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STR_AO.TcDUT

STR_AO.TcDUT 2.0 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
    3. 

  3.   <DUT Name="STR_AO" Id="{23458609-0f6e-473f-a61b-eae9b82dd6ca}">
    4. 

  4.     <Declaration><![CDATA[TYPE STR_AO :
    5. 

  5. STRUCT
    6. 

  6. MFC1_Flow_Setpoint	,
    7. 

  7. MFC1_Rate_Setpoint	,
    8. 

  8. MFC2_Flow_Setpoint	,
    9. 

  9. MFC2_Rate_Setpoint	,
    10. 

  10. MFC3_Flow_Setpoint	,
    11. 

  11. MFC3_Rate_Setpoint	,
    12. 

  12. //MFC4_Flow_Setpoint	,
    13. 

  13. //MFC4_Rate_Setpoint	,
    14. 

  14. MFC5_Flow_Setpoint	,
    15. 

  15. MFC5_Rate_Setpoint	,
    16. 

  16. MFC6_Flow_Setpoint	,
    17. 

  17. MFC6_Rate_Setpoint	,
    18. 

  18. MFC7_Flow_Setpoint	,
    19. 

  19. MFC7_Rate_Setpoint	,
    20. 

  20. LID_Temp_SV	,	//E02
    21. 

  21. //LID_Heater2_Temperature_Setpoint	,	//E03
    22. 

  22. //LID_Heater3_Temperature_Setpoint	,	//E04
    23. 

  23. //LID_Heater4_Temperature_Setpoint	,	//E05
    24. 

  24. Chamber_Temp1_SV	,//E06
    25. 

  25. Chamber_Temp2_SV	,//E07
    26. 

  26. Chamber_Temp3_SV	,//E08
    27. 

  27. (*Chamber_Heater4_Temperature_Setpoint	,//E09
    28. 

  28. Chamber_Heater5_Temperature_Setpoint	,//E10
    29. 

  29. Chamber_Heater6_Temperature_Setpoint	,//E11
    30. 

  30. Chamber_Heater7_Temperature_Setpoint	,//E12
    31. 

  31. Chamber_Heater8_Temperature_Setpoint	,//E13*)
    32. 

  32. AV102_Temp_SV	,//E14
    33. 

  33. AV101_Temp_SV	,//E15
    34. 

  34. AV106_Temp_SV	,//E16
    35. 

  35. BA01_Temp_SV	,//E17
    36. 

  36. VG103_Pipe_Temp_SV	,//E16
    37. 

  37. Exhaust1_6_Temp_SV	,//E14
    38. 

  38. Exhaust7_8_Temp_SV	,//E15
    39. 

  39. VG101_Pipe_Temp_SV	,//E16
    40. 

  40. (*Forline_Heater9_Temperature_Setpoint	,//E17
    41. 

  41. Forline_Heater10_Temperature_Setpoint	,//E14
    42. 

  42. Forline_Heater11_Temperature_Setpoint	,//E15
    43. 

  43. Forline_Heater12_Temperature_Setpoint	,//E16
    44. 

  44. Forline_Heater13_Temperature_Setpoint	,//E17
    45. 

  45. Forline_Heater14_Temperature_Setpoint	,//E14
    46. 

  46. Forline_Heater15_Temperature_Setpoint	,//E15
    47. 

  47. Forline_Heater16_Temperature_Setpoint	,//E16
    48. 

  48. Forline_Heater17_Temperature_Setpoint	,//E17
    49. 

  49. Forline_Heater18_Temperature_Setpoint	,//E14
    50. 

  50. Forline_Heater19_Temperature_Setpoint	,//E15
    51. 

  51. Forline_Heater20_Temperature_Setpoint	,//E16*)
    52. 

  52. Gate_Valve_Temp_SV	,//E18
    53. 

  53. APC_Temp_SV	,//E01
    54. 

  54. //TMP_Temp_SV	,//不用
    55. 

  55. Tape_Temp1_SV	,
    56. 

  56. Tape_Temp2_SV	,
    57. 

  57. Tape_Temp3_SV	,
    58. 

  58. IGS_Temp1_SV	,
    59. 

  59. IGS_Temp2_SV	,
    60. 

  60. Chiller_Temp1_SV	,
    61. 

  61. Chiller_Temp2_SV	,
    62. 

  62. Stage_Temp1_SV	,
    63. 

  63. Stage_Temp2_SV	,
    64. 

  64. Chiller1_On	,
    65. 

  65. Chiller2_On:REAL;
    66. 

  66. 

  67. 

  68. APC:VAT_OUT;
    69. 

  69. 

  70. TMP:TMP_OUT;
    71. 

  71. 

  72. END_STRUCT
    73. 

  73. END_TYPE
    74. 

  74. ]]></Declaration>
    75. 

  75.   </DUT>
    76. 

  76. </TcPlcObject>
    77.