Helios/PLC/DUTs/Info/Alarm.TcDUT

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <DUT Name="Alarm" Id="{32fa4914-c2be-4c70-8233-a56768b135fb}">
    <Declaration><![CDATA[TYPE Alarm :
STRUCT
	PRESSURE:BOOL;
	MFC1:BOOL;
	MFC2:BOOL;
	MFC3:BOOL;
	MFC5:BOOL;
	MFC6:BOOL;
	MFC7:BOOL;
	WALL_TEMP:BOOL;
	LID_TEMP:BOOL;
	STAGE_EDGE_TEMP:BOOL;
	STAGE_CENTER_TEMP: BOOL;
	Gas1FlowPressureOutOfRange:BOOL;
	Gas2FlowPressureOutOfRange:BOOL;
	Gas3FlowPressureOutOfRange:BOOL;
	Gas4FlowPressureOutOfRange:BOOL;
	Gas5FlowPressureOutOfRange:BOOL;
	Gas6FlowPressureOutOfRange:BOOL;
	TurboN2PurgePressureOutOfRange:BOOL;
	PrepareTransferTimerout:BOOL;
	TransferWaferTimeout:BOOL;
	OpenGasValveTimeout:BOOL;
	CloseGasValveTimeout:BOOL;
	OpenCloseSlitValveTimeout:BOOL;
	ATMCheckTimeout:BOOL;
	
	PLC				:BOOL;	
	DRY_PUMP		:BOOL;
	PENDULUM_VALVE	:BOOL;
	TURBO_PUMP		:BOOL;
	CHILLER1		:BOOL;
	CHILLER2		:BOOL;
	
	//PROCESS TOLERANCE
	TOLERANCE_PRESSURE:BOOL;
	TOLERANCE_MFC1:BOOL;
	TOLERANCE_MFC2:BOOL;
	TOLERANCE_MFC3:BOOL;
	TOLERANCE_MFC5:BOOL;
	TOLERANCE_MFC6:BOOL;
	TOLERANCE_MFC7:BOOL;
	TOLERANCE_WALL_TEMP:BOOL;
	TOLERANCE_LID_TEMP:BOOL;
	TOLERANCE_STAGE_EDGE_TEMP:BOOL;
	TOLERANCE_STAGE_CENTER_TEMP: BOOL;
END_STRUCT
END_TYPE
]]></Declaration>
  </DUT>
</TcPlcObject>