<?xml version='1.0'?> <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'> <!--文件根据210-0062-100_ IO LIST_KPL2200_PM_20230726.xlsx生成--> <!--生成时间：10/08/2023 10:07:36--> <Dig_In> <DI_ITEM Index="0" Name="DI_Lid_Closed" Device="" Addr="w20.00" /> <DI_ITEM Index="1" Name="DI_ATM_Switch" Device="ATM_SW" Addr="w20.01" /> <DI_ITEM Index="2" Name="DI_VAC_Switch" Device="" Addr="w20.02" /> <DI_ITEM Index="3" Name="" /> <DI_ITEM Index="4" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" /> <DI_ITEM Index="5" Name="" Device="" Addr="w20.05" /> <DI_ITEM Index="6" Name="" Device="" Addr="w20.06" /> <DI_ITEM Index="7" Name="DI_Source_RF_Generator_Interlock" Device="" Addr="w20.07" /> <DI_ITEM Index="8" Name="DI_Source_RF_Match_Interlock" Device="" Addr="w20.08" /> <DI_ITEM Index="9" Name="DI_Turbo_Pump_Interlock" Device="" Addr="w20.09" /> <DI_ITEM Index="10" Name="DI_Slit_Door_Open_POS" Device="" Addr="w20.10" /> <DI_ITEM Index="11" Name="DI_Slit_Door_Close_POS" Device="" Addr="w20.11" /> <DI_ITEM Index="12" Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" /> <DI_ITEM Index="13" Name="" /> <DI_ITEM Index="14" Name="" /> <DI_ITEM Index="15" Name="DI_Chamber_Pressure_10t_Guage_Alarm" Device="VG_PPH" Addr="w20.15" /> <DI_ITEM Index="16" Name="DI_Process_Pressure_2t_Guage_Alarm" Device="VG_PPL" Addr="w21.00" /> <DI_ITEM Index="17" Name="" /> <DI_ITEM Index="18" Name="DI_Foreline_Pressure_10t_Guage_Alarm" Device="VG_FL" Addr="w21.02" /> <DI_ITEM Index="19" Name="" /> <DI_ITEM Index="20" Name="" Device="" Addr="" /> <DI_ITEM Index="21" Name="DI_Top_Safty_Door_SW" Device="" Addr="w21.05" /> <DI_ITEM Index="22" Name="DI_Gas_Detector1_Alarm" Device="" Addr="w21.06" /> <DI_ITEM Index="23" Name="DI_Gas_Detector2_Alarm" Device="" Addr="w21.07" /> <DI_ITEM Index="24" Name="" Device="" Addr="" /> <DI_ITEM Index="25" Name="" Device="" Addr="" /> <DI_ITEM Index="26" Name="" Device="" Addr="" /> <DI_ITEM Index="27" Name="" Device="" Addr="" /> <DI_ITEM Index="28" Name="" Device="" Addr="" /> <DI_ITEM Index="29" Name="DI_CHB_M-HT_Control_TC_Broken_Alarm" Device="" Addr="w21.13" /> <DI_ITEM Index="30" Name="" Device="" Addr="" /> <DI_ITEM Index="31" Name="DI_CHB_M-HT_Heater_On_FB" Device="" Addr="w21.15" /> <DI_ITEM Index="32" Name="DI_CHB_M-HT_OT_Switch_Alarm" Device="" Addr="w22.00" /> <DI_ITEM Index="33" Name="" /> <DI_ITEM Index="34" Name="DI_PN2_Pressure_Switch" Device="PGN2" Addr="w22.02" Note="Gas Box" /> <DI_ITEM Index="35" Name="DI_MFC1_Pressure_Switch" Device="PG1" Addr="w22.03" Note="Gas Box" /> <DI_ITEM Index="36" Name="DI_MFC2_Pressure_Switch" Device="PG2" Addr="w22.04" Note="Gas Box" /> <DI_ITEM Index="37" Name="DI_MFC3_Pressure_Switch" Device="PG3" Addr="w22.05" Note="Gas Box" /> <DI_ITEM Index="38" Name="DI_MFC4_Pressure_Switch" Device="PG4" Addr="w22.06" Note="Gas Box" /> <DI_ITEM Index="39" Name="DI_MFC5_Pressure_Switch" Device="PG5" Addr="w22.07" Note="Gas Box" /> <DI_ITEM Index="40" Name="DI_MFC6_Pressure_Switch" Device="PG6" Addr="w22.08" Note="Gas Box" /> <DI_ITEM Index="41" Name="DI_MFC7_Pressure_Switch" Device="PG7" Addr="w22.09" Note="Gas Box" /> <DI_ITEM Index="42" Name="DI_MFC8_Pressure_Switch" Device="PG8" Addr="w22.10" Note="Gas Box" /> <DI_ITEM Index="43" Name="DI_N2_Purge_Pressure_Switch" Device="N2_P" Addr="w22.11" Note="Gas Box" /> <DI_ITEM Index="44" Name="" Device="VG_He" Addr="" Note="ESC配置" /> <DI_ITEM Index="45" Name="" /> <DI_ITEM Index="46" Name="" /> <DI_ITEM Index="47" Name="" /> <DI_ITEM Index="48" Name="" /> <DI_ITEM Index="49" Name="" /> <DI_ITEM Index="50" Name="" /> <DI_ITEM Index="51" Name="DI_Gas_Box_Door_Switch" Device="" Addr="w23.03" /> <DI_ITEM Index="52" Name="DI_Gas_Box_Pressure_Switch" Device="" Addr="w23.04" /> <DI_ITEM Index="53" Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" /> <DI_ITEM Index="54" Name="DI_Source_RF_Water_Flow_Switch" Device="" Addr="w23.06" /> <DI_ITEM Index="55" Name="DI_Spare_Water_Flow_Switch" Device="" Addr="w23.07"/> <DI_ITEM Index="56" Name="DI_P_Valve_TC_Deviation_out_of_range" Device="" Addr="w23.08" /> <DI_ITEM Index="57" Name="DI_P_Valve_Control_TC_Broken_Alarm" Device="" Addr="w23.09" /> <DI_ITEM Index="58" Name="DI_P_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w23.10" /> <DI_ITEM Index="59" Name="DI_P_Valve_Heater_On_FB" Device="" Addr="w23.11" /> <DI_ITEM Index="60" Name="" /> <DI_ITEM Index="61" Name="" Device="" Addr="" /> <DI_ITEM Index="62" Name="DI_Gas_Line_Control_TC_Broken_Alarm" Device="" Addr="w23.14" /> <DI_ITEM Index="63" Name="" Device="" Addr="" /> <DI_ITEM Index="64" Name="DI_Gas_Line_Heater_On_FB" Device="" Addr="w24.00" /> <DI_ITEM Index="65" Name="" Device="" Addr="" /> <DI_ITEM Index="66" Name="DI_S_Valve_OT_Switch_Alarm" Device="" Addr="w24.02" /> <DI_ITEM Index="67" Name="" Device="" Addr="" /> <DI_ITEM Index="68" Name="" /> <DI_ITEM Index="69" Name="DI_Space_Heater_Ctrl_TC_Broken_Alarm" Device="" Addr="w24.05"/> <DI_ITEM Index="70" Name="DI_Space_Heater_Heat_On" Device="" Addr="w24.06" /> <DI_ITEM Index="71" Name="DI_Space_Heater_Over_Temp" Device="" Addr="w24.07" /> <DI_ITEM Index="72" Name="DI_Lid_Up_Button" Device="" Addr="w24.08" /> <DI_ITEM Index="73" Name="DI_Lid_Down_Button" Device="" Addr="w24.09" /> <DI_ITEM Index="74" Name="DI_Lid_Up_Limit_Pos_SW" Device="" Addr="w24.10" /> <DI_ITEM Index="75" Name="DI_Lid_Down_Limit_Pos_SW" Device="" Addr="w24.11" /> <DI_ITEM Index="76" Name="DI_Arm_Not_Extend_to_PM" Device="" Addr="w24.12" /> <DI_ITEM Index="77" Name="DI_TM_Safety_Door_Colse" Device="" Addr="w24.13" /> <DI_ITEM Index="78" Name="" Device="" Addr="" /> <DI_ITEM Index="79" Name="" Device="" Addr="" /> <DI_ITEM Index="80" Name="DI_Top_Plate_Coolant_Flow_SW" Device="" Addr="w25.00" /> <DI_ITEM Index="81" Name="" /> <DI_ITEM Index="82" Name="DI_Lid_Rotate_Lock_SW" Device="" Addr="w25.02"/> <DI_ITEM Index="83" Name="DI_Lid_Servo_Alarm" Device="" Addr="w25.03" /> <DI_ITEM Index="84" Name="DI_MFC1_Fault_Exist" Device="PG1" Addr="w25.04" Note="Gas Box" /> <DI_ITEM Index="85" Name="DI_MFC2_Fault_Exist" Device="PG2" Addr="w25.05" Note="Gas Box" /> <DI_ITEM Index="86" Name="DI_MFC3_Fault_Exist" Device="PG3" Addr="w25.06" Note="Gas Box" /> <DI_ITEM Index="87" Name="DI_MFC4_Fault_Exist" Device="PG4" Addr="w25.07" Note="Gas Box" /> <DI_ITEM Index="88" Name="DI_MFC5_Fault_Exist" Device="PG5" Addr="w25.08" Note="Gas Box" /> <DI_ITEM Index="89" Name="DI_MFC6_Fault_Exist" Device="PG6" Addr="w25.09" Note="Gas Box" /> <DI_ITEM Index="90" Name="DI_MFC7_Fault_Exist" Device="PG7" Addr="w25.10" Note="Gas Box" /> <DI_ITEM Index="91" Name="DI_MFC8_Fault_Exist" Device="PG8" Addr="w25.11" Note="Gas Box" /> <DI_ITEM Index="92" Name="" Device="" Addr="" /> <DI_ITEM Index="93" Name="" /> <DI_ITEM Index="94" Name="" /> <DI_ITEM Index="95" Name="" /> <DI_ITEM Index="96" Name="DI_Lift_Servo_Alarm" Device="" Addr="w26.00" /> <DI_ITEM Index="97" Name="DI_Lift_Up_Limit_Pos_SW" Device="" Addr="w26.01" /> <DI_ITEM Index="98" Name="DI_Lift_Down_Limit_Pos_SW" Device="" Addr="w26.02" /> <DI_ITEM Index="99" Name="DI_Lift_Servo_ORG_Pos_SW" Device="" Addr="w26.03" /> <DI_ITEM Index="100" Name="DI_Lift_Servo_with_origin" Device="" Addr="w26.04" /> <DI_ITEM Index="101" Name="DI_Lift_Servo_servo_on" Device="" Addr="w26.05" /> <DI_ITEM Index="102" Name="DI_Lift_Servo_alarm" Device="" Addr="w26.06" /> <DI_ITEM Index="103" Name="DI_Lift_Servo_ORG_fail_alarm" Device="" Addr="w26.07" /> <DI_ITEM Index="104" Name="DI_Lift_Servo_ABS_fail_alarm" Device="" Addr="w26.08" /> <DI_ITEM Index="105" Name="DI_Lift_Servo_Over_software_Limit_alarm" Device="" Addr="w26.09" /> <DI_ITEM Index="106" Name="DI_Lift_Servo_Go_Position1_Complete" Device="" Addr="w26.10" /> <DI_ITEM Index="107" Name="DI_Lift_Servo_Go_Position2_Complete" Device="" Addr="w26.11" /> <DI_ITEM Index="108" Name="DI_Lift_Servo_Go_Position3_Complete" Device="" Addr="w26.12" /> <DI_ITEM Index="109" Name="DI_Lift_Servo_Go_Position4_Complete" Device="" Addr="w26.13" /> <DI_ITEM Index="110" Name="DI_Lift_Servo_Go_Position5_Complete" Device="" Addr="w26.14" /> <DI_ITEM Index="111" Name="" /> </Dig_In> <Dig_Out> <DO_ITEM Index="0" Name="DO_PVN21" Device="GPVN21" Addr="w0.00" Note="Gas Box" /> <DO_ITEM Index="1" Name="DO_PVN22" Device="GPVN22" Addr="w0.01" Note="Gas Box" /> <DO_ITEM Index="2" Name="DO_PV11" Device="GPV11" Addr="w0.02" Note="Gas Box" /> <DO_ITEM Index="3" Name="DO_PV12" Device="GPV12" Addr="w0.03" Note="Gas Box" /> <DO_ITEM Index="4" Name="DO_PV21" Device="GPV21" Addr="w0.04" Note="Gas Box" /> <DO_ITEM Index="5" Name="DO_PV22" Device="GPV22" Addr="w0.05" Note="Gas Box" /> <DO_ITEM Index="6" Name="DO_PV31" Device="GPV31" Addr="w0.06" Note="Gas Box" /> <DO_ITEM Index="7" Name="DO_PV32" Device="GPV32" Addr="w0.07" Note="Gas Box" /> <DO_ITEM Index="8" Name="DO_PV41" Device="GPV41" Addr="w0.08" Note="Gas Box" /> <DO_ITEM Index="9" Name="DO_PV42" Device="GPV42" Addr="w0.09" Note="Gas Box" /> <DO_ITEM Index="10" Name="DO_N2_Valve" Device="GPVN2" Addr="w0.10" Note="Gas Box" /> <DO_ITEM Index="11" Name="DO_MFC1_Valve" Device="GPV1" Addr="w0.11" Note="Gas Box" /> <DO_ITEM Index="12" Name="DO_MFC2_Valve" Device="GPV2" Addr="w0.12" Note="Gas Box" /> <DO_ITEM Index="13" Name="DO_MFC3_Valve" Device="GPV3" Addr="w0.13" Note="Gas Box" /> <DO_ITEM Index="14" Name="DO_MFC4_Valve" Device="GPV4" Addr="w0.14" Note="Gas Box" /> <DO_ITEM Index="15" Name="DO_MFC5_Valve" Device="GPV5" Addr="w0.15" Note="Gas Box" /> <DO_ITEM Index="16" Name="DO_MFC6_Valve" Device="GPV6" Addr="w1.00" Note="Gas Box" /> <DO_ITEM Index="17" Name="DO_MFC7_Valve" Device="GPV7" Addr="w1.01" Note="Gas Box" /> <DO_ITEM Index="18" Name="DO_MFC8_Valve" Device="GPV8" Addr="w1.02" Note="Gas Box" /> <DO_ITEM Index="19" Name="DO_N2_Purge1_Valve" Device="N2_Purge" Addr="w1.03" Note="Gas Box" /> <DO_ITEM Index="20" Name="DO_N2_Purge2_Valve" Device="N2_Purge" Addr="w1.04" Note="Gas Box" /> <DO_ITEM Index="21" Name="DO_Gas_Final_Valve" Device="PV1" Addr="w1.05" /> <DO_ITEM Index="22" Name="DO_Soft_Pumping_Valve" Device="PV2" Addr="w1.06" /> <DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" /> <DO_ITEM Index="24" Name="DO_Slit_Door_Open" Device="PV4" Addr="w1.08" /> <DO_ITEM Index="25" Name="DO_Slit_Door_Close" Device="PV4" Addr="w1.09" /> <DO_ITEM Index="26" Name="" /> <DO_ITEM Index="27" Name="" /> <DO_ITEM Index="28" Name="DO_Purge_Valve" Device="" Addr="w1.12"/> <DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" /> <DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" /> <DO_ITEM Index="31" Name="DO_Gauge_Valve" Device="PV8" Addr="w1.15" /> <DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" /> <DO_ITEM Index="33" Name="" Device="" Addr="" /> <DO_ITEM Index="34" Name="" Device="" Addr="" /> <DO_ITEM Index="35" Name="DO_CHB_M-HT_Heater_On" Device="" Addr="w2.03" /> <DO_ITEM Index="36" Name="" /> <DO_ITEM Index="37" Name="" /> <DO_ITEM Index="38" Name="" /> <DO_ITEM Index="39" Name="" /> <DO_ITEM Index="40" Name="" /> <DO_ITEM Index="41" Name="" /> <DO_ITEM Index="42" Name="" /> <DO_ITEM Index="43" Name="" /> <DO_ITEM Index="44" Name="" /> <DO_ITEM Index="45" Name="" /> <DO_ITEM Index="46" Name="DO_P_Valve_Heater_On" Device="" Addr="w2.14" /> <DO_ITEM Index="47" Name="DO_Gas_Line_Heater_On" Device="" Addr="w2.15" /> <DO_ITEM Index="48" Name="" /> <DO_ITEM Index="49" Name="" /> <DO_ITEM Index="50" Name="DO_Lid_Up" Device="" Addr="w3.02" /> <DO_ITEM Index="51" Name="DO_Lid_Down" Device="" Addr="w3.03" /> <DO_ITEM Index="52" Name="" /> <DO_ITEM Index="53" Name="" /> <DO_ITEM Index="54" Name="" /> <DO_ITEM Index="55" Name="" /> <DO_ITEM Index="56" Name="" /> <DO_ITEM Index="57" Name="" /> <DO_ITEM Index="58" Name="DO_Lift_Servo_Go_Position1" Device="去位置1" Addr="w3.10" /> <DO_ITEM Index="59" Name="DO_Lift_Servo_Go_Position2" Device="去位置2" Addr="w3.11" /> <DO_ITEM Index="60" Name="DO_Lift_Servo_Go_Position3" Device="去位置3" Addr="w3.12" /> <DO_ITEM Index="61" Name="DO_Lift_Servo_Origin" Device="找原点" Addr="w3.13" /> <DO_ITEM Index="62" Name="DO_Lift_Servo_Enable" Device="使能" Addr="w3.14" /> <DO_ITEM Index="63" Name="DO_Lift_Servo_Manual_UP" Device="手动上升" Addr="w3.15" /> <DO_ITEM Index="64" Name="DO_Lift_Servo_Manual_DOWN" Device="手动下降" Addr="w4.00" /> <DO_ITEM Index="65" Name="DO_Lift_Servo_Go_Position4" Device="去位置4" Addr="w4.01"/> <DO_ITEM Index="66" Name="DO_Lift_Servo_Go_Position5" Device="去位置5" Addr="w4.02" /> <DO_ITEM Index="67" Name="DO_Lift_Servo_Estop" Device="停止" Addr="w4.03"/> <DO_ITEM Index="68" Name="" /> <DO_ITEM Index="69" Name="" /> <DO_ITEM Index="70" Name="" /> <DO_ITEM Index="71" Name="" /> <DO_ITEM Index="72" Name="" /> <DO_ITEM Index="73" Name="" /> <DO_ITEM Index="74" Name="" /> <DO_ITEM Index="75" Name="" /> <DO_ITEM Index="76" Name="" /> <DO_ITEM Index="77" Name="" /> <DO_ITEM Index="78" Name="" /> <DO_ITEM Index="79" Name="" /> <DO_ITEM Index="80" Name="DO_Lid_Servo_MATC_Mode" Device="维修模式" Addr="w5.00"/> <DO_ITEM Index="81" Name="" /> <DO_ITEM Index="82" Name="" /> <DO_ITEM Index="83" Name="" /> <DO_ITEM Index="84" Name="" /> <DO_ITEM Index="85" Name="" /> <DO_ITEM Index="86" Name="" /> <DO_ITEM Index="87" Name="" /> <DO_ITEM Index="88" Name="" /> <DO_ITEM Index="89" Name="" /> <DO_ITEM Index="90" Name="" /> <DO_ITEM Index="91" Name="" /> <DO_ITEM Index="92" Name="" /> <DO_ITEM Index="93" Name="" /> <DO_ITEM Index="94" Name="" /> <DO_ITEM Index="95" Name="" /> <DO_ITEM Index="96" Name="" /> <DO_ITEM Index="97" Name="" /> <DO_ITEM Index="98" Name="" /> <DO_ITEM Index="99" Name="" /> <DO_ITEM Index="100" Name="" /> <DO_ITEM Index="101" Name="" /> <DO_ITEM Index="102" Name="" /> <DO_ITEM Index="103" Name="" /> <DO_ITEM Index="104" Name="" /> <DO_ITEM Index="105" Name="" /> <DO_ITEM Index="106" Name="" /> <DO_ITEM Index="107" Name="" /> <DO_ITEM Index="108" Name="" /> <DO_ITEM Index="109" Name="" /> <DO_ITEM Index="110" Name="" /> <DO_ITEM Index="111" Name="" /> </Dig_Out> <Ana_Out> <AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="MFC" /> <AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint" BufferOffset="2" Device="" Addr="d1002" Note="MFC" /> <AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint" BufferOffset="4" Device="" Addr="d1004" Note="MFC" /> <AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint" BufferOffset="6" Device="" Addr="d1006" Note="MFC" /> <AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1008" Note="MFC" /> <AO_ITEM Index="5" Name="AO_MFC6_Flow_Setpoint" BufferOffset="10" Device="" Addr="d1010" Note="MFC" /> <AO_ITEM Index="6" Name="AO_MFC7_Flow_Setpoint" BufferOffset="12" Device="" Addr="d1012" Note="MFC" /> <AO_ITEM Index="7" Name="AO_MFC8_Flow_Setpoint" BufferOffset="14" Device="" Addr="d1014" Note="MFC" /> <AO_ITEM Index="8" Name="" Device="" Addr="" Note="MFC" /> <AO_ITEM Index="9" Name="AO_Turbo_Pump_N2_Flow_Setpoint" BufferOffset="18" Device="" Addr="d1018" Note="MFC" /> <AO_ITEM Index="10" Name="" BufferOffset="20" Device="" Addr="" Note="" /> <AO_ITEM Index="11" Name="" BufferOffset="22" Device="" Addr="" /> <AO_ITEM Index="12" Name="" Device="" Addr="" Note="前级管道设定温度" /> <AO_ITEM Index="13" Name="" Device="" Addr="" Note="Temp Limit" /> <AO_ITEM Index="14" Name="AO_CHB_M-HT_Temperature_Setpoint" BufferOffset="28" Device="" Addr="d1028" Note="H-HT设定温度" /> <AO_ITEM Index="15" Name="AO_CHB_M-HT_Temp_Limit_Setpoint" BufferOffset="30" Device="" Addr="d1030" Note="H-HT极限温度设定" /> <AO_ITEM Index="16" Name="AO_Heartbeat" Device="" BufferOffset="32" Addr="d1032" Note="PC to PLC" /> <AO_ITEM Index="17" Name="" Device="" Addr="" Note="ESC配置" /> <AO_ITEM Index="18" Name="" Device="" Addr="" /> <AO_ITEM Index="19" Name="AO_P_Valve_Temperature_Setpoint" BufferOffset="38" Device="" Addr="d1038" Note="钟摆阀门加热设定温度" /> <AO_ITEM Index="20" Name="AO_P_Valve_Temp_Limit_Setpoint" BufferOffset="40" Device="" Addr="d1040" Note="钟摆阀门Temp Limit" /> <AO_ITEM Index="21" Name="" BufferOffset="42" Device="" Addr="" Note="" /> <AO_ITEM Index="22" Name="" BufferOffset="44" Device="" Addr="" Note="" /> <AO_ITEM Index="23" Name="" /> <AO_ITEM Index="24" Name="" /> <AO_ITEM Index="25" Name="AO_Space_Heater_Heat_Temp_Setpoint" BufferOffset="50" Device="" Addr="d1050" Note="" /> <AO_ITEM Index="26" Name="AO_Space_Heater_Temp_High_Limit_Setpoint" BufferOffset="52" Device="" Addr="d1052" Note="" /> <AO_ITEM Index="27" Name="" /> <AO_ITEM Index="28" Name="" /> <AO_ITEM Index="29" Name="AO_CHB_H-HT_Power_Distribute_Percent" BufferOffset="58" Device="" Addr="d1058" /> <AO_ITEM Index="30" Name="" /> <AO_ITEM Index="31" Name="" /> <AO_ITEM Index="32" Name="" /> <AO_ITEM Index="33" Name="" /> <AO_ITEM Index="34" Name="AO_Lift_Servo_Position1" BufferOffset="68" Device="" Addr="d1068"/> <AO_ITEM Index="35" Name="AO_Lift_Servo_Position2" BufferOffset="70" Device="" Addr="d1070"/> <AO_ITEM Index="36" Name="AO_Lift_Servo_Position3" BufferOffset="72" Device="" Addr="d1072"/> <AO_ITEM Index="37" Name="AO_Lift_Servo_Position4" BufferOffset="74" Device="" Addr="d1074"/> <AO_ITEM Index="38" Name="AO_Lift_Servo_Position5" BufferOffset="76" Device="" Addr="d1076"/> <AO_ITEM Index="39" Name="AO_Origin_Search_High_Speed" BufferOffset="78" Device="" Addr="d1078"/> <AO_ITEM Index="40" Name="AO_Origin_Search_Low_Speed" BufferOffset="80" Device="" Addr="d1080"/> <AO_ITEM Index="41" Name="AO_Abs_Move_Speed" BufferOffset="82" Device="" Addr="d1082"/> <AO_ITEM Index="42" Name="AO_Max_Move_Speed" BufferOffset="84" Device="" Addr="d1084" /> <AO_ITEM Index="43" Name="AO_Soft_Down_Limit" BufferOffset="86" Device="" Addr="d1086" /> <AO_ITEM Index="44" Name="AO_Soft_Up_Limit" BufferOffset="88" Device="" Addr="d1088" /> <AO_ITEM Index="45" Name="" /> <AO_ITEM Index="46" Name="" /> <AO_ITEM Index="47" Name="" /> <AO_ITEM Index="48" Name="" /> <AO_ITEM Index="49" Name="" /> </Ana_Out> <Ana_In> <AI_ITEM Index="0" Name="AI_Chamber_Pressure_10t" BufferOffset="0" Device="" Addr="d2000" Note="float" /> <AI_ITEM Index="1" Name="AI_Process_Pressure_2t" Device="" BufferOffset="2" Addr="d2002" Note="float" /> <AI_ITEM Index="2" Name="AI_Foreline_Pressure_10t" Device="" BufferOffset="4" Addr="d2004" Note="float" /> <AI_ITEM Index="3" Name="" Device="" Addr="" Note="float" /> <AI_ITEM Index="4" Name="AI_MFC1_Flow" BufferOffset="8" Device="" Addr="d2008" Note="float" /> <AI_ITEM Index="5" Name="AI_MFC2_Flow" BufferOffset="10" Device="" Addr="d2010" Note="float" /> <AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="float" /> <AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="float" /> <AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="float" /> <AI_ITEM Index="9" Name="AI_MFC6_Flow" BufferOffset="18" Device="" Addr="d2018" Note="float" /> <AI_ITEM Index="10" Name="AI_MFC7_Flow" BufferOffset="20" Device="" Addr="d2020" Note="float" /> <AI_ITEM Index="11" Name="AI_MFC8_Flow" BufferOffset="22" Device="" Addr="d2022" Note="float" /> <AI_ITEM Index="12" Name="" BufferOffset="24" Device="" Addr="" Note="float" /> <AI_ITEM Index="13" Name="AI_Turbo_Pump_N2_Flow" BufferOffset="26" Device="" Addr="d2026" Note="float" /> <AI_ITEM Index="14" Name="" BufferOffset="28" Device="" Addr="d2028" Note="float" /> <AI_ITEM Index="15" Name="AI_Penning_Gauge_Pressure1" BufferOffset="30" Device="" Addr="d2030" Note="float"/> <AI_ITEM Index="16" Name="AI_Penning_Gauge_Pressure2" BufferOffset="32" Device="" Addr="d2032" Note="float" /> <AI_ITEM Index="17" Name="" /> <AI_ITEM Index="18" Name="AI_CHB_M-HT_Control_TC_Temp" BufferOffset="36" Device="" Addr="d2036" Note="float" /> <AI_ITEM Index="19" Name="" /> <AI_ITEM Index="20" Name="AI_Spare_Heater_Control_TC_Temp" /> <AI_ITEM Index="21" Name="" /> <AI_ITEM Index="22" Name="AI_Heartbeat_FB" BufferOffset="44" Device="" Addr="d2044" Note="float" /> <AI_ITEM Index="23" Name="AI_Second" BufferOffset="46" Device="" Addr="d2046" Note="float" /> <AI_ITEM Index="24" Name="AI_Minute" BufferOffset="48" Device="" Addr="d2048" Note="float" /> <AI_ITEM Index="25" Name="AI_Time" BufferOffset="50" Device="" Addr="d2050" Note="float" /> <AI_ITEM Index="26" Name="AI_Day" BufferOffset="52" Device="" Addr="d2052" Note="float" /> <AI_ITEM Index="27" Name="AI_Month" BufferOffset="54" Device="" Addr="d2054" Note="float" /> <AI_ITEM Index="28" Name="AI_Year" BufferOffset="56" Device="" Addr="d2056" Note="float" /> <AI_ITEM Index="29" Name="" /> <AI_ITEM Index="30" Name="" /> <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" BufferOffset="62" Device="" Addr="d2062" Note="float" /> <AI_ITEM Index="32" Name="AI_P_Valve_Control_TC_Temp" BufferOffset="64" Device="" Addr="d2064" Note="float" /> <AI_ITEM Index="33" Name="AI_Gas_Line_Control_TC_Temp" BufferOffset="66" Device="" Addr="d2066" Note="float" /> <AI_ITEM Index="34" Name="" /> <AI_ITEM Index="35" Name="AI_Lift_Servo_Current_Posi_Mm" BufferOffset="70" Device="" Addr="d2070" Note="float" /> <AI_ITEM Index="36" Name="" /> <AI_ITEM Index="37" Name="" /> <AI_ITEM Index="38" Name="" /> <AI_ITEM Index="39" Name="" Device="" Addr="" Note="float" /> <AI_ITEM Index="40" Name="" Device="" Addr="" Note="float" /> <AI_ITEM Index="41" Name="" Device="" Addr="" Note="float" /> <AI_ITEM Index="42" Name="" /> <AI_ITEM Index="43" Name="" Device="" Addr="" Note="float" /> <AI_ITEM Index="44" Name="" Device="" Addr="" Note="float" /> <AI_ITEM Index="45" Name="" Device="" Addr="" Note="float" /> <AI_ITEM Index="46" Name="" /> <AI_ITEM Index="47" Name="" /> <AI_ITEM Index="48" Name="" /> <AI_ITEM Index="49" Name="" /> <AI_ITEM Index="50" Name="" /> <AI_ITEM Index="51" Name="" /> <AI_ITEM Index="52" Name="" /> </Ana_In> </IO_DEFINE>