using Newtonsoft.Json; using Newtonsoft.Json.Converters; using System.ComponentModel; using CyberX8_Core.Attributes; namespace CyberX8_Core { /// /// 设计概述: /// 本设计主要目的,为了满足复杂的刻蚀工艺需求(各个工艺参数之间相互关联), 和应对未来不断新增的工艺需求(新的设备、 /// 新的工艺、新的材料等等), 同时又能对现存的Recipe保持最大的兼容 /// /// 1. 将Process 的每道工艺分解为1个至多个逻辑工艺单元, 每个逻辑工艺单元通过 Class Name 和RT的工艺算法绑定, /// 同时也和 GUI Recipe Editor 的页面布局绑定。 /// /// 2. 一个逻辑单元功能调试好, 并且有在客户端使用后, 此逻辑单元想关联的 RT Process 代码和GUI 界面代码, /// 不允许再修改, 只能增加新的Class 来实现新的工艺需求 /// /// 3. 通过配置文件里面定义 ProcessUnit Class Name列表, 来定义当前机台支持的工艺功能, 也就是说如果Recipe文件里面保函了 /// 配置文件里面没有列出的工艺单元, 表明本机台不支持此Recipe, 并报警提示用户 /// public enum VenusUnits { PressureByPressureModeUnit, TCPUnit, BiasUnit, GasControlUnit, ESCHVUnit, ProcessKitUnit } public enum VenusCleanRecipeUnits { PressureByPressureModeUnit, TCPUnit, GasControlUnit, ProcessKitUnit } public enum Kepler2300Uints { PressureByPressureModeUnit, TCPUnit, BiasUnit, GasControlUnit, ProcessKitUnit } public enum Kepler2300CleanRecipeUints { PressureByPressureModeUnit, TCPUnit, GasControlUnit, ProcessKitUnit } public enum Kepler2200AUnits { PressureByPressureModeUnit, Kepler2200GasControlUnit, HeaterUnit, TCPUnit } public enum Kepler2200BUnits { PressureByPressureModeUnit, Kepler2200GasControlUnit, HeaterUnit, TCPUnit } public enum VenusSEUnits { PressureByPressureModeUnit, TCPUnit, BiasUnit, VenusSEGasControlUnit, ESCHVUnit, ProcessKitUnit } public enum VenusDEUnits { } public partial class PressureByPressureModeUnit : ProcessUnitBase { public string UnitName { get; set; } = "PressureModeUnit"; public PressureUnitMode PressureUnitMode { get; set; } public int StartValue { get; set; } public int ValvePositionPreset { get; set; } [IsCanConfigIgnore] public bool EnableRamp { get; set; } public int HoldTime { get; set; } public int TargetValue { get; set; } public event PropertyChangedEventHandler PropertyChanged; public void InvokePropertyChanged(string propertyName) { if (PropertyChanged != null) { PropertyChanged.Invoke(this, new PropertyChangedEventArgs(propertyName)); } } } public class HeaterUnit : ProcessUnitBase { public string UnitName { get; set; } = "HeaterUnit"; public int HeaterTemp { get; set; } public int HeaterRatio { get; set; } public Suspect SuspectPosition { get; set; } public int PositionOffset { get; set; } } public class TCPUnit : ProcessUnitBase { private string m_UnitName = "TCPUnit"; public string UnitName { get { return m_UnitName; } set { m_UnitName = value; } } [IsTolerance] public ToleranceMode ToleranceMode { get; set; } [IsTolerance] public int ToleranceDelayTime_ms { get; set; } public int RFPower { get; set; } [IsTolerance] public int RFPowerWarningRange { get; set; } [IsTolerance] public int RFPowerAlarmRange { get; set; } public int C1 { get; set; } public int C2 { get; set; } [IsOnlyRead] public int AutoC1 { get; set; } [IsOnlyRead] public int AutoC2 { get; set; } public int MaxReflectedPower { get; set; } [JsonConverter(typeof(StringEnumConverter))] public MatchWorkMode MatchWorkMode { get; set; } private bool m_EnableRamp; [IsCanConfigIgnore] public bool EnableRamp { get { return m_EnableRamp;} set { m_EnableRamp = value; } } //public int StartPower { get; set; } public int TargetRFPower { get; set; } } public class BiasUnit : ProcessUnitBase { public string UnitName { get; set; } = "BiasUnit"; [IsTolerance] public ToleranceMode ToleranceMode { get; set; } [IsTolerance] public int ToleranceDelayTime_ms { get; set; } public int RFPower { get; set; } [IsTolerance] public int RFPowerWarningRange { get; set; } [IsTolerance] public int RFPowerAlarmRange { get; set; } public int BiasRFPower { get; set; } public int BiasC1{ get; set; } public int BiasC2 { get; set; } [IsOnlyRead] public int AutoBiasC1 { get; set; } [IsOnlyRead] public int AutoBiasC2 { get; set; } public int BiasMaxReflectedPower { get; set; } [JsonConverter(typeof(StringEnumConverter))] public MatchWorkMode BiasMatchWorkMode { get; set; } [JsonConverter(typeof(StringEnumConverter))] public GeneratorMode BiasGeneratorMode { get; set; } public int PulseRateFreq { get; set; } public int PulseDutyCycle { get; set; } [IsCanConfigIgnore] public bool EnableRamp { get; set; } [JsonConverter(typeof(StringEnumConverter))] public TargetMode TargetMode { get; set; } //public int StartBiasRFPower { get; set; } public int TargetBiasRFPower { get; set; } } public class GasControlUnit : ProcessUnitBase { public string UnitName { get; set; } = "GasControlUnit"; [IsTolerance] public ToleranceMode ToleranceMode { get; set; } [IsTolerance] public int ToleranceDelayTime_ms { get; set; } public int Gas1 { get; set; } [IsTolerance] public int Gas1WarningRange { get; set; } [IsTolerance] public int Gas1AlarmRange { get; set; } public int Gas2 { get; set; } [IsTolerance] public int Gas2WarningRange { get; set; } [IsTolerance] public int Gas2AlarmRange { get; set; } public int Gas3 { get; set; } [IsTolerance] public int Gas3WarningRange { get; set; } [IsTolerance] public int Gas3AlarmRange { get; set; } public int Gas4 { get; set; } [IsTolerance] public int Gas4WarningRange { get; set; } [IsTolerance] public int Gas4AlarmRange { get; set; } public int Gas5 { get; set; } [IsTolerance] public int Gas5WarningRange { get; set; } [IsTolerance] public int Gas5AlarmRange { get; set; } public int Gas6 { get; set; } [IsTolerance] public int Gas6WarningRange { get; set; } [IsTolerance] public int Gas6AlarmRange { get; set; } public int Gas7 { get; set; } [IsTolerance] public int Gas7WarningRange { get; set; } [IsTolerance] public int Gas7AlarmRange { get; set; } public int Gas8 { get; set; } [IsTolerance] public int Gas8WarningRange { get; set; } [IsTolerance] public int Gas8AlarmRange { get; set; } [IsCanConfigIgnore] public bool EnableRamp { get; set; } public int Gas1Target { get; set; } public int Gas2Target { get; set; } public int Gas3Target { get; set; } public int Gas4Target { get; set; } public int Gas5Target { get; set; } public int Gas6Target { get; set; } public int Gas7Target { get; set; } public int Gas8Target { get; set; } public int FlowRatie { get; set; } } public class Kepler2200GasControlUnit : ProcessUnitBase { public string UnitName { get; set; } = "GasUnit"; [IsTolerance] public ToleranceMode ToleranceMode { get; set; } [IsTolerance] public int ToleranceDelayTime_ms { get; set; } public int Gas1 { get; set; } [IsTolerance] public int Gas1WarningRange { get; set; } [IsTolerance] public int Gas1AlarmRange { get; set; } public int Gas2 { get; set; } [IsTolerance] public int Gas2WarningRange { get; set; } [IsTolerance] public int Gas2AlarmRange { get; set; } public int Gas3 { get; set; } [IsTolerance] public int Gas3WarningRange { get; set; } [IsTolerance] public int Gas3AlarmRange { get; set; } public int Gas4 { get; set; } [IsTolerance] public int Gas4WarningRange { get; set; } [IsTolerance] public int Gas4AlarmRange { get; set; } public int Gas5 { get; set; } [IsTolerance] public int Gas5WarningRange { get; set; } [IsTolerance] public int Gas5AlarmRange { get; set; } public int Gas6 { get; set; } [IsTolerance] public int Gas6WarningRange { get; set; } [IsTolerance] public int Gas6AlarmRange { get; set; } } public class VenusSEGasControlUnit : ProcessUnitBase { public string UnitName { get; set; } = "SEGasControlUnit"; public int Gas1 { get; set;} public int Gas2 { get; set;} public int Gas3 { get; set;} public int Gas4 { get; set;} public int Gas5 { get; set;} public int Gas6 { get; set;} public int Gas7 { get; set;} public int Gas8 { get; set;} public int Gas9 { get; set;} public int Gas10 { get; set;} public int Gas11 { get; set;} public int Gas12 { get; set;} } public class ESCHVUnit : ProcessUnitBase { public string UnitName { get; set; } = "ESCHVUnit"; public int BacksideHelum { get; set; } public int MinHeFlow { get; set; } public int MaxHeFlow { get; set; } public int ESCClampValtage { get; set; } public int Temperature { get; set; } } public class ProcessKitUnit : ProcessUnitBase { public string UnitName { get; set; } = "ProcessKitUnit"; private MovementPosition m_LiftPinPostion; [JsonConverter(typeof(StringEnumConverter))] public MovementPosition LiftPinPostion { get { return m_LiftPinPostion; } set { m_LiftPinPostion = value; } } [JsonConverter(typeof(StringEnumConverter))] public MovementPosition WeprBasrPinPosition { get; set; } } }