SN 262 1 RDS true 1 Catholyte 0 1 CA true 1 2 CA true 2 4 CA true 0 1 Sn true 4 1 2 Ag true 4 2 3 FA true 4 3 4 AD true 4 5 R1 true 1,2 5 6 R2 true 1,2 1 Anolyte 0 1 AN true 1 2 AN true 2 4 AN true 0 1 Sn true 1 2 Ag true 2 3 FA true 4 3 4 AD true 4 4 5 R1 true 5 6 R2 true true 1 1 Lumina1ChannelCurrent true 2 1 Lumina1ChannelCurrent true 3 1 Lumina1ChannelCurrent true 4 1 Lumina1ChannelCurrent true 5 1 Lumina1ChannelCurrent true 6 1 Lumina1ChannelCurrent true 7 1 Lumina1ChannelCurrent true 8 1 Lumina1ChannelCurrent true 9 1 Lumina1ChannelCurrent true 10 1 Lumina1ChannelCurrent true 11 1 Lumina1ChannelCurrent true 12 1 Lumina1ChannelCurrent true 13 1 Lumina1ChannelCurrent true 14 1 Lumina2ChannelCurrent true 1 1 Lumina1ChannelCurrent false Eaton5PX true 1 ThunderDualPUF -326 Type1 NotInstalled 40 true 4 1 SMC false 4 1 STDThornton false 1 2 STDThornton true 1 1 true 1 2 true 1 FFUType2 true 4 1 0 STDLinmot true 3 2 0 STDLinmot true 1 3 1 STDLinmot true 1 DualPUF_WithDistanceSensors true 1 HighSpeedThunder NoDripTray GuidePin BR1 true 2 HighSpeedThunder NoDripTray GuidePin BR2 true 1 4088 1 QDR RP1-1 true 1 1 TC1-1 Stratus 1 Ni true 300 2 2219 1 Power1-1 Power2-1 LNM1-1 Stratus false 11 2000 340 true Level Level None Peristaltic 2 false None STD Regulate true 6 3292 2 QDR RP1-2 true 2 1 TC1-2 Stratus 1 Ni true 300 7 2219 2 Power3-1 Power4-1 LNM1-2 Stratus true 14 2000 340 true Level Level None Peristaltic 2 false None STD Standard true 9 3185 3 QDR RP1-3 true 12 2390 4 QDR RP1-4 true 3 1 TC1-3 Stratus 1 Ni true 300 10 2219 3 Power5-1 Power6-1 LNM1-3 Stratus true 15 2000 340 true Level Level Standard None Peristaltic 2 false None Standard CMMPower1-1 STD Standard true 4 1 TC1-4 Stratus 1 Ni true 300 14 2219 4 Power7-1 Power8-1 LNM1-4 Stratus true 16 2000 340 true Level Level None Peristaltic 2 false None STD Standard true 20 1135 1 Scanning LNM3-1 true 21 957 1 HVDHSIndependent true 22 873 2 HVDHSIndependent true 24 619 1 Standard true 25 584 2 Standard true 26 549 3 Standard true 27 514 4 Standard true 28 480 5 Standard true 29 445 6 Standard true 30 410 7 Standard true 31 375 8 Standard true 32 341 9 Standard true 33 305 10 Standard true 34 275 11 Standard true 35 240 12 Standard true 36 206 13 Standard true 37 169 14 Standard true 38 135 15 Standard true 39 100 16 Standard True EFEM true LoadPort 1 BrooksVision true LoadPort 2 BrooksVision true LoadPort 3 BrooksVision true 300 SRD1 SRD 1 VacuumChuckWithFan true 300 SRD2 SRD 2 VacuumChuckWithFan true SystemFacilities false true false true false true SystemSafety true true 200 Dummy1 Dummy 25 1 true 200 Dummy1 Dummy 25 2