123456789101112131415161718192021222324252627282930313233343536373839404142 |
- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="Warning" Id="{c72d9631-6c56-44fc-bf37-a0851e84c9b1}">
- <Declaration><![CDATA[TYPE Warning :
- STRUCT
- PRESSURE:BOOL;
- MFC1:BOOL;
- MFC2:BOOL;
- MFC3:BOOL;
- MFC5:BOOL;
- MFC6:BOOL;
- MFC7:BOOL;
- WALL_TEMP:BOOL;
- LID_TEMP:BOOL;
- STAGE_EDGE_TEMP:BOOL;
- STAGE_CENTER_TEMP: BOOL;
- CHILLER1:BOOL;
- CHILLER2:BOOL;
- OpenCloseSlitValveTimeout:BOOL;
- Gas1FlowPressureOutOfRange:BOOL;
- Gas2FlowPressureOutOfRange:BOOL;
- Gas3FlowPressureOutOfRange:BOOL;
- Gas4FlowPressureOutOfRange:BOOL;
- Gas5FlowPressureOutOfRange:BOOL;
- Gas6FlowPressureOutOfRange:BOOL;
- //PROCESS TOLERANCE
- TOLERANCE_PRESSURE:BOOL;
- TOLERANCE_MFC1:BOOL;
- TOLERANCE_MFC2:BOOL;
- TOLERANCE_MFC3:BOOL;
- TOLERANCE_MFC5:BOOL;
- TOLERANCE_MFC6:BOOL;
- TOLERANCE_MFC7:BOOL;
- TOLERANCE_WALL_TEMP:BOOL;
- TOLERANCE_LID_TEMP:BOOL;
- TOLERANCE_STAGE_EDGE_TEMP:BOOL;
- TOLERANCE_STAGE_CENTER_TEMP: BOOL;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
|