using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.Common.Utilities;
using MECF.Framework.Common.WaferHolder;
using CyberX8_Core;
using CyberX8_RT.Devices.AXIS;
using CyberX8_RT.Devices.Loader;
using CyberX8_RT.Devices.PUF;
using CyberX8_RT.Modules.Loader;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
namespace CyberX8_RT.Modules.PUF
{
public class PufPlaceToLoaderRoutine : RoutineBase, IRoutine
{
private enum PlaceStep
{
CheckStatus,
OnlyPlaceToLoader,
OnlyPlaceToLoaderWait,
SwitchWaferHolder,
LastVerticalFlip,
LastVerticalFlipWait,
LastVerticalPark,
LastVerticalParkWait,
LastRotationPark,
LastRotationParkWait,
End
}
#region 常量
private const string CURRENT_STATION_LIST = "CurrentStationList";
private const string SIDE_A = "SideA";
#endregion
#region 内部变量
private string _side;
private LoaderEntity _loaderEntity;
private JetAxisBase _flipAxis;
private JetAxisBase _rotationAxis;
private JetAxisBase _verticalAxis;
private PufVacuum _vacuum;
private LoaderSideDevice _loaderSide;
private JetAxisBase _loaderCrsAxis;
private JetAxisBase _gantryAxis;
private PufOnlyPlaceToLoaderRoutine _onlyPlaceToLoaderRoutine;
#endregion
///
/// 构造函数
///
///
public PufPlaceToLoaderRoutine(string module) : base(module)
{
}
///
/// 中止
///
public void Abort()
{
_flipAxis.StopPositionOperation();
_rotationAxis.StopPositionOperation();
_verticalAxis.StopPositionOperation();
Runner.Stop("Manual Abort");
}
///
/// 监控
///
///
public RState Monitor()
{
Runner.Run(PlaceStep.CheckStatus,CheckPreCondition,_delay_1ms)
.Run(PlaceStep.OnlyPlaceToLoader,StartOnlyPlaceToLoader,_delay_1ms)
.WaitWithStopCondition(PlaceStep.OnlyPlaceToLoaderWait,CheckPlaceEndStatus,CheckPlaceStopStatus)
.Run(PlaceStep.SwitchWaferHolder,SwitchWaferHolderSideWafer,_delay_1ms)
.Run(PlaceStep.LastVerticalFlip, () => _verticalAxis.PositionStation("Flip"), _delay_1ms)
.WaitWithStopCondition(PlaceStep.LastVerticalFlipWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
.Run(PlaceStep.LastVerticalPark, () => _verticalAxis.PositionStation("Park"), _delay_1ms)
.WaitWithStopCondition(PlaceStep.LastVerticalParkWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
.Run(PlaceStep.LastRotationPark, () => _rotationAxis.PositionStation("Park"), _delay_1ms)
.WaitWithStopCondition(PlaceStep.LastRotationParkWait, CheckRotationPositionStatus, CheckRotationPositionRunStop)
.End(PlaceStep.End, NullFun, _delay_1ms);
return Runner.Status;
}
///
/// 执行放片至Loader
///
///
private bool StartOnlyPlaceToLoader()
{
return _onlyPlaceToLoaderRoutine.Start(_side) == RState.Running;
}
///
/// 检验放片状态
///
///
private bool CheckPlaceEndStatus()
{
return _onlyPlaceToLoaderRoutine.Monitor() ==RState.End;
}
///
/// 检验放片停止状态
///
///
private bool CheckPlaceStopStatus()
{
RState state = _onlyPlaceToLoaderRoutine.Monitor();
if(state==RState.Failed||state==RState.Timeout)
{
return true;
}
return false;
}
///
/// WaferHolder交换片
///
///
private bool SwitchWaferHolderSideWafer()
{
WaferHolderInfo waferHolderInfo = _loaderEntity.WaferHolderInfo;
if (waferHolderInfo != null)
{
if (Module == ModuleName.PUF1.ToString())
{
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), 1, ModuleName.Loader1, 0);
WaferInfo loaderWaferInfo = WaferManager.Instance.GetWafer(ModuleName.Loader1, 0);
waferHolderInfo.WaferAId = loaderWaferInfo.WaferID;
waferHolderInfo.WaferAType = (int)loaderWaferInfo.WaferType;
WaferHolderDataRecorder.UpdateWaferHolderData(waferHolderInfo.Id, waferHolderInfo);
MaterialTrackerManager.Instance.UpdateModuleMaterial(ModuleName.Loader1.ToString());
}
else
{
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), 1, ModuleName.Loader1, 1);
WaferInfo loaderWaferInfo = WaferManager.Instance.GetWafer(ModuleName.Loader1, 1);
waferHolderInfo.WaferBId = loaderWaferInfo.WaferID;
waferHolderInfo.WaferBType = (int)loaderWaferInfo.WaferType;
WaferHolderDataRecorder.UpdateWaferHolderData(waferHolderInfo.Id, waferHolderInfo);
MaterialTrackerManager.Instance.UpdateModuleMaterial(ModuleName.Loader1.ToString());
}
}
return true;
}
///
/// 检验Rotation移动状态
///
///
private bool CheckRotationPositionStatus()
{
return _rotationAxis.Status == RState.End;
}
///
/// 检验Rotation是否还在运动
///
///
private bool CheckRotationPositionRunStop()
{
return _rotationAxis.Status == RState.Failed;
}
///
/// 检验Vertical移动状态
///
///
private bool CheckVerticalPositionStatus()
{
return _verticalAxis.Status == RState.End;
}
///
/// 检验Vertical是否还在运动
///
///
private bool CheckVerticalPositionRunStop()
{
return _verticalAxis.Status == RState.Failed;
}
///
/// 启动
///
///
///
public RState Start(params object[] objs)
{
_side = objs[0].ToString();
_loaderEntity = Singleton.Instance.GetModule(ModuleName.Loader1.ToString());
_flipAxis = DEVICE.GetDevice($"{Module}.Flip");
_rotationAxis = DEVICE.GetDevice($"{Module}.Rotation");
_verticalAxis = DEVICE.GetDevice($"{Module}.Vertical");
_vacuum = DEVICE.GetDevice($"{Module}.Vacuum");
_gantryAxis = DEVICE.GetDevice($"{ModuleName.Transporter2}.Gantry");
GetLoaderSide();
GetCrsAxis();
_onlyPlaceToLoaderRoutine = new PufOnlyPlaceToLoaderRoutine(Module.ToString());
return Runner.Start(Module, "Place To Loader");
}
///
/// 检验是否存在Wafer
///
///
private bool CheckWaferPresent()
{
if (_side == "SideA")
{
if (!_vacuum.ChuckAWaferPresent)
{
NotifyError(eEvent.ERR_PUF, $"{_side} has no Wafer", -1);
return false;
}
}
else
{
if (!_vacuum.ChuckBWaferPresent)
{
NotifyError(eEvent.ERR_PUF, $"{_side} has no Wafer",-1);
return false;
}
}
return true;
}
///
/// 检验前置条件
///
///
private bool CheckPreCondition()
{
if(!CheckWaferPresent())
{
return false;
}
bool isLoaderInstall = ModuleHelper.IsInstalled(ModuleName.Loader1);
if (isLoaderInstall)
{
if(_loaderSide.SideData.WaferPresent)
{
NotifyError(eEvent.ERR_PUF, $"{_loaderSide.Module}.{_loaderSide.Name} has Wafer",-1);
return false;
}
JetAxisBase loaderRotationaxis = DEVICE.GetDevice($"{ModuleName.Loader1}.Rotation");
if (loaderRotationaxis != null)
{
double loaderRotationPosition = loaderRotationaxis.MotionData.MotorPosition;
if (!loaderRotationaxis.CheckPositionIsInStation(loaderRotationPosition, "LOADA"))
{
NotifyError(eEvent.ERR_PUF, $"Loader Rotation {loaderRotationPosition} is not in LOADA", -1);
return false;
}
}
if (Module == ModuleName.PUF1.ToString())
{
//Loader1.SwingA 在Open
JetAxisBase loaderShuttleAAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.ShuttleA");
if (loaderShuttleAAxis != null)
{
double loaderShuttleAPosition = loaderShuttleAAxis.MotionData.MotorPosition;
if (!loaderShuttleAAxis.CheckPositionIsInStation(loaderShuttleAPosition, "OPEN"))
{
NotifyError(eEvent.ERR_PUF, $"Loader ShuttleA {loaderShuttleAPosition} is not in OPEN", -1);
return false;
}
}
//Loader1.TiltA 在HORI
JetAxisBase loaderTiltAAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.TiltA");
if (loaderTiltAAxis != null)
{
double loaderTiltAPosition = loaderTiltAAxis.MotionData.MotorPosition;
if (!loaderTiltAAxis.CheckPositionIsInStation(loaderTiltAPosition, "HORI"))
{
NotifyError(eEvent.ERR_PUF, $"Loader TiltA {loaderTiltAPosition} is not in HORI", -1);
return false;
}
}
}
if (Module == ModuleName.PUF2.ToString())
{
//Loader1.SwingB 在Open
JetAxisBase loaderShuttleBAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.ShuttleB");
double loaderShuttleBPosition = loaderShuttleBAxis.MotionData.MotorPosition;
if (!loaderShuttleBAxis.CheckPositionIsInStation(loaderShuttleBPosition, "OPEN"))
{
LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader ShuttleB {loaderShuttleBPosition} is not in OPEN");
return false;
}
//Loader1.TiltB 在HORI
JetAxisBase loaderTiltBAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.TiltB");
double loaderTiltBPosition = loaderTiltBAxis.MotionData.MotorPosition;
if (!loaderTiltBAxis.CheckPositionIsInStation(loaderTiltBPosition, "HORI"))
{
LOG.WriteLog(eEvent.ERR_PUF, Module, $"Loader TiltB {loaderTiltBPosition} is not in HORI");
return false;
}
}
//Loader Handle Wafer状态确认
// Lip Seal Vacuum "ON"
if (!_loaderSide.SideData.CRSVacuum)
{
NotifyError(eEvent.ERR_PUF, "Loader1 LS Vacuum is off", -1);
return false;
}
//Bernoulli Bladder "ON",Retracted Green Light
if (!_loaderSide.SideData.BernoulliBladder)
{
NotifyError(eEvent.ERR_PUF, "Loader1 Bernoulli Bladder is off",-1);
return false;
}
if (_loaderSide.SideData.BernoulliExtended)
{
NotifyError(eEvent.ERR_PUF, "Loader1 Bernoulli Retracted is off", -1);
return false;
}
//其他SideA/B均为OFF
if (_loaderSide.SideData.BernoulliN2)
{
NotifyError(eEvent.ERR_PUF, "Loader1 Bernoulli N2 is on",-1);
return false;
}
}
//Loader Transporter在Loader右侧
bool loaderTransporterInstalled = ModuleHelper.IsInstalled(ModuleName.Transporter2);
if (loaderTransporterInstalled && !_gantryAxis.JudgeCompareTargetStation("Loader", "Right"))
{
NotifyError(eEvent.ERR_PUF, "Loader Transporter is not in Loader right position", -1);
return false;
}
double rotationPosition = _rotationAxis.MotionData.MotorPosition;
if (_rotationAxis.CheckPositionIsEmpty(rotationPosition))
{
LOG.WriteLog(eEvent.ERR_PUF, Module, $"rotation axis {rotationPosition} is not at Station");
return false;
}
double flipPosition = _flipAxis.MotionData.MotorPosition;
if (_flipAxis.CheckPositionIsEmpty(flipPosition))
{
LOG.WriteLog(eEvent.ERR_PUF, Module, $"flip axis {flipPosition} is not at Station");
return false;
}
return true;
}
///
/// 获取LoaderSide
///
private void GetLoaderSide()
{
if (Module == ModuleName.PUF1.ToString())
{
_loaderSide = DEVICE.GetDevice($"{ModuleName.Loader1}.SideA");
}
else
{
_loaderSide = DEVICE.GetDevice($"{ModuleName.Loader1}.SideB");
}
}
///
/// 获取lipseal Axis
///
private void GetCrsAxis()
{
if(Module==ModuleName.PUF1.ToString())
{
_loaderCrsAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.LSA");
}
else
{
_loaderCrsAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.LSB");
}
}
}
}