 chenzk
|
1141e64fd7
revise reservoir variable config
|
4 months ago |
|
chenzk
|
9208998148
revise reservoir Initialize routine
|
4 months ago |
 chenkui
|
6004f92144
Scheduler add wafersize
|
4 months ago |
 niuyx
|
ac12da0db9
Add FI Home operation in GalilSimulator; Revise SRD related Routines;
|
4 months ago |
|
niuyx
|
8734ae3224
Add GalilRotationAxis; Modify SRD related configs；
|
4 months ago |
|
niuyx
|
3ab5905002
Revise SRDHomeRoutine
|
4 months ago |
|
niuyx
|
ed99981344
Revise SRD related Routines; Add SRD Galil simulator;
|
4 months ago |
|
chenkui
|
1fba73d760
update axis run judger
|
4 months ago |
|
chenzk
|
2b887d9e15
add reservoir regulate pump
|
4 months ago |
|
chenkui
|
24c6be2f94
update robot abort
|
4 months ago |
|
chenkui
|
fc844d450d
update robot aligner vacuum
|
4 months ago |
|
chenkui
|
da62bf186b
update WaferHolderInfo DATA
|
4 months ago |
|
niuyx
|
98951c81ff
Add SRDRunRecipe;
|
4 months ago |
|
chenkui
|
8c811f7802
update double wafers scheduler
|
4 months ago |
 guojun
|
226d35c15a
update System.sccfg
|
4 months ago |
|
chenzk
|
8714d1f457
revise reservoir config
|
4 months ago |
|
chenkui
|
aa349d89f3
update WagoControllerCfg.xml
|
4 months ago |
|
niuyx
|
69d4e6919b
Add SRD UnloaderRoutine、ChuckATMRoutine; Modify EfemView;
|
4 months ago |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
4 months ago |
|
chenzk
|
dce33ff7d5
revise reservoir/metal
|
4 months ago |
|
niuyx
|
f0806c0b53
Revise SRDLoaderRoutine;
|
4 months ago |
|
niuyx
|
58c7513e6c
Modify SRD related Routines; Modify SRD recipes;
|
4 months ago |
|
chenzk
|
36d75ad043
revise SH Resrvoir UI
|
4 months ago |
|
chenzk
|
f34c069c2e
revise UI
|
4 months ago |
|
chenzk
|
9a000dbe19
revise wago simulator
|
4 months ago |
|
chenkui
|
1af6a448da
update dummy wafersize
|
4 months ago |
|
chenkui
|
18048c3726
update robot place aligner home
|
4 months ago |
|
niuyx
|
48517b7d99
Add SRDLiftUpRoutine; Revise IO ModuleIOCfg.xml and SRD UI; Add SRD related Simulator;
|
4 months ago |
|
chenzk
|
3705df9310
add rinse run recipe
|
4 months ago |
|
niuyx
|
c7c6f6cccc
Modify SRD UI; Add SRD related Operation;
|
4 months ago |
