using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.Fsm; using Aitex.Core.RT.Log; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Core.Utilities; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.Common.WaferHolder; using CyberX8_Core; using CyberX8_RT.Devices.Dryer; using System; using System.Collections.Generic; using System.Linq; using System.Reflection; using System.Text; using System.Threading.Tasks; using System.Timers; using Aitex.Core.RT.RecipeCenter; using MECF.Framework.Common.RecipeCenter; using MECF.Framework.Common.Persistent.Dryer; using MECF.Framework.Common.ToolLayout; using CyberX8_RT.Devices.Safety; using MECF.Framework.Common.Alarm; using MECF.Framework.Common.CommonData; namespace CyberX8_RT.Modules.Dryer { public class DryerEntity : Entity, IEntity, IModuleEntity { #region 常量 private const int IDLE_TICKS = 1000; private const string AUTO = "Auto"; private const string MANUAL = "Manual"; private const string DISABLED = "Disabled"; private const string ENGINEERING = "Engineering"; private const string PRODUCTION = "Production"; #endregion #region 内部变量 /// /// 设备对象 /// private DryerDevice _device; /// /// Manual模式下Cycle run /// private DryerCycleManualProcessRecipeRoutine _cycleManualProcessRoutine; /// /// Cycle次数 /// private int _cycle = 0; /// /// 已经完成的Cycle次数 /// private int _achievedCycle = 0; /// /// Hvd recipe 的dryTime属性 /// private int _dryTime; /// /// 持久化对象 /// private DryerPersistentValue _persistentValue; /// /// 当前运行的Recipe /// private HvdRecipe _currentRecipe; /// /// Runrecipe已经运行的时间 /// private int _runrecipeElapsedTime = 0; /// /// run recipe start time /// private DateTime _runRecipeStartTime; /// /// run recipe complete time /// private DateTime _runRecipeCompleteTime; /// /// 是否Retry /// private bool _isRetry = false; #endregion #region 属性 /// /// 当前状态机状态 /// public int State { get { return fsm.State; } } /// /// 模块名称 /// public ModuleName Module { get; private set; } /// /// 初始化状态 /// public bool IsInit { get { return fsm.State == (int)DryerState.Init; } } /// /// 空闲状态 /// public bool IsIdle { get { return fsm.State == (int)DryerState.Idle; } } /// /// 是否发生错误 /// public bool IsError { get { return fsm.State == (int)DryerState.Error; } } /// /// 是否完成初始化 /// public bool IsInitialized { get { return fsm.State >= (int)DryerState.Initialized; } } /// /// 是否正在作业 /// public bool IsBusy { get { return fsm.State > (int)DryerState.Idle; } } /// /// 是否禁用 /// public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } } /// /// 自动模式 /// public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } } /// /// 自动模式 /// public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } } /// /// 是否为工程模式 /// public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } } /// /// 是否为产品模式 /// public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } } /// /// WaferHolder信息 /// public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } } /// /// 已完成的RunRecipeCycle次数 /// public int AchievedCycle { get { return _achievedCycle; } } /// /// 剩余时间 /// public override int TimeToReady { get { if (_currentRecipe == null) { return base.TimeToReady; } switch (fsm.State) { case (int)DryerState.RunReciping: return Math.Max(_dryTime - fsm.ElapsedTime / 1000, 0); default: return base.TimeToReady; } } } #endregion /// /// 构造函数 /// public DryerEntity(ModuleName moduleName) { this.Module = moduleName; InitialFsm(); _device = DEVICE.GetDevice(Module.ToString()); WaferManager.Instance.SubscribeLocation(Module, 2); } /// /// 初始化状态机 /// private void InitialFsm() { fsm = new StateMachine(Module.ToString(), (int)DryerState.Init, 20); fsm.EnableRepeatedMsg(true); AnyStateTransition(DryerMsg.Error, NullFunc, DryerState.Error); Transition(DryerState.Error, DryerMsg.ResumeError, NullFunc, DryerState.Init); //Initialize AnyStateTransition(DryerMsg.Initialize, InitializeAll, DryerState.Initialized); //直接进入Idle Transition(DryerState.Initialized, FSM_MSG.TIMER, NullFunc, DryerState.Idle); //Cycle Run Recipe Transition(DryerState.Idle, DryerMsg.RunRecipe, CycleManualProcess, DryerState.RunReciping); Transition(DryerState.RunReciping, FSM_MSG.TIMER, CycleManualMonitor, DryerState.Idle); Transition(DryerState.RunReciping, DryerMsg.Abort, CycleManualAbort, DryerState.Abort); //Retry Transition(DryerState.Error, DryerMsg.Retry, NullFunc, DryerState.Retrying); Transition(DryerState.Retrying, FSM_MSG.TIMER, DryerRetry, DryerState.Retrying); Transition(DryerState.Retrying, DryerMsg.RunRecipe, RetryRunRecipe, DryerState.RunReciping); //Enter Init Transition(DryerState.Idle, DryerMsg.Init, NullFunc, DryerState.Init); EnumLoop.ForEach((item) => { fsm.MapState((int)item, item.ToString()); }); EnumLoop.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); }); } /// /// 初始化 /// /// protected override bool Init() { InitializeParameter(); InitializeOperation(); InitializeData(); InitializeRoutine(); return true; } /// /// 初始化参数 /// private void InitializeParameter() { _persistentValue = DryerPersistentManager.Instance.GetDryerPersistentValue(Module.ToString()); if (_persistentValue == null) { LOG.WriteLog(eEvent.ERR_RESERVOIR, Module.ToString(), "Persistent Value Object is not exist"); } } /// /// 初始化操作 /// private void InitializeOperation() { OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_DRYER, Module.ToString(), (int)DryerMsg.Initialize); }); OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) => { HvdRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe(args[0].ToString()); if (recipe == null) { LOG.WriteLog(eEvent.ERR_DRYER, Module.ToString(), $"{args[0]} recipe is null"); return false; } object[] objects = new object[args.Length]; objects[0] = recipe; for (int i = 1; i < args.Length; i++) { objects[i] = args[i]; } return CheckToPostMessage(eEvent.ERR_DRYER, Module.ToString(), (int)DryerMsg.RunRecipe, objects); }); OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_DRYER, Module.ToString(), (int)DryerMsg.Abort); }); } /// /// EnterInit /// public void EnterInit() { if ((DryerState)fsm.State != DryerState.Idle) return; else { CheckToPostMessage(eEvent.ERR_DRYER, Module.ToString(), (int)DryerMsg.Init); } } /// /// 初始化DATA /// private void InitializeData() { InitializeSvid(); DATA.Subscribe($"{Module}.FsmState", () => ((DryerState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo,SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.DryTime", () => _dryTime, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB); } /// /// 初始化SVID /// private void InitializeSvid() { DATA.Subscribe($"{Module}.State", () => ((RinseState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.LotID", () => (WaferHolderInfo != null ? WaferHolderInfo.LotId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.WSID", () => (WaferHolderInfo != null ? WaferHolderInfo.Id : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.LSAID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.LSBID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.ModuleRecipe", () => (_currentRecipe != null ? _currentRecipe.Ppid : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.SequenceRecipe", () => (WaferHolderInfo != null ? WaferHolderInfo.SequenceId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.WaferAID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.WaferBID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.TotalTime", () => _dryTime, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.TimeRemain", () => _dryTime - _cycleManualProcessRoutine.ElapsedMilliseconds / 1000, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo!=null? WaferHolderInfo.CurrentControlJobId:"", SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB); } /// /// 初始化Routine /// private void InitializeRoutine() { _cycleManualProcessRoutine = new DryerCycleManualProcessRecipeRoutine(Module.ToString()); } /// /// 初始化 /// /// /// private bool InitializeAll(object[] param) { if (!CheckSafety()) { return false; } return _device.IOInitialized; } /// /// 检验Safety /// /// private bool CheckSafety() { SafetyDevice safetyDevice = DEVICE.GetDevice("Safety"); if (safetyDevice != null) { bool result = safetyDevice.SafetyData.TwincatState == 8; if (!result) { LOG.WriteLog(eEvent.ERR_DRYER, Module.ToString(), "Twincat Status is not OP status"); return false; } } return true; } #region Cycle RunRecipe private bool CycleManualProcess(object[] param) { HvdRecipe hvdRecipe = param[0] as HvdRecipe; _cycle = (int)param[1]; bool result= _cycleManualProcessRoutine.Start(param) == RState.Running; _runrecipeElapsedTime = 0; if(result) { _isRetry = false; _dryTime = _cycle * hvdRecipe.DryTime; _currentRecipe = hvdRecipe; _runRecipeStartTime = DateTime.Now; if (WaferHolderInfo != null && _currentRecipe != null) { FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid); } } return result; } /// /// Retry RunRecipe /// /// /// private bool RetryRunRecipe(object[] param) { int stepIndex = (int)param[0]; bool result = _cycleManualProcessRoutine.Retry(stepIndex) == RState.Running; if (result) { _isRetry = true; if (_currentRecipe != null) { _dryTime = _cycle * _currentRecipe.DryTime; } } return result; } private bool CycleManualMonitor(object[] param) { RState state = _cycleManualProcessRoutine.Monitor(); if (Singleton.Instance.IsAutoRunning&&_runrecipeElapsedTime!=TimeToReady) { _runrecipeElapsedTime = TimeToReady; LOG.WriteLog(eEvent.INFO_DRYER, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s."); } if (state == RState.Failed || state == RState.Timeout) { if (Singleton.Instance.IsAutoRunning) { //不存在其他可用的Dryer if (!CheckOtherDyrerAvaible()) { AlarmList alarmList = new AlarmList(Module.ToString(), ((DryerState)fsm.State).ToString(), (int)DryerMsg.RunRecipe, _cycleManualProcessRoutine.ErrorMsg, _cycleManualProcessRoutine.ErrorStep, (int)AlarmType.Error); AlarmListManager.Instance.AddAlarm(alarmList); } } _runrecipeElapsedTime = 0; PostMsg(DryerMsg.Error); //记录LotTrack _runRecipeCompleteTime = DateTime.Now; _cycleManualProcessRoutine.DryerLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2"); DryerLotTrackUtil.ExportDryerLotTrack(Module.ToString(), _cycleManualProcessRoutine.DryerLotTrackDatas, _cycleManualProcessRoutine.DryerLotTrackHeaderDatas, IsAuto, _isRetry); if (WaferHolderInfo != null && _currentRecipe != null) { FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid); } return false; } else if(state==RState.End) { _runrecipeElapsedTime = 0; if (Singleton.Instance.IsAutoRunning) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), DryerState.RunReciping.ToString()); } //记录LotTrack _runRecipeCompleteTime = DateTime.Now; int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds; _cycleManualProcessRoutine.DryerLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2"); DryerLotTrackUtil.ExportDryerLotTrack(Module.ToString(), _cycleManualProcessRoutine.DryerLotTrackDatas, _cycleManualProcessRoutine.DryerLotTrackHeaderDatas, IsAuto, _isRetry); if (WaferHolderInfo != null && _currentRecipe != null) { FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid,timeLength); } } _achievedCycle = _cycleManualProcessRoutine.GetAchievedCycle(); return state == RState.End; } /// /// 检验其他Dryer是否可用 /// /// private bool CheckOtherDyrerAvaible() { List installedModules = DryerItemManager.Instance.InstalledModules; foreach (string item in installedModules) { if (item != Module.ToString()) { DryerEntity dryerEntity = Singleton.Instance.GetModule(item); if(dryerEntity!=null&&dryerEntity.IsAuto&&(dryerEntity.IsIdle||dryerEntity.IsBusy)) { return true; } } } return false; } private bool CycleManualAbort(object[] param) { _cycleManualProcessRoutine.Abort(); //记录LotTrack _runRecipeCompleteTime = DateTime.Now; _cycleManualProcessRoutine.DryerLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2"); DryerLotTrackUtil.ExportDryerLotTrack(Module.ToString(), _cycleManualProcessRoutine.DryerLotTrackDatas, _cycleManualProcessRoutine.DryerLotTrackHeaderDatas, IsAuto, _isRetry); return true; } #endregion #region RunRecipeRetry /// /// Retry /// /// /// private bool DryerRetry(object[] param) { AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString()); if (alarmList != null) { CheckToPostMessage(eEvent.ERR_DRYER, Module.ToString(), alarmList.ModuleCmd, alarmList.ModuleStep); } return false; } #endregion public bool Check(int msg, out string reason, params object[] args) { reason = ""; return true; } public bool CheckAcked(int msg) { return true; } public int Invoke(string function, params object[] args) { switch(function) { case "HomeAll": if(IsIdle) { return (int)FSM_MSG.NONE; } if(CheckToPostMessage(eEvent.ERR_DRYER,Module.ToString(),(int)DryerMsg.Initialize)) { return (int)DryerMsg.Initialize; } else { return (int)FSM_MSG.NONE; } case "Retry": if (CheckToPostMessage(eEvent.ERR_DRYER, Module.ToString(), (int)DryerMsg.Retry)) { return (int)DryerMsg.Retry; } else { return (int)FSM_MSG.NONE; } } return (int)FSM_MSG.NONE; } } public enum DryerMsg { NONE, Error, ResumeError, Initialize, Manual, Auto, RunRecipe, Abort, Init, Retry } }