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@@ -181,7 +181,7 @@ namespace CyberX8_RT.Devices.EFEM
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_cassete200Present = cassete;
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if (cassete)
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{
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- if (_cassete200Present)
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+ if (_cassete150Present)
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{
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WaferSize = WaferSize.WS8;
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}
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@@ -192,7 +192,7 @@ namespace CyberX8_RT.Devices.EFEM
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_cassete150Present = cassete;
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if (cassete)
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{
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- if (_cassete150Present)
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+ if (!_cassete200Present)
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{
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WaferSize = WaferSize.WS6;
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}
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@@ -206,7 +206,7 @@ namespace CyberX8_RT.Devices.EFEM
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WaferSize = WaferSize.WS4;
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}
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}
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- if (!_cassete100Present && !_cassete150Present && !_cassete200Present)
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+ if (!_cassete100Present && !_cassete150Present)
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{
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UpdateWaferArrive(false);
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}
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