Helios/PLC/POUs/PRG/IO_EXCHANGE.TcPOU

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <POU Name="IO_EXCHANGE" Id="{f197fe3c-f147-431b-8c60-d0dc828e5b5f}" SpecialFunc="None">
    <Declaration><![CDATA[PROGRAM IO_EXCHANGE
VAR
	WRITE_SINT			:	FB_EcCoESdoWrite	;
	sNetId              : 	T_AmsNetId := '10.4.6.84.7.1'; (* NetId of EtherCAT Master *)     
    nSlaveAddr_1        : 	UINT := 1003; (* Port Number of EtherCAT Slave *) 
	SDO_WRITE			:	STR_SDO	;
	WRITE_DATA_SINT		:	USINT;
	WRITE_EN_SINT		:	BOOL;
END_VAR
]]></Declaration>
    <Implementation>
      <ST><![CDATA[PLC_TO_UI();
UI_TO_PLC();

//************************HW-IO******************************************
//C02
		GV.NDI.	AV101_OPEN	:=	ECC.	CHAMBER_IN.		C02	[	1	];	//	AV101OPEN
		GV.NDI.	AV101_CLOSE	:=	ECC.	CHAMBER_IN.		C02	[	2	];	//	AV101CLOSE
		GV.NDI.	AV102_OPEN	:=	ECC.	CHAMBER_IN.		C02	[	3	];	//	AV102OPEN
	//	GV.NDI.	AV102_CLOSE	:=	ECC.	CHAMBER_IN.		C02	[	4	];	//	AV102CLOSE
	//	GV.NDI.	AV103_OPEN	:=									
	//	GV.NDI.	AV103_CLOSE	:=									
		GV.NDI.	AV104_OPEN	:=	ECC.	CHAMBER_IN.		C02	[	5	];	//	AV104OPEN
	//	GV.NDI.	AV104_CLOSE	:=	ECC.	CHAMBER_IN.		C02	[	6	];	//	AV104CLOSE
		GV.NDI.	AV105_OPEN	:=	ECC.	CHAMBER_IN.		C02	[	7	];	//	AV105OPEN
	//	GV.NDI.	AV105_CLOSE	:=	ECC.	CHAMBER_IN.		C02	[	8	];	//	AV105CLOSE
		GV.NDI.	AV106_OPEN	:=	ECC.	CHAMBER_IN.		C02	[	9	];	//	AV106OPEN
		GV.NDI.	AV106_CLOSE	:=	ECC.	CHAMBER_IN.		C02	[	10	];	//	AV106CLOSE
		GV.NDI.	CY1_OPEN	:=	ECC.	CHAMBER_IN.		C02	[	11	];	//	CY1 UP
		GV.NDI.	CY1_CLOSE	:=	ECC.	CHAMBER_IN.		C02	[	12	];	//	CY1 DOWN
		GV.NDI.	Lift_Pin_Middle1	:=	ECC.	CHAMBER_IN.		C02	[	13	];	//	CY1 Middle
		GV.NDI.	CY2_OPEN	:=	ECC.	CHAMBER_IN.		C02	[	14	];	//	CY2 UP						 
		GV.NDI.	CY2_CLOSE	:=	ECC.	CHAMBER_IN.		C02	[	15	];	//	CY2 DOWN
		GV.NDI.	Lift_Pin_Middle2	:=	ECC.	CHAMBER_IN.		C02	[	16	];	//	CY2 Middle								

//C03																											
		GV.NDI.	GV1_OPEN			:=	ECC.	CHAMBER_IN.		C03	[	1	];		//Slit Door Opened
		GV.NDI.	GV1_CLOSE			:=	ECC.	CHAMBER_IN.		C03	[	2	];		//Slit Door Closed
		GV.NDI.FL02B2				:=	ECC.	CHAMBER_IN.		C03	[	3	];		
		//							:=	ECC.	CHAMBER_IN.		C03	[	4	];		
		GV.NDI.FL03B2				:=	ECC.	CHAMBER_IN.		C03	[	5	];		
		//							:=	ECC.	CHAMBER_IN.		C03	[	6	];		
		GV.NDI.FL04B2				:=	ECC.	CHAMBER_IN.		C03	[	7	];		
		GV.NDI.Robot_Extend_TO_PM	:=	ECC.	CHAMBER_IN.		C03	[	8	];		//Robot Extend To PM
					//				:=	ECC.	CHAMBER_IN.		C03	[	9	];		
		GV.NDI.CDA_OK				:=	ECC.	CHAMBER_IN.		C03	[	10	];		
		GV.NDI.SYS_CDA_OK			:=	ECC.	CHAMBER_IN.		C03	[	11	];		//SYS CDA OK
		GV.NDI.SYS_N2_OK			:=	ECC.	CHAMBER_IN.		C03	[	12	];		//SYS N2 OK
		GV.NDI.TM_Lid_Closed		:=	ECC.	CHAMBER_IN.		C03	[	13	];		//TM Lid Closed
					//				:=	ECC.	CHAMBER_IN.		C03	[	14	];		
					//				:=	ECC.	CHAMBER_IN.		C03	[	15	];		//
					//				:=	ECC.	CHAMBER_IN.		C03	[	16	];		//

//C04
		GV.AI.	APC_Temp				:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C04	[	1	])/10;	//	SSR1	钟摆阀(E01)	TC01
		GV.AI.	Lid_Temp				:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C04	[	2	])/10;	//	SSR2	LID HEATER控温TC	(E02-E05) TC02
		GV.AI.	Lid_Temp_Monitor1		:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C04	[	3	])/10;	//	LID HEATER TC monitor	TC03
		GV.AI.	Lid_Temp_Monitor2		:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C04	[	4	])/10;	//	LID HEATER TC monitor	TC04
		GV.AI.	Chamber_Temp1			:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C04	[	5	])/10;	//	SSR3	CHAMBER HEATER 控温TC (E06,E07)	TC05
		GV.AI.	Chamber_Temp2			:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C04	[	6	])/10;	//	SSR4	CHAMBER HEATER 控温TC (E08,E09,E12,E13)	TC06
		GV.AI.	Chamber_Temp3			:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C04	[	7	])/10;	//	SSR5	CHAMBER HEATER 控温TC (E10,E11)			TC07
		GV.AI.	Stage_Temp1				:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C04	[	8	])/10;	//	CHILLER控温用(左侧内)	TC08

//C05		
		GV.AI.	Stage_Temp2				:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C05	[	1	])/10;	//	CHILLER控温用(左侧外)	TC09 
		GV.AI.	Stage_Temp3				:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C05	[	2	])/10;	//	CHILLER控温用(右侧内)	TC10
		GV.AI.	Stage_Temp4				:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C05	[	3	])/10;	//	CHILLER控温用(右侧外)	TC11
		GV.AI.	Chamber_Temp_Monitor	:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C05	[	4	])/10;	//	腔体底部监控用	TC12
		GV.AI.	Gate_Valve_Temp			:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C05	[	5	])/10;	//	SSR18	GATE VALVE控温用	E18 TC13
		GV.AI.	Gate_Valve_Temp_Monitor	:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C05	[	6	])/10;	//	GATE VALVE监控	TC14
										//			INT_TO_REAL(	ECC.	CHAMBER_IN.	C05	[	7	])/10;	//	
										//			INT_TO_REAL(	ECC.	CHAMBER_IN.	C05	[	8	])/10;	//	

//C06							
										//							ECC.	CHAMBER_IN.	C06	[	1	]);
										//							ECC.	CHAMBER_IN.	C06	[	2	]);
										//							ECC.	CHAMBER_IN.	C06	[	3	]);
										//							ECC.	CHAMBER_IN.	C06	[	4	]);

							
//C07											
		ECC.	CHAMBER_OUT.	C07	[	1	]	:=	TRUE;//GV_IL.TMP_PW_EN;//GV.TURBO_PUMP_POWER_ON							;	
		ECC.	CHAMBER_OUT.	C07	[	2	]	:=	GV_IL.HTR_APC_EN;//GV.PENDULUM_VALVE_HEATER_POWER_ON				;	
		ECC.	CHAMBER_OUT.	C07	[	3	]	:=	GV_IL.HTR_LID_EN;//GV.LID_HEATER_POWER_ON							;	
		ECC.	CHAMBER_OUT.	C07	[	4	]	:=	GV_IL.HTR_CHAMBER_EN;//GV.CHAMBER_HEATER_POWER_ON						;	
		ECC.	CHAMBER_OUT.	C07	[	5	]	:=	GV_IL.HTR_GAS_BOX_EN;//GV.IGS_HEATER_POWER_ON							;	
		ECC.	CHAMBER_OUT.	C07	[	6	]	:=	GV_IL.HTR_GAS_BOX_EN;//GV.TAPE_HEATER_POWER_ON							;	
		ECC.	CHAMBER_OUT.	C07	[	7	]	:=	GV_IL.HTR_FORLINE_EN;//GV.FORELINE_HEATER_POWER_ON						;	
		ECC.	CHAMBER_OUT.	C07	[	8	]	:=	GV_IL.HTR_GATE_VALVE_EN;//GV.GATE_VALVE_HEATER_POWER_ON					;	
	//	ECC.	CHAMBER_OUT.	C07	[	9	]	:=			;	
	//	ECC.	CHAMBER_OUT.	C07	[	10	]	:=			;	
	//	ECC.	CHAMBER_OUT.	C07	[	11	]	:=			;	
	//	ECC.	CHAMBER_OUT.	C07	[	12	]	:=			;	
		ECC.	CHAMBER_OUT.	C07	[	13	]	:=	GV.NDO.GV_Open_Enable		;	//Slit Door Open Enable
		ECC.	CHAMBER_OUT.	C07	[	14	]	:=	GV.NDO.GV_Close_Enable		;	//Slit Door Close Enable
		ECC.	CHAMBER_OUT.	C07	[	15	]	:=	GV.NDO.TM_Robot_Extend_Enable AND GV.NDI.CY1_OPEN AND GV.NDI.CY2_OPEN		;	//Robot Extend Enable
		ECC.	CHAMBER_OUT.	C07	[	16	]	;//:=			;	
												
//C08												
		ECC.	CHAMBER_OUT.	C08	[	1	]	:=	GV.LID_HEATER_SSR_ON[1]		;	//SSR02
	//	ECC.	CHAMBER_OUT.	C08	[	2	]	:=	GV.LID_HEATER_SSR_ON[2]		;	//SSR02
	//	ECC.	CHAMBER_OUT.	C08	[	3	]	:=	GV.LID_HEATER_SSR_ON[3]		;	//SSR02
	//	ECC.	CHAMBER_OUT.	C08	[	4	]	:=	GV.LID_HEATER_SSR_ON[4]		;	//SSR02
	//	ECC.	CHAMBER_OUT.	C08	[	5	]	:=								;	
	//	ECC.	CHAMBER_OUT.	C08	[	6	]	:=								;	
		ECC.	CHAMBER_OUT.	C08	[	7	]	:=	GV.CHAMBER_HEATER_SSR_ON[1]	;	//SSR03
		ECC.	CHAMBER_OUT.	C08	[	8	]	:=	GV.CHAMBER_HEATER_SSR_ON[2]	;	//SSR03
		ECC.	CHAMBER_OUT.	C08	[	9	]	:=	GV.CHAMBER_HEATER_SSR_ON[3]	;	//SSR04	
	//	ECC.	CHAMBER_OUT.	C08	[	10	]	:=	
		ECC.	CHAMBER_OUT.	C08	[	11	]	:=	GV.CHAMBER_HEATER_SSR_ON[4];	//SSR05
	//	ECC.	CHAMBER_OUT.	C08	[	12	]	:=	
		ECC.	CHAMBER_OUT.	C08	[	13	]	:=	
	//	ECC.	CHAMBER_OUT.	C08	[	14	]	:=	
	//	ECC.	CHAMBER_OUT.	C08	[	15	]	:=								;	
	//	ECC.	CHAMBER_OUT.	C08	[	16	]	:=								;	
												
//C09												
		ECC.	CHAMBER_OUT.	C09	[	1	]	:=	GV.FORELINE_HEATER_SSR_ON[1];	//SSR6	AV102 E33
		ECC.	CHAMBER_OUT.	C09	[	2	]	:=	GV.FORELINE_HEATER_SSR_ON[2];	//SSR7	AV101 E36
		ECC.	CHAMBER_OUT.	C09	[	3	]	:=	GV.FORELINE_HEATER_SSR_ON[3];	//SSR8	AV106	E38
		ECC.	CHAMBER_OUT.	C09	[	4	]	:=	GV.FORELINE_HEATER_SSR_ON[4];	//SSR9	BA01	
	//	ECC.	CHAMBER_OUT.	C09	[	5	]	:=								;	
	//	ECC.	CHAMBER_OUT.	C09	[	6	]	:=								;	
		ECC.	CHAMBER_OUT.	C09	[	7	]	:=	GV.GATE_VALVE_SSR_ON		;	//SSR18
	//	ECC.	CHAMBER_OUT.	C09	[	8	]	:=								;	
		ECC.	CHAMBER_OUT.	C09	[	9	]	:=	GV.PEN_VALVE_HEATER_SSR_ON	;	//SSR01
	//	ECC.	CHAMBER_OUT.	C09	[	10	]	:=								;	
		ECC.	CHAMBER_OUT.	C09	[	11	]	:=	GV.FORELINE_HEATER_SSR_ON[5];	//SSR10	VG103
		ECC.	CHAMBER_OUT.	C09	[	12	]	:=	GV.FORELINE_HEATER_SSR_ON[6];	//SSR11	EXHAUST1-6
		ECC.	CHAMBER_OUT.	C09	[	13	]	:=	GV.FORELINE_HEATER_SSR_ON[7];	//SSR12	EXHAUST7-8
		ECC.	CHAMBER_OUT.	C09	[	14	]	:=	GV.FORELINE_HEATER_SSR_ON[8];	//SSR13	
	//	ECC.	CHAMBER_OUT.	C09	[	15	]	:=								;	
	//	ECC.	CHAMBER_OUT.	C09	[	16	]	:=								;	
		
//C15
		GV.AI.VG103_Pipe_Temp			:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C15	[	1	])/10;	//	TC-03-A	SSR10	AV104+VG103_PIPE_1+VG103_PIPE_2
		GV.AI.BA01_Temp					:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C15	[	2	])/10;	//	TC-06-A	SSR09	BA101腔体侧+BA101
		GV.AI.VG101_Pipe_Temp			:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C15	[	3	])/10;	//	TC-07-A	SSR13	PS10+PS11
		GV.AI.Exhaust1_6_Temp			:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C15	[	4	])/10;	//	TC-29-A	SSR11	EXHAUST OUT1-6 E29-E32 E34-E35
		GV.AI.AV102_Temp				:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C15	[	5	])/10;	//	TC-33-A	SSR06	AV102
		GV.AI.AV101_Temp				:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C15	[	6	])/10;	//	TC-36-A	SSR07	AV101
		GV.AI.Exhaust7_8_Temp			:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C15	[	7	])/10;	//	TC-37-A	SSR12	EXHAUST7+8  E37+E39
		GV.AI.AV106_Temp				:=			INT_TO_REAL(	ECC.	CHAMBER_IN.	C15	[	8	])/10;	//	TC-38-A	SSR08	AV106
	

//C32												
		GV.AI.PG_PS1_VALUE	:=	(ECC.	IGS_IN.		C32	[	1	]*115/32767-15)*6.895;		
		GV.AI.PG_PS2_VALUE	:=	(ECC.	IGS_IN.		C32	[	2	]*115/32767-15)*6.895;		
		GV.AI.PG_PS3_VALUE	:=	(ECC.	IGS_IN.		C32	[	3	]*115/32767-15)*6.895;		
		GV.AI.PG_PS4_VALUE	:=	(ECC.	IGS_IN.		C32	[	4	]*115/32767-15)*6.895;		
												
//C33												
		GV.AI.PG_PS5_VALUE	:=	(ECC.	IGS_IN.		C33	[	1	]*75/32767-15)*6.895;		
		GV.AI.PG_PS6_VALUE	:=	(ECC.	IGS_IN.		C33	[	2	]*115/32767-15)*6.895;		
//		GV.AI.PG_PS7_VALUE	:=	(ECC.	IGS_IN.		C33	[	3	]*1015/32767-15)*6.895;		
//		GV.AI.PG_PS8_VALUE	:=	(ECC.	IGS_IN.		C33	[	4	]*1015/32767-15)*6.895;		
												
//C34												
//		GV.AI.PG_PS9_VALUE	:=	(ECC.	IGS_IN.		C34	[	1	]*1015/32767-15)*6.895;		
		GV.AI.PS1_VALUE		:=	(ECC.	IGS_IN.		C34	[	2	]*1015/32767-15)*6.895;		
		GV.AI.PS2_VALUE		:=	(ECC.	IGS_IN.		C34	[	3	]*1015/32767-15)*6.895;		
		GV.AI.MS1_VALUE		:=	(ECC.	IGS_IN.		C34	[	4	]*1015/32767-15)*6.895;		
												
//C35												
		GV.AI.GD01_VALUE	:=	ECC.	IGS_IN.		C35	[	1	];		
		GV.AI.GD02_VALUE	:=	ECC.	IGS_IN.		C35	[	2	];		
					//		:=	ECC.	IGS_IN.		C35	[	3	];		
					//		:=	ECC.	IGS_IN.		C35	[	4	];		
												
//C36												
		GV.NDI.	PG_PS1_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C36	[	1	];
		GV.NDI.	PG_PS1_Pressure_Switch_Down_Limit	:=	 ECC.	IGS_IN.		C36	[	2	];
		GV.NDI.	PG_PS2_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C36	[	3	];
		GV.NDI.	PG_PS2_Pressure_Switch_Down_Limit	:=	 ECC.	IGS_IN.		C36	[	4	];
		GV.NDI.	PG_PS3_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C36	[	5	];
		GV.NDI.	PG_PS3_Pressure_Switch_Down_Limit	:=	 ECC.	IGS_IN.		C36	[	6	];
		GV.NDI.	PG_PS4_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C36	[	7	];
		GV.NDI.	PG_PS4_Pressure_Switch_Down_Limit	:=	 ECC.	IGS_IN.		C36	[	8	];
		GV.NDI.	PG_PS5_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C36	[	9	];
		GV.NDI.	PG_PS5_Pressure_Switch_Down_Limit	:=	 ECC.	IGS_IN.		C36	[	10	];
		GV.NDI.	PG_PS6_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C36	[	11	];
		GV.NDI.	PG_PS6_Pressure_Switch_Down_Limit	:=	 ECC.	IGS_IN.		C36	[	12	];
//		GV.NDI.	PG_PS7_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C36	[	13	];
//		GV.NDI.	PG_PS7_Pressure_Switch_Down_Limit	:=	 ECC.	IGS_IN.		C36	[	14	];
//		GV.NDI.	PG_PS8_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C36	[	15	];
//		GV.NDI.	PG_PS8_Pressure_Switch_Down_Limit	:=	 ECC.	IGS_IN.		C36	[	16	];
											
//C37											
//		GV.NDI.	PG_PS9_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C37	[	1	];
//		GV.NDI.	PG_PS9_Pressure_Switch_Down_Limit	:=	 ECC.	IGS_IN.		C37	[	2	];
		//GV.NDI.	MS1_Pressure_Switch_Up_Limit		:=	 ECC.	IGS_IN.		C37	[	3	];
		GV.NDI.	MS1_ALM								:=	 ECC.	IGS_IN.		C37	[	4	];//QDP33P
		GV.NDI.	PS1_Pressure_Switch					:=	 ECC.	IGS_IN.		C37	[	5	];
		GV.NDI.	PS2_Pressure_Switch					:=	 ECC.	IGS_IN.		C37	[	6	];
											//		:=	ECC.	IGS_IN.		C37	[	7	];
											//		:=	ECC.	IGS_IN.		C37	[	8	];
											//		:=	ECC.	IGS_IN.		C37	[	9	];
											//		:=	ECC.	IGS_IN.		C37	[	10	];
											//		:=	ECC.	IGS_IN.		C37	[	11	];
											//		:=	ECC.	IGS_IN.		C37	[	12	];
											//		:=	ECC.	IGS_IN.		C37	[	13	];
											//		:=	ECC.	IGS_IN.		C37	[	14	];
											//		:=	ECC.	IGS_IN.		C37	[	15	];
											//		:=	ECC.	IGS_IN.		C37	[	16	];

(*												
//C38												
		GV.NDI.	GD001_ALM1							:=	ECC.	IGS_IN.		C38	[	1	];
		GV.NDI.	GD001_ALM2							:=	ECC.	IGS_IN.		C38	[	2	];
		GV.NDI.	GD002_ALM1							:=	ECC.	IGS_IN.		C38	[	3	];
		GV.NDI.	GD002_ALM2							:=	ECC.	IGS_IN.		C38	[	4	];

//C39																						
		GV.NDI.	GD_FAULT							:=	ECC.	IGS_IN.		C39	[	1	];
		GV.NDI.	MS1_Pressure_Switch_Up_Limit		:=	ECC.	IGS_IN.		C39	[	2	];
		GV.NDI.	MS1_Pressure_Switch_Down_Limit		:=	ECC.	IGS_IN.		C39	[	3	];
					//								:=	ECC.	IGS_IN.		C39	[	4	];
*)
//C40																							
		GV.AI.Tape_Temp1	:=	INT_TO_REAL(	ECC.	IGS_IN.	C40	[	1	])/10;	//	IGS 加热带			TC31	E31
		GV.AI.Tape_Temp2	:=	INT_TO_REAL(	ECC.	IGS_IN.	C40	[	2	])/10;	//	IGS 加热带			TC32	E32
		GV.AI.IGS_Temp1		:=	INT_TO_REAL(	ECC.	IGS_IN.	C40	[	3	])/10;	//	IGS BLOCK HEATER	TC33	E33 绿+ 红-
		GV.AI.IGS_Temp2		:=	INT_TO_REAL(	ECC.	IGS_IN.	C40	[	4	])/10;	//	IGS BLOCK HEATER	TC34	E34 绿+ 红-
		GV.AI.Tape_Temp3	:=	INT_TO_REAL(	ECC.	IGS_IN.	C40	[	5	])/10;	//	IGS 加热带	TC35	E35
						//	:=	INT_TO_REAL(	ECC.	IGS_IN.	C40	[	6	])/10;	//	IGS BLOCK HEATER	TC36	E36
						//	:=	INT_TO_REAL(	ECC.	IGS_IN.	C40	[	7	])/10;		
						//	:=	INT_TO_REAL(	ECC.	IGS_IN.	C40	[	8	])/10;		

//C42												
		ECC.	IGS_OUT.	C42	[	1	]	:=	GV.TAPE_HEATER_SSR_ON[1]	;	//SSR31	GAS BOX内+外延1
		ECC.	IGS_OUT.	C42	[	2	]	:=	GV.TAPE_HEATER_SSR_ON[2]	;	//SSR32	外延2+外延3
		ECC.	IGS_OUT.	C42	[	3	]	:=	GV.TAPE_HEATER_SSR_ON[3]	;	//SSR33	阀体
	//	ECC.	IGS_OUT.	C42	[	4	]	:=			;	
	//	ECC.	IGS_OUT.	C42	[	5	]	:=			;	
	//	ECC.	IGS_OUT.	C42	[	6	]	:=			;	
		ECC.	IGS_OUT.	C42	[	7	]	:=	GV.IGS_HEATER_SSR_ON[1]		;	//SSR35
		ECC.	IGS_OUT.	C42	[	8	]	:=	GV.IGS_HEATER_SSR_ON[2]		;	//SSR36
	//	ECC.	IGS_OUT.	C42	[	9	]	:=			;	
	//	ECC.	IGS_OUT.	C42	[	10	]	:=			;	
	//	ECC.	IGS_OUT.	C42	[	11	]	:=			;	
	//	ECC.	IGS_OUT.	C42	[	12	]	:=			;	
	//	ECC.	IGS_OUT.	C42	[	13	]	:=			;	
	//	ECC.	IGS_OUT.	C42	[	14	]	:=			;	
	//	ECC.	IGS_OUT.	C42	[	15	]	:=			;	
	//	ECC.	IGS_OUT.	C42	[	16	]	:=			;	
(*
//C43																								
		ECC.	IGS_OUT.	C43	[	1	]	:=	TRUE;//GV.VT03_POWER_ON		;	
	//	ECC.	IGS_OUT.	C43	[	2	]	:=			;	
	//	ECC.	IGS_OUT.	C43	[	3	]	:=			;	
	//	ECC.	IGS_OUT.	C43	[	4	]	:=			;	
*)

//MFC									
		GV.AI.	MFC1_Flow					:=	ECC.	MFC_PV	[	1	].Flow_Reading	;
		ECC.	MFC_SV	[	1	].Flow_SP	:=	GV.AO.	MFC1_Flow_Setpoint	;
		ECC.	MFC_SV	[	1	].Ramp_Time	:=	REAL_TO_UDINT(GV.AO.	MFC1_Rate_Setpoint)	;
		GV.AI.	MFC2_Flow					:=	ECC.	MFC_PV	[	2	].Flow_Reading	;
		ECC.	MFC_SV	[	2	].Flow_SP	:=	GV.AO.	MFC2_Flow_Setpoint	;
		ECC.	MFC_SV	[	2	].Ramp_Time	:=	REAL_TO_UDINT(GV.AO.	MFC2_Rate_Setpoint)	;
		GV.AI.	MFC3_Flow					:=	ECC.	MFC_PV	[	3	].Flow_Reading	;
		ECC.	MFC_SV	[	3	].Flow_SP	:=	GV.AO.	MFC3_Flow_Setpoint	;
		ECC.	MFC_SV	[	3	].Ramp_Time	:=	REAL_TO_UDINT(GV.AO.	MFC3_Rate_Setpoint)	;
(*		GV.AI.	MFC4_Flow					:=	ECC.	MFC_PV	[	4	].Flow_Reading	;
		ECC.	MFC_SV	[	4	].Flow_SP	:=	GV.AO.	MFC4_Flow_Setpoint	;
		ECC.	MFC_SV	[	4	].Ramp_Time	:=	REAL_TO_UDINT(GV.AO.	MFC4_Rate_Setpoint)	;
*)		GV.AI.	MFC5_Flow					:=	ECC.	MFC_PV	[	5	].Flow_Reading	;
		ECC.	MFC_SV	[	5	].Flow_SP	:=	GV.AO.	MFC5_Flow_Setpoint	;
		ECC.	MFC_SV	[	5	].Ramp_Time	:=	REAL_TO_UDINT(GV.AO.	MFC5_Rate_Setpoint)	;
		GV.AI.	MFC6_Flow					:=	ECC.	MFC_PV	[	6	].Flow_Reading	;
		ECC.	MFC_SV	[	6	].Flow_SP	:=	GV.AO.	MFC6_Flow_Setpoint	;
		ECC.	MFC_SV	[	6	].Ramp_Time	:=	REAL_TO_UDINT(GV.AO.	MFC6_Rate_Setpoint)	;
		GV.AI.	MFC7_Flow					:=	ECC.	MFC_PV	[	7	].Flow_Reading	;
		ECC.	MFC_SV	[	7	].Flow_SP	:=	GV.AO.	MFC7_Flow_Setpoint	;
		ECC.	MFC_SV	[	7	].Ramp_Time	:=	REAL_TO_UDINT(GV.AO.	MFC7_Rate_Setpoint)	;
	//	GV.AI.	MFC8_PV						:=	ECC.	MFC_PV	[	8	].Flow_Reading	;
	//	ECC.	MFC_SV	[	1	].Flow_SP	:=	GV.AO.	MFC8_Flow_Setpoint	;
	//	ECC.	MFC_SV	[	1	].Ramp_Time	:=	REAL_TO_UDINT(GV.AO.	MFC8_Rate_Setpoint)	;
	//	GV.AI.	MFC9_PV						:=	ECC.	MFC_PV	[	9	].Flow_Reading	;
	//	ECC.	MFC_SV	[	1	].Flow_SP	:=	GV.AO.	MFC9_Flow_Setpoint	;
	//	ECC.	MFC_SV	[	1	].Ramp_Time	:=	REAL_TO_UDINT(GV.AO.	MFC9_Rate_Setpoint)	;


	
//EV
		ECC.	EV1.	A.	0	:=	GV.	NDO.	GV101C;	//GATE VALVE CLOSE
		ECC.	EV1.	A.	1	:=	GV.	NDO. 	GV101O;	//GATE VALVE OPEN
	//	ECC.	EV1.	A.	2	:=	GV.	NDO.	
	//	ECC.	EV1.	A.	3	:=	GV.	NDO.	
		ECC.	EV1.	A.	4	:=	GV.	NDO.	AV110;	//PIN UP
		ECC.	EV1.	A.	5	:=	GV.	NDO.	AV109;	//PIN MIDDLE
		ECC.	EV1.	A.	6	:=	GV.	NDO.	AV103	AND GV_IL.AV103_EN;
		ECC.	EV1.	A.	7	:=	GV.	NDO.	AV104 	AND GV_IL.AV104_EN;	//VG103关断阀
		ECC.	EV1.	B.	0	:=	GV.	NDO.	AV101	AND GV_IL.AV101_EN;	//预抽阀
		ECC.	EV1.	B.	1	:=	GV.	NDO.	AV102	AND GV_IL.AV102_EN;	//分子泵前级阀
	//	ECC.	EV1.	B.	2	:=	GV.	NDO.		;
	//	ECC.	EV1.	B.	3	:=	GV.	NDO.		;
	//	ECC.	EV1.	B.	4	:=	GV.	NDO.		;
	//	ECC.	EV1.	B.	5	:=	GV.	NDO.		;
	//	ECC.	EV1.	B.	6	:=	GV.	NDO.		;
	//	ECC.	EV1.	B.	7	:=	GV.	NDO.		;

										
										
	//	ECC.	EV2.	A.	0	:=	GV.	NDO.	AV201	;
	//	ECC.	EV2.	A.	1	:=	GV.	NDO.	AC101	;
	//	ECC.	EV2.	A.	2	:=	GV.	NDO.	AC102	;
	//	ECC.	EV2.	A.	3	:=	GV.	NDO.	AC103	;
		ECC.	EV2.	A.	4	:=	GV.	NDO.	AV201	;	//进水管关断阀
	//	ECC.	EV2.	A.	5	:=	GV.	NDO.	AV202	;	//
		ECC.	EV2.	A.	6	:=	GV.	NDO.	AV107	;	//钟摆阀动作使能保持阀
		ECC.	EV2.	A.	7	:=	GV.	NDO.	AV108	;	//分子泵purge
		ECC.	EV2.	B.	0	:=	GV.	NDO.	AV105	AND GV_IL.AV105_EN;	//BA101关断阀
		ECC.	EV2.	B.	1	:=	GV.	NDO.	AV106	AND GV_IL.AV106_EN;	//酸排关断阀
	//	ECC.	EV2.	B.	2	:=	GV.	NDO.		;
	//	ECC.	EV2.	B.	3	:=	GV.	NDO.		;
	//	ECC.	EV2.	B.	4	:=	GV.	NDO.		;
	//	ECC.	EV2.	B.	5	:=	GV.	NDO.		;
	//	ECC.	EV2.	B.	6	:=	GV.	NDO.		;
	//	ECC.	EV2.	B.	7	:=	GV.	NDO.		;
	
										
//gas box内										
		ECC.	EV3.	A.	0	:=	GV.	NDO.	AV1	;	//
		ECC.	EV3.	A.	1	:=	GV.	NDO.	AV2	;
		ECC.	EV3.	A.	2	:=	GV.	NDO.	AV3	;
		ECC.	EV3.	A.	3	:=	GV.	NDO.	AV4	;
		ECC.	EV3.	A.	4	:=	GV.	NDO.	AV6	;
		ECC.	EV3.	A.	5	:=	GV.	NDO.	AV7	;
		ECC.	EV3.	A.	6	:=	GV.	NDO.	AV9	;
		ECC.	EV3.	A.	7	:=	GV.	NDO.	AV10;
		ECC.	EV3.	B.	0	:=	GV.	NDO.	AV11;
		ECC.	EV3.	B.	1	:=	GV.	NDO.	AV12;
		ECC.	EV3.	B.	2	:=	GV.	NDO.	AV13;
		ECC.	EV3.	B.	3	:=	GV.	NDO.	AV14;
		ECC.	EV3.	B.	4	:=	GV.	NDO.	AV16;
		ECC.	EV3.	B.	5	:=	GV.	NDO.	AV17;
		ECC.	EV3.	B.	6	:=	GV.	NDO.	AV19;
		ECC.	EV3.	B.	7	:=	GV.	NDO.	AV20;
		ECC.	EV3.	C.	0	:=	GV.	NDO.	AV22;
		ECC.	EV3.	C.	1	:=	GV.	NDO.	AV23;
		ECC.	EV3.	C.	2	:=	GV.	NDO.	AV25;
		ECC.	EV3.	C.	3	:=	GV.	NDO.	AV26;
		ECC.	EV3.	C.	4	:=	GV.	NDO.	AV27;
	//	ECC.	EV3.	C.	5	:=	GV.	NDO.		;
	//	ECC.	EV3.	C.	6	:=	GV.	NDO.		;
	//	ECC.	EV3.	C.	7	:=	GV.	NDO.		;
	//	ECC.	EV3.	D.	0	:=	GV.	NDO.		;
	//	ECC.	EV3.	D.	1	:=	GV.	NDO.		;
	//	ECC.	EV3.	D.	2	:=	GV.	NDO.		;
	//	ECC.	EV3.	D.	3	:=	GV.	NDO.		;
	//	ECC.	EV3.	D.	4	:=	GV.	NDO.		;
	//	ECC.	EV3.	D.	5	:=	GV.	NDO.		;
	//	ECC.	EV3.	D.	6	:=	GV.	NDO.		;
	//	ECC.	EV3.	D.	7	:=	GV.	NDO.		;
										
										
//gas box内										
	//	ECC.	EV4.	A.	0	:=	GV.	NDO.	AV5	;
		ECC.	EV4.	A.	1	:=	GV.	NDO.	AV5	;
	//	ECC.	EV4.	A.	2	:=	GV.	NDO.	AV8	;
		ECC.	EV4.	A.	3	:=	GV.	NDO.	AV8	;
	//	ECC.	EV4.	A.	4	:=	GV.	NDO.	AV15	;
		ECC.	EV4.	A.	5	:=	GV.	NDO.	AV15	;
	//	ECC.	EV4.	A.	6	:=	GV.	NDO.	AV18	;
		ECC.	EV4.	A.	7	:=	GV.	NDO.	AV18	;
	//	ECC.	EV4.	B.	0	:=	GV.	NDO.	AV21	;
		ECC.	EV4.	B.	1	:=	GV.	NDO.	AV21	;
	//	ECC.	EV4.	B.	2	:=	GV.	NDO.	AV24	;
		ECC.	EV4.	B.	3	:=	GV.	NDO.	AV24	;
	//	ECC.	EV4.	B.	4	:=	GV.	NDO.		;
	//	ECC.	EV4.	B.	5	:=	GV.	NDO.		;
	//	ECC.	EV4.	B.	6	:=	GV.	NDO.		;
	//	ECC.	EV4.	B.	7	:=	GV.	NDO.		;
	




//APC											
	GV.	AI.	APC.	ACTUAL_PRESSURE					:=	ECC.			APC_PV.Actual_Pressure	*100/133.3*1000;	
	GV.	AI.	APC.	Pressure_Sensor_1				:=	ECC.			APC_PV.Pressure_Sensor_1	*100/133.3*1000;	
	GV.	AI.	APC.	Pressure_Sensor_2				:=	ECC.			APC_PV.Pressure_Sensor_2	*100/133.3*1000;	
	GV.	AI.	APC.	ACTUAL_POSITION					:=	ECC.			APC_PV.Actual_Position	;	
	GV.	AI.	APC.	CONTROL_MODE					:=	ECC.			APC_PV.Control_Mode	;	
	GV.	AI.	APC.	ERROR_NUMBER					:=	ECC.			APC_PV.ERROR_NUMBER	;	
	GV.	AI.	APC.	General_Status					:=	ECC.			APC_PV.General_Status	;	
	GV.	AI.	APC.	GENERAL_WARNINGS				:=	ECC.			APC_PV.General_Warnings	;	
	GV.	AI.	APC.	Extended_Warnings				:=	ECC.			APC_PV.Extended_Warnings	;	
	ECC.	APC_SV.Target_Pressure					:=	GV.	AO.	APC.	TARGET_PRESSURE*0.1333/100	;	
	ECC.	APC_SV.Target_Position					:=	GV.	AO.	APC.	TARGET_POSITION	;	
	ECC.	APC_SV.Pressure_Input_Digital_Sensor_1	:=	GV.	AO.	APC.	Pressure_Input_Digital_Sensor_1	;	//E-therCAT通讯传送过来的sensor值1
	ECC.	APC_SV.Pressure_Input_Digital_Sensor_2	:=	GV.	AO.	APC.	Pressure_Input_Digital_Sensor_2	;	//E-therCAT通讯传送过来的sensor值2
	ECC.	APC_SV.Control_Mode						:=	GV.	AO.	APC.	CONTROL_MODE	;	
	ECC.	APC_SV.General_Control_Setpoint			:=	GV.	AO.	APC.	General_Control_Setpoint	;		(*Bit 0: Zero 
										 																	  BIT 1: NOT used 
																											  Bit 2: Ping Pong TX Bit
																											  Bit 3: Not Used
																											  Bit 4: Access Mode Locked (VAT使用手册P72)
																											  Bit 5-15: Not Used
																											*)
	ECC.	APC_SV.Pressure_Ramp_Time				:=	GV.	AO.	APC.	PRESSURE_RAMP_TIME	;	
	
	IF GV.	AO.	APC.	TARGET_PRESSURE>=1000
		THEN 
			ECC.APC_SV.Bank_Sel:=1;
		ELSIF
			GV.	AO.	APC.	TARGET_PRESSURE<1000 AND GV.	AO.	APC.	TARGET_PRESSURE>=100
		THEN 
			ECC.APC_SV.Bank_Sel:=2;
		ELSIF
			GV.	AO.	APC.	TARGET_PRESSURE<100
		THEN
			ECC.APC_SV.Bank_Sel:=3;
	END_IF
	
	IF ECC.	APC_SV.Control_Mode=7 AND ECC.APC_PV.Control_Mode<>7 THEN
		WRITE_EN_SINT:=TRUE;
		ELSE		
		WRITE_EN_SINT:=FALSE;
	END_IF
	
	WRITE_DATA_SINT:=ECC.APC_SV.Bank_Sel;
	SDO_WRITE.Index:=UINT#16#2350;
	SDO_WRITE.Subindex:=USINT#16#03;
	
	
	WRITE_SINT(
		sNetId:= sNetId, 						//主站IP地址, 
		nSlaveAddr:= nSlaveAddr_1, 				//从站端口
		nSubIndex:= USINT_TO_BYTE(SDO_WRITE.Subindex),	//SubIndex
		nIndex:= UINT_TO_WORD(SDO_WRITE.Index), 		//Index
		pSrcBuf:= ADR(WRITE_DATA_SINT), 
		cbBufLen:= SIZEOF(WRITE_DATA_SINT), 
		bExecute:= WRITE_EN_SINT, 
		//tTimeout:= T#200MS, 
		bBusy=> , 
		bError=> , 
		nErrId=> );	
											
//TMP											
	GV.	AI.	TMP.	ROTATION						:=	ECC.			TURBO_PV.Rotation	;	//1:ROTATING,0:NOT ROTATING
	GV.	AI.	TMP.	NORMAL							:=	ECC.			TURBO_PV.Normal	;		//1:NORMAL,0:UNNORMAL
	GV.	AI.	TMP.	ACCELERATION					:=	ECC.			TURBO_PV.Acceleration	;	
	GV.	AI.	TMP.	Deceleration_Includes_Braking	:=	ECC.			TURBO_PV.Deceleration_Includes_Braking	;	
	GV.	AI.	TMP.	REMOTE_LOCAL					:=	ECC.			TURBO_PV.Remote_Local	;	//1:LOCAL.E-CAT CONTROL DISABLED,0:REMOTE.E-CAT CONTROL ENABLED
	GV.	AI.	TMP.	Turbo_Low_Speed					:=	ECC.			TURBO_PV.Turbo_Low_Speed	;	
	GV.	AI.	TMP.	ALARM							:=	ECC.		TURBO_PV.Alarm	;	
	GV.	AI.	TMP.	WARNING							:=	ECC.		TURBO_PV.Warning	;	
	GV.	AI.	TMP.	Turbo_Speed						:=	REAL_TO_INT(ECC.TURBO_PV.Turbo_Speed*32.5	);	//0.1[%],1000(100.0%):RATED SPEED,0(0.0%):NO RATATION
	GV.	AI.	TMP.	Turbo_Current					:=	ECC.			TURBO_PV.Turbo_Current	;	//0.1A
	GV.	AI.	TMP.	Turbo_pump_temperature			:=	ECC.			TURBO_PV.Turbo_pump_temperature	;	//1[℃]
	//GV.	AI.	TMP.	VibrationH					:=	ECC.			TURBO_PV.VibrationH	;	
	//GV.	AI.	TMP.	VibrationB					:=	ECC.			TURBO_PV.VibrationB	;	
	//GV.	AI.	TMP.	VibrationZ					:=	ECC.			TURBO_PV.VibrationZ	;	
	ECC.			TURBO_SV.Turbo_Start_Stop		:=	GV.	AO.	TMP.	Turbo_Start_Stop	;	//1:START,0:STOP
	ECC.			TURBO_SV.Turbo_Reset_Alarm		:=	GV.	AO.	TMP.	Turbo_Reset_Alarm	;	//1:RESET ALARM,0:NO ACTION
	ECC.			TURBO_SV.Turbo_Low_Speed		:=	GV.	AO.	TMP.	Turbo_Low_Speed	;		//1:LOW SPEED MODE ON,0:OFF
	
//PG PS
	GV.AI.VG103_Pressure		:=	ECC.	VG103_PV.Sensor_Value1	/133.3	*1000					;
											
	GV.AI.VG101_Pressure		:=	ECC.	VG101_PV.Sensor_Value1	/133.3	*1000					;
											
	GV.AI.VG102_Pressure		:=	ECC.	VG102_PV.Sensor_Value1	/133.3	*1000					;
											
	GV.AI.BA1_Pressure			:=	ECC.	BA1_PV.Combination_Gauge_Active_Value_Module_1	/133.3	;
											
	GV.AI.VG104_Pressure		:=	ECC.	VG104_PV.Sensor_Value1	/133.3	*1000					;

//CHILLER
	GV.	AI.CHILLER1_TEMP_PV						:=	UINT_TO_REAL(	ECC.	CHILLER1_PV.Module2_Word[1]	)/10	;	//有符号整数，-50.0 to 150.0℃ = FE0Ch to 05DCh ,0.1℃/dig
	GV.	AI.CHILLER1_DI_PV						:=	UINT_TO_REAL(	ECC.	CHILLER1_PV.Module2_Word[2]	)	;	//	0.0 to 20.0M-ohm = 0000h to 00C8h ,0.1M-ohm/dig
	GV.	AI.CHILLER1_FLOW_PV						:=	UINT_TO_REAL(	ECC.	CHILLER1_PV.Module2_Word[3]	)	;	//	0.0 to 150.0LPM = 0000h to 05DCh 0.1LPM/dig
	GV.	AI.CHILLER1_PRESS_PV					:=	UINT_TO_REAL(	ECC.	CHILLER1_PV.Module2_Word[4]	)	;	//	0.00 to 2.00MPa = 0h to C8h 0.01MP/dig
	ECC.CHILLER1_SV.Module2_Word[1]				:=	REAL_TO_UINT(	GV.		AO.Chiller1_On					)	;	//CHILLER1 ON
	ECC.CHILLER1_SV.Module2_Word[2]				:=	REAL_TO_UINT(	GV.		AO.Chiller_Temp1_SV	*10			)	;	// -20.0 to 90.0℃= FF38h to 384h 0.1℃/dig
	ECC.CHILLER1_SV.Module2_Word[3]				:=	INT_TO_UINT(	ECC.	CHAMBER_IN.	C04	[	8	]		)	;	// Stage温度反馈给chiller
	
	GV.	AI.CHILLER2_TEMP_PV						:=	UINT_TO_REAL(	ECC.	CHILLER2_PV.Module2_Word[1]	)/10	;	//有符号整数，-50.0 to 150.0℃ = FE0Ch to 05DCh ,0.1℃/dig
	GV.	AI.CHILLER2_DI_PV						:=	UINT_TO_REAL(	ECC.	CHILLER2_PV.Module2_Word[2]	)	;	//	0.0 to 20.0M-ohm = 0000h to 00C8h ,0.1M-ohm/dig
	GV.	AI.CHILLER2_FLOW_PV						:=	UINT_TO_REAL(	ECC.	CHILLER2_PV.Module2_Word[3]	)	;	//	0.0 to 150.0LPM = 0000h to 05DCh 0.1LPM/dig
	GV.	AI.CHILLER2_PRESS_PV					:=	UINT_TO_REAL(	ECC.	CHILLER2_PV.Module2_Word[4]	)	;	//	0.00 to 2.00MPa = 0h to C8h 0.01MP/dig
	ECC.CHILLER2_SV.Module2_Word[1]				:=	REAL_TO_UINT(	GV.		AO.Chiller2_On					)	;	//CHILLER1 ON
	ECC.CHILLER2_SV.Module2_Word[2]				:=	REAL_TO_UINT(	GV.		AO.Chiller_Temp2_SV	*10			)	;	// -20.0 to 90.0℃= FF38h to 384h 0.1℃/dig
	ECC.CHILLER2_SV.Module2_Word[3]				:=	INT_TO_UINT(	ECC.	CHAMBER_IN.	C05	[	2	]		)	;	// Stage温度反馈给chiller
	
	
]]></ST>
    </Implementation>
    <Action Name="PLC_TO_UI" Id="{fcef9783-1463-4fcd-8ba4-63d45cb7cb94}">
      <Implementation>
        <ST><![CDATA[PM.HeartBeat:=UI.HeartBeat;
PM.NDI:=GV.NDI;
PM.AI:=GV.AI;
GV.NDI.	AV1	:=GV.NDO.	AV1	;
GV.NDI.	AV2	:=GV.NDO.	AV2	;
GV.NDI.	AV3	:=GV.NDO.	AV3	;
GV.NDI.	AV4	:=GV.NDO.	AV4	;
GV.NDI.	AV5	:=GV.NDO.	AV5	;
GV.NDI.	AV6	:=GV.NDO.	AV6	;
GV.NDI.	AV7	:=GV.NDO.	AV7	;
GV.NDI.	AV8	:=GV.NDO.	AV8	;
GV.NDI.	AV9	:=GV.NDO.	AV9	;
GV.NDI.	AV10	:=GV.NDO.	AV10	;
GV.NDI.	AV11	:=GV.NDO.	AV11	;
GV.NDI.	AV12	:=GV.NDO.	AV12	;
GV.NDI.	AV13	:=GV.NDO.	AV13	;
GV.NDI.	AV14	:=GV.NDO.	AV14	;
GV.NDI.	AV15	:=GV.NDO.	AV15	;
GV.NDI.	AV16	:=GV.NDO.	AV16	;
GV.NDI.	AV17	:=GV.NDO.	AV17	;
GV.NDI.	AV18	:=GV.NDO.	AV18	;
GV.NDI.	AV19	:=GV.NDO.	AV19	;
GV.NDI.	AV20	:=GV.NDO.	AV20	;
GV.NDI.	AV21	:=GV.NDO.	AV21	;
GV.NDI.	AV22	:=GV.NDO.	AV22	;
GV.NDI.	AV23	:=GV.NDO.	AV23	;
GV.NDI.	AV24	:=GV.NDO.	AV24	;
GV.NDI.	AV25	:=GV.NDO.	AV25	;
GV.NDI.	AV26	:=GV.NDO.	AV26	;
GV.NDI.	AV27	:=GV.NDO.	AV27	;
]]></ST>
      </Implementation>
    </Action>
    <Action Name="UI_TO_PLC" Id="{82d78811-3f27-47e1-a7a5-eefa03f615c8}">
      <Implementation>
        <ST><![CDATA[
	
//CONFIG
	GV.PMConfig:=UI.PMConfig;

	
	GV.Chiller:=UI.Chiller;
	GV.InnerChiller:=UI.InnerChiller;
	GV.OuterChiller:=UI.OuterChiller;
	GV.TopChiller:=UI.TopChiller;
	
	GV.DryPump:=UI.DryPump;
	
	GV.Mfcgas1:=UI.Mfcgas1;
	GV.Mfcgas2:=UI.Mfcgas2;
	GV.Mfcgas3:=UI.Mfcgas3;
	GV.Mfcgas4:=UI.Mfcgas4;
	GV.Mfcgas5:=UI.Mfcgas5;
	GV.Mfcgas6:=UI.Mfcgas6;
	GV.Mfcgas7:=UI.Mfcgas7;
	GV.Mfcgas8:=UI.Mfcgas8;
	GV.Mfcgas9:=UI.Mfcgas9;
	GV.Mfcgas10:=UI.Mfcgas10;
	GV.Mfcgas11:=UI.Mfcgas11;
	GV.Mfcgas12:=UI.Mfcgas12;
	GV.MfcN2:=UI.MfcN2;
	GV.MfcHe:=UI.MfcHe;
	
	GV.Pump:=UI.Pump;
	
	GV.Purge:=UI.Purge;
	
	GV.PendulumHeater:=UI.PendulumHeater;
	GV.LidHeater:=UI.LidHeater;
	GV.ChamberHeater:=UI.ChamberHeater;
	GV.IGSHeater:=UI.IGSHeater;
	GV.TapeHeater:=UI.TapeHeater;
	GV.ForelineHeater:=UI.ForelineHeater;


	
	GV.PendulumValve:=UI.PendulumValve;


	GV.ChamberHeater:=UI.ChamberHeater;
	GV.ChamberHeater:=UI.ChamberHeater;

//Status	
	GV.AO.	AV102_Temp_SV								:=	UI.AO.	AV102_Temp_SV			;
	GV.AO.	AV101_Temp_SV								:=	UI.AO.	AV101_Temp_SV			;
	GV.AO.	AV106_Temp_SV								:=	UI.AO.	AV106_Temp_SV			;
	GV.AO.	BA01_Temp_SV								:=	UI.AO.	BA01_Temp_SV			;
	GV.AO.	VG103_Pipe_Temp_SV							:=	UI.AO.	VG103_Pipe_Temp_SV		;
	GV.AO.	Exhaust1_6_Temp_SV							:=	UI.AO.	Exhaust1_6_Temp_SV		;
	GV.AO.	Exhaust7_8_Temp_SV							:=	UI.AO.	Exhaust7_8_Temp_SV		;
	GV.AO.	VG101_Pipe_Temp_SV							:=	UI.AO.	VG101_Pipe_Temp_SV		;
	GV.AO.	Gate_Valve_Temp_SV							:=	UI.AO.	Gate_Valve_Temp_SV		;
	GV.AO.	APC_Temp_SV									:=	UI.AO.	APC_Temp_SV		;
//	GV.AO.	TMP_Temp_SV									:=	UI.AO.	TMP_Temp_SV		;
	GV.AO.	Tape_Temp1_SV								:=	UI.AO.	Tape_Temp1_SV		;
	GV.AO.	Tape_Temp2_SV								:=	UI.AO.	Tape_Temp2_SV		;
	GV.AO.	Tape_Temp3_SV								:=	UI.AO.	Tape_Temp3_SV		;
	GV.AO.	IGS_Temp1_SV								:=	UI.AO.	IGS_Temp1_SV		;
	GV.AO.	IGS_Temp2_SV								:=	UI.AO.	IGS_Temp2_SV		;
	GV.AO.	Chiller_Temp1_SV							:=	UI.AO.	Chiller_Temp1_SV		;
	GV.AO.	Chiller_Temp2_SV							:=	UI.AO.	Chiller_Temp2_SV		;
	GV.AO.	Chiller1_On									:=	UI.AO.	Chiller1_On			;
	GV.AO.	Chiller2_On									:=	UI.AO.	Chiller2_On			;
	GV.AO.	TMP.	Turbo_Start_Stop					:=	UI.AO.	TMP.	Turbo_Start_Stop	;
	GV.AO.	TMP.	Turbo_Reset_Alarm					:=	UI.AO.	TMP.	Turbo_Reset_Alarm	;
	GV.AO.	TMP.	Turbo_Low_Speed						:=	UI.AO.	TMP.	Turbo_Low_Speed	;
	
	GV.NDO.AV104:=UI.NDO.AV104;
	GV.NDO.AV105:=UI.NDO.AV105;
	
	IF NOT MAIN.Process_EN THEN	
	GV.NDO	.	AV101	:=	UI.NDO	.	AV101	AND 	GV_IL.	AV101_EN;
	GV.NDO	.	AV102	:=	UI.NDO	.	AV102	AND 	GV_IL.	AV102_EN;
	GV.NDO	.	AV103	:=	UI.NDO	.	AV103	AND 	GV_IL.	AV103_EN;
	GV.NDO	.	AV104	:=	UI.NDO	.	AV104	AND 	GV_IL.	AV104_EN;
	GV.NDO	.	AV105	:=	UI.NDO	.	AV105	AND 	GV_IL.	AV105_EN;
	GV.NDO	.	AV106	:=	UI.NDO	.	AV106	AND 	GV_IL.	AV106_EN;
	GV.NDO	.	AV107	:=	UI.NDO	.	AV107				;
	GV.NDO	.	AV108	:=	UI.NDO	.	AV108				;
	GV.NDO	.	AV109	:=	UI.NDO	.	AV109				;
	GV.NDO	.	AV110	:=	UI.NDO	.	AV110				;
	GV.NDO	.	GV101C	:=	UI.NDO	.	GV101C				;
	GV.NDO	.	GV101O	:=	UI.NDO	.	GV101O				;
	GV.NDO	.	AV201	:=	UI.NDO	.	AV201				;
	GV.NDO	.	AV202	:=	UI.NDO	.	AV202				;
	GV.NDO	.	AC101	:=	UI.NDO	.	AC101				;
	GV.NDO	.	AC102	:=	UI.NDO	.	AC102				;
	GV.NDO	.	AC103	:=	UI.NDO	.	AC103				;
	GV.NDO	.	AC104	:=	UI.NDO	.	AC104				;
	GV.NDO	.	AC105	:=	UI.NDO	.	AC105				;
	GV.NDO	.	AC106	:=	UI.NDO	.	AC106				;
	GV.NDO	.	AV1	:=	UI.NDO	.	AV1	AND 	GV_IL.	AV1_EN	;
	GV.NDO	.	AV2	:=	UI.NDO	.	AV2	AND 	GV_IL.	AV2_EN	;
	GV.NDO	.	AV3	:=	UI.NDO	.	AV3	AND 	GV_IL.	AV3_EN	;
	GV.NDO	.	AV4	:=	UI.NDO	.	AV4	AND 	GV_IL.	AV4_EN	;
	GV.NDO	.	AV6	:=	UI.NDO	.	AV6	AND 	GV_IL.	AV6_EN	;
	GV.NDO	.	AV7	:=	UI.NDO	.	AV7	AND 	GV_IL.	AV7_EN	;
	GV.NDO	.	AV9	:=	UI.NDO	.	AV9	AND 	GV_IL.	AV9_EN	;
	GV.NDO	.	AV10	:=	UI.NDO	.	AV10	AND 	GV_IL.	AV10_EN	;
	GV.NDO	.	AV11	:=	UI.NDO	.	AV11	AND 	GV_IL.	AV11_EN	;
	GV.NDO	.	AV12	:=	UI.NDO	.	AV12	AND 	GV_IL.	AV12_EN	;
	GV.NDO	.	AV13	:=	UI.NDO	.	AV13	AND 	GV_IL.	AV13_EN	;
	GV.NDO	.	AV14	:=	UI.NDO	.	AV14	AND 	GV_IL.	AV14_EN	;
	GV.NDO	.	AV16	:=	UI.NDO	.	AV16	AND 	GV_IL.	AV16_EN	;
	GV.NDO	.	AV17	:=	UI.NDO	.	AV17	AND 	GV_IL.	AV17_EN	;
	GV.NDO	.	AV19	:=	UI.NDO	.	AV19	AND 	GV_IL.	AV19_EN	;
	GV.NDO	.	AV20	:=	UI.NDO	.	AV20	AND 	GV_IL.	AV20_EN	;
	GV.NDO	.	AV22	:=	UI.NDO	.	AV22	AND 	GV_IL.	AV22_EN	;
	GV.NDO	.	AV23	:=	UI.NDO	.	AV23	AND 	GV_IL.	AV23_EN	;
	GV.NDO	.	AV25	:=	UI.NDO	.	AV25	AND 	GV_IL.	AV25_EN	;
	GV.NDO	.	AV26	:=	UI.NDO	.	AV26	AND 	GV_IL.	AV26_EN	;
	GV.NDO	.	AV27	:=	UI.NDO	.	AV27	AND 	GV_IL.	AV27_EN	;
	GV.NDO	.	AV5	:=	UI.NDO	.	AV5	AND 	GV_IL.	AV5_EN	;
	GV.NDO	.	AV8	:=	UI.NDO	.	AV8	AND 	GV_IL.	AV8_EN	;
	GV.NDO	.	AV15	:=	UI.NDO	.	AV15	AND 	GV_IL.	AV15_EN	;
	GV.NDO	.	AV18	:=	UI.NDO	.	AV18	AND 	GV_IL.	AV18_EN	;
	GV.NDO	.	AV21	:=	UI.NDO	.	AV21	AND 	GV_IL.	AV21_EN	;
	GV.NDO	.	AV24	:=	UI.NDO	.	AV24	AND 	GV_IL.	AV24_EN	;
	GV.NDO	.	MaualEndStep	:=	UI.NDO	.	MaualEndStep				;


	GV.AO.	LID_Temp_SV		:=	UI.AO.	LID_Temp_SV		;

	GV.AO.	Chamber_Temp1_SV	:=	UI.AO.	Chamber_Temp1_SV		;
	GV.AO.	Chamber_Temp2_SV	:=	UI.AO.	Chamber_Temp2_SV		;
	GV.AO.	Chamber_Temp3_SV	:=	UI.AO.	Chamber_Temp3_SV		;

	GV.AO.	MFC1_Flow_Setpoint	:=	UI.AO.	MFC1_Flow_Setpoint		;
	GV.AO.	MFC1_Rate_Setpoint	:=	UI.AO.	MFC1_Rate_Setpoint		;
	GV.AO.	MFC2_Flow_Setpoint	:=	UI.AO.	MFC2_Flow_Setpoint		;
	GV.AO.	MFC2_Rate_Setpoint	:=	UI.AO.	MFC2_Rate_Setpoint		;
	GV.AO.	MFC3_Flow_Setpoint	:=	UI.AO.	MFC3_Flow_Setpoint		;
	GV.AO.	MFC3_Rate_Setpoint	:=	UI.AO.	MFC3_Rate_Setpoint		;
//	GV.AO.	MFC4_Flow_Setpoint	:=	UI.AO.	MFC4_Flow_Setpoint		;
//	GV.AO.	MFC4_Rate_Setpoint	:=	UI.AO.	MFC4_Rate_Setpoint		;
	GV.AO.	MFC5_Flow_Setpoint	:=	UI.AO.	MFC5_Flow_Setpoint		;
	GV.AO.	MFC5_Rate_Setpoint	:=	UI.AO.	MFC5_Rate_Setpoint		;
	GV.AO.	MFC6_Flow_Setpoint	:=	UI.AO.	MFC6_Flow_Setpoint		;
	GV.AO.	MFC6_Rate_Setpoint	:=	UI.AO.	MFC6_Rate_Setpoint		;
	GV.AO.	MFC7_Flow_Setpoint	:=	UI.AO.	MFC7_Flow_Setpoint		;
	GV.AO.	MFC7_Rate_Setpoint	:=	UI.AO.	MFC7_Rate_Setpoint		;
	GV.AO.	Stage_Temp1_SV		:=	UI.AO.	Stage_Temp1_SV		;
	GV.AO.	Stage_Temp2_SV		:=	UI.AO.	Stage_Temp2_SV		;
	GV.AO.	APC.	Target_Pressure	:=	UI.AO.	APC.	Target_Pressure	;
	GV.AO.	APC.	Target_Position	:=	UI.AO.	APC.	Target_Position	;
	//GV.AO.	APC.	Pressure_Input_Digital_Sensor_1	:=	UI.AO.	APC.	Pressure_Input_Digital_Sensor_1	;
	//GV.AO.	APC.	Pressure_Input_Digital_Sensor_2	:=	UI.AO.	APC.	Pressure_Input_Digital_Sensor_2	;
	IF GV_IL.APC_EN THEN 
		GV.AO.	APC.	Control_Mode	:=	UI.AO.	APC.	Control_Mode	;
	ELSE 
		GV.AO.	APC.	Control_Mode	:=	3	;
	END_IF
	GV.AO.	APC.	General_Control_Setpoint	:=	UI.AO.	APC.	General_Control_Setpoint	;
	GV.AO.	APC.	Pressure_Ramp_Time	:=	UI.AO.	APC.	Pressure_Ramp_Time	;
	GV.NDO.GV_Open_Enable:=NOT MAIN.Process_EN;
	GV.NDO.GV_Close_Enable:=NOT MAIN.Process_EN;
	GV.NDO.TM_Robot_Extend_Enable:=UI.NDO.TM_Robot_Extend_Enable;
	END_IF

//RECIPE
	GV.Step_Num:=UI.Step_Num;
	GV.SetpArray:=UI.SetpArray;
	
	GV.Process_Start:=UI.Process_Start;
	GV.Process_Stop:=UI.Process_Stop;]]></ST>
      </Implementation>
    </Action>
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</TcPlcObject>