namespace CyberX8_Core { public enum VenusDevice { ValveMfc1, ValveMfc2, ValveMfc3, ValveMfc4, ValveMfc5, ValveMfc6, ValveMfc7, ValveMfc8, ValveMfc9, ValveMfc10, ValveMfc11, ValveMfc12, ValvePVN21, ValvePVN22, ValvePV11, ValvePV12, ValvePV21, ValvePV22, ValvePV31, ValvePV32, ValvePV41, ValvePV42, ValvePV51, ValvePV52, ValvePV61, ValvePV62, ValvePV71, ValvePV72, ValvePV81, ValvePV82, ValvePV91, ValvePV92, ValvePVA1, ValvePVA2, ValvePVB1, ValvePVB2, ValvePVC1, ValvePVC2, ValveN2, ValvePVHe1, ValvePVHe2, ValvePVHe3, ValveHeISO, ValveMainPurge, ValveGasFinal, ValveSoftPump, ValveFastPump, ValveCHBPurge, ValveTurboPumpPumping, ValveTurboPumpPurge, ValveGuage, ValveLoadlockVent, ValveLoadlockPumping, ValvePurge, MfcGas1, MfcGas2, MfcGas3, MfcGas4, MfcGas5, GasStick1, GasStick2, GasStick3, TemperatureControl, ChamberLid, ATM_SW, VAC_SW, WaterFlow_SW, N2_Pressure, ProcessGauge, PressureGauge, ForelineGauge, MainPump, Chiller, InnerChiller, OuterChiller, TopChiller, Rf, BiasRf, Match, BiasMatch, PressureControl, ThrottleValve, HeaterChamber, ForelineHeater, Heartbeat, ResetPlcSignal, LiftPin, SlitDoor, SmallPin, MediumPin, LoadLockArm, StatisticsRfOnTime, StatisticsPumpOnTime, PlcDateTime, Lid, LidLoadlock, LidLocker, ESCHV, PendulumValve, TurboPump, EndPoint, TMLid, LLALid, LLBLid, LLATSlitDoor, LLBTSlitDoor, LLAESlitDoor, LLBESlitDoor, //se vce VCESlitDoor, VCESoftPumpValve, VCEFastPumpValve, VCESoftVentValve, VCEFastVentValve, VCEATMSensor, TMATMSensor, VCEVACSensor, TMVACSensor, VCESlitDoorOpenEnable, TMExtendVCEEnable, //se pm PMASlitDoor, PMBSlitDoor, PMCSlitDoor, PMASlitDoorOpenEnable, PMBSlitDoorOpenEnable, PMCSlitDoorOpenEnable, TMExtendPMAEnable, TMExtendPMBEnable, TMExtendPMCEnable, //tm all TMValveN2, TMSoftPumpValve, TMFastPumpValve, TMPurgeValve, TMVentValve, TMSoftVentValve, TMFastVentValve, //kepler tm LLASoftPumpValve, LLAFastPumpValve, LLAPurgeValve, LLAVentValve, LLBSoftPumpValve, LLBFastPumpValve, LLBPurgeValve, LLBVentValve, ValveWaterRelay, TMPowerOn, TMInSafty, WaferLeakSensor, EFEMSideDoorClosed, TMPCWFlowSwitch, LLAPCWFlowSwitch, LLBPCWFlowSwitch, TMLidClosed, CDAPressureSwitch, VaccumPressureSwitch, N2PressureSwitch, TMPressureCtrl, TMRobotNotExtendPMA, TMRobotNotExtendPMB, TMRobotNotExtendPMC, TMRobotNotExtendPMD, TMRobotNotExtendLLA, TMRobotNotExtendLLB, EfemRobotNotExtendLLA, EfemRobotNotExtendLLB, TMVacSwitch, LLAVacSwitch, LLBVacSwitch, TMATMSwitch, LLAATMSwitch, LLBATMSwitch, LLAWaferSizeCheckSwitch, LLBWaferSizeCheckSwitch, PMAWaferSizeCheckSwitch, PMBWaferSizeCheckSwitch, PMCWaferSizeCheckSwitch, PMDWaferSizeCheckSwitch, LLASoftVentValve, LLAFastVentValve, LLBSoftVentValve, LLBFastVentValve, TMVacAtmMode, } public enum StateData { RecipeProcessTime, RecipeStepNo, RecipeStepMode, RecipeName, RecipeBaseName, RecipeStepTimeElapsed, RecipeStepTimeSetPoint, RecipeStepRfTimeSetPoint, RecipeStepElectrodeTemp, SmallWafer, MidWafer, BigWafer, RfTimeElapsed, PumpTime, PMState, TMState, IsAutoMode, IsPmOnline, IsTmOnline, PMJobState, TMJobState, PmPlatformState, JobState, JobTmRecipe, JobPmRecipe, JobStartTime, JobStopTime, JobProcessCount, IsPumpingOkForProcess, IsCoolingOkForProcess, IsGasFlowingOkForProcess, IsRfPowering, TotalCycle, ProcessStatus, AlarmEvent, LeakCheckElapseTime, DataLogName, LotName, CurrentMagazineType, SchedulerRecipe, SchedulerState, SchedulerLoadStationInSubstrate, SchedulerRailInSubstrate, SchedulerPmSubstrate, SchedulerRailOutSubstrate, SchedulerLoadStationOutSubstrate, } public enum RtOperation { DeviceOperation, LockLid, UnlockLid, StartPump, StartTurboPump, Pump, PumpLoadLock, StopPump, GasFlow, StopGasFlow, Cooling, StopCooling, /// /// /// 0:Step mode /// 1:Power on time /// 2:Electrode temperature /// 3:Electrode Critical temperature /// RfPower, Vent, VentLoadLock, Purge, PurgeLoadLock, Abort, Heat, SetConfig, SetPMBChillerState, SetHardwareConfig, LLPlace, LLPick, PMPick, PMPlace, Extend, Retract, Goto, RunRecipe, RunCleanRecipe, SkipCurrentStep, ResumeRecipe, AbortRecipe, Reset, LeakCheck, GasLeakCheck, DeleteLeakCheck, MFCVerification, AllMFCVerification, SwitchOffBuzzer, // Lift pin & Guide pin MoveLiftPin, MoveGuidePin, StartAutoRun, StopAutoRun, PauseAutoRun, ResumeAutoRun, InitAll, AckError, TmRun, TmStop, PmAuto, PmManual, PmOnline, PmOffline, PmError, JobAuto, JobManual, JobRun, JobStop, JobAbort, JobPmLoadRecipe, JobTmLoadRecipe, JobTmRun, JobTmStop, JobPmOnline, JobPmOffline, JobPmProcessDone, JobTmRecovered, Cycle, Online, Offline, ControlPressure, AbortControlPressure } public enum MovementPosition { Down, Up, Left, Right, Middle, Unknown } public enum RState { Init, Running, End, Failed, Timeout, Paused, } }