 chenzk
|
5abebed224
revise sunwayrobot
|
4 months ago |
|
chenzk
|
20ecea3b8f
revise robot cycle routine
|
4 months ago |
 chenkui
|
e2d5bb5c5d
update galil controller inputs
|
4 months ago |
|
chenkui
|
0f6f0fbadc
update efem pick and place wafer size
|
4 months ago |
|
chenzk
|
9aa3738300
add robot cycle(exclude srd)
|
4 months ago |
|
chenkui
|
23e37955ed
add SRD1/SRD2/Aligner1/PUF1 station
|
4 months ago |
|
chenkui
|
63d3440eab
update SunWayRobot
|
4 months ago |
|
chenkui
|
56c86c7a9c
update Efem MapRoutine
|
4 months ago |
|
chenkui
|
747b0bffa5
update sunway robot
|
4 months ago |
|
chenkui
|
371876b350
add robot map routine
|
5 months ago |
