chenzk
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f22f75738a
revise safeopen/close log bug
|
4 weeks ago |
chenzk
|
48af58ca91
revise saveopen/saveclose
|
4 weeks ago |
chenzk
|
6de2319620
add pause/resume
|
4 weeks ago |
chenkui
|
c01a23840f
add scheduler time;
|
1 month ago |
chenzk
|
da5f88fe9f
add efem safeopen/safeclose
|
1 month ago |
niuyx
|
a7a47c78bd
Revise CanOpenAxis operationLocker;
|
1 month ago |
chenzk
|
251ddce6ed
update version to 1.0.3.1
|
1 month ago |
chenzk
|
00a7c5c6cf
revise pm count box input limit
|
1 month ago |
chenkui
|
51ae52d1f5
adjust transporter state and fixed transporter safe interlock
|
1 month ago |
chenkui
|
41534ec752
update transporter placing state safe move interlock
|
1 month ago |
chenkui
|
a0566b0b96
update transporter interlock
|
1 month ago |
chenkui
|
975152ef49
update transporter safe move interlock
|
1 month ago |
niuyx
|
463d72f325
Revise SRD StopOperation Bug; Revise SRDLotrack Bug of Retry;
|
1 month ago |
chenkui
|
2b6f620c00
update transporter safe move interlock
|
1 month ago |
chenkui
|
6458e62756
update transporter block
|
1 month ago |
guojun
|
b8bbc8d92f
reivse power sim config
|
1 month ago |
niuyx
|
a144c966a0
Revise SRDRotation stopPosition bug;
|
1 month ago |
chenzk
|
9b14a737d0
revise gold power bug
|
1 month ago |
chenzk
|
ab386b06ec
revise waferhistory view,revise reservoir alarm bug
|
1 month ago |
chenzk
|
b5925eba95
revise event file export
|
1 month ago |
chenzk
|
23c137c6af
add all recipe save as
|
1 month ago |
niuyx
|
77c816b572
Revise DIReplen concurrency bug;
|
1 month ago |
niuyx
|
64268396a0
Revise simultaneous DIReplen bugs of multiple reservoirs;
|
1 month ago |
chenzk
|
ba87258635
revise reservoir log bug
|
1 month ago |
chenkui
|
1d1ac9cef0
update powerSupplier current set error
|
1 month ago |
niuyx
|
8a491a5886
Add DIReplen ClearError and optimize DIReplen function;
|
1 month ago |
chenkui
|
f71afdff82
update metal short current test
|
1 month ago |
chenzk
|
e91f50bc3c
add reservoir period log
|
1 month ago |
chenzk
|
bfb6613c6d
add reservoir auto direplen start/complete log
|
1 month ago |
niuyx
|
c257cf3011
Revise Reservoir UI of MaxOnTime unit; Add DIValveMaxOnTime check function;
|
1 month ago |