 chenkui
|
41534ec752
update transporter placing state safe move interlock
|
hai 1 mes |
|
chenkui
|
a0566b0b96
update transporter interlock
|
hai 1 mes |
|
chenkui
|
975152ef49
update transporter safe move interlock
|
hai 1 mes |
 niuyx
|
463d72f325
Revise SRD StopOperation Bug; Revise SRDLotrack Bug of Retry;
|
hai 1 mes |
|
chenkui
|
2b6f620c00
update transporter safe move interlock
|
hai 1 mes |
|
chenkui
|
6458e62756
update transporter block
|
hai 1 mes |
 guojun
|
b8bbc8d92f
reivse power sim config
|
hai 1 mes |
|
niuyx
|
a144c966a0
Revise SRDRotation stopPosition bug;
|
hai 1 mes |
 chenzk
|
9b14a737d0
revise gold power bug
|
hai 1 mes |
|
chenzk
|
ab386b06ec
revise waferhistory view，revise reservoir alarm bug
|
hai 1 mes |
|
chenzk
|
b5925eba95
revise event file export
|
hai 1 mes |
|
chenzk
|
23c137c6af
add all recipe save as
|
hai 1 mes |
|
niuyx
|
77c816b572
Revise DIReplen concurrency bug;
|
hai 2 meses |
|
niuyx
|
64268396a0
Revise simultaneous DIReplen bugs of multiple reservoirs;
|
hai 2 meses |
|
chenzk
|
ba87258635
revise reservoir log bug
|
hai 2 meses |
|
chenkui
|
1d1ac9cef0
update powerSupplier current set error
|
hai 2 meses |
|
niuyx
|
8a491a5886
Add DIReplen ClearError and optimize DIReplen function;
|
hai 2 meses |
|
chenkui
|
f71afdff82
update metal short current test
|
hai 2 meses |
|
chenzk
|
e91f50bc3c
add reservoir period log
|
hai 2 meses |
|
chenzk
|
bfb6613c6d
add reservoir auto direplen start/complete log
|
hai 2 meses |
|
niuyx
|
c257cf3011
Revise Reservoir UI of MaxOnTime unit; Add DIValveMaxOnTime check function;
|
hai 2 meses |
|
chenzk
|
0e12a3f8c0
revise efem lock color，revise hvd recipe
|
hai 2 meses |
|
chenzk
|
15ffc18433
revise top view transport name
|
hai 2 meses |
|
chenzk
|
2ea59fe258
revise robot cycle bug
|
hai 2 meses |
|
chenzk
|
2819cb58db
revise reservoir holdofftime monitor bug
|
hai 2 meses |
|
chenzk
|
2215838113
update x12 number158 bug solution to x8
|
hai 2 meses |
|
chenzk
|
494dc08d31
add VoltageSetUnitSetScale,revise metalusage/LogManager bug
|
hai 2 meses |
|
chenkui
|
69a0c70b7c
fix gold power supplier set current and step issue
|
hai 2 meses |
|
chenzk
|
411483be01
add reservoir hold off time Monitor
|
hai 2 meses |
|
niuyx
|
c003ed491f
Revise stopPosition Bug;
|
hai 2 meses |
