 niuyx
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ac12da0db9
Add FI Home operation in GalilSimulator; Revise SRD related Routines;
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2 meses atrás |
|
niuyx
|
8734ae3224
Add GalilRotationAxis; Modify SRD related configs；
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2 meses atrás |
|
niuyx
|
3ab5905002
Revise SRDHomeRoutine
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2 meses atrás |
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niuyx
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ed99981344
Revise SRD related Routines; Add SRD Galil simulator;
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2 meses atrás |
 chenkui
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1fba73d760
update axis run judger
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2 meses atrás |
 chenzk
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2b887d9e15
add reservoir regulate pump
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2 meses atrás |
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chenkui
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24c6be2f94
update robot abort
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2 meses atrás |
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chenkui
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fc844d450d
update robot aligner vacuum
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2 meses atrás |
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chenkui
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da62bf186b
update WaferHolderInfo DATA
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2 meses atrás |
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niuyx
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98951c81ff
Add SRDRunRecipe;
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2 meses atrás |
|
chenkui
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8c811f7802
update double wafers scheduler
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2 meses atrás |
 guojun
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226d35c15a
update System.sccfg
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2 meses atrás |
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chenzk
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8714d1f457
revise reservoir config
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2 meses atrás |
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chenkui
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aa349d89f3
update WagoControllerCfg.xml
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2 meses atrás |
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niuyx
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69d4e6919b
Add SRD UnloaderRoutine、ChuckATMRoutine; Modify EfemView;
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2 meses atrás |
|
chenkui
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4648c5a74f
update efem crossed/double wafer
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2 meses atrás |
|
chenzk
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dce33ff7d5
revise reservoir/metal
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2 meses atrás |
|
niuyx
|
f0806c0b53
Revise SRDLoaderRoutine;
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2 meses atrás |
|
niuyx
|
58c7513e6c
Modify SRD related Routines; Modify SRD recipes;
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2 meses atrás |
|
chenzk
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36d75ad043
revise SH Resrvoir UI
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3 meses atrás |
|
chenzk
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f34c069c2e
revise UI
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3 meses atrás |
|
chenzk
|
9a000dbe19
revise wago simulator
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3 meses atrás |
|
chenkui
|
1af6a448da
update dummy wafersize
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3 meses atrás |
|
chenkui
|
18048c3726
update robot place aligner home
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3 meses atrás |
|
niuyx
|
48517b7d99
Add SRDLiftUpRoutine; Revise IO ModuleIOCfg.xml and SRD UI; Add SRD related Simulator;
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3 meses atrás |
|
chenzk
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3705df9310
add rinse run recipe
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3 meses atrás |
|
niuyx
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c7c6f6cccc
Modify SRD UI; Add SRD related Operation;
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3 meses atrás |
|
niuyx
|
fb043274f4
Modify SRD related ModuleIO and variable; Revise fwdLimit display of transporter;
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3 meses atrás |
|
chenzk
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4cedb89bf1
revise operation view/wago simulator
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3 meses atrás |
|
chenkui
|
374bc8bc8e
add srd wago
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3 meses atrás |
