using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using MECF.Framework.Common.CommonData.Loader;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Utilities;
using CyberX8_Core;
using CyberX8_RT.Devices.AXIS;
using CyberX8_RT.Devices.AXIS.CANOpen;
using CyberX8_RT.Modules.PUF;
using CyberX8_RT.Modules;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using CyberX8_RT.Modules.Transporter;
namespace CyberX8_RT.Devices.Loader
{
public class LoaderInstallCRSRoutine : RoutineBase, IRoutine
{
private enum InstallStep
{
DoorUnlock,
DoorUnlockCheck,
TiltGotoVertical,
TiltGotoVerticalCheck,
SwingGotoOpen,
SwingGotoOpenWait,
CRSGotoUnlock,
CRSGotoUnlockWait,
SwingGotoClose,
SwingGotoCloseWait,
DoorLockOn,
DoorLockOnCheck,
WSSideClampOn,
WSSideClampOnCheck,
WSClampOn,
BernoulliN2On,
BernoulliN2OnCheck,
BernoulliBladderOn,
BernoulliBladderOnCheck,
TransBladderOn,
TransBladderOnCheck,
TranslateHighOff,
TranslateHighOffCheck,
CRSVacuumOn,
CRSVacuumOnCheck,
WSBladderOn,
WSBladderOnCheck,
VacuumLevel,
VacuumLevelCheck,
CRSGotoLock,
CRSGotoLockWait,
CRSVacuumOff,
CRSVacuumOffCheck,
WSBladderOff,
WSBladderOffCheck,
VacuumOffLevel,
VacuumOffLevelCheck,
CRSSwitchOn,
CRSSwitchOnCheck,
TransBladderOff,
TransBladderOffCheck,
LastTranslateHighOff,
LastTranslateHighOffCheck,
BernoulliN2Off,
BernoulliN2OffCheck,
HomingCRSAxis,
HomingCRSAxisWait,
CRSHomedGotoSetUp,
CRSHomedGotoSetUpCheck,
End
}
#region 内部变量
private string _side = "";
private LoaderCommonWaferHolderSideClampRoutine _waferHolderSideClampRoutine;
private LoaderSideTransBladderRoutine _transBladderRoutine;
private JetAxisBase _crsAxis;
private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine;
private LoaderSideBernoulliN2PressureRoutine _bernoulliN2PressureRoutine;
private LoaderSideTransHighRoutine _transHightRoutine;
private LoaderSideVacuumRoutine _vacuumRoutine;
private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine;
private LoaderSideWhBladderRoutine _whBladderRoutine;
private LoaderSideUnloadVacuumLevelCheckRoutine _unloadVacuumLevelCheckRoutine;
private LoaderSideDoorLockRoutine _doorLockRoutine;
private JetAxisBase _shuttleAxis;
private JetAxisBase _tiltAxis;
private JetAxisBase _rotationAxis;
private LoaderCommonDevice _loaderCommonDevice;
private LoaderSideDevice _sideDevice;
#endregion
///
/// 构造函数
///
///
public LoaderInstallCRSRoutine(string module,string side) : base(module)
{
_side = side;
}
///
/// 中止
///
public void Abort()
{
Runner.Stop("Manual Abort");
}
///
/// 监控
///
///
public RState Monitor()
{
//1.0 Door UnLock
Runner.Run(InstallStep.DoorUnlock, () => { return _doorLockRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.DoorUnlockCheck, () => { return CommonFunction.CheckRoutineEndState(_doorLockRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_doorLockRoutine); })
//1.1 Tilt Goto Vertical
.Run(InstallStep.TiltGotoVertical, () => { return _tiltAxis.PositionStation("VERT",false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.TiltGotoVerticalCheck, () => { return _tiltAxis.Status == RState.End; }, () => { return _tiltAxis.Status == RState.Failed; })
//1.2 Swing Goto OPEN
.Run(InstallStep.SwingGotoOpen, () => { return _shuttleAxis.PositionStation("OPEN", false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.SwingGotoOpenWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
//1.3 CRS Goto Unlock
.Run(InstallStep.CRSGotoUnlock, () => { return _crsAxis.PositionStation("Unlock",false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.CRSGotoUnlockWait, () => { return _crsAxis.Status == RState.End; }, () => { return _crsAxis.Status == RState.Failed; })
//1.4 Swing Goto CLOSE
.Run(InstallStep.SwingGotoClose, () => { return _shuttleAxis.PositionStation("CLOSED", false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.SwingGotoCloseWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
//1.5 Door Lock On
.Run(InstallStep.DoorLockOn, () => { return _doorLockRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.DoorLockOnCheck, () => { return CommonFunction.CheckRoutineEndState(_doorLockRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_doorLockRoutine); })
//1.6 WSSideClampOn
.Run(InstallStep.WSSideClampOn, () => { return _waferHolderSideClampRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.WSSideClampOnCheck, () => { return CommonFunction.CheckRoutineEndState(_waferHolderSideClampRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_waferHolderSideClampRoutine); })
//1.7 WSClampOn
.Run(InstallStep.WSClampOn, () => { return _loaderCommonDevice.WaferHolderClampOnAction(); }, _delay_1ms)
//1.8 BernoulliN2 On
.Run(InstallStep.BernoulliN2On, () => { return _bernoulliN2PressureRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliN2PressureRoutine); })
//1.9 BernoulliBladderOn
.Run(InstallStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliBladderRoutine); })
//2.0 Trans Bladder On
.Run(InstallStep.TransBladderOn, () => { return _transBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.TransBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_transBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_transBladderRoutine); })
//2.0 Trans High Off
.Run(InstallStep.TranslateHighOff, () => { return _transHightRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.TranslateHighOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transHightRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_transHightRoutine); })
//2.1 CRS Vacuum On
.Run(InstallStep.CRSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.CRSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumRoutine); })
//2.2 WS Bladder On
.Run(InstallStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_whBladderRoutine); })
//2.3 CRS Vacuum Check
.Run(InstallStep.VacuumLevel, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.VacuumLevelCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumLevelCheckRoutine); })
//2.4 CRS Goto Lock
.Run(InstallStep.CRSGotoLock, () => { return _crsAxis.PositionStation("Lock", false,0, 0, 0, false); }, NullFun, _delay_1ms)
.WaitWithStopCondition(InstallStep.CRSGotoLockWait, () => { return _crsAxis.Status == RState.End; }, () => { return _crsAxis.Status == RState.Failed; })
//2.5 CRS Vacuum Off
.Run(InstallStep.CRSVacuumOff, () => { return _vacuumRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.CRSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumRoutine); })
//2.6 WS Bladder Off
.Run(InstallStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_whBladderRoutine); })
//2.7 CRS Vacuum Check
.Run(InstallStep.VacuumOffLevel, () => { return _vacuumLevelCheckRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.VacuumOffLevelCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumLevelCheckRoutine); })
//2.8 CRS Switch On
.Run(InstallStep.CRSSwitchOn, () => { _crsAxis.SwitchOn(); return true; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.CRSSwitchOnCheck, () => { return _crsAxis.Status == RState.End; }, () => { return _crsAxis.Status == RState.Failed; })
//2.9 Trans Bladder Off
.Run(InstallStep.TransBladderOff, () => { return _transBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.TransBladderOff, () => { return CommonFunction.CheckRoutineEndState(_transBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_transBladderRoutine); })
//2.9 Trans High Off
.Run(InstallStep.LastTranslateHighOff, () => { return _transHightRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.LastTranslateHighOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transHightRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_transHightRoutine); })
//3.0 BernoulliN2 Off
.Run(InstallStep.BernoulliN2Off, () => { return _bernoulliN2PressureRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(InstallStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliN2PressureRoutine); })
//3.1 Home CRS Axis
.Run(InstallStep.HomingCRSAxis, () => { return _crsAxis.Home(); }, _delay_1ms)
.WaitWithStopCondition(InstallStep.HomingCRSAxisWait, () => { return _crsAxis.Status == RState.End; }, () => { return _crsAxis.Status == RState.Failed; })
.Run(InstallStep.CRSHomedGotoSetUp, () => { return _crsAxis.PositionStation("Setup",false); }, _delay_1ms)
.WaitWithStopCondition(InstallStep.CRSHomedGotoSetUpCheck, () => { return _crsAxis.Status == RState.End; }, () => { return _crsAxis.Status == RState.Failed; })
.End(InstallStep.End, NullFun, 10);
return Runner.Status;
}
///
/// 启动
///
///
///
///
public RState Start(params object[] objs)
{
_shuttleAxis = GetShuttleAxis();
_crsAxis = GetCrsAxis();
_tiltAxis = GetTiltAxis();
_loaderCommonDevice = DEVICE.GetDevice($"{Module}.Common");
_rotationAxis = DEVICE.GetDevice($"{Module}.Rotation");
_sideDevice = DEVICE.GetDevice($"{Module}.{_side}");
_waferHolderSideClampRoutine = new LoaderCommonWaferHolderSideClampRoutine($"{Module}");
_vacuumRoutine = new LoaderSideVacuumRoutine($"{Module}.{_side}");
_vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}");
_unloadVacuumLevelCheckRoutine = new LoaderSideUnloadVacuumLevelCheckRoutine($"{Module}.{_side}");
_doorLockRoutine = new LoaderSideDoorLockRoutine($"{Module}.{_side}");
_whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
_transHightRoutine = new LoaderSideTransHighRoutine($"{Module}.{_side}");
_bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
_transBladderRoutine = new LoaderSideTransBladderRoutine($"{Module}.{_side}");
_bernoulliN2PressureRoutine = new LoaderSideBernoulliN2PressureRoutine($"{Module}.{_side}");
if(!CheckPreCondition())
{
return RState.Failed;
}
Runner.Start(Module, "InstallCRS");
return RState.Running;
}
///
/// 获取Shuttle轴对象
///
///
private JetAxisBase GetShuttleAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.ShuttleA");
default:
return DEVICE.GetDevice($"{Module}.ShuttleB");
}
}
///
/// 获取CRS轴对象
///
///
private JetAxisBase GetCrsAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.LSA");
default:
return DEVICE.GetDevice($"{Module}.LSB");
}
}
///
/// 获取Tilt轴对象
///
///
private JetAxisBase GetTiltAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.TiltA");
default:
return DEVICE.GetDevice($"{Module}.TiltB");
}
}
///
/// 检验前置条件
///
///
private bool CheckPreCondition()
{
if (!CheckHomeCondition())
{
return false;
}
if (!CheckInstallCRSAxisCondition())
{
return false;
}
if (!InstallCRSStatusCheck())
{
return false;
}
if (!InstallCRSVacuumCheck())
{
return false;
}
return true;
}
///
/// 检验Home条件
///
///
private bool CheckHomeCondition()
{
//检验PUF、Loader Transporter,Robot均Homed
if (ModuleHelper.IsInstalled(ModuleName.PUF1))
{
PUFEntity puf1Entity = Singleton.Instance.GetModule(ModuleName.PUF1.ToString());
if (!puf1Entity.IsHomed)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module.ToString(), "PUF1 is not homed");
return false;
}
}
if (ModuleHelper.IsInstalled(ModuleName.PUF2))
{
PUFEntity puf2Entity = Singleton.Instance.GetModule(ModuleName.PUF2.ToString());
if (!puf2Entity.IsHomed)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module.ToString(), "PUF2 is not homed");
return false;
}
}
return true;
}
///
/// 检验Install Axis条件
///
///
///
private bool CheckInstallCRSAxisCondition()
{
double rotationPosition = _rotationAxis.MotionData.MotorPosition;
if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, "LOADA") &&
!_rotationAxis.CheckPositionIsInStation(rotationPosition, "SERVICEB"))
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, $"rotation {rotationPosition} not in LOADA and SERVICEB");
return false;
}
double shuttlePosition=_shuttleAxis.MotionData.MotorPosition;
if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "OPEN") &&
!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "OPENB"))
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, $"shuttle {shuttlePosition} not in OPEN or OPENB");
return false;
}
double tiltPosition=_tiltAxis.MotionData.MotorPosition;
if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "HORI"))
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, $"tilt {tiltPosition} not in HORI");
return false;
}
double crsPosition= _crsAxis.MotionData.MotorPosition;
if (_crsAxis.CheckPositionIsEmpty(crsPosition))
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, $"crs {crsPosition} not at station");
return false;
}
return true;
}
///
/// Install CRS Status Check
///
///
///
private bool InstallCRSStatusCheck()
{
//Facility:CDA,N2,Vaccum均Enable且在正常范围
//Side WaferPresent
LoaderSideData sideData = _sideDevice.SideData;
if (sideData.WaferPresent)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "side wafer is present");
return false;
}
if (sideData.DoorLowerLocked || sideData.DoorUpperLocked)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "Door Lock is on");
return false;
}
return true;
}
///
/// CRS Vacuum Check
///
///
///
private bool InstallCRSVacuumCheck()
{
//CRS Vacuum检验
LoaderSideData sideData = _sideDevice.SideData;
if (sideData.CRSVacuum)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "LS Vacuum is on");
return false;
}
//WS Bladder
if (sideData.WHBladder)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "WS Bladder is on");
return false;
}
//Translate Bladder/High Pres,且Sensor处于Retracted
if (sideData.TransBladder)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "TransBladder is on");
return false;
}
if (sideData.TransHigh)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "Trans High is on");
return false;
}
//Bernoulli N2
if (sideData.BernoulliN2)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "Bernoulli N2 is on");
return false;
}
//Wafer Shuttle Present
LoaderCommonData commonData = _loaderCommonDevice.CommonData;
if (!commonData.WaferHolderPresent)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "Wafer Shuttle is absent");
return false;
}
//Drip Tray Fluid
if (commonData.DripTrayFluid)
{
LOG.WriteLog(eEvent.ERR_LOADER, Module, "Drip Tray Fluid is on");
return false;
}
return true;
}
}
}