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UI.TcGVL

UI.TcGVL 1.3 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
    3. 

  3.   <GVL Name="UI" Id="{3f5a37c1-892b-4f04-a8f1-a50350d791df}">
    4. 

  4.     <Declaration><![CDATA[{attribute 'qualified_only'}
    5. 

  5. VAR_GLOBAL
    6. 

  6. 	HeartBeat:REAL;
    7. 

  7. //HW
    8. 

  8. 	NDO:STR_NDO;
    9. 

  9. 	AO:STR_AO;
    10. 

  10. 	
    11. 

  11. //Config
    12. 

  12. 	PMConfig:ConfigPM;
    13. 

  13. 

  14. 	
    15. 

  15. 	Chiller:ConfigChiller;	
    16. 

  16. 	InnerChiller:ConfigChiller;
    17. 

  17. 	OuterChiller:ConfigChiller;
    18. 

  18. 	TopChiller:ConfigChiller;
    19. 

  19. 	
    20. 

  20. 	DryPump:ConfigDryPump;
    21. 

  21. 	
    22. 

  22. 	Mfcgas1:ConfigMfcGas;
    23. 

  23. 	Mfcgas2:ConfigMfcGas;
    24. 

  24. 	Mfcgas3:ConfigMfcGas;
    25. 

  25. 	Mfcgas4:ConfigMfcGas;
    26. 

  26. 	Mfcgas5:ConfigMfcGas;
    27. 

  27. 	Mfcgas6:ConfigMfcGas;
    28. 

  28. 	Mfcgas7:ConfigMfcGas;
    29. 

  29. 	Mfcgas8:ConfigMfcGas;
    30. 

  30. 	Mfcgas9:ConfigMfcGas;
    31. 

  31. 	Mfcgas10:ConfigMfcGas;
    32. 

  32. 	Mfcgas11:ConfigMfcGas;
    33. 

  33. 	Mfcgas12:ConfigMfcGas;	
    34. 

  34. 	MfcN2:ConfigMfcGas;
    35. 

  35. 	MfcHe:ConfigMfcGas;
    36. 

  36. 	
    37. 

  37. 	Pump:ConfigPump;
    38. 

  38. 	
    39. 

  39. 	Purge:ConfigPurge;
    40. 

  40. 	
    41. 

  41. 	PendulumHeater:ConfigHeater;
    42. 

  42. 	LidHeater:ConfigHeater;
    43. 

  43. 	ChamberHeater:ConfigHeater;
    44. 

  44. 	IGSHeater:ConfigHeater;
    45. 

  45. 	TapeHeater:ConfigHeater;
    46. 

  46. 	ForelineHeater:ConfigHeater;
    47. 

  47. 	
    48. 

  48. 

  49. 	
    50. 

  50. 	PendulumValve:ConfigPendulumValve;
    51. 

  51. 	
    52. 

  52. 

  53. 	
    54. 

  54. 	
    55. 

  55. 	
    56. 

  56. //RECIPE
    57. 

  57. 	Step_Num:INT;
    58. 

  58. 	SetpArray:ARRAY[1..100] OF RecipeEachStep;
    59. 

  59. 

  60. 	
    61. 

  61. //INTERLOCK
    62. 

  62. 	TurboN2PurgePressure:INT;	//PS103	
    63. 

  63. 	
    64. 

  64. //PROCESS
    65. 

  65. 	Process_Start:BOOL;
    66. 

  66. 	Process_Stop:BOOL;
    67. 

  67. 

  68. //*********************READ**************
    69. 

  69. //	Process_Finished:BOOL;
    70. 

  70. 

  71. //WARNING&ALARM
    72. 

  72. 

  73. 	Warning_And_Alarm_RST:BOOL;
    74. 

  74. 

  75. 	
    76. 

  76. END_VAR
    77. 

  77. 

  78. ]]></Declaration>
    79. 

  79.   </GVL>
    80. 

  80. </TcPlcObject>
    81.