| 123456789101112131415161718192021222324252627282930313233 |
- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="SPLC_TO_PLC" Id="{9be175b1-e400-4caa-a75e-9afc08feb34c}">
- <Declaration><![CDATA[TYPE SPLC_TO_PLC :
- STRUCT
- EV1_EN,
- EV2_EN,
- EV3_EN,
- EV4_EN,
- HTR_APC_EN,
- HTR_CHAMBER_EN,
- HTR_FORLINE_EN,
- HTR_GAS_BOX,
- HTR_GATE_VALVE,
- HTR_LID,
- PROCESS_EN,
- DRY_PUMP_PW_EN,
- TMP_PW_EN,
- TRANSFER_EN,
- VALVE_ACID_EXHAUST_OPEN_EN,
- VALVE_CM_OPEN_EN,
- VALVE_DRY_PUMP_EN,
- VALVE_TMP_BACK_OPEN_EN,
- VALVE_APC_OPEN_EN,
- WAFER_MOVING_IN_EN,
- Status_Lid ,
- SPLC_Com_err,
- SPLC_FB_Err :BOOL;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
|
