using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Utilities;
using CyberX8_Core;
using CyberX8_RT.Devices.AXIS;
using CyberX8_RT.Devices.AXIS.CANOpen;
using CyberX8_RT.Modules.PUF;
using CyberX8_RT.Modules;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using MECF.Framework.Common.CommonData.Loader;
using CyberX8_RT.Modules.Transporter;
using MECF.Framework.Common.WaferHolder;
using CyberX8_RT.Modules.Loader;
using Aitex.Core.Common;
namespace CyberX8_RT.Devices.Loader
{
public class LoaderLoadRoutine : RoutineBase, IRoutine
{
private enum LoadStep
{
CheckPreCondition,
WSClampOn,
BernoulliN2On,
BernoulliN2OnCheck,
BernoulliBladderOff,
BernoulliBladderOffCheck,
TiltGotoFloat,
TiltGotoFloatWait,
Wait1,
BernoulliBladderOn,
BernoulliBladderOnCheck,
CRSVacuumValue,
CRSVacuumValueCheck,
TiltGotoVertical,
TiltGotoVerticalWait,
CRSGotoUnlock,
CRSGotoUnlockWait,
ShuttleGotoCRS,
ShuttleGotoCRSWait,
WSBladderOn,
WSBladderOnCheck,
CRSGotoSetUp,
CRSGotoSetUpWait,
CRSGotoLock,
CRSGotoLockWait,
BernoulliN2Off,
BernoulliN2OffCheck,
WSBladderOff,
WSBladderOffCheck,
Wait2,
CRSVacuumOff,
CRSVacuumOffCheck,
Wait3,
ShuttleGotoMID,
ShuttleGotoMIDWait,
HomingCRSAxis,
HomingCRSAxisWait,
CRSHomedGotoSetUp,
CRSHomedGotoSetUpCheck,
End
}
#region 内部变量
private string _side = "";
private int _crsVacuumReleaseDelayInMilliseconds = 250;
private int _translateOutDelayInMilliseconds = 250;
private int _waferSize = 200;
private JetAxisBase _crsAxis;
private JetAxisBase _tiltAxis;
private JetAxisBase _shuttleAxis;
private JetAxisBase _rotationAxis;
private LoaderCommonDevice _loaderCommonDevice;
private LoaderSideDevice _sideDevice;
private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine;
private LoaderSideBernoulliN2PressureRoutine _bernoulliN2PressureRoutine;
private LoaderSideVacuumAndLevelCheckRoutineRoutine _vacuumAndLevelCheckRoutineRoutine;
private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine;
private LoaderSideWhBladderRoutine _whBladderRoutine;
#endregion
///
/// 构造函数
///
///
public LoaderLoadRoutine(string module,string side) : base(module)
{
_side = side;
}
///
/// 中止
///
public void Abort()
{
Runner.Stop("Manual Abort");
}
///
/// 监控
///
///
public RState Monitor()
{
Runner.Run(LoadStep.CheckPreCondition, CheckPreCondition, _delay_1ms)
//1 WSClamp On
.Run(LoadStep.WSClampOn, WaferHolderClampOn, _delay_1ms)
//2 BernoulliN2 On
.Run(LoadStep.BernoulliN2On, () => { return _bernoulliN2PressureRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(LoadStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },
() => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, "BernoulliN2 On failed"))
//3 Bernoulli Bladder Off
.Run(LoadStep.BernoulliBladderOff, () => { return _bernoulliBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(LoadStep.BernoulliBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },
() => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder Off failed"))
//4 Tilt Goto Float
.Run(LoadStep.TiltGotoFloat, () => { return AxisPosition(_tiltAxis, "FLOAT"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(LoadStep.TiltGotoFloatWait, () => { return _tiltAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_tiltAxis))
//5 等待0.5秒
.Delay(LoadStep.Wait1, 500)
//6 BernoulliBladder On
.Run(LoadStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(LoadStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },
() => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))
//7 CRS Vacuum Check
.Run(LoadStep.CRSVacuumValue, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(LoadStep.CRSVacuumValueCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); },
() => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "CRS Vacuum Check failed"))
//8 Tilt Goto Vertical
.Run(LoadStep.TiltGotoVertical, () => { return AxisPosition(_tiltAxis, "VERT"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(LoadStep.TiltGotoVerticalWait, () => { return _tiltAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_tiltAxis))
//9 CRS Goto Unlock
.Run(LoadStep.CRSGotoUnlock, () => { return AxisPosition(_crsAxis, $"Unlock{_waferSize}"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(LoadStep.CRSGotoUnlockWait, () => { return _crsAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_crsAxis))
//10 Shuttle Goto CRS
.Run(LoadStep.ShuttleGotoCRS, () => { return AxisPosition(_shuttleAxis, "LS"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(LoadStep.ShuttleGotoCRSWait, () => { return _shuttleAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_shuttleAxis))
//11 WS Bladder On
.Run(LoadStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(LoadStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
() => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed"))
//12 CRS Goto SetUp
.Run(LoadStep.CRSGotoSetUp, () => { return AxisPosition(_crsAxis, $"Setup{_waferSize}"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(LoadStep.CRSGotoSetUpWait, () => { return _crsAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_crsAxis))
//13 CRS Goto Lock
.Run(LoadStep.CRSGotoLock, () => { return AxisPosition(_crsAxis, $"Lock{_waferSize}"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(LoadStep.CRSGotoLockWait, () => { return _crsAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_crsAxis))
//14 Bernoulli N2 Off
.Run(LoadStep.BernoulliN2Off, () => { return _bernoulliN2PressureRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(LoadStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },
() => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, "Bernoulli N2 Off failed"))
//15 WS Bladder Off
.Run(LoadStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(LoadStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
() => CheckRoutineStopStatus(_whBladderRoutine, "WS Bladder Off failed"))
//16 等待0.5秒
.Delay(LoadStep.Wait2, 500)
//17 CRS Vacuum Off
.Run(LoadStep.CRSVacuumOff, () => { return _vacuumAndLevelCheckRoutineRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(LoadStep.CRSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumAndLevelCheckRoutineRoutine); },
() => CheckRoutineStopStatus(_vacuumAndLevelCheckRoutineRoutine, "LS Vacuum Off failed"))
//18 等待0.5秒
.Delay(LoadStep.Wait3, 500)
//19 Shuttle Goto Mid
.Run(LoadStep.ShuttleGotoMID, () => { return AxisPosition(_shuttleAxis, "MID"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(LoadStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_shuttleAxis))
//20 Home CRS Axis
.Run(LoadStep.HomingCRSAxis, CRSHome, _delay_1ms)
.WaitWithStopCondition(LoadStep.HomingCRSAxisWait, () => { return _crsAxis.Status == RState.End; },
() => CheckCRSHomeStopStatus())
.Run(LoadStep.CRSHomedGotoSetUp, () => { return AxisPosition(_crsAxis, $"Setup{_waferSize}"); }, _delay_1ms)
.WaitWithStopCondition(LoadStep.CRSHomedGotoSetUpCheck, () => { return _crsAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_crsAxis))
.End(LoadStep.End, UpdateWaferHolderLipCRSUsed);
return Runner.Status;
}
///
/// 检验TranslateBladderOff异常状态
///
///
private bool CheckRoutineStopStatus(IRoutine routine, string error)
{
bool result = CommonFunction.CheckRoutineStopState(routine);
if (result)
{
NotifyError(eEvent.ERR_LOADER, $"{error}", 0);
}
return result;
}
///
/// Axis goto position
///
///
///
///
private bool AxisPosition(JetAxisBase axis, string station)
{
bool result = axis.PositionStation(station);
if (!result)
{
NotifyError(eEvent.ERR_LOADER, $"{axis.Module} goto {station} failed", 0);
}
return result;
}
///
/// 检验电机运动异常状态
///
///
///
private bool CheckAxisMotionStopStatus(JetAxisBase axis)
{
bool result = axis.Status == RState.Failed || axis.Status == RState.Timeout;
if (result)
{
NotifyError(eEvent.ERR_LOADER, $"{axis.Module} motion failed", 0);
}
return result;
}
///
/// CRS Home
///
///
private bool CRSHome()
{
bool result = _crsAxis.Home();
if (!result)
{
NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0);
}
return result;
}
///
/// 检验CRS home异常状态
///
///
private bool CheckCRSHomeStopStatus()
{
bool result=_crsAxis.Status==RState.Failed||_crsAxis.Status==RState.Timeout;
if (result)
{
NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0);
}
return result;
}
///
/// 启动
///
///
///
public RState Start(params object[] objs)
{
if (SC.ContainsItem($"Loader1.{_side}WaferSize"))
{
_waferSize = SC.GetValue($"Loader1.{_side}WaferSize");
}
_crsAxis = GetCrsAxis();
_tiltAxis = GetTiltAxis();
_shuttleAxis= GetShuttleAxis();
_loaderCommonDevice = DEVICE.GetDevice($"Loader1.Common");
_rotationAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.Rotation");
_sideDevice = DEVICE.GetDevice($"{Module}.{_side}");
_vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}");
_whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
_bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
_bernoulliN2PressureRoutine = new LoaderSideBernoulliN2PressureRoutine($"{Module}.{_side}");
_vacuumAndLevelCheckRoutineRoutine = new LoaderSideVacuumAndLevelCheckRoutineRoutine($"{Module}.{_side}");
if (SC.ContainsItem("Loader1.LSVacuumReleaseDelayInMilliseconds"))
{
_crsVacuumReleaseDelayInMilliseconds = SC.GetValue("Loader1.LSVacuumReleaseDelayInMilliseconds");
}
if (SC.ContainsItem("Loader1.TranslateOutDelayInMilliseconds"))
{
_translateOutDelayInMilliseconds = SC.GetValue("Loader1.TranslateOutDelayInMilliseconds");
}
Runner.Start(Module, "Load");
return RState.Running;
}
///
/// 获取Shuttle轴对象
///
///
private JetAxisBase GetShuttleAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.ShuttleA");
default:
return DEVICE.GetDevice($"{Module}.ShuttleB");
}
}
///
/// 获取CRS轴对象
///
///
private JetAxisBase GetCrsAxis()
{
switch(_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.LSA");
default:
return DEVICE.GetDevice($"{Module}.LSB");
}
}
///
/// 获取Tilt轴对象
///
///
private JetAxisBase GetTiltAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.TiltA");
default:
return DEVICE.GetDevice($"{Module}.TiltB");
}
}
///
/// 检验前置条件
///
///
private bool CheckPreCondition()
{
if(!CheckHomeCondition())
{
return false;
}
if(!CheckAxisCondition())
{
return false;
}
if(!StatusCheck())
{
return false;
}
if(!CRSVacuumCheck())
{
return false;
}
return true;
}
///
/// 检验Home条件
///
///
private bool CheckHomeCondition()
{
//检验PUF、Loader Transporter,Robot均Homed
if (ModuleHelper.IsInstalled(ModuleName.PUF1))
{
PUFEntity puf1Entity = Singleton.Instance.GetModule(ModuleName.PUF1.ToString());
if (!puf1Entity.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed",-1);
return false;
}
}
if (ModuleHelper.IsInstalled(ModuleName.Loader1))
{
LoaderEntity loaderEntity = Singleton.Instance.GetModule(ModuleName.Loader1.ToString());
if (!loaderEntity.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, "Loader is not homed", -1);
return false;
}
}
if (ModuleHelper.IsInstalled(ModuleName.Transporter2))
{
TransporterEntity loaderTransportEntity = Singleton.Instance.GetModule(ModuleName.Transporter2.ToString());
if (!loaderTransportEntity.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed",-1);
return false;
}
}
return true;
}
///
/// 检验Axis位置
///
///
///
private bool CheckAxisCondition()
{
if(!_rotationAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"rotation is not homed",-1);
return false;
}
if (!_shuttleAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed",-1);
return false;
}
if (!_tiltAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed", -1);
return false;
}
if (!_crsAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"{_crsAxis.Name} is not homed",-1);
return false;
}
double rotationPosition = _rotationAxis.MotionData.MotorPosition; //校验rotation是否再load位置
if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOAD{_side.Substring(_side.Length- 1)}{_waferSize}"))
{
NotifyError(eEvent.ERR_LOADER, $"rotation {rotationPosition} not in LOAD{_side.Substring(_side.Length - 1)}{_waferSize}", -1);
return false;
}
double shuttlePosition=_shuttleAxis.MotionData.MotorPosition;//校验shuttle位置是否再out位置
if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, $"OUT{_waferSize}"))
{
NotifyError(eEvent.ERR_LOADER, $"shuttle {shuttlePosition} not in $OUT{_waferSize}",-1);
return false;
}
double tiltPosition = _tiltAxis.MotionData.MotorPosition;//校验tilt是否在hori位置
if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "HORI"))
{
NotifyError(eEvent.ERR_LOADER, $"tilt {tiltPosition} not in HORI", -1);
return false;
}
double crsPosition=_crsAxis.MotionData.MotorPosition;//校验crs是否在setup位置
if (_crsAxis.CheckPositionIsInStation(tiltPosition, $"Setup{_waferSize}"))
{
NotifyError(eEvent.ERR_LOADER, $"crs {crsPosition} not at Setup{_waferSize}",-1);
return false;
}
return true;
}
///
/// Wafer Holder Clamp On
///
///
private bool WaferHolderClampOn()
{
bool result = _loaderCommonDevice.WaferHolderClampOnAction();
if (!result)
{
NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp on faied", 0);
}
return result;
}
///
/// Status Check
///
///
///
private bool StatusCheck()
{
//判断是否放置wafershuttle
if (!_loaderCommonDevice.CommonData.WaferHolderPresent)
{
NotifyError(eEvent.ERR_LOADER, "There is no wafer shuttle, can not do load", -1);
return false;
}
return true;
}
///
/// CRS Vacuum Check
///
///
///
private bool CRSVacuumCheck()
{
LoaderSideData sideData = _sideDevice.SideData;
LoaderCommonData commonData = _loaderCommonDevice.CommonData;
//Bernoulli Bladder
if (!sideData.BernoulliBladder)
{
NotifyError(eEvent.ERR_LOADER, "BernoulliBladder is off", -1);
return false;
}
if (sideData.BernoulliExtended)
{
NotifyError(eEvent.ERR_LOADER, "Bernoulli is Extended", -1);
return false;
}
//Bernoulli N2
if (sideData.BernoulliN2)
{
NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is On", -1);
return false;
}
//CRS Vacuum检验
if (!sideData.CRSVacuum)
{
NotifyError(eEvent.ERR_LOADER, "LS Vacuum is off",-1);
return false;
}
if (SC.ContainsItem($"{Module}.LSVacuumHighLimit")) //真空值要大于最小设定值
{
double crsVacuumHighLimit = SC.GetValue($"{Module}.LSVacuumHighLimit");
if (sideData.CRSVacuumValue >= crsVacuumHighLimit || sideData.CRSVacuumValue >= 0)
{
NotifyError(eEvent.ERR_LOADER, "LS Vacuum value is invalid", -1);
return false;
}
}
//WS Clamp
if (!commonData.WaferHolderClamp)
{
NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp is off", -1);
return false;
}
//WS Bladder
if (sideData.WHBladder)
{
NotifyError(eEvent.ERR_LOADER, "WS Bladder is on", -1);
return false;
}
//Drip Tray Fluid
if (commonData.DripTrayFluid)
{
NotifyError(eEvent.ERR_LOADER, "Drip Tray Fluid is on", -1);
return false;
}
//Wafer Shuttle Present
if (!commonData.WaferHolderPresent)
{
NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle is absent",-1);
return false;
}
return true;
}
///
/// 更新WaferHolder LipCRS用量
///
///
private bool UpdateWaferHolderLipCRSUsed()
{
WaferHolderInfo waferHolderInfo = WaferHolderManager.Instance.GetWaferHolder("Loader");
if (waferHolderInfo != null)
{
if (!string.IsNullOrEmpty(waferHolderInfo.CrsAId)&&_side=="SideA")
{
waferHolderInfo.CrsATotalUses++;
WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo);
}
if (!string.IsNullOrEmpty(waferHolderInfo.CrsBId) && _side == "SideB")
{
waferHolderInfo.CrsBTotalUses++;
WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo);
}
}
return true;
}
}
}