using Aitex.Core.RT.Device; using Aitex.Core.RT.Log; using Aitex.Core.RT.Routine; using Aitex.Core.Util; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Routine; using MECF.Framework.Common.Utilities; using CyberX8_Core; using CyberX8_RT.Devices.AXIS; using CyberX8_RT.Devices.AXIS.CANOpen; using CyberX8_RT.Modules.PUF; using CyberX8_RT.Modules; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using MECF.Framework.Common.CommonData.Loader; using CyberX8_RT.Modules.Transporter; using Aitex.Core.RT.SCCore; namespace CyberX8_RT.Devices.Loader { public class LoaderUnloadRoutine : RoutineBase, IRoutine { private enum UnloadStep { CheckPreCondition, WSClampOn, LSGotoLock, LSGotoLockWait, ShuttleGotoIN, ShuttleGotoINWait, BernoulliBladderOn, BernoulliBladderOnCheck, BernoulliN2On, WSBladderOn, WSBladderOnCheck, LSVacuumOn, LSVacuumOnCheck, LSVacuumLevelCheck, LSVacuumLevelCheckWait, ShuttleGotoLS, ShuttleGotoLSWait, LSGotoSetup, LSGotoSetupWait, LSGotoUnlock, LSGotoUnlockWait, ReLSVacuumLevelCheck, ReLSVacuumLevelCheckWait, ShuttleGotoOUT, ShuttleGotoOUTWait, TiltGotoHori, TiltGotoHoriCheck, BernoulliN2Off, WSBladderOff, WSBladderOffCheck, End } #region 内部变量 private string _side = ""; private JetAxisBase _lsAxis; private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine; private LoaderSideVacuumRoutine _vacuumRoutine; private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine; private LoaderSideWhBladderRoutine _whBladderRoutine; private JetAxisBase _shuttleAxis; private JetAxisBase _tiltAxis; private JetAxisBase _rotationAxis; private LoaderSideDevice _sideDevice; private LoaderCommonDevice _loaderCommonDevice; /// /// WaferSize /// private int _waferSize; #endregion /// /// 构造函数 /// /// public LoaderUnloadRoutine(string module, string side) : base(module) { _side = side; } /// /// 中止 /// public void Abort() { Runner.Stop("Manual Abort"); } /// /// 监控 /// /// public RState Monitor() { Runner.Run(UnloadStep.CheckPreCondition,CheckPreCondition,_delay_1ms) //1. WS Clamp on .Run(UnloadStep.WSClampOn, WSClampOnAction, () => { return _loaderCommonDevice.CommonData.WaferHolderClamp; }, _delay_5s) //2. LS Goto Lock位 .Run(UnloadStep.LSGotoLock, () => { return AxisPosition(_lsAxis,$"Lock{_waferSize}"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.LSGotoLockWait, () => { return _lsAxis.Status == RState.End; }, ()=>CheckAxisMotionStopStatus(_lsAxis)) //3. Shuttle Goto OPEN .Run(UnloadStep.ShuttleGotoIN, () => { return AxisPosition(_shuttleAxis, "IN"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.ShuttleGotoINWait, () => { return _shuttleAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_shuttleAxis)) //4. BernoulliBladderOn .Run(UnloadStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed")) //5. BernoulliN2 On .Run(UnloadStep.BernoulliN2On, BernoulliN2On, () => { return _sideDevice.SideData.BernoulliN2; }, _delay_5s) //6. WS Bladder On .Run(UnloadStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed")) //7. LS Vacuum On .Run(UnloadStep.LSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.LSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => CheckRoutineStopStatus(_vacuumRoutine, "LS Vaccum On failed")) //8. LS vacuum level check .Run(UnloadStep.LSVacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.LSVacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "LS Vacuum Level Check failed")) //9. Shuttle Goto LS .Run(UnloadStep.ShuttleGotoLS, () => { return AxisPosition(_shuttleAxis, "LS"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.ShuttleGotoLSWait, () => { return _shuttleAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_shuttleAxis)) //10. LS Goto Setup .Run(UnloadStep.LSGotoSetup, () => { return AxisPosition(_lsAxis, $"Setup{_waferSize}"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.LSGotoSetupWait, () => { return _lsAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_lsAxis)) //11. LS Goto Unlock .Run(UnloadStep.LSGotoUnlock, () => { return AxisPosition(_lsAxis, $"Unlock{_waferSize}"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.LSGotoUnlockWait, () => { return _lsAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_lsAxis)) //12. Re LS Vacuum level Check .Run(UnloadStep.ReLSVacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.ReLSVacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine,"LS Vacuum Level check failed")) //13. Shuttle Goto OUT .Run(UnloadStep.ShuttleGotoOUT, () => { return AxisPosition(_shuttleAxis, $"OUT{_waferSize}"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.ShuttleGotoOUTWait, () => { return _shuttleAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_shuttleAxis)) //14. Tilt Goto HORI .Run(UnloadStep.TiltGotoHori, () => { return AxisPosition(_tiltAxis,"HORI"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.TiltGotoHoriCheck, () => { return _tiltAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_tiltAxis)) //15. Bernoulli N2 Off .Run(UnloadStep.BernoulliN2Off, BernoulliN2Off, () => { return !_sideDevice.SideData.BernoulliN2; }, _delay_5s) //16. WS Bladder Off .Run(UnloadStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder Off failed")) .End(UnloadStep.End, NullFun, 10); return Runner.Status; } /// /// 检验Routine异常状态 /// /// private bool CheckRoutineStopStatus(IRoutine routine,string error) { bool result = CommonFunction.CheckRoutineStopState(routine); if (result) { NotifyError(eEvent.ERR_LOADER, $"{error}", 0); } return result; } /// /// Axis goto position /// /// /// /// private bool AxisPosition(JetAxisBase axis,string station) { bool result = axis.PositionStation(station); if (!result) { NotifyError(eEvent.ERR_LOADER, $"{axis.Module} goto {station} failed", 0); } return result; } /// /// 检验电机运动异常状态 /// /// /// private bool CheckAxisMotionStopStatus(JetAxisBase axis) { bool result = axis.Status == RState.Failed || axis.Status == RState.Timeout; if (result) { NotifyError(eEvent.ERR_LOADER, $"{axis.Module} motion failed", 0); } return result; } /// /// BerolliN2 On /// /// private bool BernoulliN2On() { bool result= _sideDevice.BernoulliN2OnAction("", null); if (!result) { NotifyError(eEvent.ERR_LOADER, $"BernoulliN2 On failed", 0); } return result; } /// /// BernoulliN2Off /// /// private bool BernoulliN2Off() { bool result = _sideDevice.BernoulliN2OffAction("", null); if (!result) { NotifyError(eEvent.ERR_LOADER, "BernoulliN2 Off failed", 0); } return result; } /// /// Wafer Holder Clamp Off /// /// public bool WSClampOffAction() { bool result = _loaderCommonDevice.WaferHolderClampOffAction(); if (!result) { NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp Off failed", 2); } return result; } /// /// Wafer Holder Clamp On /// /// public bool WSClampOnAction() { bool result = _loaderCommonDevice.WaferHolderClampOnAction(); if (!result) { NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp On failed", 2); } return result; } /// /// 启动 /// /// /// /// public RState Start(params object[] objs) { if (SC.ContainsItem($"Loader1.{_side}WaferSize")) { _waferSize = SC.GetValue($"Loader1.{_side}WaferSize"); } _shuttleAxis = GetShuttleAxis(); _lsAxis = GetCrsAxis(); _tiltAxis = GetTiltAxis(); _loaderCommonDevice = DEVICE.GetDevice($"Loader1.Common"); _rotationAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.Rotation"); _sideDevice = DEVICE.GetDevice($"{Module}.{_side}"); _vacuumRoutine = new LoaderSideVacuumRoutine($"{Module}.{_side}"); _vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}"); //_unloadVacuumLevelCheckRoutine = new LoaderSideUnloadVacuumLevelCheckRoutine($"{Module}.{_side}"); _whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}"); _bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}"); Runner.Start(Module, $"Unload {_side}"); return RState.Running; } /// /// 获取Shuttle轴对象 /// /// private JetAxisBase GetShuttleAxis() { switch (_side) { case "SideA": return DEVICE.GetDevice($"{Module}.ShuttleA"); default: return DEVICE.GetDevice($"{Module}.ShuttleB"); } } /// /// 获取CRS轴对象 /// /// private JetAxisBase GetCrsAxis() { switch (_side) { case "SideA": return DEVICE.GetDevice($"{Module}.LSA"); default: return DEVICE.GetDevice($"{Module}.LSB"); } } /// /// 获取Tilt轴对象 /// /// private JetAxisBase GetTiltAxis() { switch (_side) { case "SideA": return DEVICE.GetDevice($"{Module}.TiltA"); default: return DEVICE.GetDevice($"{Module}.TiltB"); } } /// /// 检验前置条件 /// /// private bool CheckPreCondition() { if (!CheckHomeCondition()) { return false; } if (!CheckUnloadAxisCondition()) { return false; } if (!UnloadStatusCheck()) { return false; } return true; } /// /// 检验Home条件 /// /// private bool CheckHomeCondition() { //检验PUF、Loader Transporter,Robot均Homed //Efem Home if (ModuleHelper.IsInstalled(ModuleName.EFEM)) { EfemEntity efemEntity = Singleton.Instance.GetModule(ModuleName.EFEM.ToString()); if (!efemEntity.IsHomed) { LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module, $"{ModuleName.EFEM.ToString()} is not home, Cannot execute GotoSavedPosition"); return false; } } if (ModuleHelper.IsInstalled(ModuleName.PUF1)) { PUFEntity puf1Entity = Singleton.Instance.GetModule(ModuleName.PUF1.ToString()); if (!puf1Entity.IsHomed) { NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed",-1); return false; } } if (ModuleHelper.IsInstalled(ModuleName.Transporter2)) { TransporterEntity loaderTransportEntity = Singleton.Instance.GetModule(ModuleName.Transporter2.ToString()); if (!loaderTransportEntity.IsHomed) { NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed",-1); return false; } } return true; } /// /// 检验Axis条件 /// /// /// private bool CheckUnloadAxisCondition() { if (!_rotationAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"Rotation is not homed",-1); return false; } if (!_shuttleAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed", -1); return false; } if (!_tiltAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed",-1); return false; } if (!_lsAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"{_lsAxis.Name} is not homed", -1); return false; } //LS已经运动到 Setup 位 double crsPosition = _lsAxis.MotionData.MotorPosition; if (!_lsAxis.CheckPositionIsInStation(crsPosition, $"Setup{_waferSize}")) { NotifyError(eEvent.ERR_LOADER, $"LS {crsPosition} not in Setup{_waferSize}", -1); return false; } //Rotation已经运动到 loaderA 位(sideA 下片时)或 loaderB 位(sideB 下片时) double rotationPosition = _rotationAxis.MotionData.MotorPosition; if(_side == "SideA") { if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADA{_waferSize}")) { NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADA{_waferSize}", -1); return false; } } else { if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADB{_waferSize}")) { NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADB{_waferSize}", -1); return false; } } //Shuttle已经运动到 MID 位 double shuttlePosition =_shuttleAxis.MotionData.MotorPosition; if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "MID")) { NotifyError(eEvent.ERR_LOADER, $"Shuttle {shuttlePosition} not in MID", -1); return false; } //Tilt已经运动到 VERT 位 double tiltPosition = _tiltAxis.MotionData.MotorPosition; if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "VERT")) { NotifyError(eEvent.ERR_LOADER, $"Tilt {tiltPosition} not in VERT", -1); return false; } return true; } /// /// 检验状态条件 /// /// /// private bool UnloadStatusCheck() { LoaderSideData sideData = _sideDevice.SideData; LoaderCommonData commonData = _loaderCommonDevice.CommonData; //Bernoulli Bladder(WS Bladder on) if (!sideData.BernoulliBladder) { NotifyError(eEvent.ERR_LOADER, "Bernoulli Bladder is off", -1); return false; } //Bernoulli N2(BernoulliN2 off) if (sideData.BernoulliN2) { NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is on",-1); return false; } //LS Vacuum检验(LS Vaccum off) if (sideData.CRSVacuum) { NotifyError(eEvent.ERR_LOADER, "LS Vacuum is on", -1); return false; } //Wafer Shuttle Present(WS present) if (!commonData.WaferHolderPresent) { NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle is absent", -1); return false; } //Wafer Shuttle Clamp(Clamp on/off均可) //Wafer Shuttle Bladder(Bladder off) if (sideData.WHBladder) { NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Bladder is on", -1); return false; } //Drip Tray Fluid(Drip Tray Fluid正常) if (commonData.DripTrayFluid) { NotifyError(eEvent.ERR_LOADER, "Drip Tray Fluid is on", -1); return false; } return true; } } }