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@@ -33,36 +33,28 @@ namespace CyberX8_RT.Modules.Transporter
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private enum PickUpStep
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{
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CheckPreCondition,
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- TargetCellUnclamp,
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- TargetCellUnclampWait,
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- VerticalLow,
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- VerticalLowWait,
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+ DropBlockLockoff,
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+ ElevatorGotoUp,
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+ ElevatorGotoUpWait,
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SafeMoveTo,
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CheckMoveToStatus,
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GantryPosition,
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- GantryPoisitiolWait,
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- UnlockTransporterClamp,
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- UnlockTransporterClampWait,
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- CellClampRetract,
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- //CellClampRetractWait,
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+ GantryPoisitionWait,
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LoopPickupRetry,
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- LoopRetryUnlock,
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- LoopRetryUnlockWait,
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- LoopRetryBackToLow,
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- LoopRetryBackToLowWait,
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- ElevatorPosition,
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- ElevatorPositionWait,
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+ LoopRetryLockoff,
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+ LoopRetryElevatorBackToUp,
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+ LoopRetryElevatorBackToUpWait,
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+ ElevatorPositionToCell,
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+ ElevatorPositionToCellWait,
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Delay,
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- ReadyToLockCheck,
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- LockTransporterClamp,
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- LockTransporterClampWait,
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+ DropBlockLockOn,
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LoopPickupRetryEnd,
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CalculateLiftupSpeed,
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PickupDelay,
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- VerticalUp,
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- VerticalUpWait,
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- UpdateWaferHolder,
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- CheckWHPresentAndLock,
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+ ElevatorPositionToUp,
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+ ElevatorPositionToUpWait,
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+ UpdateWaferShuttle,
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+ CheckWSPresent,
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//ReadBarcodeConfirm,
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End
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}
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@@ -74,11 +66,8 @@ namespace CyberX8_RT.Modules.Transporter
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private LoaderEntity _loaderEntity;
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private JetAxisBase _loaderRotationAxis;
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private SystemFacilities _facilities;
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- private TransporterUnlockRoutine _unlockRoutine;
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- private TransporterLockRoutine _lockRoutine;
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private TransporterConflictRoutine _conflictRoutine;
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private TransporterCommon _transporterCommon;
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- private LoaderPreTransferUnclampRoutine _preTransferUnclampRoutine;
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private LoaderCommonDevice _loaderCommonDevice;
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ProcessLayoutCellItem _cellItem;
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private int _pickupTime;
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@@ -109,175 +98,80 @@ namespace CyberX8_RT.Modules.Transporter
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public RState Monitor()
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{
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Runner.Run(PickUpStep.CheckPreCondition, CheckStartPreConfition, _delay_1ms)
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- //确认cell clamp Retracted
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- .Run(PickUpStep.TargetCellUnclamp, TargetCellUnclamp, _delay_1ms)
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- .WaitWithStopCondition(PickUpStep.TargetCellUnclampWait, TargetCellUnclampEndStatus, TargetCellUnclampStopStatus)
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- .Run(PickUpStep.VerticalLow, ElevatorGotoLow, _delay_1ms)
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- .WaitWithStopCondition(PickUpStep.VerticalLowWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
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- //1.2 Move to 安全
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+ //1. 确认DropBlockLock是否off
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+ .Run(PickUpStep.DropBlockLockoff, DropBlockLockoff, NullFun, _delay_1ms)
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+ //2. Elevator go to up
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+ .Run(PickUpStep.ElevatorGotoUp, ElevatorGotoUP, _delay_1ms)
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+ .WaitWithStopCondition(PickUpStep.ElevatorGotoUpWait, CheckElevatorPositionEndStatus, CheckElevatorPositionEndStatus)
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+ //3. other Transporter Safe Move
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.Run(PickUpStep.SafeMoveTo, SafeMoveTo, _delay_1ms)
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.WaitWithStopCondition(PickUpStep.CheckMoveToStatus, () => CommonFunction.CheckRoutineEndState(_conflictRoutine),
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CheckSafeMoveToStopStatus)
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- //1.2 Gantry 移动
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+ //4. Gantry 移动到目标位置
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.Run(PickUpStep.GantryPosition, GantryPositionToCell, _delay_1ms)
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- .WaitWithStopCondition(PickUpStep.GantryPoisitiolWait, CheckGantryPositionStatus, CheckGantryPositionRunStop)
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- //1.3 Unlock Transporter clamp
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- .Run(PickUpStep.UnlockTransporterClamp, () => { return _unlockRoutine.Start(null) == RState.Running; }, NullFun, _delay_1ms)
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- .WaitWithStopCondition(PickUpStep.UnlockTransporterClampWait, () => CommonFunction.CheckRoutineEndState(_unlockRoutine),
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- CheckUnlockRoutineStopStatus)
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- //.WaitWithStopCondition(PickUpStep.CellClampRetractWait,CheckCellRetractRoutineEndState,CheckGantryPositionRunStop)
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+ .WaitWithStopCondition(PickUpStep.GantryPoisitionWait, CheckGantryPositionStatus, CheckGantryPositionRunStop)
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+ //5. Pick up Retry
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.LoopRetryStart(PickUpStep.LoopPickupRetry,"Pick up loop retry",_pickMaxRetries,NullFun,_delay_1ms)
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- .LoopRetrySecondRun(PickUpStep.LoopRetryUnlock, () => { return _unlockRoutine.Start(null) == RState.Running; }, NullFun, _delay_1ms)
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- .LoopRetrySecondRunWithStopStatus(PickUpStep.LoopRetryUnlockWait, () => CommonFunction.CheckRoutineEndState(_unlockRoutine),
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- CheckUnlockRoutineStopStatus)
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- .LoopRetrySecondRun(PickUpStep.LoopRetryBackToLow,ElevatorGotoLow,NullFun,_delay_1ms)
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- .LoopRetrySecondRunWithStopStatus(PickUpStep.LoopRetryBackToLowWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
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- //1.4 Elevator 移动至cell
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- .LoopRetryRun(PickUpStep.ElevatorPosition, () => { return VerticalPositionToCell(); }, NullFun, _delay_1ms)
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- .LoopRetryRunWithStopStatus(PickUpStep.ElevatorPositionWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
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+ .LoopRetrySecondRun(PickUpStep.LoopRetryLockoff, DropBlockLockoff, NullFun, _delay_1ms)
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+ .LoopRetrySecondRun(PickUpStep.LoopRetryElevatorBackToUp, ElevatorGotoUp, NullFun,_delay_1ms)
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+ .LoopRetrySecondRunWithStopStatus(PickUpStep.LoopRetryElevatorBackToUpWait, CheckElevatorPositionEndStatus, CheckElevatorPositionStopStatus)
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+ //6. Elevator 移动至对应cell位
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+ .LoopRetryRun(PickUpStep.ElevatorPositionToCell, ElevatorPositionToCell, NullFun, _delay_1ms)
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+ .LoopRetryRunWithStopStatus(PickUpStep.ElevatorPositionToCellWait, CheckElevatorPositionEndStatus, CheckElevatorPositionStopStatus)
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.LoopRetryDelay(PickUpStep.Delay,500)
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- //1.5 确认Ready to Lock Sensor
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- .LoopRetryWaitBack(PickUpStep.ReadyToLockCheck,CheckReadyToLock,_delay_1s)
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- //1.6 Unlock Transporter clamp
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- .LoopRetryRun(PickUpStep.LockTransporterClamp, () => { return _lockRoutine.Start(null) == RState.Running; }, NullFun, _delay_1ms)
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- .LoopRetryRunWithStopStatusBack(PickUpStep.LockTransporterClampWait, () => { return CommonFunction.CheckRoutineEndState(_lockRoutine); },
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- CheckLockRoutineStopStatus)
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+ //7. Drop Block Lock on，抓取WS
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+ .LoopRetryRun(PickUpStep.DropBlockLockOn, DropBlockLockon, NullFun, _delay_1ms)
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.LoopRetryEnd(PickUpStep.LoopPickupRetryEnd, _delay_1ms)
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- //1.7 确认Elevator lift speed
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+ //8. 确认Elevator lift speed
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.Run(PickUpStep.CalculateLiftupSpeed,CalculateLiftupSpeed,_delay_1ms)
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- //1.8 Pickup delay
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- .Delay(PickUpStep.PickupDelay,_pickupDelayTime*1000)
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- //1.9 Elevator goto Up
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- .Run(PickUpStep.VerticalUp, ElevatorGotoUP, 100)
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- .WaitWithStopCondition(PickUpStep.VerticalUpWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
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- //2.0 Material Tracking Update
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- .Run(PickUpStep.UpdateWaferHolder, WaferHolderTransfer,_delay_1ms)
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- //2.0 确认WSPresent与Lock
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- .Wait(PickUpStep.CheckWHPresentAndLock,CheckWHPresentAndLock,_delay_2s)
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- //2.1 Read Barcode 确认与Material Tracking的转移是否一致
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+ //9. Pickup delay
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+ .Delay(PickUpStep.PickupDelay,_pickupDelayTime * 1000)
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+ //10. Elevator goto Up
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+ .Run(PickUpStep.ElevatorPositionToUp, ElevatorGotoUP, 100)
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+ .WaitWithStopCondition(PickUpStep.ElevatorPositionToUpWait, CheckElevatorPositionEndStatus, CheckElevatorPositionStopStatus)
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+ //11. Material Tracking Update
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+ .Run(PickUpStep.UpdateWaferShuttle, WaferShuttleTransfer,_delay_1ms)
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+ //12. 确认Transporter的Wafer shuttle hold present信号为on
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+ .Wait(PickUpStep.CheckWSPresent,CheckWSPresent, _delay_2s)
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+ //13. Read Barcode 确认与Material Tracking的转移是否一致
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//.Run(PickUpStep.ReadBarcodeConfirm,ReadBarcode,_delay_1ms)
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.End(PickUpStep.End,NullFun,100);
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return Runner.Status;
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}
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/// <summary>
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- /// 目标cell unclamp
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+ /// 关闭DropBlockLock
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/// </summary>
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/// <returns></returns>
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- private bool TargetCellUnclamp()
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+ private bool DropBlockLockoff()
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{
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- if (_cellName == "Loader")
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+ if (_transporterCommon.TransporterData.Lock)
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{
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- bool result= _preTransferUnclampRoutine.Start() == RState.Running;
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- if(!result)
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- {
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- NotifyError(eEvent.ERR_TRANSPORTER, "Loader Unclamp failed",0);
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- }
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- return result;
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- }
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- else
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- {
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- _cellItem = ProcessLayoutManager.Instance.GetProcessLayoutCellItemByModuleName(_cellName);
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- if(_cellItem!=null)
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- {
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- bool result = false;
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- if(Enum.TryParse(_cellItem.ModuleName,out ModuleName cellModuleName))
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- {
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- if (ModuleHelper.IsRinse(cellModuleName))
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- {
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- RinseDevice rinseDevice = DEVICE.GetDevice<RinseDevice>(_cellItem.ModuleName);
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- if (rinseDevice != null)
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- {
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- result= rinseDevice.WaferHolderClampValveOff();
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- if(!result)
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- {
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- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellItem.ModuleName} Clamp off failed", 0);
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- }
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- return result;
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- }
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- }
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- else if (ModuleHelper.IsMetal(cellModuleName))
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- {
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- MetalCellDevice metalCellDevice = DEVICE.GetDevice<MetalCellDevice>(_cellItem.ModuleName);
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- if (metalCellDevice != null)
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- {
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- result= metalCellDevice.WaferHolderClampOff();
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- if (!result)
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- {
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- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellItem.ModuleName} Clamp off failed",0);
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- }
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- return result;
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- }
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- }
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- }
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- }
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- }
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+ return _transporterCommon.UnlockOperation("", null);
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+ }
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return true;
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}
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/// <summary>
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- /// 目标Cell Unclamp状态
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+ /// 打开DropBlockLock
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/// </summary>
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/// <returns></returns>
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- private bool TargetCellUnclampEndStatus()
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+ private bool DropBlockLockon()
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{
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- if (_cellName == "Loader")
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+ if (!_transporterCommon.TransporterData.Lock)
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{
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- return CommonFunction.CheckRoutineEndState(_preTransferUnclampRoutine);
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- }
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- else
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- {
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- _cellItem = ProcessLayoutManager.Instance.GetProcessLayoutCellItemByModuleName(_cellName);
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- if (_cellItem != null)
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- {
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- if (Enum.TryParse(_cellItem.ModuleName, out ModuleName cellModuleName))
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- {
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- if (ModuleHelper.IsRinse(cellModuleName))
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- {
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- RinseDevice rinseDevice = DEVICE.GetDevice<RinseDevice>(_cellItem.ModuleName);
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- if (rinseDevice != null)
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- {
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- return !rinseDevice.RinseData.WaferHolderClamp;
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- }
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- }
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- else if (ModuleHelper.IsMetal(cellModuleName))
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- {
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- MetalCellDevice metalCellDevice = DEVICE.GetDevice<MetalCellDevice>(_cellItem.ModuleName);
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- if (metalCellDevice != null)
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- {
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- return metalCellDevice.ClampOff;
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- }
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- }
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- }
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- }
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+ return _transporterCommon.LockOperation("", null);
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}
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return true;
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}
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/// <summary>
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- /// 目标Cell Unclamp运行中止状态
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- /// </summary>
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- /// <returns></returns>
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- private bool TargetCellUnclampStopStatus()
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- {
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- if (_cellName == "Loader")
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- {
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- bool result= CommonFunction.CheckRoutineStopState(_preTransferUnclampRoutine);
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- if (result)
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- {
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- NotifyError(eEvent.ERR_TRANSPORTER, "Loader Unclamp failed", 0);
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- }
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- return result;
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- }
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- return false;
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- }
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- /// <summary>
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- /// Elevator运动至LOW
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+ /// Elevator运动至UP
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/// </summary>
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/// <returns></returns>
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- private bool ElevatorGotoLow()
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+ private bool ElevatorGotoUp()
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{
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- bool result = _elevatorAxis.PositionStation("LOW");
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+ bool result = _elevatorAxis.PositionStation("UP");
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if(!result)
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{
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- NotifyError(eEvent.ERR_TRANSPORTER, "Elevator goto LOW failed",0);
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+ NotifyError(eEvent.ERR_TRANSPORTER, "Elevator goto UP failed",0);
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}
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return result;
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}
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@@ -364,7 +258,7 @@ namespace CyberX8_RT.Modules.Transporter
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/// Elevator Position to cell
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/// </summary>
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/// <returns></returns>
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- private bool VerticalPositionToCell()
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+ private bool ElevatorPositionToCell()
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{
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bool result = false;
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if( _cellItem != null )
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@@ -393,7 +287,7 @@ namespace CyberX8_RT.Modules.Transporter
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/// 检验Vertical移动状态
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/// </summary>
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/// <returns></returns>
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- private bool CheckVerticalPositionStatus()
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+ private bool CheckElevatorPositionEndStatus()
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{
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return _elevatorAxis.Status == RState.End;
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}
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@@ -401,7 +295,7 @@ namespace CyberX8_RT.Modules.Transporter
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/// 检验Vertical是否还在运动
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/// </summary>
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/// <returns></returns>
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- private bool CheckVerticalPositionRunStop()
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+ private bool CheckElevatorPositionStopStatus()
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{
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bool result = _elevatorAxis.Status == RState.Failed || _elevatorAxis.Status == RState.Timeout ;
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if (result)
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@@ -430,51 +324,7 @@ namespace CyberX8_RT.Modules.Transporter
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NotifyError(eEvent.ERR_TRANSPORTER, "Gantry Motion failed", 0);
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}
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return result;
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- }
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- /// <summary>
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- /// 检验Unlock异常状态
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- /// </summary>
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- /// <returns></returns>
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- private bool CheckUnlockRoutineStopStatus()
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- {
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- bool result = CommonFunction.CheckRoutineStopState(_unlockRoutine);
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- if (result)
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- {
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- NotifyError(eEvent.ERR_TRANSPORTER, "unlock failed", 0);
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- }
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- return result;
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- }
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- /// <summary>
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- /// 检验Ready to lock
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- /// </summary>
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- /// <returns></returns>
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- private bool CheckReadyToLock()
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- {
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- if(! _transporterCommon.TransporterData.ReadyToLock1)
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- {
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- NotifyError(eEvent.WARN_TRANSPORTER, $"{Module} Ready to lock1 is off",0);
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- return false;
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- }
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- if (!_transporterCommon.TransporterData.ReadyToLock2)
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- {
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- NotifyError(eEvent.WARN_TRANSPORTER, $"{Module} Ready to lock2 is off",0);
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- return false;
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- }
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- return true;
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- }
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- /// <summary>
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- /// 检验Lock Routine异常状态
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- /// </summary>
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- /// <returns></returns>
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- private bool CheckLockRoutineStopStatus()
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- {
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- bool result = CommonFunction.CheckRoutineStopState(_lockRoutine);
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- if(result)
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- {
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- NotifyError(eEvent.WARN_TRANSPORTER, "lock failed", 0);
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- }
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- return result;
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- }
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+ }
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/// <summary>
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/// 计算提升速度
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/// </summary>
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@@ -541,7 +391,7 @@ namespace CyberX8_RT.Modules.Transporter
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/// 更新WaferHolder移动信息
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/// </summary>
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/// <returns></returns>
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- private bool WaferHolderTransfer()
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+ private bool WaferShuttleTransfer()
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{
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bool isMetal = false;
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DateTime lastMetalRecipeTime = DateTime.Now;
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@@ -593,10 +443,10 @@ namespace CyberX8_RT.Modules.Transporter
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/// 检验WHPresent与Lock状态
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/// </summary>
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/// <returns></returns>
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- private bool CheckWHPresentAndLock()
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+ private bool CheckWSPresent()
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{
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- bool locked = _transporterCommon.TransporterData.Locked1 && _transporterCommon.TransporterData.Locked2;
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- bool whPresent= _transporterCommon.TransporterData.WhPresent1 && _transporterCommon.TransporterData.WhPresent2;
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+ bool locked = _transporterCommon.TransporterData.Lock;
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+ bool whPresent= _transporterCommon.TransporterData.WSHoldPresent;
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bool result= locked && (whPresent||_bypassWaferHolderPresent);
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if (!result)
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{
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@@ -641,18 +491,14 @@ namespace CyberX8_RT.Modules.Transporter
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public RState Start(params object[] objs)
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{
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_cellName = objs[0].ToString();
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- _elevatorAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Elevator");
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+ _elevatorAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Elevator");;
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_gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Gantry");
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_loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());
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_loaderRotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");
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- _facilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
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- _unlockRoutine = new TransporterUnlockRoutine(Module);
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- _lockRoutine = new TransporterLockRoutine(Module);
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_conflictRoutine = new TransporterConflictRoutine(Module);
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_transporterCommon = DEVICE.GetDevice<TransporterCommon>($"{Module}.Common");
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_loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"{ModuleName.Loader1}.Common");
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_bypassWaferHolderPresent = SC.GetValue<bool>("Transporter.BypassWaferHolderPresent");
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- _preTransferUnclampRoutine = new LoaderPreTransferUnclampRoutine(ModuleName.Loader1.ToString());
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_velocity = 0;
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_acceleration = 0;
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_pickMaxRetries = SC.GetValue<int>("Transporter.MaxPickTries");
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@@ -674,24 +520,32 @@ namespace CyberX8_RT.Modules.Transporter
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/// <returns></returns>
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private bool CheckStartPreConfition()
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{
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+ //所有轴上电并Homed
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bool result = CheckPreCondition();
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if(!result)
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{
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return false;
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}
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- double elevatorPosition = _elevatorAxis.MotionData.MotorPosition;
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- if (!_elevatorAxis.CheckPositionIsInStation(elevatorPosition, "Up") &&
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- !_elevatorAxis.CheckPositionIsInStation(elevatorPosition, "Low"))
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- {
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- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} elevator axis {elevatorPosition} is not in Up or Low station",-1);
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+ //Transporter Elevator在UP位
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+ //double elevatorPosition = _elevatorAxis.MotionData.MotorPosition;
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+ //if (!_elevatorAxis.CheckPositionIsInStation(elevatorPosition, "UP"))
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+ //{
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+ // NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} elevator axis {elevatorPosition} is not in Up station", -1);
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+ // return false;
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+ //}
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+ //Transporter的Wafer shuttle hold present信号为off
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+ if (_transporterCommon.TransporterData.WSHoldPresent)
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+ {
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+ NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} WaferShuttleHoldPresent is on", -1);
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return false;
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}
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-
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+ //Loader is Home
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if (!_loaderEntity.IsHomed)
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{
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- NotifyError(eEvent.ERR_TRANSPORTER, $"{ModuleName.Loader1} is not homed",-1);
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+ NotifyError(eEvent.ERR_TRANSPORTER, $"{ModuleName.Loader1} is not homed", -1);
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return false;
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}
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+ //若目标Cell为Loader, 则Loader需在TRNA或TRANB位置且WaferShuttlePresent信号on
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if (_cellName == "Loader")
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{
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double loaderRotationPosition = _loaderRotationAxis.MotionData.MotorPosition;
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@@ -701,23 +555,27 @@ namespace CyberX8_RT.Modules.Transporter
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NotifyError(eEvent.ERR_TRANSPORTER, $"{ModuleName.Loader1} rotation axis {loaderRotationPosition} is not int TRNPA or TRNPB station",-1);
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return false;
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}
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+ if(!_loaderCommonDevice.CommonData.WaferHolderPresent)
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+ {
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+ NotifyError(eEvent.ERR_TRANSPORTER, $"{ModuleName.Loader1} WaferShuttlePresent is off", -1);
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+ return false;
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+ }
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}
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-
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- if (!WaferHolderManager.Instance.HasWaferHolder(_cellName))
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+ //Transporter没有WS信息
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+ if (!WaferHolderManager.Instance.HasWaferHolder(Module))
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{
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- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellName} does not has wafer Shuttle", -1);
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+ NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} already has wafer Shuttle", -1);
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return false;
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}
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- //检验Facilities
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- var faciltiesResult = _facilities.CheckCDA();
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- if (!faciltiesResult.result)
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+ //目标Cell应有WS信息
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+ if (!WaferHolderManager.Instance.HasWaferHolder(_cellName))
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{
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- NotifyError(eEvent.ERR_TRANSPORTER, faciltiesResult.reason,-1);
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+ NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellName} does not has wafer shuttle", -1);
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return false;
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}
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+
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return true;
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}
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-
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/// <summary>
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/// 检验前置条件
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/// </summary>
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