Helios/PLC/DUTs/IO/STR_NDI.TcDUT

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <DUT Name="STR_NDI" Id="{4ab57c46-39d4-4f3c-88a6-8531c15a5180}">
    <Declaration><![CDATA[TYPE STR_NDI :
STRUCT
//	Heartbeat	,	
	AV101_OPEN	,	
	AV101_CLOSE	,	
	AV102_OPEN	,	
	AV102_CLOSE	,	
	AV103_OPEN	,
	AV103_CLOSE	,
	AV104_OPEN	,
	AV104_CLOSE	,
	AV105_OPEN	,
	AV105_CLOSE	,
	AV106_OPEN	,
	AV106_CLOSE	,
	CY1_OPEN	,
	CY1_CLOSE	,
	CY2_OPEN	,
	CY2_CLOSE	,
	GV1_OPEN	,
	GV1_CLOSE	,
	Lid_Closed	,
	Water_Leak_Sensor01	,
	Water_Leak_Sensor02	,
	Water_Leak_Sensor03	,
	Water_Leak_Sensor04	,
//	WAFER_CHECK_SENSOR1	,
//	WAFER_CHECK_SENSOR2	,
//	WAFER_CHECK_SENSOR3	,
//	WAFER_CHECK_SENSOR4	,
//	PS10_H_ALM	,	
//	PS10_L_ALM	,
//	PS11_H_ALM	,
//	PS11_L_ALM	,
//	PS12_H_ALM		,
//	PS12_L_ALM	,
//	LID_heater_OT	,
//	Chamber_heater_OT	,
	Chiller_Controller_ALM	,
	PG_PS1_Pressure_Switch_Up_Limit	,
	PG_PS1_Pressure_Switch_Down_Limit	,
	PG_PS2_Pressure_Switch_Up_Limit	,
	PG_PS2_Pressure_Switch_Down_Limit	,
	PG_PS3_Pressure_Switch_Up_Limit	,
	PG_PS3_Pressure_Switch_Down_Limit	,
	PG_PS4_Pressure_Switch_Up_Limit	,
	PG_PS4_Pressure_Switch_Down_Limit	,
	PG_PS5_Pressure_Switch_Up_Limit	,
	PG_PS5_Pressure_Switch_Down_Limit	,
	PG_PS6_Pressure_Switch_Up_Limit	,
	PG_PS6_Pressure_Switch_Down_Limit	,
	PG_PS7_Pressure_Switch_Up_Limit	,
	PG_PS7_Pressure_Switch_Down_Limit	,
	PG_PS8_Pressure_Switch_Up_Limit	,
	PG_PS8_Pressure_Switch_Down_Limit	,
	PG_PS9_Pressure_Switch_Up_Limit	,
	PG_PS9_Pressure_Switch_Down_Limit	,
	MS1_ALM	,
	PS1_Pressure_Switch	,
	PS2_Pressure_Switch	,
(*	Forline_Heater1_OT	,
	Forline_Heater2_OT	,
	Forline_Heater3_OT	,
	Forline_Heater4_OT	,
	Forline_Heater5_OT	,
	Forline_Heater6_OT	,
	Forline_Heater7_OT	,
	Forline_Heater8_OT	,
	Turbo_Pump_Heater_OT	,
	Pendulum_Valve_Heater_OT	,
	IGS_Heater_OT	,
	Tape_Heater_OT	,
//	Foreline_Heater_OT	,
	Gate_Valve_OT	,
	Stage_Heater_OT	,
*)	CDA_OK	,
	Lift_Pin_Middle1	,
	Lift_Pin_Middle2	,
//	FL01B2	,
//	FL01B4	,
	FL02B2	,
//	FL02B4	,
	FL03B2	,
//	FL03B4	,
	FL04B2	,
//	FL04B4	,
//	DP01_OUTPUT1	,
//	DP01_OUTPUT2	,
//	MaualEndStepFeedBack	,
	AV1		,
	AV2		,
	AV3		,
	AV4		,
	AV6		,
	AV7		,
	AV9		,
	AV10	,
	AV11	,
	AV12	,
	AV13	,
	AV14	,
	AV16	,
	AV17	,
	AV19	,
	AV20	,
	AV22	,
	AV23	,
	AV25	,
	AV26	,
	AV27	,
	AV5		,
	AV8		,
	AV15	,
	AV18	,
	AV21	,
	AV24	,
	GD1_ALM	,
	GD2_ALM	,
	GD_FAULT:BOOL;
END_STRUCT
END_TYPE

]]></Declaration>
  </DUT>
</TcPlcObject>