using System; using System.Text.RegularExpressions; using Aitex.Core.Common; using Aitex.Core.RT.Log; using Aitex.Core.RT.Event; using Aitex.Core.RT.DataCenter; using Aitex.Core.Util; using Aitex.Sorter.Common; using TSC = Aitex.Sorter.Common; using Aitex.Core.RT.Device; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using Aitex.Core.RT.OperationCenter; using MECF.Framework.Common.Communications; namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot { public enum RobotType { SR100, NX100, MAG7, } public class Robot : BaseDevice, IDevice, IConnection { public event Action OnSlotMapRead; public string Address { get { return _addr; } } public bool IsConnected { get { return _socket.IsConnected; } } public bool Disconnect() { return true; } public const string delimiter = "\r"; public int LastErrorCode { get; set; } public int Status { get; set; } public int ErrorCode { get; set; } public int ElapseTime { get; set; } public int Speed { get; set; } public int Rotation { get; set; } public int Extension { get; set; } public int Wrist1 { get; set; } public int Wrist2 { get; set; } public int Evevation { get; set; } public bool StateWaferOnBlade1 { get; set; } public bool StateWaferOnBlade2 { get; set; } public bool StateBlade1Gripped { get; set; } public bool StateBlade2Gripped { get; set; } public bool StateInterlock1 { get; set; } public bool StateInterlock2 { get; set; } public bool StateInterlock3 { get; set; } public bool StateInterlock4 { get; set; } public bool StateInterlock5 { get; set; } public bool StateInterlock6 { get; set; } public bool StateInterlock7 { get; set; } public bool StateInterlock8 { get; set; } public bool Swap { get; set; } public Hand PlaceBalde { get; set; } public ModuleName Blade1Target { get; set; } public ModuleName Blade2Target { get; set; } //naming follow PM1.A LL1.A PM2.B public string CmdBladeTarget { get; set; } //naming follow 0 1 public string CmdBlade1Extend { get; set; } //naming follow 0 1 public string CmdBlade2Extend { get; set; } public bool Blade1Enable { get { if (SC.ContainsItem($"{Name}.Blade1Enable")) { return SC.GetValue($"{Name}.Blade1Enable"); } return SC.GetValue($"Robot.Blade1Enable"); } set { if (SC.ContainsItem($"{Name}.Blade1Enable")) { SC.SetItemValue($"{Name}.Blade1Enable", value); } else if (SC.ContainsItem($"Robot.Blade1Enable")) { SC.SetItemValue($"Robot.Blade1Enable", value); } } } public bool Blade2Enable { get { if (SC.ContainsItem($"{Name}.Blade2Enable")) { return SC.GetValue($"{Name}.Blade2Enable"); } return SC.GetValue($"Robot.Blade2Enable"); } set { if (SC.ContainsItem($"{Name}.Blade2Enable")) { SC.SetItemValue($"{Name}.Blade2Enable", value); } else if (SC.ContainsItem($"Robot.Blade2Enable")) { SC.SetItemValue($"Robot.Blade2Enable", value); } } } public int Blade2Slots { get { if (SC.ContainsItem($"{Name}.Blade2Slots")) { return Math.Max(SC.GetValue($"{Name}.Blade2Slots"), 1); } if (SC.ContainsItem($"Robot.Blade2Slots")) { return Math.Max(SC.GetValue($"Robot.Blade2Slots"), 1); } return 1; } } public bool Initalized { get; set; } public bool Communication { get { return !_commErr; } } public bool Busy { get { return _backgroundHandler != null || _foregroundHandler != null; } } public bool Moving { get { return _backgroundHandler != null; } } public bool Error { get { return ErrorCode > 0 || _commErr || _exceuteErr; } } public DeviceState State { get { if (!Initalized) { return DeviceState.Unknown; } if (Error) { return DeviceState.Error; } if (Busy) return DeviceState.Busy; return DeviceState.Idle; } } //public string ErrorMessage //{ // get // { // return _factory.GetError(LastErrorCode); // } //} public bool WaferOnBlade1 { get { return (Status & (int)StateBit.WaferOnBlade1) > 0; } } public bool WaferOnBlade2 { get { return (Status & (int)StateBit.WaferOnBlade2) > 0; } } public bool WaferPresentOnBlade1 { get; set; } public bool WaferPresentOnBlade2 { get; set; } public Hand TransferBlade { get { if (!Blade1Enable) return Hand.Blade2; if (!Blade2Enable) return Hand.Blade1; return Hand.Both; } } protected static Object _locker = new Object(); protected AsyncSocket _socket; protected IHandler _eventHandler = null; protected IHandler _backgroundHandler = null; //moving protected IHandler _foregroundHandler = null; //current handler private IRobotHandlerFactory _factory = null; private DeviceTimer _timerQuery = new DeviceTimer(); //private int _queryPeriod = 5000; //ms //private bool _queryState = true; protected bool _exceuteErr = false; protected bool _commErr = false; protected string _addr; protected RobotType _type = RobotType.SR100; private string AlarmRobotError = "RobotError"; public Robot(string module, string name, string display, string deviceId, string address, RobotType type = RobotType.SR100) : base(module, name, display, deviceId) { _addr = address; _socket = new AsyncSocket(address); _type = type; _socket.OnDataChanged += new AsyncSocket.MessageHandler(OnDataChanged); _socket.OnErrorHappened += new AsyncSocket.ErrorHandler(OnErrorHandler); Initalized = false; WaferManager.Instance.SubscribeLocation(ModuleHelper.Converter(name), 1 + Blade2Slots); } public Robot(string module, string name, string address, RobotType type = RobotType.SR100) : this(module, name, name, name, address, type) { } public bool Initialize() { switch (_type) { case RobotType.NX100: _factory = new NX100.NX100RobotHandlerFactory(this); break; case RobotType.SR100: _factory = new SR100.SR100RobotHandlerFactory(this); break; case RobotType.MAG7: _factory = new MAG7.Mag7RobotHandlerFactory(this); break; } ConnectionManager.Instance.Subscribe(Name, this); Connect(); DEVICE.Register(String.Format("{0}.{1}", ModuleName.Robot.ToString(), "Init"), (out string reason, int time, object[] param) => { bool ret = Init(out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Initializing"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", ModuleName.Robot.ToString(), "Home"), (out string reason, int time, object[] param) => { bool ret = Home(out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Homing"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", ModuleName.Robot.ToString(), "RobotHome"), (out string reason, int time, object[] param) => { bool ret = Home(out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Homing"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "Reset"), (out string reason, int time, object[] param) => { bool ret = Clear(out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Reset"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "RobotReset"), (out string reason, int time, object[] param) => { bool ret = Clear(out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Reset"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "Grip"), (out string reason, int time, object[] param) => { Hand hand = (Hand)Enum.Parse(typeof(Hand), (string)param[0], true); bool ret = Grip(hand, out reason); //bool ret = WaferMapping(ModuleName.LP1, out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Grip"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "Release"), (out string reason, int time, object[] param) => { Hand hand = (Hand)Enum.Parse(typeof(Hand), (string)param[0], true); bool ret = Release(hand, out reason); //bool ret = QueryWaferMap(ModuleName.LP1, out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Release"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "Stop"), (out string reason, int time, object[] param) => { bool ret = Stop(false, out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Stopping"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "Pick"), (out string reason, int time, object[] param) => { ModuleName chamber = (ModuleName)Enum.Parse(typeof(ModuleName), (string)param[0], true); int slot = int.Parse((string)param[1]); Hand hand = (Hand)Enum.Parse(typeof(Hand), (string)param[2], true); bool ret = Pick(chamber, slot, hand, out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Pick wafer"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "Place"), (out string reason, int time, object[] param) => { ModuleName chamber = (ModuleName)Enum.Parse(typeof(ModuleName), (string)param[0], true); int slot = int.Parse((string)param[1]); Hand hand = (Hand)Enum.Parse(typeof(Hand), (string)param[2], true); bool ret = Place(chamber, slot, hand, out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Place wafer"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "Exchange"), (out string reason, int time, object[] param) => { ModuleName chamber = (ModuleName)Enum.Parse(typeof(ModuleName), (string)param[0], true); int slot = int.Parse((string)param[1]); Hand hand = (Hand)Enum.Parse(typeof(Hand), (string)param[2], true); bool ret = Exchange(chamber, slot, hand, out reason); if (ret) { reason = string.Format("{0} {1}", Name, "Swap wafer"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "Goto"), (out string reason, int time, object[] param) => { ModuleName chamber = (ModuleName)Enum.Parse(typeof(ModuleName), (string)param[0], true); int slot = int.Parse((string)param[1]); Hand hand = (Hand)Enum.Parse(typeof(Hand), (string)param[2], true); Motion next = (Motion)Enum.Parse(typeof(Motion), (string)param[3], true); int x = int.Parse((string)param[4]); int y = int.Parse((string)param[5]); int z = int.Parse((string)param[6]); bool ret = Goto(chamber, slot, next, hand, x, y, z, out reason); if (ret) { reason = string.Format("{0}{1}", Name, "Goto"); return true; } return false; }); DEVICE.Register(String.Format("{0}.{1}", Name, "BladeEnable"), (out string reason, int time, object[] param) => { Hand hand = (Hand)Enum.Parse(typeof(Hand), (string)param[0], true); bool bEnable = bool.Parse((string)param[1]); bool ret = Enable(hand, bEnable, out reason); if (ret) { reason = string.Format("{0}{1}", Name, "Disable robot arm"); return true; } return false; }); OP.Subscribe($"{Name}.Reconnect", (string cmd, object[] args) => { return Connect(); }); DATA.Subscribe($"{Name}.State", () => State); DATA.Subscribe($"{Name}.Busy", () => Busy); DATA.Subscribe($"{Name}.ErrorCode", () => ErrorCode); DATA.Subscribe($"{Name}.Blade1Target", () => Blade1Target); DATA.Subscribe($"{Name}.Blade2Target", () => Blade2Target); DATA.Subscribe($"{Name}.Blade1Enable", () => Blade1Enable); DATA.Subscribe($"{Name}.Blade2Enable", () => Blade2Enable); DATA.Subscribe($"{Name}.Swap", () => Swap); DATA.Subscribe($"{Name}.PlaceBalde", () => PlaceBalde); DATA.Subscribe($"{Name}.Speed", () => Speed); DATA.Subscribe($"{Name}.RobotSpeed", () => Speed.ToString()); DATA.Subscribe($"{Name}.RobotState", () => State.ToString()); DATA.Subscribe($"{Name}.Rotation", () => Rotation); DATA.Subscribe($"{Name}.Extension", () => Extension); DATA.Subscribe($"{Name}.Wrist1", () => Wrist1); DATA.Subscribe($"{Name}.Wrist2", () => Wrist2); DATA.Subscribe($"{Name}.Evevation", () => Evevation); DATA.Subscribe($"{Name}.CmdBladeTarget", () => CmdBladeTarget); DATA.Subscribe($"{Name}.CmdBlade1Extend", () => CmdBlade1Extend); DATA.Subscribe($"{Name}.CmdBlade2Extend", () => CmdBlade2Extend); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotBusy", () => Busy); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotError", () => ErrorCode); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotBlade1Traget", () => Blade1Target); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotBlade2Traget", () => Blade2Target); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotBlade1Enabled", () => Blade1Enable); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotBlade2Enabled", () => Blade2Enable); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotSwap", () => Swap); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotSwapPlaceBalde", () => PlaceBalde); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotPosRotationAxis", () => Rotation); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotPosExtensionAxis", () => Extension); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotPosWrist1Axis", () => Wrist1); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotPosWrist2Axis", () => Wrist2); DATA.Subscribe(ModuleName.Robot.ToString(), "RobotPosEvevationAxis", () => Evevation); DATA.Subscribe($"{Name}.CommunicationStatus", () => _socket == null ? false : _socket.IsConnected); EV.Subscribe(new EventItem("Event", AlarmRobotError, "Robot error", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.HostNotification)); Reset(); string str = string.Empty; _eventHandler = _factory.Event(); return true; } public void Terminate() { } public void Monitor() { } public void Reset() { lock (_locker) { _foregroundHandler = null; _backgroundHandler = null; } _exceuteErr = false; if (_commErr) { Connect(); } Swap = false; } public bool Enable(Hand hand, bool bEnable, out string reason) { reason = string.Empty; if (hand == Hand.Blade1) { Blade2Enable = bEnable; } else if (hand == Hand.Blade2) { Blade2Enable = bEnable; } else { reason = "Can't disable all blade"; return false; } return true; } public virtual bool Connect() { _commErr = false; _socket.Connect(this._addr); return true; } #region Command public bool Init(out string reason) { lock (_locker) { _foregroundHandler = null; _backgroundHandler = null; } reason = string.Empty; return execute(_factory.Init(), out reason); } public bool Home(out string reason) { lock (_locker) { _foregroundHandler = null; _backgroundHandler = null; } reason = string.Empty; return execute(_factory.Home(), out reason); } public bool Grip(Hand hand, out string reason) { reason = string.Empty; return execute(_factory.Grip(hand), out reason); } public bool Release(Hand hand, out string reason) { reason = string.Empty; return execute(_factory.Release(hand), out reason); } public bool WaferMapping(ModuleName loadport, out string reason) { reason = string.Empty; return execute(_factory.WaferMapping(loadport), out reason); } public bool QueryWaferMap(ModuleName loadport, out string reason) { reason = string.Empty; return execute(_factory.QueryWaferMap(loadport), out reason); } public bool QueryState(out string reason) { reason = string.Empty; return execute(_factory.QueryState(), out reason); } public bool QueryPosition(out string reason) { reason = string.Empty; return execute(_factory.QueryPosition(), out reason); } public bool Clear(out string reason) { reason = string.Empty; return execute(_factory.Clear(), out reason); } public bool Stop(bool isEmergency, out string reason) { reason = string.Empty; lock (_locker) { _foregroundHandler = null; _backgroundHandler = null; } return execute(_factory.Stop(isEmergency), out reason); } public bool Resume(out string reason) { reason = string.Empty; return execute(_factory.Resume(), out reason); } public bool SetSpeed(int speed, out string reason) { reason = string.Empty; return execute(_factory.SetSpeed(speed), out reason); } public bool SetCommunication(out string reason) { reason = string.Empty; return execute(_factory.SetCommunication(), out reason); } public bool SetLoad(Hand hand, out string reason) { reason = string.Empty; return execute(_factory.SetLoad(hand), out reason); } public bool CheckLoad(ModuleName chamber, int slot, out string reason) { reason = string.Empty; return execute(_factory.CheckLoad(chamber, slot), out reason); } public bool RequestWaferPresent(out string reason) { reason = string.Empty; return execute(_factory.RequestWaferPresent(), out reason); } public bool Goto(ModuleName chamber, int slot, Motion motion, Hand hand, int x, int y, int z, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Pick invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 25 - Blade2Slots, slot)) //0-20 | 20,21,22,23,24 { reason = string.Format("Pick invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 25 - Blade2Slots + 1, slot)) //0 - 21| 21,22,23,24 { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 25, slot)) { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else { if (hand == Hand.Both) { reason = string.Format("Pick invalid parameter, double pick,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.Goto(chamber, slot, motion, hand, x, y, z), out reason); } public bool MoveTo(ModuleName chamber, int slot, Hand hand, bool isPick, int x, int y, int z, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Pick invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 25 - Blade2Slots, slot)) //0-20 | 20,21,22,23,24 { reason = string.Format("Pick invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 25 - Blade2Slots + 1, slot)) //0 - 21| 21,22,23,24 { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 25, slot)) { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else { if (hand == Hand.Both) { reason = string.Format("Pick invalid parameter, double pick,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.MoveTo(chamber, slot, hand, isPick, x, y, z), out reason); } public bool Extend(ModuleName chamber, int slot, Hand hand, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Extend invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 25 - Blade2Slots, slot)) //0-20 | 20,21,22,23,24 { reason = string.Format("Extend invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 25 - Blade2Slots + 1, slot)) //0 - 21| 21,22,23,24 { reason = string.Format("Extend invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 25, slot)) { reason = string.Format("Extend invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else { if (hand == Hand.Both) { reason = string.Format("Extend invalid parameter, double pick,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.Extend(chamber, slot, hand), out reason); } public bool Retract(ModuleName chamber, int slot, Hand hand, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Retract invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 25 - Blade2Slots, slot)) //0-20 | 20,21,22,23,24 { reason = string.Format("Retract invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 25 - Blade2Slots + 1, slot)) //0 - 21| 21,22,23,24 { reason = string.Format("Retract invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 25, slot)) { reason = string.Format("Retract invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else { if (hand == Hand.Both) { reason = string.Format("Retract invalid parameter, double pick,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.Retract(chamber, slot, hand), out reason); } public bool PickExtend(ModuleName chamber, int slot, Hand hand, out string reason) { reason = string.Empty; if (chamber.ToString() == Name || chamber == ModuleName.System || ModuleHelper.IsLoadPort(chamber) || ModuleHelper.IsBuffer(chamber)) { reason = $"Pick extend target not support, chamber is {chamber.ToString()}, slot is {slot}"; return false; } if (hand == Hand.Both) { reason = string.Format("Pick extend invalid parameter, do not support double arm extend ,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } return execute(_factory.PickExtend(chamber, slot, hand), out reason); } public bool PickRetract(ModuleName chamber, int slot, Hand hand, out string reason) { reason = string.Empty; if (chamber.ToString() == Name || chamber == ModuleName.System || ModuleHelper.IsLoadPort(chamber) || ModuleHelper.IsBuffer(chamber)) { reason = $"Pick retract target not support, chamber is {chamber.ToString()}, slot is {slot}"; return false; } if (hand == Hand.Both) { reason = string.Format("Pick retract invalid parameter, do not support double arm retract ,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } return execute(_factory.PickRetract(chamber, slot, hand), out reason); } public bool Pick(ModuleName chamber, int slot, Hand hand, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Pick invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 25 - Blade2Slots, slot)) //0-20 | 20,21,22,23,24 { reason = string.Format("Pick invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 25 - Blade2Slots + 1, slot)) //0 - 21| 21,22,23,24 { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 25, slot)) { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else if (ModuleHelper.IsBuffer(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 6 - Blade2Slots, slot)) //0-20 | 20,21,22,23,24 { reason = string.Format("Pick invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 6 - Blade2Slots + 1, slot)) //0 - 21| 21,22,23,24 { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 6, slot)) { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else { if (hand == Hand.Both) { reason = string.Format("Pick invalid parameter, double pick,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.Pick(chamber, slot, hand), out reason); } public bool Place(ModuleName chamber, int slot, Hand hand, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Place invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 25 - Blade2Slots, slot)) //0-20 | 20,21,22,23,24 { reason = string.Format("Place invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 25 - Blade2Slots + 1, slot)) //0 - 21| 21,22,23,24 { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 25, slot)) { reason = string.Format("Place invalid parameter,place, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else if (ModuleHelper.IsBuffer(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 6 - Blade2Slots, slot)) //0-6 { reason = string.Format("Place invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 6 - Blade2Slots + 1, slot)) //0 - 6 { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 6, slot)) { reason = string.Format("Place invalid parameter,place, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else { if (hand == Hand.Both) { reason = string.Format("Place invalid parameter, double place,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.Place(chamber, slot, hand), out reason); } public bool PlaceExtend(ModuleName chamber, int slot, Hand hand, out string reason) { reason = string.Empty; if (chamber.ToString() == Name || chamber == ModuleName.System || ModuleHelper.IsLoadPort(chamber) || ModuleHelper.IsBuffer(chamber)) { reason = $"Place extend target not support, chamber is {chamber.ToString()}, slot is {slot}"; return false; } if (hand == Hand.Both) { reason = $"Place extend invalid parameter, do not support double arm extend ,chamber is {chamber.ToString()}, slot is {slot}"; return false; } return execute(_factory.PlaceExtend(chamber, slot, hand), out reason); } public bool PlaceRetract(ModuleName chamber, int slot, Hand hand, out string reason) { reason = string.Empty; if (chamber.ToString() == Name || chamber == ModuleName.System || ModuleHelper.IsLoadPort(chamber) || ModuleHelper.IsBuffer(chamber)) { reason = $"Place retract target not support, chamber is {chamber.ToString()}, slot is {slot}"; return false; } if (hand == Hand.Both) { reason = $"Place retract invalid parameter, do not support double arm extend ,chamber is {chamber.ToString()}, slot is {slot}"; return false; } return execute(_factory.PlaceRetract(chamber, slot, hand), out reason); } public bool Exchange(ModuleName chamber, int slot, Hand hand, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Exchange invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (Blade2Slots > 1) { reason = string.Format("this robot don't support exchange operation."); return false; } if (hand == Hand.Both) { reason = string.Format("Exchange invalid parameter,double hand"); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (!checkslot(0, 25, slot)) { reason = string.Format("Exchange invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.Exchange(chamber, slot, hand), out reason); } public bool PickEx(ModuleName chamber, int slot, Hand hand, int x, int y, int z, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Pick invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 25 - Blade2Slots, slot)) //0-20 | 20,21,22,23,24 { reason = string.Format("Pick invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 25 - Blade2Slots + 1, slot)) //0 - 21| 21,22,23,24 { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 25, slot)) { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else { if (hand == Hand.Both) { reason = string.Format("Pick invalid parameter, double pick,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.PickEx(chamber, slot, hand, x, y, z), out reason); } public bool PlaceEx(ModuleName chamber, int slot, Hand hand, int x, int y, int z, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Place invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (hand == Hand.Both) { if (!checkslot(0, 25 - Blade2Slots, slot)) //0-20 | 20,21,22,23,24 { reason = string.Format("Place invalid parameter,double hand, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else if (hand == Hand.Blade2) { if (!checkslot(0, 25 - Blade2Slots + 1, slot)) //0 - 21| 21,22,23,24 { reason = string.Format("Pick invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } else { if (!checkslot(0, 25, slot)) { reason = string.Format("Place invalid parameter,place, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } } else { if (hand == Hand.Both) { reason = string.Format("Place invalid parameter, double place,chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.PlaceEx(chamber, slot, hand, x, y, z), out reason); } public bool ExchangeEx(ModuleName chamber, int slot, Hand hand, int x, int y, int z, out string reason) { reason = string.Empty; if (chamber == ModuleName.Robot) { reason = string.Format("Exchange invalid parameter, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } if (Blade2Slots > 1) { reason = string.Format("this robot don't support exchange operation."); return false; } if (hand == Hand.Both) { reason = string.Format("Exchange invalid parameter,double hand"); return false; } if (ModuleHelper.IsLoadPort(chamber)) { if (!checkslot(0, 25, slot)) { reason = string.Format("Exchange invalid parameter,pick, chamber is {0}, slot is {1}", chamber.ToString(), slot); return false; } } return execute(_factory.ExchangeEx(chamber, slot, hand, x, y, z), out reason); } #endregion public virtual bool execute(IHandler handler, out string reason) { reason = string.Empty; lock (_locker) { if (_foregroundHandler != null) { reason = "System busy, please wait or reset system."; EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.DeviceID, handler.ToString(), reason)); return false; } if (_backgroundHandler != null && handler.IsBackground) { reason = "System busy,one background command is running, please wait or reset system."; EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.DeviceID, handler.ToString(), reason)); reason = "系统忙,后台命令正在处理,暂时不能处理新的后台命令"; return false; } handler.Unit = (int)Unit.Robot; if (!handler.Execute(ref _socket)) { reason = "Communication error,please check it."; return false; } if (handler.IsBackground) _backgroundHandler = handler; else _foregroundHandler = handler; } return true; } public virtual void OnDataChanged(string package) { try { if (!package.Contains("Gb") && !package.Contains("Pb")) package = package.ToUpper(); string[] msgs = Regex.Split(package, delimiter); foreach (string msg in msgs) { if (msg.Length > 0) { bool completed = false; string resp = msg; lock (_locker) { if (_foregroundHandler != null && _foregroundHandler.OnMessage(ref _socket, resp, out completed)) { _foregroundHandler = null; } else if (_backgroundHandler != null && _backgroundHandler.OnMessage(ref _socket, resp, out completed)) { if (completed) { string reason = string.Empty; QueryState(out reason); _backgroundHandler = null; } } else { if (_eventHandler != null) { if (_eventHandler.OnMessage(ref _socket, resp, out completed)) { if (completed) { EV.PostMessage("Robot", EventEnum.DefaultWarning, string.Format(" has error. {0:X}", ErrorCode)); _exceuteErr = true; } } } } } } } } catch (ExcuteFailedException e) { EV.PostMessage("Robot", EventEnum.DefaultWarning, string.Format("executed failed. {0}", e.Message)); OnError(); _exceuteErr = false; } catch (InvalidPackageException e) { EV.PostMessage("Robot", EventEnum.DefaultWarning, string.Format("receive invalid package. {0}", e.Message)); OnError(); } catch (System.Exception ex) { _commErr = true; LOG.WriteExeption("Robot failed:", ex); } } private void OnErrorHandler(ErrorEventArgs args) { _commErr = true; Initalized = false; EV.PostMessage(Module, EventEnum.CommunicationError, Display, args.Reason); OnError(); } private bool checkslot(int min, int max, int slot) { return slot >= min && slot < max; } public void NotifySlotMapResult(ModuleName module, string slotMap) { if (OnSlotMapRead != null) { OnSlotMapRead(module, slotMap); } } public void OnError() { EV.Notify(AlarmRobotError); } public void NotifyWaferPresent(Hand hand, WaferStatus status) { if (status == WaferStatus.Empty) { if (hand == Hand.Blade1) { WaferPresentOnBlade1 = status == WaferStatus.Empty; } if (hand == Hand.Blade2) { WaferPresentOnBlade2 = status == WaferStatus.Empty; } } if (status == WaferStatus.Unknown) { EV.PostWarningLog(Module, "Wafer present unknown"); return; } if (hand == Hand.Blade1) { WaferPresentOnBlade1 = status == WaferStatus.Normal; } if (hand == Hand.Blade2) { WaferPresentOnBlade2 = status == WaferStatus.Normal; } } } }