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@@ -46,10 +46,10 @@ namespace CyberX8_RT.Devices.Loader
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BernoulliN2OffCheck,
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WSBladderOff,
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WSBladderOffCheck,
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- Wait500MS,
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+ Wait500MSForWSBladder,
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LSVacuumOff,
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LSVacuumOffCheck,
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- ReWait500MS,
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+ Wait500MS,
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ShuttleGotoMID,
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ShuttleGotoMIDWait,
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HomingLSAxis,
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@@ -100,53 +100,68 @@ namespace CyberX8_RT.Devices.Loader
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Runner.Run(InstallStep.CheckPreCondition, CheckPreCondition, _delay_1ms)
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//1. Tilt Goto Vertical
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.Run(InstallStep.TiltGotoVertical, () => { return _tiltAxis.PositionStation("VERT",false); }, NullFun, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.TiltGotoVerticalCheck, () => { return _tiltAxis.Status == RState.End; }, () => { return _tiltAxis.Status == RState.Failed; })
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+ .WaitWithStopCondition(InstallStep.TiltGotoVerticalCheck, () => { return _tiltAxis.Status == RState.End; },
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+ () => { return _tiltAxis.Status == RState.Failed; })
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//2. LS Goto Unlock
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.Run(InstallStep.LSGotoUnlock, () => { return _lsAxis.PositionStation($"Unlock{_waferSize}", false); }, NullFun, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.LSGotoUnlockWait, () => { return _lsAxis.Status == RState.End; }, () => { return _lsAxis.Status == RState.Failed; })
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+ .WaitWithStopCondition(InstallStep.LSGotoUnlockWait, () => { return _lsAxis.Status == RState.End; },
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+ () => { return _lsAxis.Status == RState.Failed; })
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//3. Shuttle Goto IN
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.Run(InstallStep.ShuttleGotoIN, () => { return _shuttleAxis.PositionStation("IN", false); }, NullFun, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.ShuttleGotoINWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
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+ .WaitWithStopCondition(InstallStep.ShuttleGotoINWait, () => { return _shuttleAxis.Status == RState.End; },
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+ () => { return _shuttleAxis.Status == RState.Failed; })
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//4. BernoulliBladder On
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.Run(InstallStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliBladderRoutine); })
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+ .WaitWithStopCondition(InstallStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },
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+ () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))
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//5. Bernoulli N2 On
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.Run(InstallStep.BernoulliN2On, () => { return _bernoulliN2PressureRoutine.Start(true) == RState.Running; }, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliN2PressureRoutine); })
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+ .WaitWithStopCondition(InstallStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },
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+ () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, " BernoulliN2 On failed"))
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//6. WS Bladder On
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.Run(InstallStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_whBladderRoutine); })
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+ .WaitWithStopCondition(InstallStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
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+ () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed"))
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//7. LS Vacuum On
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.Run(InstallStep.LSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.LSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumRoutine); })
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+ .WaitWithStopCondition(InstallStep.LSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); },
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+ () => CheckRoutineStopStatus(_vacuumRoutine, "LS Vacuum On failed"))
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//8. LS Vacuum Level Check
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.Run(InstallStep.VacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.VacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumLevelCheckRoutine); })
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- //9. Shutle Goto LS
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+ .WaitWithStopCondition(InstallStep.VacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); },
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+ () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "LS Vacuum Level Check failed"))
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+ //9. Shuttle Goto LS
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.Run(InstallStep.ShuttleGotoLS, () => { return _shuttleAxis.PositionStation("LS", false); }, NullFun, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.ShuttleGotoLSWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
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+ .WaitWithStopCondition(InstallStep.ShuttleGotoLSWait, () => { return _shuttleAxis.Status == RState.End; },
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+ () => { return _shuttleAxis.Status == RState.Failed; })
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//10. LS Goto Lock
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.Run(InstallStep.LSGotoLock, () => { return _lsAxis.PositionStation($"Lock{_waferSize}", false, 0, 0, 0, false); }, NullFun, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.LSGotoLockWait, () => { return _lsAxis.Status == RState.End; }, () => { return _lsAxis.Status == RState.Failed; })
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+ .WaitWithStopCondition(InstallStep.LSGotoLockWait, () => { return _lsAxis.Status == RState.End; },
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+ () => { return _lsAxis.Status == RState.Failed; })
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//11. Bernoulli N2 Off
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.Run(InstallStep.BernoulliN2Off, () => { return _bernoulliN2PressureRoutine.Start(false) == RState.Running; }, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliN2PressureRoutine); })
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+ .WaitWithStopCondition(InstallStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },
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+ () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, " BernoulliN2 Off failed"))
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//12. WS Bladder Off
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.Run(InstallStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_whBladderRoutine); })
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+ .WaitWithStopCondition(InstallStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
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+ () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder Off failed"))
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//13. Wait 0.5s for WS Bladder
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- .Delay(InstallStep.Wait500MS, 500)
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+ .Delay(InstallStep.Wait500MSForWSBladder, 500)
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//14. LS Vacuum Off
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.Run(InstallStep.LSVacuumOff, () => { return _vacuumRoutine.Start(false) == RState.Running; }, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.LSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumRoutine); })
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+ .WaitWithStopCondition(InstallStep.LSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); },
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+ () => CheckRoutineStopStatus(_vacuumRoutine, "LS Vacuum Off failed"))
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//15. Wait 0.5s
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- .Delay(InstallStep.ReWait500MS, 500)
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+ .Delay(InstallStep.Wait500MS, 500)
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//16. Shuttle Goto MID
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.Run(InstallStep.ShuttleGotoMID, () => { return _shuttleAxis.PositionStation("MID", false); }, NullFun, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
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+ .WaitWithStopCondition(InstallStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; },
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+ () => { return _shuttleAxis.Status == RState.Failed; })
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//17. Home LS Axis
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.Run(InstallStep.HomingLSAxis, () => { return _lsAxis.Home(); }, _delay_1ms)
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- .WaitWithStopCondition(InstallStep.HomingLSAxisWait, () => { return _lsAxis.Status == RState.End; }, () => { return _lsAxis.Status == RState.Failed; })
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+ .WaitWithStopCondition(InstallStep.HomingLSAxisWait, () => { return _lsAxis.Status == RState.End; },
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+ () => { return _lsAxis.Status == RState.Failed; })
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.End(InstallStep.End, NullFun, 10);
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return Runner.Status;
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}
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@@ -163,7 +178,7 @@ namespace CyberX8_RT.Devices.Loader
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_waferSize = SC.GetValue<int>($"Loader1.{_side}WaferSize");
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}
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_shuttleAxis = GetShuttleAxis();
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- _lsAxis = GetCrsAxis();
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+ _lsAxis = GetLsAxis();
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_tiltAxis = GetTiltAxis();
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_loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"{Module}.Common");
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_rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
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@@ -173,12 +188,22 @@ namespace CyberX8_RT.Devices.Loader
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_whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
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_bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
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_bernoulliN2PressureRoutine = new LoaderSideBernoulliN2PressureRoutine($"{Module}.{_side}");
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- if(!CheckPreCondition())
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+
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+ Runner.Start(Module, "Install LS");
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+ return RState.Running;
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+ }
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+ /// <summary>
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+ /// 检验Routine异常状态
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool CheckRoutineStopStatus(IRoutine routine, string error)
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+ {
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+ bool result = CommonFunction.CheckRoutineStopState(routine);
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+ if (result)
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{
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- return RState.Failed;
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+ NotifyError(eEvent.ERR_LOADER, $"{error}", 0);
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}
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- Runner.Start(Module, "InstallCRS");
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- return RState.Running;
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+ return result;
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}
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/// <summary>
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/// 获取Shuttle轴对象
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@@ -198,7 +223,7 @@ namespace CyberX8_RT.Devices.Loader
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/// 获取CRS轴对象
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/// </summary>
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/// <returns></returns>
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- private JetAxisBase GetCrsAxis()
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+ private JetAxisBase GetLsAxis()
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{
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switch (_side)
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{
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@@ -337,7 +362,7 @@ namespace CyberX8_RT.Devices.Loader
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double shuttlePosition = _shuttleAxis.MotionData.MotorPosition;
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if (_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "IN"))
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{
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- NotifyError(eEvent.ERR_LOADER, $"Shuttle {shuttlePosition} not in IN", -1);
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+ NotifyError(eEvent.ERR_LOADER, $"Shuttle {shuttlePosition} is in IN", -1);
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return false;
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}
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