namespace CyberX8_Core { public enum Kepler2300Device { ValveMfc1, ValveMfc2, ValveMfc3, ValveMfc4, ValveMfc5, ValveMfc6, ValveMfc7, ValveMfc8, ValvePVN21, ValvePVN22, ValvePV11, ValvePV12, ValvePV21, ValvePV22, ValvePV31, ValvePV32, ValvePV41, ValvePV42, ValveN2, ValvePVHe1, ValvePVHe2, ValveGasFinal, ValveSoftPump, ValveFastPump, ValveCHBPurge, ValveTurboPumpPumping, ValveTurboPumpPurge, ValveGuage, ValveLoadlockVent, ValveLoadlockPumping, MfcGas1, MfcGas2, MfcGas3, MfcGas4, MfcGas5, GasStick1, GasStick2, GasStick3, TemperatureControl, ChamberLid, ATM_SW, VAC_SW, WaterFlow_SW, N2_Pressure, ProcessGauge, PressureGauge, ForelineGauge, MainPump, Chiller, Rf, BiasRf, Match, BiasMatch, PressureControl, ThrottleValve, HeaterChamber, ForelineHeater, Heartbeat, ResetPlcSignal, LiftPin, SlitDoor, SmallPin, MediumPin, LoadLockArm, StatisticsRfOnTime, StatisticsPumpOnTime, PlcDateTime, Lid, LidLoadlock, LidLocker, ESCHV, PendulumValve, TurboPump, EndPoint, TMLid, LLALid, LLBLid, LLATSlitDoor, LLBTSlitDoor, LLAESlitDoor, LLBESlitDoor, TMValveN2, TMSoftPumpValve, TMFastPumpValve, TMPurgeValve, //TMVentValve, TMSoftVentValve, TMFastVentValve, LLASoftPumpValve, LLAFastPumpValve, LLAPurgeValve, LLAVentValve, LLBSoftPumpValve, LLBFastPumpValve, LLBPurgeValve, LLBVentValve, ValveWaterRelay, TMPowerOn, TMInSafty, WaferLeakSensor, EFEMSideDoorClosed, TMPCWFlowSwitch, LLAPCWFlowSwitch, LLBPCWFlowSwitch, TMLidClosed, CDAPressureSwitch, VaccumPressureSwitch, N2PressureSwitch, TMPressureCtrl, TMRobotNotExtendPMA, TMRobotNotExtendPMB, TMRobotNotExtendPMC, TMRobotNotExtendPMD, TMRobotNotExtendLLA, TMRobotNotExtendLLB, EfemRobotNotExtendLLA, EfemRobotNotExtendLLB, TMVacSwitch, LLAVacSwitch, LLBVacSwitch, TMATMSwitch, LLAATMSwitch, LLBATMSwitch, LLAWaferSizeCheckSwitch, LLBWaferSizeCheckSwitch, PMAWaferSizeCheckSwitch, PMBWaferSizeCheckSwitch, PMCWaferSizeCheckSwitch, PMDWaferSizeCheckSwitch, } }