 chenkui
|
2facb74aa2
add QDR Prewet function;
|
6 months ago |
|
chenkui
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
6 months ago |
|
chenkui
|
3c2229df11
add SchedulerAligner plat type
|
6 months ago |
|
chenkui
|
2bf0be7542
update loader waferSize
|
6 months ago |
|
chenkui
|
898fe7af38
update SchedulerLoader
|
7 months ago |
|
chenkui
|
76a2644a3d
update scheduler issue
|
7 months ago |
|
chenkui
|
6004f92144
Scheduler add wafersize
|
7 months ago |
|
chenkui
|
8c811f7802
update double wafers scheduler
|
7 months ago |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
7 months ago |
|
chenkui
|
1af6a448da
update dummy wafersize
|
7 months ago |
|
chenkui
|
18048c3726
update robot place aligner home
|
7 months ago |
 chenzk
|
3705df9310
add rinse run recipe
|
7 months ago |
|
chenkui
|
7849fa3cd1
update scheduler
|
7 months ago |
|
chenkui
|
abb9a9350a
update scheduler puf parameter
|
7 months ago |
|
chenkui
|
5902a2565b
add loader LoadSideRoutine
|
7 months ago |
|
chenkui
|
f7533a737b
Initialize
|
9 months ago |
