<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
<Dig_In>
<DI_ITEM Index="0" Name="DI_TM_DI1" Device="" Addr="w0.00" Note="System CDA Pressure ok" />
<DI_ITEM Index="1" Name="DI_TM_DI2" Device="" Addr="w0.01" Note="System N2 Pressure ok"/>
<DI_ITEM Index="2" Name="DI_TM_DI3" Device="" Addr="w0.02" Note="VCE SLIT DOOR OPEN ENABLE" />
<DI_ITEM Index="3" Name="DI_TM_DI5" Device="" Addr="w0.03" Note="PMA SLIT DOOR OPEN ENABLE" />
<DI_ITEM Index="4" Name="DI_TM_DI7" Device="" Addr="w0.04" Note="PMB SLIT DOOR OPEN ENABLE" />
<DI_ITEM Index="5" Name="DI_TM_DI9" Device="" Addr="w0.05" Note="PMC SLIT DOOR OPEN ENABLE" />
<DI_ITEM Index="6" Name="DI_TM_DI4" Device="" Addr="w0.06" Note="TM RB EXTEND VCE ENABLE" />
<DI_ITEM Index="7" Name="DI_TM_DI6" Device="" Addr="w0.07" Note="TM RB EXTEND PMA ENABLE" />
<DI_ITEM Index="8" Name="DI_TM_DI8" Device="" Addr="w0.08" Note="TM RB EXTEND PMB ENABLE" />
<DI_ITEM Index="9" Name="DI_TM_DI10" Device="" Addr="w0.09" Note="TM RB EXTEND PMC ENABLE" />
<DI_ITEM Index="10" Name="DI_SYS_C1" Device="" Addr="w0.10" Note="AC RACK FAN OK" />
<DI_ITEM Index="11" Name="DI_SYS_C2" Device="" Addr="w0.11" Note="AC RACK Smoke Detector out1" />
<DI_ITEM Index="12" Name="DI_SYS_C3" Device="" Addr="w0.12" Note="AC RACK Smoke Detector out2" />
<DI_ITEM Index="13" Name="DI_SYS_C4" Device="" Addr="w0.13" Note="Factory Smoke Detector Out" />
<DI_ITEM Index="14" Name="DI_TSYS_C5" Device="" Addr="w0.14" Note="Abnormal exhaust gas treatment" />
<DI_ITEM Index="15" Name="DI_TM_N2_1" Device="" Addr="w0.15" Note="TM N2气压表1" />
<DI_ITEM Index="16" Name="DI_VCE_TM_OPS" Device="" Addr="w1.00" Note="VCE到TM门阀开信号" />
<DI_ITEM Index="17" Name="DI_VCE_TM_CLS" Device="" Addr="w1.01" Note="VCE到TM门阀关信号" />
<DI_ITEM Index="18" Name="DI_TM_PMA_OPS" Device="" Addr="w1.02" Note="TM到PMA门阀开信号" />
<DI_ITEM Index="19" Name="DI_TM_PMA_CLS" Device="" Addr="w1.03" Note="TM到PMA门阀关信号" />
<DI_ITEM Index="20" Name="DI_TM_PMB_OPS" Device="" Addr="w1.04" Note="TM到PMB门阀开信号" />
<DI_ITEM Index="21" Name="DI_TM_PMB_CLS" Device="" Addr="w1.05" Note="TM到PMB门阀关信号" />
<DI_ITEM Index="22" Name="DI_TM_N2_2" Device="" Addr="w1.06" Note="TM N2气压表2" />
<DI_ITEM Index="23" Name="DI_TM_CDA" Device="" Addr="w1.07" Note="TM CDA气压表" />
<DI_ITEM Index="24" Name="DI_TM_HE" Device="" Addr="w1.08" Note="TM He气压表" />
<DI_ITEM Index="25" Name="DI_TM_LEAK" Device="" Addr="w1.09" Note="漏液检测器" />
<DI_ITEM Index="26" Name="DI_VCE_V" Device="" Addr="w1.10" Note="VCE真空信号" />
<DI_ITEM Index="27" Name="DI_TM_V" Device="" Addr="w1.11" Note="TM真空信号" />
<DI_ITEM Index="28" Name="DI_VCE_RB_RET" Device="" Addr="w1.12" Note="ROBOT TO VCE RETRACT" />
<DI_ITEM Index="29" Name="DI_PMA_RB_RET" Device="" Addr="w1.13" Note="ROBOT TO PMA RETRACT" />
<DI_ITEM Index="30" Name="DI_PMB_RB_RET" Device="" Addr="w1.14" Note="ROBOT TO PMB RETRACT" />
<DI_ITEM Index="31" Name="DI_PMC_RB_RET" Device="" Addr="w1.15" Note="ROBOT TO PMC RETRACT" />
<DI_ITEM Index="32" Name="DI_PMD_RB_RET" Device="" Addr="w2.00" Note="ROBOT TO PMD RETRACT" />
<DI_ITEM Index="33" Name="DI_TM_PMC_OPS" Device="" Addr="w2.01" Note="TM到PMC门阀开信号" />
<DI_ITEM Index="34" Name="DI_TM_PMC_CLS" Device="" Addr="w2.02" Note="TM到PMC门阀关信号" />
<DI_ITEM Index="35" Name="DI_TM_PMD_OPS" Device="" Addr="w2.03" Note="TM到PMD门阀开信号" />
<DI_ITEM Index="36" Name="DI_TM_PMD_CLS" Device="" Addr="w2.04" Note="TM到PMD门阀关信号" />
</Dig_In>
<Dig_Out>
<DO_ITEM Index="0" Name="" Device="" Addr="" />
<DO_ITEM Index="1" Name="" Device="" Addr="" />
<DO_ITEM Index="2" Name="" Device="" Addr="" />
<DO_ITEM Index="3" Name="" Device="" Addr="" />
<DO_ITEM Index="4" Name="" Device="" Addr="" />
<DO_ITEM Index="5" Name="" Device="" Addr="" />
<DO_ITEM Index="6" Name="" Device="" Addr="" />
<DO_ITEM Index="7" Name="" Device="" Addr="" />
<DO_ITEM Index="8" Name="" Device="" Addr="" />
<DO_ITEM Index="9" Name="" Device="" Addr="" />
<DO_ITEM Index="10" Name="" Device="" Addr="" />
<DO_ITEM Index="11" Name="DO_TM_PMD_OP" Device="" Addr="w199.14" Note="TM到PMD门阀开"/>
<DO_ITEM Index="12" Name="DO_TM_PMD_CL" Device="" Addr="w199.15" Note="TM到PMD门阀关" />
<DO_ITEM Index="13" Name="DO_VCE_TM_OP" Device="" Addr="w200.00" Note="VCE到TM门阀开" />
<DO_ITEM Index="14" Name="DO_VCE_TM_CL" Device="" Addr="w200.01" Note="VCE到TM门阀关" />
<DO_ITEM Index="15" Name="DO_TM_PMA_OP" Device="" Addr="w200.02" Note="TM到PMA门阀开"/>
<DO_ITEM Index="16" Name="DO_TM_PMA_CL" Device="" Addr="w200.03" Note="TM到PMA门阀关"/>
<DO_ITEM Index="17" Name="DO_TM_PMB_OP" Device="" Addr="w200.04" Note="TM到PMB门阀开"/>
<DO_ITEM Index="18" Name="DO_TM_PMB_CL" Device="" Addr="w200.05" Note="TM到PMB门阀关"/>
<DO_ITEM Index="19" Name="DO_TM_PMC_OP" Device="" Addr="w200.06" Note="TM到PMC门阀开"/>
<DO_ITEM Index="20" Name="DO_TM_PMC_CL" Device="" Addr="w200.07" Note="TM到PMC门阀关"/>
<DO_ITEM Index="21" Name="DO_TM_V_HS" Device="" Addr="w200.08" Note="TM腔快抽真空"/>
<DO_ITEM Index="22" Name="DO_TM_V_LS" Device="" Addr="w200.09" Note="TM腔慢抽真空"/>
<DO_ITEM Index="23" Name="DO_TM_B_HS" Device="" Addr="w200.10" Note="TM腔快破真空"/>
<DO_ITEM Index="24" Name="DO_TM_B_LS" Device="" Addr="w200.11" Note="TM腔慢破真空"/>
<DO_ITEM Index="25" Name="DO_VCE_V_HS" Device="" Addr="w200.12" Note="VCE腔快抽真空"/>
<DO_ITEM Index="26" Name="DO_VCE_V_LS" Device="" Addr="w200.13" Note="VCE腔慢抽真空" />
<DO_ITEM Index="27" Name="DO_VCE_B_HS" Device="" Addr="w200.14" Note="VCE腔快破真空"/>
<DO_ITEM Index="28" Name="DO_VCE_B_LS" Device="" Addr="w200.15" Note="VCE腔慢破真空"/>
<DO_ITEM Index="29" Name="DO_V_220V" Device="" Addr="w201.00" Note="220V线圈"/>
<DO_ITEM Index="30" Name="DO_TM_C1" Device="" Addr="w201.01" Note="系统允许断电"/>
<DO_ITEM Index="31" Name="DO_TM_C2" Device="" Addr="w201.02" Note="备用"/>
<DO_ITEM Index="32" Name="" Device="" Addr="" />
<DO_ITEM Index="33" Name="" Device="" Addr="" />
<DO_ITEM Index="34" Name="" Device="" Addr="" />
<DO_ITEM Index="35" Name="" Device="" Addr="" />
<DO_ITEM Index="36" Name="" Device="" Addr="" />
</Dig_Out>
<Ana_Out>
<AO_ITEM Index="0" Name="AO_MFC_Flow_Setpoint" BufferOffset="0" Device="" Addr="d200" Note="MFC Flow Setpoint" />
<AO_ITEM Index="1" Name="AO_TM_Vacuum_Gauge" BufferOffset="1" Device="" Addr="d201" Note="TM"/>
<AO_ITEM Index="2" Name="" BufferOffset="" />
<AO_ITEM Index="3" Name="" BufferOffset="" />
<AO_ITEM Index="4" Name="" BufferOffset="" />
<AO_ITEM Index="5" Name="" BufferOffset="" />
<AO_ITEM Index="6" Name="" BufferOffset="" />
<AO_ITEM Index="7" Name="" BufferOffset="" />
<AO_ITEM Index="8" Name="" BufferOffset=""/>
<AO_ITEM Index="9" Name="" BufferOffset="" />
<AO_ITEM Index="10" Name="" BufferOffset="" />
<AO_ITEM Index="11" Name="" BufferOffset="" />
<AO_ITEM Index="12" Name="" BufferOffset="" />
<AO_ITEM Index="13" Name="" BufferOffset="" />
<AO_ITEM Index="14" Name="" BufferOffset="" />
<AO_ITEM Index="15" Name="" BufferOffset="" />
<AO_ITEM Index="16" Name="" BufferOffset="" />
<AO_ITEM Index="17" Name="" BufferOffset="" />
<AO_ITEM Index="18" Name="" BufferOffset="" />
<AO_ITEM Index="19" Name="" BufferOffset="" />
<AO_ITEM Index="20" Name="" BufferOffset="" />
<AO_ITEM Index="21" Name="" />
<AO_ITEM Index="22" Name="" />
<AO_ITEM Index="23" Name="" />
<AO_ITEM Index="24" Name="" />
<AO_ITEM Index="25" Name="" />
<AO_ITEM Index="26" Name="" />
<AO_ITEM Index="27" Name="" />
<AO_ITEM Index="28" Name="" />
<AO_ITEM Index="29" Name="" />
<AO_ITEM Index="30" Name="" />
<AO_ITEM Index="31" Name="" />
<AO_ITEM Index="32" Name="" />
<AO_ITEM Index="33" Name="" />
<AO_ITEM Index="34" Name="" />
<AO_ITEM Index="35" Name="" />
<AO_ITEM Index="36" Name="" />
<AO_ITEM Index="37" Name="" />
<AO_ITEM Index="38" Name="" />
<AO_ITEM Index="39" Name="" />
<AO_ITEM Index="40" Name="" />
<AO_ITEM Index="41" Name="" />
<AO_ITEM Index="42" Name="" />
<AO_ITEM Index="43" Name="" />
<AO_ITEM Index="44" Name="" />
<AO_ITEM Index="45" Name="" />
<AO_ITEM Index="46" Name="" />
<AO_ITEM Index="47" Name="" />
<AO_ITEM Index="48" Name="" />
<AO_ITEM Index="49" Name="" />
</Ana_Out>
<Ana_In>
<AI_ITEM Index="0" Name="AI_MFC_Flow_Setpoint" BufferOffset="2" Device="" Addr="D100" />
<AI_ITEM Index="1" Name="AI_VCE_Vacuum_Gauge" BufferOffset="10" Device="" Addr="D101" />
<AI_ITEM Index="2" Name="AI_TM_Vacuum_Gauge" BufferOffset="2" Device="" Addr="D102"/>
<AI_ITEM Index="3" Name="AI_VCE_Pipeline_Vacuum_Gauge" BufferOffset="10" Device="" Addr="D103"/>
<AI_ITEM Index="4" Name="AI_TM_Pipeline_Vacuum_Gauge" BufferOffset="22" Device="" Addr="D104"/>
<AI_ITEM Index="5" Name=""/>
<AI_ITEM Index="6" Name="" />
<AI_ITEM Index="7" Name=""/>
<AI_ITEM Index="8" Name=""/>
<AI_ITEM Index="9" Name=""/>
<AI_ITEM Index="10" Name="" />
<AI_ITEM Index="11" Name=""/>
<AI_ITEM Index="12" Name=""/>
<AI_ITEM Index="13" Name=""/>
<AI_ITEM Index="14" Name=""/>
<AI_ITEM Index="15" Name=""/>
<AI_ITEM Index="16" Name=""/>
<AI_ITEM Index="17" Name=""/>
<AI_ITEM Index="18" Name=""/>
<AI_ITEM Index="19" Name=""/>
<AI_ITEM Index="20" Name=""/>
<AI_ITEM Index="21" Name="" />
<AI_ITEM Index="22" Name=""/>
<AI_ITEM Index="23" Name=""/>
<AI_ITEM Index="24" Name=""/>
<AI_ITEM Index="25" Name=""/>
<AI_ITEM Index="26" Name="" />
<AI_ITEM Index="27" Name="" />
<AI_ITEM Index="28" Name="" />
<AI_ITEM Index="29" Name="" />
<AI_ITEM Index="30" Name="" />
<AI_ITEM Index="31" Name="" />
<AI_ITEM Index="32" Name="" />
<AI_ITEM Index="33" Name="" />
<AI_ITEM Index="34" Name="" />
<AI_ITEM Index="35" Name="" />
<AI_ITEM Index="36" Name="" />
<AI_ITEM Index="37" Name="" />
<AI_ITEM Index="38" Name="" />
<AI_ITEM Index="39" Name="" />
<AI_ITEM Index="40" Name="" />
<AI_ITEM Index="41" Name="" />
<AI_ITEM Index="42" Name="" />
<AI_ITEM Index="43" Name="" />
<AI_ITEM Index="44" Name="" />
<AI_ITEM Index="45" Name="" />
<AI_ITEM Index="46" Name="" />
<AI_ITEM Index="47" Name="" />
<AI_ITEM Index="48" Name="" />
<AI_ITEM Index="49" Name="" />
</Ana_In>
</IO_DEFINE>