 chenkui
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be3b324847
update EFEM UI;
|
5 mesi fa |
|
chenkui
|
2a9a5325f5
modify error code
|
6 mesi fa |
|
chenkui
|
0d497c6f55
PUF/Loader/Transport check all axis is homed then enter idle state
|
6 mesi fa |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
7 mesi fa |
|
chenkui
|
0f6f0fbadc
update efem pick and place wafer size
|
7 mesi fa |
 niuyx
|
27849ae532
Add Puf vaccum and chuck in/out in simulator; Modify FestoSimulator UI；
|
8 mesi fa |
|
chenkui
|
0b293c8ffb
update puf axis
|
8 mesi fa |
|
chenkui
|
05cd83ee92
Add Galil Axis
|
8 mesi fa |
|
chenkui
|
31c26804e6
add Festo Communication Protocol
|
9 mesi fa |
|
chenkui
|
f7533a737b
Initialize
|
9 mesi fa |
