 chenkui
|
6004f92144
Scheduler add wafersize
|
6 months ago |
|
chenkui
|
8c811f7802
update double wafers scheduler
|
7 months ago |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
7 months ago |
|
chenkui
|
1af6a448da
update dummy wafersize
|
7 months ago |
|
chenkui
|
18048c3726
update robot place aligner home
|
7 months ago |
 chenzk
|
3705df9310
add rinse run recipe
|
7 months ago |
|
chenkui
|
7849fa3cd1
update scheduler
|
7 months ago |
|
chenkui
|
abb9a9350a
update scheduler puf parameter
|
7 months ago |
|
chenkui
|
5902a2565b
add loader LoadSideRoutine
|
7 months ago |
|
chenkui
|
f7533a737b
Initialize
|
8 months ago |
