 niuyx
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662974038d
Modify SrdRecipeView, PrewetHomePage; Modify galil Home step; Add Prewet simulator;
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3 months ago |
 chenzk
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d657128b27
revise database bug
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3 months ago |
 chenkui
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4e761b030f
update async scheduler
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3 months ago |
|
chenzk
|
e2dd985b02
reverse reservoir initialize routine
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3 months ago |
|
chenkui
|
f4a23bc2c9
update galilconfig name
|
3 months ago |
|
chenzk
|
1141e64fd7
revise reservoir variable config
|
3 months ago |
|
chenzk
|
9208998148
revise reservoir Initialize routine
|
3 months ago |
|
chenkui
|
6004f92144
Scheduler add wafersize
|
3 months ago |
|
niuyx
|
ac12da0db9
Add FI Home operation in GalilSimulator; Revise SRD related Routines;
|
3 months ago |
|
niuyx
|
8734ae3224
Add GalilRotationAxis; Modify SRD related configs；
|
3 months ago |
|
niuyx
|
3ab5905002
Revise SRDHomeRoutine
|
3 months ago |
|
niuyx
|
ed99981344
Revise SRD related Routines; Add SRD Galil simulator;
|
3 months ago |
|
chenkui
|
1fba73d760
update axis run judger
|
3 months ago |
|
chenzk
|
2b887d9e15
add reservoir regulate pump
|
3 months ago |
|
chenkui
|
24c6be2f94
update robot abort
|
3 months ago |
|
chenkui
|
fc844d450d
update robot aligner vacuum
|
3 months ago |
|
chenkui
|
da62bf186b
update WaferHolderInfo DATA
|
3 months ago |
|
niuyx
|
98951c81ff
Add SRDRunRecipe;
|
3 months ago |
|
chenkui
|
8c811f7802
update double wafers scheduler
|
3 months ago |
 guojun
|
226d35c15a
update System.sccfg
|
3 months ago |
|
chenzk
|
8714d1f457
revise reservoir config
|
3 months ago |
|
chenkui
|
aa349d89f3
update WagoControllerCfg.xml
|
3 months ago |
|
niuyx
|
69d4e6919b
Add SRD UnloaderRoutine、ChuckATMRoutine; Modify EfemView;
|
3 months ago |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
3 months ago |
|
chenzk
|
dce33ff7d5
revise reservoir/metal
|
3 months ago |
|
niuyx
|
f0806c0b53
Revise SRDLoaderRoutine;
|
3 months ago |
|
niuyx
|
58c7513e6c
Modify SRD related Routines; Modify SRD recipes;
|
3 months ago |
|
chenzk
|
36d75ad043
revise SH Resrvoir UI
|
3 months ago |
|
chenzk
|
f34c069c2e
revise UI
|
3 months ago |
|
chenzk
|
9a000dbe19
revise wago simulator
|
3 months ago |
