using Aitex.Core.RT.Device; using Aitex.Core.RT.Log; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Routine; using MECF.Framework.Common.Utilities; using CyberX8_Core; using CyberX8_RT.Devices.AXIS; using CyberX8_RT.Devices.AXIS.CANOpen; using CyberX8_RT.Modules.PUF; using CyberX8_RT.Modules; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using MECF.Framework.Common.CommonData.Loader; using CyberX8_RT.Modules.Transporter; using MECF.Framework.Common.WaferHolder; using CyberX8_RT.Modules.Loader; using Aitex.Core.Common; namespace CyberX8_RT.Devices.Loader { public class LoaderLoadRoutine : RoutineBase, IRoutine { private enum LoadStep { CheckPreCondition, WSClampOn, BernoulliN2On, BernoulliN2OnCheck, BernoulliBladderOff, BernoulliBladderOffCheck, TiltGotoFloat, TiltGotoFloatWait, Wait1, BernoulliBladderOn, BernoulliBladderOnCheck, CRSVacuumValue, CRSVacuumValueCheck, TiltGotoVertical, TiltGotoVerticalWait, CRSGotoUnlock, CRSGotoUnlockWait, ShuttleGotoCRS, ShuttleGotoCRSWait, WSBladderOn, WSBladderOnCheck, CRSGotoSetUp, CRSGotoSetUpWait, CRSGotoLock, CRSGotoLockWait, BernoulliN2Off, BernoulliN2OffCheck, WSBladderOff, WSBladderOffCheck, Wait2, CRSVacuumOff, CRSVacuumOffCheck, Wait3, ShuttleGotoMID, ShuttleGotoMIDWait, HomingCRSAxis, HomingCRSAxisWait, CRSHomedGotoSetUp, CRSHomedGotoSetUpCheck, End } #region 内部变量 private string _side = ""; private int _crsVacuumReleaseDelayInMilliseconds = 250; private int _translateOutDelayInMilliseconds = 250; private int _waferSize = 200; private JetAxisBase _crsAxis; private JetAxisBase _tiltAxis; private JetAxisBase _shuttleAxis; private JetAxisBase _rotationAxis; private LoaderCommonDevice _loaderCommonDevice; private LoaderSideDevice _sideDevice; private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine; private LoaderSideBernoulliN2PressureRoutine _bernoulliN2PressureRoutine; private LoaderSideVacuumAndLevelCheckRoutineRoutine _vacuumAndLevelCheckRoutineRoutine; private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine; private LoaderSideWhBladderRoutine _whBladderRoutine; #endregion /// /// 构造函数 /// /// public LoaderLoadRoutine(string module,string side) : base(module) { _side = side; } /// /// 中止 /// public void Abort() { Runner.Stop("Manual Abort"); } /// /// 监控 /// /// public RState Monitor() { Runner.Run(LoadStep.CheckPreCondition, CheckPreCondition, _delay_1ms) //1 WSClamp On .Run(LoadStep.WSClampOn, WaferHolderClampOn, _delay_1ms) //2 BernoulliN2 On .Run(LoadStep.BernoulliN2On, () => { return _bernoulliN2PressureRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(LoadStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, "BernoulliN2 On failed")) //3 Bernoulli Bladder Off .Run(LoadStep.BernoulliBladderOff, () => { return _bernoulliBladderRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(LoadStep.BernoulliBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder Off failed")) //4 Tilt Goto Float .Run(LoadStep.TiltGotoFloat, () => { return AxisPosition(_tiltAxis, "FLOAT"); }, NullFun, _delay_1ms) .WaitWithStopCondition(LoadStep.TiltGotoFloatWait, () => { return _tiltAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_tiltAxis)) //5 等待0.5秒 .Delay(LoadStep.Wait1, 500) //6 BernoulliBladder On .Run(LoadStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(LoadStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed")) //7 CRS Vacuum Check .Run(LoadStep.CRSVacuumValue, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(LoadStep.CRSVacuumValueCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "CRS Vacuum Check failed")) //8 Tilt Goto Vertical .Run(LoadStep.TiltGotoVertical, () => { return AxisPosition(_tiltAxis, "VERT"); }, NullFun, _delay_1ms) .WaitWithStopCondition(LoadStep.TiltGotoVerticalWait, () => { return _tiltAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_tiltAxis)) //9 CRS Goto Unlock .Run(LoadStep.CRSGotoUnlock, () => { return AxisPosition(_crsAxis, $"Unlock{_waferSize}"); }, NullFun, _delay_1ms) .WaitWithStopCondition(LoadStep.CRSGotoUnlockWait, () => { return _crsAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_crsAxis)) //10 Shuttle Goto CRS .Run(LoadStep.ShuttleGotoCRS, () => { return AxisPosition(_shuttleAxis, "LS"); }, NullFun, _delay_1ms) .WaitWithStopCondition(LoadStep.ShuttleGotoCRSWait, () => { return _shuttleAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_shuttleAxis)) //11 WS Bladder On .Run(LoadStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(LoadStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed")) //12 CRS Goto SetUp .Run(LoadStep.CRSGotoSetUp, () => { return AxisPosition(_crsAxis, $"Setup{_waferSize}"); }, NullFun, _delay_1ms) .WaitWithStopCondition(LoadStep.CRSGotoSetUpWait, () => { return _crsAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_crsAxis)) //13 CRS Goto Lock .Run(LoadStep.CRSGotoLock, () => { return AxisPosition(_crsAxis, $"Lock{_waferSize}"); }, NullFun, _delay_1ms) .WaitWithStopCondition(LoadStep.CRSGotoLockWait, () => { return _crsAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_crsAxis)) //14 Bernoulli N2 Off .Run(LoadStep.BernoulliN2Off, () => { return _bernoulliN2PressureRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(LoadStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, "Bernoulli N2 Off failed")) //15 WS Bladder Off .Run(LoadStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(LoadStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => CheckRoutineStopStatus(_whBladderRoutine, "WS Bladder Off failed")) //16 等待0.5秒 .Delay(LoadStep.Wait2, 500) //17 CRS Vacuum Off .Run(LoadStep.CRSVacuumOff, () => { return _vacuumAndLevelCheckRoutineRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(LoadStep.CRSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumAndLevelCheckRoutineRoutine); }, () => CheckRoutineStopStatus(_vacuumAndLevelCheckRoutineRoutine, "LS Vacuum Off failed")) //18 等待0.5秒 .Delay(LoadStep.Wait3, 500) //19 Shuttle Goto Mid .Run(LoadStep.ShuttleGotoMID, () => { return AxisPosition(_shuttleAxis, "MID"); }, NullFun, _delay_1ms) .WaitWithStopCondition(LoadStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_shuttleAxis)) //20 Home CRS Axis .Run(LoadStep.HomingCRSAxis, CRSHome, _delay_1ms) .WaitWithStopCondition(LoadStep.HomingCRSAxisWait, () => { return _crsAxis.Status == RState.End; }, () => CheckCRSHomeStopStatus()) .Run(LoadStep.CRSHomedGotoSetUp, () => { return AxisPosition(_crsAxis, $"Setup{_waferSize}"); }, _delay_1ms) .WaitWithStopCondition(LoadStep.CRSHomedGotoSetUpCheck, () => { return _crsAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_crsAxis)) .End(LoadStep.End, UpdateWaferHolderLipCRSUsed); return Runner.Status; } /// /// 检验TranslateBladderOff异常状态 /// /// private bool CheckRoutineStopStatus(IRoutine routine, string error) { bool result = CommonFunction.CheckRoutineStopState(routine); if (result) { NotifyError(eEvent.ERR_LOADER, $"{error}", 0); } return result; } /// /// Axis goto position /// /// /// /// private bool AxisPosition(JetAxisBase axis, string station) { bool result = axis.PositionStation(station); if (!result) { NotifyError(eEvent.ERR_LOADER, $"{axis.Module} goto {station} failed", 0); } return result; } /// /// 检验电机运动异常状态 /// /// /// private bool CheckAxisMotionStopStatus(JetAxisBase axis) { bool result = axis.Status == RState.Failed || axis.Status == RState.Timeout; if (result) { NotifyError(eEvent.ERR_LOADER, $"{axis.Module} motion failed", 0); } return result; } /// /// CRS Home /// /// private bool CRSHome() { bool result = _crsAxis.Home(); if (!result) { NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0); } return result; } /// /// 检验CRS home异常状态 /// /// private bool CheckCRSHomeStopStatus() { bool result=_crsAxis.Status==RState.Failed||_crsAxis.Status==RState.Timeout; if (result) { NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0); } return result; } /// /// 启动 /// /// /// public RState Start(params object[] objs) { if (SC.ContainsItem($"Loader1.{_side}WaferSize")) { _waferSize = SC.GetValue($"Loader1.{_side}WaferSize"); } _crsAxis = GetCrsAxis(); _tiltAxis = GetTiltAxis(); _shuttleAxis= GetShuttleAxis(); _loaderCommonDevice = DEVICE.GetDevice($"Loader1.Common"); _rotationAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.Rotation"); _sideDevice = DEVICE.GetDevice($"{Module}.{_side}"); _vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}"); _whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}"); _bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}"); _bernoulliN2PressureRoutine = new LoaderSideBernoulliN2PressureRoutine($"{Module}.{_side}"); _vacuumAndLevelCheckRoutineRoutine = new LoaderSideVacuumAndLevelCheckRoutineRoutine($"{Module}.{_side}"); if (SC.ContainsItem("Loader1.LSVacuumReleaseDelayInMilliseconds")) { _crsVacuumReleaseDelayInMilliseconds = SC.GetValue("Loader1.LSVacuumReleaseDelayInMilliseconds"); } if (SC.ContainsItem("Loader1.TranslateOutDelayInMilliseconds")) { _translateOutDelayInMilliseconds = SC.GetValue("Loader1.TranslateOutDelayInMilliseconds"); } Runner.Start(Module, "Load"); return RState.Running; } /// /// 获取Shuttle轴对象 /// /// private JetAxisBase GetShuttleAxis() { switch (_side) { case "SideA": return DEVICE.GetDevice($"{Module}.ShuttleA"); default: return DEVICE.GetDevice($"{Module}.ShuttleB"); } } /// /// 获取CRS轴对象 /// /// private JetAxisBase GetCrsAxis() { switch(_side) { case "SideA": return DEVICE.GetDevice($"{Module}.LSA"); default: return DEVICE.GetDevice($"{Module}.LSB"); } } /// /// 获取Tilt轴对象 /// /// private JetAxisBase GetTiltAxis() { switch (_side) { case "SideA": return DEVICE.GetDevice($"{Module}.TiltA"); default: return DEVICE.GetDevice($"{Module}.TiltB"); } } /// /// 检验前置条件 /// /// private bool CheckPreCondition() { if(!CheckHomeCondition()) { return false; } if(!CheckAxisCondition()) { return false; } if(!StatusCheck()) { return false; } if(!CRSVacuumCheck()) { return false; } return true; } /// /// 检验Home条件 /// /// private bool CheckHomeCondition() { //检验PUF、Loader Transporter,Robot均Homed if (ModuleHelper.IsInstalled(ModuleName.PUF1)) { PUFEntity puf1Entity = Singleton.Instance.GetModule(ModuleName.PUF1.ToString()); if (!puf1Entity.IsHomed) { NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed",-1); return false; } } if (ModuleHelper.IsInstalled(ModuleName.Loader1)) { LoaderEntity loaderEntity = Singleton.Instance.GetModule(ModuleName.Loader1.ToString()); if (!loaderEntity.IsHomed) { NotifyError(eEvent.ERR_LOADER, "Loader is not homed", -1); return false; } } if (ModuleHelper.IsInstalled(ModuleName.Transporter2)) { TransporterEntity loaderTransportEntity = Singleton.Instance.GetModule(ModuleName.Transporter2.ToString()); if (!loaderTransportEntity.IsHomed) { NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed",-1); return false; } } return true; } /// /// 检验Axis位置 /// /// /// private bool CheckAxisCondition() { if(!_rotationAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"rotation is not homed",-1); return false; } if (!_shuttleAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed",-1); return false; } if (!_tiltAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed", -1); return false; } if (!_crsAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"{_crsAxis.Name} is not homed",-1); return false; } double rotationPosition = _rotationAxis.MotionData.MotorPosition; //校验rotation是否再load位置 if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOAD{_side.Substring(_side.Length- 1)}{_waferSize}")) { NotifyError(eEvent.ERR_LOADER, $"rotation {rotationPosition} not in LOAD{_side.Substring(_side.Length - 1)}{_waferSize}", -1); return false; } double shuttlePosition=_shuttleAxis.MotionData.MotorPosition;//校验shuttle位置是否再out位置 if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, $"OUT{_waferSize}")) { NotifyError(eEvent.ERR_LOADER, $"shuttle {shuttlePosition} not in $OUT{_waferSize}",-1); return false; } double tiltPosition = _tiltAxis.MotionData.MotorPosition;//校验tilt是否在hori位置 if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "HORI")) { NotifyError(eEvent.ERR_LOADER, $"tilt {tiltPosition} not in HORI", -1); return false; } double crsPosition=_crsAxis.MotionData.MotorPosition;//校验crs是否在setup位置 if (_crsAxis.CheckPositionIsInStation(tiltPosition, $"Setup{_waferSize}")) { NotifyError(eEvent.ERR_LOADER, $"crs {crsPosition} not at Setup{_waferSize}",-1); return false; } return true; } /// /// Wafer Holder Clamp On /// /// private bool WaferHolderClampOn() { bool result = _loaderCommonDevice.WaferHolderClampOnAction(); if (!result) { NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp on faied", 0); } return result; } /// /// Status Check /// /// /// private bool StatusCheck() { //判断是否放置wafershuttle if (!_loaderCommonDevice.CommonData.WaferHolderPresent) { NotifyError(eEvent.ERR_LOADER, "There is no wafer shuttle, can not do load", -1); return false; } return true; } /// /// CRS Vacuum Check /// /// /// private bool CRSVacuumCheck() { LoaderSideData sideData = _sideDevice.SideData; LoaderCommonData commonData = _loaderCommonDevice.CommonData; //Bernoulli Bladder if (!sideData.BernoulliBladder) { NotifyError(eEvent.ERR_LOADER, "BernoulliBladder is off", -1); return false; } if (sideData.BernoulliExtended) { NotifyError(eEvent.ERR_LOADER, "Bernoulli is Extended", -1); return false; } //Bernoulli N2 if (sideData.BernoulliN2) { NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is On", -1); return false; } //CRS Vacuum检验 if (!sideData.CRSVacuum) { NotifyError(eEvent.ERR_LOADER, "LS Vacuum is off",-1); return false; } if (SC.ContainsItem($"{Module}.LSVacuumHighLimit")) //真空值要大于最小设定值 { double crsVacuumHighLimit = SC.GetValue($"{Module}.LSVacuumHighLimit"); if (sideData.CRSVacuumValue >= crsVacuumHighLimit || sideData.CRSVacuumValue >= 0) { NotifyError(eEvent.ERR_LOADER, "LS Vacuum value is invalid", -1); return false; } } //WS Clamp if (!commonData.WaferHolderClamp) { NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp is off", -1); return false; } //WS Bladder if (sideData.WHBladder) { NotifyError(eEvent.ERR_LOADER, "WS Bladder is on", -1); return false; } //Drip Tray Fluid if (commonData.DripTrayFluid) { NotifyError(eEvent.ERR_LOADER, "Drip Tray Fluid is on", -1); return false; } //Wafer Shuttle Present if (!commonData.WaferHolderPresent) { NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle is absent",-1); return false; } return true; } /// /// 更新WaferHolder LipCRS用量 /// /// private bool UpdateWaferHolderLipCRSUsed() { WaferHolderInfo waferHolderInfo = WaferHolderManager.Instance.GetWaferHolder("Loader"); if (waferHolderInfo != null) { if (!string.IsNullOrEmpty(waferHolderInfo.CrsAId)&&_side=="SideA") { waferHolderInfo.CrsATotalUses++; WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo); } if (!string.IsNullOrEmpty(waferHolderInfo.CrsBId) && _side == "SideB") { waferHolderInfo.CrsBTotalUses++; WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo); } } return true; } } }