using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.WaferHolder;
using System;
using MECF.Framework.Common.ToolLayout;
using MECF.Framework.Common.Persistent.Reservoirs;
using Aitex.Core.RT.OperationCenter;
using MECF.Framework.Common.RecipeCenter;
using Aitex.Core.RT.RecipeCenter;
using MECF.Framework.Common.SubstrateTrackings;
using Aitex.Core.RT.Device;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.ProcessCell;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Alarm;
using CyberX8_Core;
using CyberX8_RT.Devices.Metal;
using CyberX8_RT.Devices.Reservoir;
using CyberX8_RT.Modules.Metal;
using CyberX8_RT.Modules.Reservoir;
using CyberX8_RT.Modules;
using CyberX8_RT.Modules.EFEM;
using static Mono.Security.X509.X520;
namespace CyberX8_RT.Modules.Metal
{
public class MetalEntity : Entity, IEntity, IModuleEntity
{
#region 常量
private const string STRATUS = "Stratus";
private const string AUTO = "Auto";
private const string MANUAL = "Manual";
private const string DISABLED = "Disabled";
private const string ENGINEERING = "Engineering";
private const string PRODUCTION = "Production";
#endregion
#region 内部变量
///
/// 已经完成的Cycle次数
///
private int _achievedCycle = 0;
///
/// Metal项
///
private MetalItem _metalItem;
///
/// 持久化对象
///
private MetalPersistentValue _persistentValue;
///
/// c&m Initialize routine
///
private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
///
/// C&M Runrecipe routine
///
private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
///
/// S&H Initialize Routine
///
private StandardHotInitializeRoutine _standardHotInitializeRoutine;
///
/// S&H RunRecipe Routine
///
private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
///
/// Current short test routine
///
private CurrentShortTestRoutine _currentShortTestRoutine;
///
/// 当前Recipe
///
private DepRecipe _currentRecipe = null;
///
/// recipe时间
///
private int _recipeTime;
///
/// 循环次数
///
private int _cycle = 0;
///
/// 运行Recipe面
///
private string _recipeSide = "";
///
/// 当前RunRecipe Routine
///
private RoutineBase _currentRunRecipeRoutine;
///
/// Runrecipe已经运行的时间
///
private int _runrecipeElapsedTime = 0;
///
/// run recipe start time
///
private DateTime _runRecipeStartTime;
///
/// run recipe complete time
///
private DateTime _runRecipeCompleteTime;
///
/// 所在reservoir
///
private StandardHotReservoirDevice _reservoirDevice;
///
/// 所在reservoir名字
///
private string _reservoirName;
///
/// 当前完成recipe次数
///
private int _currentCycleTimes;
#endregion
#region 属性
///
/// 模块名称
///
public ModuleName Module { get; private set; }
///
/// 初始化状态
///
public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
///
/// 空闲状态
///
public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
///
/// 是否发生错误
///
public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
///
/// 是否正在作业
///
public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
///
/// 是否初始化完成
///
public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
///
/// 是否禁用
///
public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
///
/// 自动模式
///
public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
///
/// 自动模式
///
public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
///
/// 是否为工程模式
///
public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
///
/// 是否为产品模式
///
public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
///
/// WaferHolder信息
///
public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
///
/// 已完成的RunRecipeCycle次数
///
public int AchievedCycle { get { return _achievedCycle; } }
///
/// 当前状态机状态
///
public int State { get { return fsm.State; } }
///
/// 当前Metal设置的WaferSize
///
public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
///
/// recipe时长
///
public int RecipeTime { get { return _recipeTime; } }
///
/// 剩余时间
///
public override int TimeToReady
{
get
{
if (IsIdle)
{
return 0;
}
switch (fsm.State)
{
case (int)MetalState.RunReciping:
return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
default:
return 0;
}
}
}
///
/// 用量
///
public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
#endregion
///
/// 构造函数
///
///
public MetalEntity(ModuleName moduleName)
{
this.Module = moduleName;
WaferManager.Instance.SubscribeLocation(Module, 2);
InitialFsm();
}
///
/// 初始化
///
///
protected override bool Init()
{
InitializeDATA();
InitializeParameter();
InitializeRoutine();
InitializeOperation();
return true;
}
///
/// 初始化参数
///
private void InitializeParameter()
{
_persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
if (_persistentValue == null)
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
}
_metalItem = MetalItemManager.Instance.GetMetalItem(Module.ToString());
_reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
_reservoirDevice = DEVICE.GetDevice($"{_reservoirName}");
}
///
/// 初始化Routine
///
private void InitializeRoutine()
{
_compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
_standardHotInitializeRoutine = new StandardHotInitializeRoutine(Module.ToString());
_compactEmbranceRunRecipeRoutine = new CompactEmbranceRunRecipeRoutine(Module.ToString());
_standardHotRunRecipeRoutine = new StandardHotRunRecipeRoutine(Module.ToString());
_currentShortTestRoutine = new CurrentShortTestRoutine(Module.ToString());
}
///
/// 初始化操作
///
private void InitializeOperation()
{
OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
{
DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe(args[0].ToString());
if (recipe == null)
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
return false;
}
object[] objects = new object[args.Length];
objects[0] = recipe;
for (int i = 1; i < args.Length; i++)
{
objects[i] = args[i];
}
return CheckToPostMessage(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe, objects);
});
OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
}
///
/// EnterInit
///
public void EnterInit()
{
if ((MetalState)fsm.State != MetalState.Idle) return;
else
{
CheckToPostMessage(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
}
}
/// 初始化状态机
///
private void InitialFsm()
{
fsm = new StateMachine(Module.ToString(), (int)MetalState.Init, 20);
fsm.EnableRepeatedMsg(true);
AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
//Initialize
AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
Transition(MetalState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, MetalState.Initialized);
//直接进入Idle
Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
//RunRecipe
Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
//Current Short Test
Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
//Enter Init
Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
EnumLoop.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
EnumLoop.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
}
///
/// 初始化DATA
///
private void InitializeDATA()
{
InitializeSVID();
DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.SubordinateReservoirName", () => _reservoirName, SubscriptionAttribute.FLAG.IgnoreSaveDB);
}
///
/// 初始化SVID
///
private void InitializeSVID()
{
DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId , SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.ModuleRecipe", () => _currentRecipe?.Ppid, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.SequenceRecipe", () =>WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeAUsage", () => MetalUsage != null ? MetalUsage.AnodeAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.MembranceAUsage", () => MetalUsage != null ? MetalUsage.MembranceAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue($"Metal.{Module}.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue($"Metal.{Module}.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeAWafers", () => MetalUsage != null ? MetalUsage.AnodeAWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue($"Metal.{Module}.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue($"Metal.{Module}.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue($"Metal.{Module}.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue($"Metal.{Module}.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
}
///
/// 进入错误状态
///
///
///
private bool EnterError(object[] args)
{
if (State == (int)MetalState.RunReciping)
{
if (_metalItem.SubType == STRATUS)
{
_standardHotRunRecipeRoutine.Abort();
}
else
{
_compactEmbranceRunRecipeRoutine.Abort();
}
}
return true;
}
///
/// UpdateMetalUsageAction
///
///
///
///
private bool UpdateMetalUsageAction(string cmd, object[] args)
{
if (args.Length > 2)
{
MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
}
return true;
}
#region Initialize All
///
/// 初始化
///
///
///
private bool InitializeAll(object[] param)
{
if (fsm.State == (int)MetalState.Initializing)
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
return false;
}
if (!CheckReservoirInitialized())
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
return false;
}
if (!MetalUsageMointor(Module.ToString()))
{
return false;
}
if ("Auto".Equals(_persistentValue.OperatingMode))
{
if (!CheckReservoirIsAuto())
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
return false;
}
}
if (_metalItem.SubType == STRATUS)
{
return _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
}
else
{
return _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
}
}
///
/// 检验Reservoir是否Initialized
///
///
private bool CheckReservoirInitialized()
{
string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
ReservoirEntity reservoirEntity = Singleton.Instance.GetModule(reservoir);
if (reservoirEntity != null)
{
return reservoirEntity.IsInitialized;
}
return false;
}
///
/// 检验Reservoir是否Auto
///
///
private bool CheckReservoirIsAuto()
{
string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
{
return true;
}
return false;
}
///
/// 初始化监控
///
///
///
private bool InitializeAllMonitor(object[] param)
{
RState rsstate = RState.Running;
if (_metalItem.SubType == STRATUS)
{
rsstate = _standardHotInitializeRoutine.Monitor();
}
else
{
rsstate = _compactEmbranceInitializeRoutine.Monitor();
}
if (rsstate == RState.End)
{
return true;
}
else if (rsstate == RState.Failed || rsstate == RState.Timeout)
{
PostMsg(MetalMsg.Error);
return false;
}
return false;
}
#endregion
#region RunRecipe
///
/// Run Recipe
///
///
///
private bool RunRecipe(object[] param)
{
MetalUsageMointor(); //Metal run recipe前检查PMCounter消耗
string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
if (_metalItem.SubType == STRATUS)
{
StandardHotReservoirDevice resDevice = DEVICE.GetDevice(reservoirName);
resDevice.ReservoirUsageMonitor();
}
DepRecipe recipe = param[0] as DepRecipe;
_recipeSide = param[1].ToString();
_cycle = (int)param[2];
_runrecipeElapsedTime = 0;
bool result = false;
if (_metalItem.SubType == STRATUS)
{
_currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
result = _standardHotRunRecipeRoutine.Start(recipe, _recipeSide,_cycle) == RState.Running;
}
else
{
_currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
result = _compactEmbranceRunRecipeRoutine.Start(recipe, _recipeSide, _cycle) == RState.Running;
}
if (result)
{
if (WaferHolderInfo != null)
{
WaferHolderInfo.MetalModuleName = Module;
}
_recipeTime = (recipe.CalculateRecipeTotalTime())*_cycle;
_currentRecipe = recipe;
if (WaferHolderInfo != null && WaferHolderInfo.SchedulerModules != null && WaferHolderInfo.SchedulerModules.Count != 0)
{
LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
}
_runRecipeStartTime = DateTime.Now;
if (WaferHolderInfo != null && _currentRecipe != null)
{
FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
}
}
return result;
}
///
/// RunRecipe监控
///
///
///
private bool RunRecipeMonitor(object[] param)
{
RState rsstate = RState.Running;
if (_metalItem.SubType == STRATUS)
{
rsstate = _standardHotRunRecipeRoutine.Monitor();
if (rsstate == RState.Running)
{
StandardHotMetalDevice _standardHotMetalDevice = DEVICE.GetDevice(Module.ToString());
if (_standardHotMetalDevice.MetalDeviceData.CellFlow <= 0)
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
rsstate = RState.Failed;
}
}
_achievedCycle = _standardHotRunRecipeRoutine.GetCurrentCycle();
}
else
{
rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
if (rsstate == RState.Running)
{
CompactMembranMetalDevice _compactMembranMetalDevice = DEVICE.GetDevice(Module.ToString());
if (_compactMembranMetalDevice.MetalDeviceData.CellFlow <= 0)
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
rsstate = RState.Failed;
}
if (_compactMembranMetalDevice.ANACellFlow.CounterValue <= 0) //检查hold flow
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeA flow is 0");
rsstate = RState.Failed;
}
if (_compactMembranMetalDevice.ANBCellFlow.CounterValue <= 0)
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeB flow is 0");
rsstate = RState.Failed;
}
}
}
if (Singleton.Instance.IsAutoRunning && _runrecipeElapsedTime != TimeToReady)
{
_runrecipeElapsedTime = TimeToReady;
LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
}
if (rsstate == RState.End)
{
_recipeTime = 0;
if (WaferHolderInfo != null)
{
double anodeAUsage = GetAnodeAUsage();
double anodeBUsage = GetAnodeBUsage();
MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
MetalUsageMointor(); //检查PMCounter消耗
//CMM Usage
string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
if (_metalItem.SubType == STRATUS)
{
StandardHotReservoirDevice resDevice = DEVICE.GetDevice(reservoirName);
resDevice.ReservoirUsageMonitor();
resDevice.SetExportCMMUsage();
}
WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
}
_runrecipeElapsedTime = 0;
//记录LotTrack
_runRecipeCompleteTime = DateTime.Now;
int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
if (_metalItem.SubType == STRATUS)
{
_standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
_standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
}
else
{
_compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
_compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
}
if (WaferHolderInfo != null && _currentRecipe != null)
{
FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
}
return true;
}
else if (rsstate == RState.Failed || rsstate == RState.Timeout)
{
_recipeTime = 0;
if (WaferHolderInfo != null)
{
double anodeAUsage = GetAnodeAUsage();
double anodeBUsage = GetAnodeBUsage();
MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
MetalUsageMointor(); //失败了也要检查PMCounter消耗
//CMMUsage
string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
if (_metalItem.SubType == STRATUS)
{
StandardHotReservoirDevice resDevice = DEVICE.GetDevice(reservoirName);
resDevice.ReservoirUsageMonitor();
resDevice.SetExportCMMUsage();
}
}
_runrecipeElapsedTime = 0;
if (WaferHolderInfo != null && _currentRecipe != null)
{
WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
}
PostMsg(MetalMsg.Error);
//记录LotTrack
_runRecipeCompleteTime = DateTime.Now;
if (_metalItem.SubType == STRATUS)
{
_standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
_standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
}
else
{
_compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
_compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
}
if (WaferHolderInfo != null && _currentRecipe != null)
{
FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
}
return false;
}
return false;
}
///
/// 监控 PM Counter Metal用量
///
private void MetalUsageMointor()
{
MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module.ToString());
if (metalUsage != null)
{
//TotalAUsage
if (metalUsage.TotalUsage > SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.TotalUsage > SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.TotalUsage",
$"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.TotalUsage",
$"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
}
}
//AnodeAUsage
if (metalUsage.AnodeAUsage > SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.AnodeAUsage > SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeAUsage",
$"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeAUsage",
$"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
}
}
//AnodeBUsage
if (metalUsage.AnodeBUsage > SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.AnodeBUsage > SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeBUsage",
$"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeBUsage",
$"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
}
}
//MembraneAUsage
if (metalUsage.MembranceAUsage > SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.MembranceAUsage > SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.MembraneAUsage",
$"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.MembraneAUsage",
$"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
}
}
//MembraneBUsage
if (metalUsage.MembranceBUsage > SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.MembranceBUsage > SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.MembraneBUsage",
$"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.MembraneBUsage",
$"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
}
}
//TotalWafer
if (metalUsage.TotalWafers > SC.GetValue($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
{
if (metalUsage.TotalWafers > SC.GetValue($"Metal.{Module}.MetalTotalWafersFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.TotalWafers",
$"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.TotalWafers",
$"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
}
}
//AnodeAWafer
if (metalUsage.AnodeAWafers > SC.GetValue($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
{
if (metalUsage.AnodeAWafers > SC.GetValue($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeAWafers",
$"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeAWafers",
$"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
}
}
//AnodeBWafer
if (metalUsage.AnodeBWafers > SC.GetValue($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
{
if (metalUsage.AnodeBWafers > SC.GetValue($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeBWafers",
$"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeBWafers",
$"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
}
}
//AnodeAbathUsage
if (metalUsage.AnodeABathUsage > SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
{
if (metalUsage.AnodeABathUsage > SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeABathUsage",
$"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeABathUsage",
$"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
}
}
//AnodeBbathUsage
if (metalUsage.AnodeBBathUsage > SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
{
if (metalUsage.AnodeBBathUsage > SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
PostMsg(MetalMsg.Error);
AlarmListManager.Instance.AddDataError(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeBBathUsage",
$"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
AlarmListManager.Instance.AddWarn(Module.ToString(),
$"{Module.ToString()}.metalUsage.AnodeBBathUsage",
$"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
}
}
}
}
///
/// 获取A面使用的电量
///
///
private double GetAnodeAUsage()
{
if (_metalItem.SubType == STRATUS)
{
return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage, 3);
}
else
{
return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage, 3);
}
}
///
/// 获取B面使用的电量
///
///
private double GetAnodeBUsage()
{
if (_metalItem.SubType == STRATUS)
{
return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
}
else
{
return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
}
}
///
/// Abort Recipe
///
///
///
public bool AbortRecipe(object[] param)
{
_runRecipeCompleteTime = DateTime.Now;
if (_metalItem.SubType == STRATUS)
{
_standardHotRunRecipeRoutine.Abort();
_standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
_standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
}
else
{
_compactEmbranceRunRecipeRoutine.Abort();
_compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
_compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
}
return true;
}
#endregion
#region Current Short Test
///
/// Current Short Test
///
///
///
private bool CurrentShortTest(object[] param)
{
return _currentShortTestRoutine.Start() == RState.Running;
}
///
/// Current Short test监控
///
///
///
private bool CurrentShortTestMonitor(object[] param)
{
RState rsstate = _currentShortTestRoutine.Monitor();
if (rsstate == RState.End)
{
return true;
}
else if (rsstate == RState.Failed || rsstate == RState.Timeout)
{
PostMsg(MetalMsg.Error);
return false;
}
return false;
}
#endregion
#region Close Flow Valve
///
/// 关闭Flow Valve
///
///
///
private bool CloseFlowValve(object[] param)
{
if (_metalItem.SubType == STRATUS)
{
StandardHotMetalDevice device = DEVICE.GetDevice(Module.ToString());
if (device != null)
{
return device.SwitchToBypass("", null);
}
return false;
}
else
{
CompactMembranMetalDevice device = DEVICE.GetDevice(Module.ToString());
if (device != null)
{
string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice(reservoir);
if (reservoirDevice != null)
{
bool result = reservoirDevice.CAByPassOn("", null);
if (result)
{
return device.CellFlowValveOff("", null);
}
}
}
return false;
}
}
#endregion
#region Open Flow Valve
///
/// 打开Flow Valve
///
///
///
private bool OpenFlowValve(object[] param)
{
if (_metalItem.SubType == STRATUS)
{
StandardHotMetalDevice device = DEVICE.GetDevice(Module.ToString());
if (device != null)
{
bool result = device.SwitchToFlow("", null);
if (result)
{
return device.OpenPump("", null);
}
}
return false;
}
else
{
CompactMembranMetalDevice device = DEVICE.GetDevice(Module.ToString());
if (device != null)
{
string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice(reservoir);
if (reservoirDevice != null)
{
bool result = reservoirDevice.CAByPassOff("", null);
if (result)
{
return device.CellFlowValveOn("", null);
}
}
}
return false;
}
}
#endregion
public bool Check(int msg, out string reason, params object[] args)
{
reason = "";
return true;
}
public bool CheckAcked(int msg)
{
return true;
}
public int Invoke(string function, params object[] args)
{
switch (function)
{
case "HomeAll":
if (IsIdle)
{
return (int)FSM_MSG.NONE;
}
if (CheckToPostMessage(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
{
return (int)MetalMsg.Initialize;
}
else
{
return (int)FSM_MSG.NONE;
}
}
return (int)FSM_MSG.NONE;
}
///
/// 监控 PM Counter Metal用量
///
private bool MetalUsageMointor(string Module)
{
MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module);
if (metalUsage != null)
{
//TotalAUsage
if (metalUsage.TotalUsage > SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.TotalUsage > SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
return false;
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
}
}
//AnodeAUsage
if (metalUsage.AnodeAUsage > SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.AnodeAUsage > SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
return false;
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
}
}
//AnodeBUsage
if (metalUsage.AnodeBUsage > SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.AnodeBUsage > SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
return false;
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
}
}
//MembraneAUsage
if (metalUsage.MembranceAUsage > SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.MembranceAUsage > SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
return false;
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
}
}
//MembraneBUsage
if (metalUsage.MembranceBUsage > SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
{
if (metalUsage.MembranceBUsage > SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
}
}
//TotalWafer
if (metalUsage.TotalWafers > SC.GetValue($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
{
if (metalUsage.TotalWafers > SC.GetValue($"Metal.{Module}.MetalTotalWafersFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
return false;
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
}
}
//AnodeAWafer
if (metalUsage.AnodeAWafers > SC.GetValue($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
{
if (metalUsage.AnodeAWafers > SC.GetValue($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
return false;
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
}
}
//AnodeBWafer
if (metalUsage.AnodeBWafers > SC.GetValue($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
{
if (metalUsage.AnodeBWafers > SC.GetValue($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
return false;
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
}
}
//AnodeAbathUsage
if (metalUsage.AnodeABathUsage > SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
{
if (metalUsage.AnodeABathUsage > SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
return false;
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
}
}
//AnodeBbathUsage
if (metalUsage.AnodeBBathUsage > SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
{
if (metalUsage.AnodeBBathUsage > SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
{
LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
return false;
}
else
{
LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
}
}
}
return true;
}
}
public enum MetalMsg
{
NONE,
Error,
ResumeError,
Initialize,
Manual,
Auto,
CurrentShortTest,
CloseFlowValve,
OpenFlowValve,
RunRecipe,
Abort,
Init
}
}