using Aitex.Core.RT.Fsm; using Aitex.Core.RT.Log; using Aitex.Core.Util; using MECF.Framework.Common.CommonData; using MECF.Framework.Common.Equipment; using CyberX8_Core; using CyberX8_RT.Modules; using CyberX8_RT.Modules.Loader; using CyberX8_RT.Modules.PUF; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using MECF.Framework.Common.SubstrateTrackings; using CyberX8_RT.Modules.Metal; using CyberX8_RT.Devices.AXIS; using Aitex.Core.RT.Device; namespace CyberX8_RT.Schedulers.Loader { public class SchedulerLoader : SchedulerModule { private enum SchedulerStep { WaitLoad, LoadingFirst, ReadyForPuf, LoadingSecond } #region 内部变量 private LoaderEntity _loaderEntity; private PUFEntity _puf1Entity; private SchedulerStep _currentStep; private int _currentWaferIndex = 1; #endregion #region 属性 public override bool IsIdle { get { return _state == RState.End; } } public override bool IsError { get { return _state == RState.Failed || _state == RState.Timeout; } } #endregion /// /// 构造函数 /// /// public SchedulerLoader(ModuleName module) : base(module.ToString()) { _loaderEntity = Singleton.Instance.GetModule(module.ToString()); _puf1Entity = Singleton.Instance.GetModule(ModuleName.PUF1.ToString()); } /// /// 执行 /// /// /// public override bool RunProcess(object recipe, object parameter, List syncModuleMessages) { _state = RState.Running; _currentStep = SchedulerStep.WaitLoad; _currentWaferIndex = 1; return true; } /// /// 监控执行 /// /// public override bool MonitorProcess(SchedulerSequence schedulerSequence, bool hasMatchWafer) { int waferTaskCount =(int)schedulerSequence.Parameters; bool loadComplete = waferTaskCount == _currentWaferIndex; if (_currentStep == SchedulerStep.WaitLoad) { if (_loaderEntity.State != (int)LOADERSTATE.WaitForLoad) { return false; } bool result = ExecuteLoadSide(loadComplete); if (result) { _currentStep = SchedulerStep.LoadingFirst; } } else if (_currentStep == SchedulerStep.LoadingFirst) { if (_loaderEntity.IsIdle) { if (waferTaskCount == 1) { _state = RState.End; } else { bool result = EnterReadyForPuf(); if (result) { _currentStep = SchedulerStep.ReadyForPuf; _currentWaferIndex=2; } } } } else if (_currentStep == SchedulerStep.ReadyForPuf) { if (_loaderEntity.State == (int)LOADERSTATE.WaitForLoad) { bool result = ExecuteLoadSide(true); if (result) { _currentStep = SchedulerStep.LoadingSecond; } } } else if (_currentStep == SchedulerStep.LoadingSecond) { if (_loaderEntity.IsIdle) { _state = RState.End; } } return true; } private bool ExecuteLoadSide(bool loadComplete) { if (_puf1Entity.State == (int)PUFSTATE.AferSwapParkStation || (_puf1Entity.IsIdle && _puf1Entity.IsBackToParkStation)) { JetAxisBase tiltAAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.TiltA"); JetAxisBase tiltBAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.TiltB"); double tiltAPosition = tiltAAxis.MotionData.MotorPosition; double tiltBPosition = tiltBAxis.MotionData.MotorPosition; bool tiltAHori = tiltAAxis.CheckPositionIsInStation(tiltAPosition, "HORI"); bool tiltBHori = tiltBAxis.CheckPositionIsInStation(tiltBPosition, "HORI"); string side = tiltAHori ? "SideA" : (tiltBHori ? "SideB" : ""); if (string.IsNullOrEmpty(side)) { return false; } return _loaderEntity.CheckToPostMessage(eEvent.WARN_LOADER, Module.ToString(), (int)LoaderMSG.LoadSide, side, loadComplete); } return false; } /// /// 第二次进入WaitForUnload /// /// private bool EnterReadyForPuf() { return _loaderEntity.CheckToPostMessage(eEvent.WARN_LOADER, Module.ToString(), (int)LoaderMSG.ReadyForPuf); } /// /// 检验前置条件 /// /// /// /// public override bool CheckPrecondition(List schedulerSequences, int sequenceIndex, object parameter, string materialId,ref string reason) { if (_state == RState.Running) { reason = "scheduler module is already running"; return false; } if (_loaderEntity.IsIdle) { reason = "loader is idle"; return false; } if (_loaderEntity.WaferHolderInfo == null) { reason = "loader has no wafer shuttle"; return false; } if (_loaderEntity.WaferHolderInfo.Id != materialId) { reason = $"{_loaderEntity.Module} wafer shuttle {_loaderEntity.WaferHolderInfo.Id} is not matched with {materialId}"; return false; } return true; } } }