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Revise LoaderInstallCRS and LoaderRotationAxisInterLock;

niuyx 1 月之前
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715c26c896

+ 52 - 27
CyberX8_RT/Devices/Loader/LoaderInstallCRSRoutine.cs

@@ -46,10 +46,10 @@ namespace CyberX8_RT.Devices.Loader
             BernoulliN2OffCheck,
             WSBladderOff,
             WSBladderOffCheck,
-            Wait500MS,
+            Wait500MSForWSBladder,
             LSVacuumOff,
             LSVacuumOffCheck,
-            ReWait500MS,
+            Wait500MS,
             ShuttleGotoMID,
             ShuttleGotoMIDWait,
             HomingLSAxis,
@@ -100,53 +100,68 @@ namespace CyberX8_RT.Devices.Loader
             Runner.Run(InstallStep.CheckPreCondition, CheckPreCondition, _delay_1ms)
                 //1. Tilt Goto Vertical
                 .Run(InstallStep.TiltGotoVertical, () => { return _tiltAxis.PositionStation("VERT",false); }, NullFun, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.TiltGotoVerticalCheck, () => { return _tiltAxis.Status == RState.End; }, () => { return _tiltAxis.Status == RState.Failed; })
+                .WaitWithStopCondition(InstallStep.TiltGotoVerticalCheck, () => { return _tiltAxis.Status == RState.End; }, 
+                    () => { return _tiltAxis.Status == RState.Failed; })
                 //2. LS Goto Unlock
                 .Run(InstallStep.LSGotoUnlock, () => { return _lsAxis.PositionStation($"Unlock{_waferSize}", false); }, NullFun, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.LSGotoUnlockWait, () => { return _lsAxis.Status == RState.End; }, () => { return _lsAxis.Status == RState.Failed; })
+                .WaitWithStopCondition(InstallStep.LSGotoUnlockWait, () => { return _lsAxis.Status == RState.End; }, 
+                    () => { return _lsAxis.Status == RState.Failed; })
                 //3. Shuttle Goto IN
                 .Run(InstallStep.ShuttleGotoIN, () => { return _shuttleAxis.PositionStation("IN", false); }, NullFun, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.ShuttleGotoINWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
+                .WaitWithStopCondition(InstallStep.ShuttleGotoINWait, () => { return _shuttleAxis.Status == RState.End; }, 
+                    () => { return _shuttleAxis.Status == RState.Failed; })
                 //4. BernoulliBladder On
                 .Run(InstallStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliBladderRoutine); })
+                .WaitWithStopCondition(InstallStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, 
+                    () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))
                 //5. Bernoulli N2 On
                 .Run(InstallStep.BernoulliN2On, () => { return _bernoulliN2PressureRoutine.Start(true) == RState.Running; }, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliN2PressureRoutine); })
+                .WaitWithStopCondition(InstallStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, 
+                    () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, " BernoulliN2 On failed"))
                 //6. WS Bladder On
                 .Run(InstallStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_whBladderRoutine); })
+                .WaitWithStopCondition(InstallStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, 
+                    () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed"))
                 //7. LS Vacuum On
                 .Run(InstallStep.LSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.LSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumRoutine); })
+                .WaitWithStopCondition(InstallStep.LSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, 
+                    () => CheckRoutineStopStatus(_vacuumRoutine, "LS Vacuum On failed"))
                 //8. LS Vacuum Level Check
                 .Run(InstallStep.VacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.VacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumLevelCheckRoutine); })
-                //9. Shutle Goto LS
+                .WaitWithStopCondition(InstallStep.VacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, 
+                    () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "LS Vacuum Level Check failed"))
+                //9. Shuttle Goto LS
                 .Run(InstallStep.ShuttleGotoLS, () => { return _shuttleAxis.PositionStation("LS", false); }, NullFun, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.ShuttleGotoLSWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
+                .WaitWithStopCondition(InstallStep.ShuttleGotoLSWait, () => { return _shuttleAxis.Status == RState.End; }, 
+                    () => { return _shuttleAxis.Status == RState.Failed; })
                 //10. LS Goto Lock
                 .Run(InstallStep.LSGotoLock, () => { return _lsAxis.PositionStation($"Lock{_waferSize}", false, 0, 0, 0, false); }, NullFun, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.LSGotoLockWait, () => { return _lsAxis.Status == RState.End; }, () => { return _lsAxis.Status == RState.Failed; })
+                .WaitWithStopCondition(InstallStep.LSGotoLockWait, () => { return _lsAxis.Status == RState.End; }, 
+                    () => { return _lsAxis.Status == RState.Failed; })
                 //11. Bernoulli N2 Off
                 .Run(InstallStep.BernoulliN2Off, () => { return _bernoulliN2PressureRoutine.Start(false) == RState.Running; }, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_bernoulliN2PressureRoutine); })
+                .WaitWithStopCondition(InstallStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); }, 
+                    () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, " BernoulliN2 Off failed"))
                 //12. WS Bladder Off
                 .Run(InstallStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_whBladderRoutine); })
+                .WaitWithStopCondition(InstallStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, 
+                    () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder Off failed"))
                 //13. Wait 0.5s for WS Bladder
-                .Delay(InstallStep.Wait500MS, 500)
+                .Delay(InstallStep.Wait500MSForWSBladder, 500)
                 //14. LS Vacuum Off
                 .Run(InstallStep.LSVacuumOff, () => { return _vacuumRoutine.Start(false) == RState.Running; }, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.LSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => { return CommonFunction.CheckRoutineStopState(_vacuumRoutine); })
+                .WaitWithStopCondition(InstallStep.LSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, 
+                    () => CheckRoutineStopStatus(_vacuumRoutine, "LS Vacuum Off failed"))
                 //15. Wait 0.5s 
-                .Delay(InstallStep.ReWait500MS, 500)
+                .Delay(InstallStep.Wait500MS, 500)
                 //16. Shuttle Goto MID
                 .Run(InstallStep.ShuttleGotoMID, () => { return _shuttleAxis.PositionStation("MID", false); }, NullFun, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; }, () => { return _shuttleAxis.Status == RState.Failed; })
+                .WaitWithStopCondition(InstallStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; }, 
+                    () => { return _shuttleAxis.Status == RState.Failed; })
                 //17. Home LS Axis
                 .Run(InstallStep.HomingLSAxis, () => { return _lsAxis.Home(); }, _delay_1ms)
-                .WaitWithStopCondition(InstallStep.HomingLSAxisWait, () => { return _lsAxis.Status == RState.End; }, () => { return _lsAxis.Status == RState.Failed; })
+                .WaitWithStopCondition(InstallStep.HomingLSAxisWait, () => { return _lsAxis.Status == RState.End; }, 
+                    () => { return _lsAxis.Status == RState.Failed; })
                 .End(InstallStep.End, NullFun, 10);
             return Runner.Status;
         }
@@ -163,7 +178,7 @@ namespace CyberX8_RT.Devices.Loader
                 _waferSize = SC.GetValue<int>($"Loader1.{_side}WaferSize");
             }
             _shuttleAxis = GetShuttleAxis();
-            _lsAxis = GetCrsAxis();
+            _lsAxis = GetLsAxis();
             _tiltAxis = GetTiltAxis(); 
             _loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"{Module}.Common");
             _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
@@ -173,12 +188,22 @@ namespace CyberX8_RT.Devices.Loader
             _whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
             _bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
             _bernoulliN2PressureRoutine = new LoaderSideBernoulliN2PressureRoutine($"{Module}.{_side}");
-            if(!CheckPreCondition())
+            
+            Runner.Start(Module, "Install LS");
+            return RState.Running;
+        }
+        /// <summary>
+        /// 检验Routine异常状态
+        /// </summary>
+        /// <returns></returns>
+        private bool CheckRoutineStopStatus(IRoutine routine, string error)
+        {
+            bool result = CommonFunction.CheckRoutineStopState(routine);
+            if (result)
             {
-                return RState.Failed;
+                NotifyError(eEvent.ERR_LOADER, $"{error}", 0);
             }
-            Runner.Start(Module, "InstallCRS");
-            return RState.Running;
+            return result;
         }
         /// <summary>
         /// 获取Shuttle轴对象
@@ -198,7 +223,7 @@ namespace CyberX8_RT.Devices.Loader
         /// 获取CRS轴对象
         /// </summary>
         /// <returns></returns>
-        private JetAxisBase GetCrsAxis()
+        private JetAxisBase GetLsAxis()
         {
             switch (_side)
             {
@@ -337,7 +362,7 @@ namespace CyberX8_RT.Devices.Loader
             double shuttlePosition = _shuttleAxis.MotionData.MotorPosition;
             if (_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "IN"))
             {
-                NotifyError(eEvent.ERR_LOADER, $"Shuttle {shuttlePosition} not in IN", -1);
+                NotifyError(eEvent.ERR_LOADER, $"Shuttle {shuttlePosition} is in IN", -1);
                 return false;
             }           
             

+ 2 - 2
CyberX8_RT/Devices/Loader/LoaderRotationAxisInterLock.cs

@@ -156,9 +156,9 @@ namespace CyberX8_RT.Devices.Loader
                     return false;
                 }
                 double loaderTransporterPosition = loaderTransporterElevatorAxis.MotionData.MotorPosition;
-                if (!loaderTransporterElevatorAxis.CheckPositionIsInStation(loaderTransporterPosition, "Up"))
+                if (!loaderTransporterElevatorAxis.CheckPositionIsInStation(loaderTransporterPosition, "UP"))
                 {
-                    LOG.WriteLog(eEvent.ERR_TRANSPORTER, Module, $"Loader transporter elevator is not in Up station, Cannot execute GotoSavedPosition");
+                    LOG.WriteLog(eEvent.ERR_TRANSPORTER, Module, $"Loader transporter elevator is not in UP station, Cannot execute GotoSavedPosition");
                     return false;
                 }
             }