 chenkui
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51ae52d1f5
adjust transporter state and fixed transporter safe interlock
|
3 weeks ago |
|
chenkui
|
41534ec752
update transporter placing state safe move interlock
|
3 weeks ago |
|
chenkui
|
a0566b0b96
update transporter interlock
|
3 weeks ago |
|
chenkui
|
975152ef49
update transporter safe move interlock
|
3 weeks ago |
|
chenkui
|
2b6f620c00
update transporter safe move interlock
|
3 weeks ago |
|
chenkui
|
2facb74aa2
add QDR Prewet function;
|
2 months ago |
|
chenkui
|
0d497c6f55
PUF/Loader/Transport check all axis is homed then enter idle state
|
2 months ago |
|
chenkui
|
8c811f7802
update double wafers scheduler
|
3 months ago |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
3 months ago |
|
chenkui
|
57ec4c0d76
update transporter scheduler
|
3 months ago |
|
chenkui
|
31c26804e6
add Festo Communication Protocol
|
5 months ago |
|
chenkui
|
f7533a737b
Initialize
|
5 months ago |
