revise reservoir Initialize routine

CyberX8_MainPages/ViewModels/MetalSHHomePageViewModel.cs

@@ -421,7 +421,8 @@ namespace CyberX8_MainPages.ViewModels
             InitializeCommand = new DelegateCommand<object>(InitializeAction);
             PumpSpeedCommand = new DelegateCommand<object>(PumpSpeedAction);
             WaferSizeList.Add((int)WaferSize.WS8);
-            WaferSizeList.Add((int)WaferSize.WS12);
+            WaferSizeList.Add((int)WaferSize.WS6);
+            WaferSizeList.Add((int)WaferSize.WS4);
         }
 
         /// <summary>

CyberX8_RT/Config/System.sccfg

@@ -481,6 +481,7 @@
 			<config default="0,0,1.5022,94.782" name="LevelCurve" nameView="LevelCurve" description="Level curve" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="260" name="MaxTankVolume" nameView="MaxTankVolume" description="Maximum Tank volume" max="300" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="3" name="HEDFlowLowLimit" nameView="HEDFlowLowLimit" description="HED Flow Limit" max="30" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="3" name="CellFlowLowLimit" nameView="CellFlowLowLimit" description="Cell Flow Limit" max="30" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="0.56" name="InitialDosingSpeed" nameView="InitialDosingSpeed" description="Initial Dosing Speed" max="0.672" min="0" paramter="" tag="" unit="mL/min" type="Double" />
 			<config default="0.14" name="MinDoseAmount" nameView="MinDoseAmount" description="Minimum Dose Amount" max="200" min="0" paramter="" tag="" unit="mL" type="Double" />
 			<config default="1" name="BottleReserveVolume1" nameView="BottleReserveVolume1" description="Bottle Reserve Volume of Replen1" max="5000" min="0" paramter="" tag="" unit="mL" type="Double" />
@@ -507,6 +508,7 @@
 			<config default="0,0,1.5022,94.782" name="LevelCurve" nameView="LevelCurve" description="Level curve" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="260" name="MaxTankVolume" nameView="MaxTankVolume" description="Maximum Tank volume" max="300" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="3" name="HEDFlowLowLimit" nameView="HEDFlowLowLimit" description="HED Flow Limit" max="30" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="3" name="CellFlowLowLimit" nameView="CellFlowLowLimit" description="Cell Flow Limit" max="30" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="0.56" name="InitialDosingSpeed" nameView="InitialDosingSpeed" description="Initial Dosing Speed" max="0.672" min="0" paramter="" tag="" unit="mL/min" type="Double" />
 			<config default="0.14" name="MinDoseAmount" nameView="MinDoseAmount" description="Minimum Dose Amount" max="200" min="0" paramter="" tag="" unit="mL" type="Double" />
 			<config default="1" name="BottleReserveVolume1" nameView="BottleReserveVolume1" description="Bottle Reserve Volume of Replen1" max="5000" min="0" paramter="" tag="" unit="mL" type="Double" />
@@ -545,6 +547,7 @@
 			<config default="0,0,1.5022,94.782" name="LevelCurve" nameView="LevelCurve" description="Level curve" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="260" name="MaxTankVolume" nameView="MaxTankVolume" description="Maximum Tank volume" max="300" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="3" name="HEDFlowLowLimit" nameView="HEDFlowLowLimit" description="HED Flow Limit" max="30" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="3" name="CellFlowLowLimit" nameView="CellFlowLowLimit" description="Cell Flow Limit" max="30" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="0.56" name="InitialDosingSpeed" nameView="InitialDosingSpeed" description="Initial Dosing Speed" max="0.672" min="0" paramter="" tag="" unit="mL/min" type="Double" />
 			<config default="0.14" name="MinDoseAmount" nameView="MinDoseAmount" description="Minimum Dose Amount" max="200" min="0" paramter="" tag="" unit="mL" type="Double" />
 			<config default="1" name="BottleReserveVolume1" nameView="BottleReserveVolume1" description="Bottle Reserve Volume of Replen1" max="5000" min="0" paramter="" tag="" unit="mL" type="Double" />
@@ -571,6 +574,7 @@
 			<config default="0,0,1.5022,94.782" name="LevelCurve" nameView="LevelCurve" description="Level curve" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="260" name="MaxTankVolume" nameView="MaxTankVolume" description="Maximum Tank volume" max="300" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="3" name="HEDFlowLowLimit" nameView="HEDFlowLowLimit" description="HED Flow Limit" max="30" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="3" name="CellFlowLowLimit" nameView="CellFlowLowLimit" description="Cell Flow Limit" max="30" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="0.56" name="InitialDosingSpeed" nameView="InitialDosingSpeed" description="Initial Dosing Speed" max="0.672" min="0" paramter="" tag="" unit="mL/min" type="Double" />
 			<config default="0.14" name="MinDoseAmount" nameView="MinDoseAmount" description="Minimum Dose Amount" max="200" min="0" paramter="" tag="" unit="mL" type="Double" />
 			<config default="1" name="BottleReserveVolume1" nameView="BottleReserveVolume1" description="Bottle Reserve Volume of Replen1" max="5000" min="0" paramter="" tag="" unit="mL" type="Double" />

CyberX8_RT/Devices/Metal/MetalCellDevice.cs

@@ -139,7 +139,7 @@ namespace CyberX8_RT.Devices.Metal
         private void InitializeParameter()
         {
             _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module);
-            if (_persistentValue == null)
+            if(_persistentValue == null)
             {
                 LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Persistent Value Object is not exist");
             }

CyberX8_RT/Modules/Metal/StandardHotRunRecipeRoutine.cs

@@ -1,6 +1,7 @@
 using Aitex.Core.RT.Device;
 using Aitex.Core.RT.Log;
 using Aitex.Core.RT.Routine;
+using Aitex.Core.Util;
 using CyberX8_Core;
 using CyberX8_RT.Devices.Metal;
 using CyberX8_RT.Modules.Metal;
@@ -140,6 +141,12 @@ namespace CyberX8_RT.Modules.Metal
                 LOG.WriteLog(eEvent.ERR_METAL, Module, "Recipe RampProfileSteps count is 0");
                 return false;
             }
+            MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(Module);
+            if (metalEntity != null && metalEntity.WaferHolderInfo == null)
+            {
+                LOG.WriteLog(eEvent.ERR_METAL, Module, $"there is no waferShuttle in {Module}");
+                return false;
+            }
             return true;
         }
         /// <summary>

CyberX8_RT/Modules/Reservoir/StandardHotReservoirInitializeRoutine.cs

@@ -25,6 +25,7 @@ namespace CyberX8_RT.Modules.Reservoir
             AutoDiReplen,
             CellPump,
             WaitCellPump,
+            WaitRegulatePumpOn,
             CheckCellFlow,
             ManualCellByPass,
             AutoCellManual,
@@ -52,13 +53,14 @@ namespace CyberX8_RT.Modules.Reservoir
         #endregion
         #region 内部变量
         List<StandardHotMetalDevice> _metalDevices = new List<StandardHotMetalDevice>();
-        private double _hedFlowLowLimit;
+        private double _cellFlowLowLimit;
         private StandardHotReservoirDevice _reservoirDevice;
         private ResRecipe _recipe;
         private CellPowerSupplier _cellPowerSupplier;
         private TemperatureController _temperatureController;
         private int _autoHedDelay = 0;
         private bool _isRegulatePump;
+        private int _cellFlowFaultHoldOffTime = 5000;
         /// <summary>
         /// CMM Check Flow延时
         /// </summary>
@@ -112,6 +114,7 @@ namespace CyberX8_RT.Modules.Reservoir
                 .Run(InitializeStep.CellPump, CellsPumpOn, _delay_1ms)
                 .WaitWithStopConditionIf(InitializeStep.WaitCellPump, !_isRegulatePump, CheckPumpOnEndStatus, CheckPumpOnStopStatus)
                 .WaitIf(InitializeStep.WaitCellPump, _isRegulatePump, CheckRegulatePumpOn,_delay_3m)
+                .DelayIf(InitializeStep.WaitRegulatePumpOn,_isRegulatePump, _cellFlowFaultHoldOffTime)
                 .Run(InitializeStep.CheckCellFlow, CheckCellFlow, _delay_1ms)
                 //Manual cell Bypass同时disable HED
                 .RunIf(InitializeStep.ManualCellByPass, _reservoirDevice.OperationMode == MANUAL, CellsByPassEnableHed, _delay_1ms)
@@ -261,11 +264,25 @@ namespace CyberX8_RT.Modules.Reservoir
             }
         }
         /// <summary>
-        /// 检验HED Flow
+        /// 检验Cell Flow
         /// </summary>
         /// <returns></returns>
         private bool CheckCellFlow()
         {
+            double toatalCellFlow = 0;
+            for (int i = 0; i < _metalDevices.Count; i++)
+            {
+                StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
+                if (hotMetalDevice!=null && hotMetalDevice.MetalDeviceData!=null)
+                {
+                    toatalCellFlow += hotMetalDevice.MetalDeviceData.CellFlow;
+                }
+            }
+            if (toatalCellFlow < _cellFlowLowLimit)
+            {
+                LOG.WriteLog(eEvent.WARN_RESERVOIR, Module, $"{Module} Cell flow:{toatalCellFlow} is less than config item CellFlowLowLimit:{_cellFlowLowLimit}");
+                return false;
+            }
             return true;
         }
         /// <summary>
@@ -646,7 +663,7 @@ namespace CyberX8_RT.Modules.Reservoir
                 _cellPowerSupplier = (CellPowerSupplier)objs[1];
             }
             _temperatureController = (TemperatureController)objs[2];
-            _hedFlowLowLimit = SC.GetValue<double>($"Reservoir.{Module}.HEDFlowLowLimit");
+            _cellFlowLowLimit = SC.GetValue<double>($"Reservoir.{Module}.CellFlowLowLimit");
             if (!CheckPreCondition())
             {
                 return RState.Failed;
@@ -677,7 +694,7 @@ namespace CyberX8_RT.Modules.Reservoir
                 LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "recipe is null");
                 return false;
             }
-            if (_recipe.CMMEnable && !_cellPowerSupplier.IsConnected)
+            if (_recipe.CMMEnable && _cellPowerSupplier != null && !_cellPowerSupplier.IsConnected)
             {
                 LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "PowerSupplier is not connected");
                 return false;