using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using MECF.Framework.Common.CommonData.Loader;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Utilities;
using CyberX8_Core;
using CyberX8_RT.Devices.AXIS;
using CyberX8_RT.Devices.AXIS.CANOpen;
using CyberX8_RT.Modules.PUF;
using CyberX8_RT.Modules;
using System;
using CyberX8_RT.Modules.Transporter;
using Aitex.Core.RT.SCCore;
namespace CyberX8_RT.Devices.Loader
{
public class LoaderInstallCRSRoutine : RoutineBase, IRoutine
{
private enum InstallStep
{
CheckPreCondition,
TiltGotoVertical,
TiltGotoVerticalCheck,
LSGotoUnlock,
LSGotoUnlockWait,
ShuttleGotoIN,
ShuttleGotoINWait,
BernoulliBladderOn,
BernoulliBladderOnCheck,
BernoulliN2On,
BernoulliN2OnCheck,
WSBladderOn,
WSBladderOnCheck,
LSVacuumOn,
LSVacuumOnCheck,
VacuumLevelCheck,
VacuumLevelCheckWait,
ShuttleGotoLS,
ShuttleGotoLSWait,
LSGotoLock,
LSGotoLockWait,
BernoulliN2Off,
BernoulliN2OffCheck,
WSBladderOff,
WSBladderOffCheck,
Wait500MSForWSBladder,
LSVacuumOff,
LSVacuumOffCheck,
Wait500MS,
ShuttleGotoMID,
ShuttleGotoMIDWait,
HomingLSAxis,
HomingLSAxisWait,
End
}
#region 内部变量
private string _side = "";
private JetAxisBase _lsAxis;
private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine;
private LoaderSideBernoulliN2PressureRoutine _bernoulliN2PressureRoutine;
private LoaderSideVacuumRoutine _vacuumRoutine;
private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine;
private LoaderSideWhBladderRoutine _whBladderRoutine;
private JetAxisBase _shuttleAxis;
private JetAxisBase _tiltAxis;
private JetAxisBase _rotationAxis;
private LoaderCommonDevice _loaderCommonDevice;
private LoaderSideDevice _sideDevice;
///
/// WaferSize
///
private int _waferSize;
#endregion
///
/// 构造函数
///
///
public LoaderInstallCRSRoutine(string module,string side) : base(module)
{
_side = side;
}
///
/// 中止
///
public void Abort()
{
Runner.Stop("Manual Abort");
}
///
/// 监控
///
///
public RState Monitor()
{
Runner.Run(InstallStep.CheckPreCondition, CheckPreCondition, _delay_1ms)
//1. Tilt Goto Vertical
.Run(InstallStep.TiltGotoVertical, () => { return _tiltAxis.PositionStation("VERT",false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.TiltGotoVerticalCheck, () => { return _tiltAxis.Status == RState.End; },
() => { return _tiltAxis.Status == RState.Failed; })
//2. LS Goto Unlock
.Run(InstallStep.LSGotoUnlock, () => { return _lsAxis.PositionStation($"Unlock{_waferSize}", false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.LSGotoUnlockWait, () => { return _lsAxis.Status == RState.End; },
() => { return _lsAxis.Status == RState.Failed; })
//3. Shuttle Goto IN
.Run(InstallStep.ShuttleGotoIN, () => { return _shuttleAxis.PositionStation("IN", false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.ShuttleGotoINWait, () => { return _shuttleAxis.Status == RState.End; },
() => { return _shuttleAxis.Status == RState.Failed; })
//4. BernoulliBladder On
.Run(InstallStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },
() => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))
//5. Bernoulli N2 On
.Run(InstallStep.BernoulliN2On, () => { return _bernoulliN2PressureRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },
() => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, " BernoulliN2 On failed"))
//6. WS Bladder On
.Run(InstallStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
() => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed"))
//7. LS Vacuum On
.Run(InstallStep.LSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.LSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); },
() => CheckRoutineStopStatus(_vacuumRoutine, "LS Vacuum On failed"))
//8. LS Vacuum Level Check
.Run(InstallStep.VacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.VacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); },
() => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "LS Vacuum Level Check failed"))
//9. Shuttle Goto LS
.Run(InstallStep.ShuttleGotoLS, () => { return _shuttleAxis.PositionStation("LS", false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.ShuttleGotoLSWait, () => { return _shuttleAxis.Status == RState.End; },
() => { return _shuttleAxis.Status == RState.Failed; })
//10. LS Goto Lock
.Run(InstallStep.LSGotoLock, () => { return _lsAxis.PositionStation($"Lock{_waferSize}", false, 0, 0, 0, false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.LSGotoLockWait, () => { return _lsAxis.Status == RState.End; },
() => { return _lsAxis.Status == RState.Failed; })
//11. Bernoulli N2 Off
.Run(InstallStep.BernoulliN2Off, () => { return _bernoulliN2PressureRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },
() => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, " BernoulliN2 Off failed"))
//12. WS Bladder Off
.Run(InstallStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
() => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder Off failed"))
//13. Wait 0.5s for WS Bladder
.Delay(InstallStep.Wait500MSForWSBladder, 500)
//14. LS Vacuum Off
.Run(InstallStep.LSVacuumOff, () => { return _vacuumRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.LSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); },
() => CheckRoutineStopStatus(_vacuumRoutine, "LS Vacuum Off failed"))
//15. Wait 0.5s
.Delay(InstallStep.Wait500MS, 500)
//16. Shuttle Goto MID
.Run(InstallStep.ShuttleGotoMID, () => { return _shuttleAxis.PositionStation("MID", false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; },
() => { return _shuttleAxis.Status == RState.Failed; })
//17. Home LS Axis
.Run(InstallStep.HomingLSAxis, () => { return _lsAxis.Home(); }, _delay_1ms)
.WaitWithStopCondition(InstallStep.HomingLSAxisWait, () => { return _lsAxis.Status == RState.End; },
() => { return _lsAxis.Status == RState.Failed; })
.End(InstallStep.End, NullFun, 10);
return Runner.Status;
}
///
/// 启动
///
///
///
///
public RState Start(params object[] objs)
{
if (SC.ContainsItem($"Loader1.{_side}WaferSize"))
{
_waferSize = SC.GetValue($"Loader1.{_side}WaferSize");
}
_shuttleAxis = GetShuttleAxis();
_lsAxis = GetLsAxis();
_tiltAxis = GetTiltAxis();
_loaderCommonDevice = DEVICE.GetDevice($"{Module}.Common");
_rotationAxis = DEVICE.GetDevice($"{Module}.Rotation");
_sideDevice = DEVICE.GetDevice($"{Module}.{_side}");
_vacuumRoutine = new LoaderSideVacuumRoutine($"{Module}.{_side}");
_vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}");
_whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
_bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
_bernoulliN2PressureRoutine = new LoaderSideBernoulliN2PressureRoutine($"{Module}.{_side}");
Runner.Start(Module, "Install LS");
return RState.Running;
}
///
/// 检验Routine异常状态
///
///
private bool CheckRoutineStopStatus(IRoutine routine, string error)
{
bool result = CommonFunction.CheckRoutineStopState(routine);
if (result)
{
NotifyError(eEvent.ERR_LOADER, $"{error}", 0);
}
return result;
}
///
/// 获取Shuttle轴对象
///
///
private JetAxisBase GetShuttleAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.ShuttleA");
default:
return DEVICE.GetDevice($"{Module}.ShuttleB");
}
}
///
/// 获取CRS轴对象
///
///
private JetAxisBase GetLsAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.LSA");
default:
return DEVICE.GetDevice($"{Module}.LSB");
}
}
///
/// 获取Tilt轴对象
///
///
private JetAxisBase GetTiltAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.TiltA");
default:
return DEVICE.GetDevice($"{Module}.TiltB");
}
}
///
/// 检验前置条件
///
///
private bool CheckPreCondition()
{
if (!CheckHomeCondition())
{
return false;
}
if (!CheckInstallCRSAxisCondition())
{
return false;
}
if (!InstallCRSStatusCheck())
{
return false;
}
return true;
}
///
/// 检验Home条件
///
///
private bool CheckHomeCondition()
{
//检验PUF、Loader Transporter,Robot均Homed
//Efem Home
if (ModuleHelper.IsInstalled(ModuleName.EFEM))
{
EfemEntity efemEntity = Singleton.Instance.GetModule(ModuleName.EFEM.ToString());
if (!efemEntity.IsHomed)
{
LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module, $"{ModuleName.EFEM.ToString()} is not home, Cannot execute GotoSavedPosition");
return false;
}
}
if (ModuleHelper.IsInstalled(ModuleName.PUF1))
{
PUFEntity puf1Entity = Singleton.Instance.GetModule(ModuleName.PUF1.ToString());
if (!puf1Entity.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed", -1);
return false;
}
}
if (ModuleHelper.IsInstalled(ModuleName.Transporter2))
{
TransporterEntity loaderTransportEntity = Singleton.Instance.GetModule(ModuleName.Transporter2.ToString());
if (!loaderTransportEntity.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed", -1);
return false;
}
}
return true;
}
///
/// 检验Axis条件
///
///
///
private bool CheckInstallCRSAxisCondition()
{
if (!_rotationAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"Rotation is not homed", -1);
return false;
}
if (!_shuttleAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed", -1);
return false;
}
if (!_tiltAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed", -1);
return false;
}
if (!_lsAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"{_lsAxis.Name} is not homed", -1);
return false;
}
//LS已经运动到 Setup 位
double crsPosition = _lsAxis.MotionData.MotorPosition;
if (!_lsAxis.CheckPositionIsInStation(crsPosition, $"Setup{_waferSize}"))
{
NotifyError(eEvent.ERR_LOADER, $"LS {crsPosition} not in Setup{_waferSize}", -1);
return false;
}
//Rotation已经运动到 loaderA 位(sideA 下片时)或 loaderB 位(sideB 下片时)
double rotationPosition = _rotationAxis.MotionData.MotorPosition;
if (_side == "SideA")
{
if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADA{_waferSize}"))
{
NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADA{_waferSize}", -1);
return false;
}
}
else
{
if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADB{_waferSize}"))
{
NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADB{_waferSize}", -1);
return false;
}
}
//Shuttle已经运动到除 IN 外任何位置
double shuttlePosition = _shuttleAxis.MotionData.MotorPosition;
if (_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "IN"))
{
NotifyError(eEvent.ERR_LOADER, $"Shuttle {shuttlePosition} is in IN", -1);
return false;
}
return true;
}
///
/// 检验Status条件
///
///
///
private bool InstallCRSStatusCheck()
{
LoaderSideData sideData = _sideDevice.SideData;
LoaderCommonData commonData = _loaderCommonDevice.CommonData;
//Bernoulli Bladder(WS Bladder on)
if (!sideData.BernoulliBladder)
{
NotifyError(eEvent.ERR_LOADER, "Bernoulli Bladder is off", -1);
return false;
}
//Bernoulli N2(BernoulliN2 off)
if (sideData.BernoulliN2)
{
NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is on", -1);
return false;
}
//CRS Vacuum检验(Vacuum off)
if (sideData.CRSVacuum)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "LS Vacuum is on");
return false;
}
//Wafer Shuttle Present
if (!commonData.WaferHolderPresent)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "Wafer Shuttle is absent");
return false;
}
//WS Clamp On
if (!commonData.WaferHolderClamp)
{
NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp is off", -1);
return false;
}
//WS Bladder off
if (sideData.WHBladder)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "WS Bladder is on");
return false;
}
//Drip Tray Fluid(正常)
if (commonData.DripTrayFluid)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "Drip Tray Fluid is on");
return false;
}
return true;
}
}
}