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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="STR_AI" Id="{4fd011a6-6a0c-4541-8224-475ba77e78c8}">
- <Declaration><![CDATA[TYPE STR_AI :
- STRUCT
- VG101_Pressure ,
- VG102_Pressure ,
- VG103_Pressure ,
- VG104_Pressure ,
- BA1_Pressure ,
- MFC1_Flow ,
- MFC2_Flow ,
- MFC3_Flow ,
- //MFC4_Flow ,
- MFC5_Flow ,
- MFC6_Flow ,
- MFC7_Flow ,
- CHILLER1_TEMP_PV ,
- CHILLER1_DI_PV ,
- CHILLER1_FLOW_PV ,
- CHILLER1_PRESS_PV ,
- CHILLER2_TEMP_PV ,
- CHILLER2_DI_PV ,
- CHILLER2_FLOW_PV ,
- CHILLER2_PRESS_PV ,
- //Turbo_Pump_Temp ,
- APC_Temp , //TC01
- Gate_Valve_Temp , //TC13
- Gate_Valve_Temp_Monitor, //TC14
- IGS_Temp1 , //TC35
- IGS_Temp2 , //TC36
- //IGS_Temp3 , //TC35
- //IGS_Temp4 , //TC36
- Lid_Temp , //TC02
- Lid_Temp_Monitor1 , //TC03
- Lid_Temp_Monitor2 , //TC04
- Tape_Temp1 , //TC31
- Tape_Temp2 , //TC32
- Tape_Temp3 , //TC32
- AV102_Temp ,
- AV101_Temp ,
- AV106_Temp ,
- BA01_Temp ,
- VG103_Pipe_Temp ,
- Exhaust1_6_Temp ,
- Exhaust7_8_Temp ,
- VG101_Pipe_Temp ,
- Chamber_Temp1 , //TC05
- Chamber_Temp2 , //TC06
- Chamber_Temp3 , //TC07
- Chamber_Temp_Monitor, //TC12
- Stage_Temp1 , //TC08
- Stage_Temp2 , //TC09
- Stage_Temp3 , //TC10
- Stage_Temp4 :REAL; //TC11
- PG_PS1_Value ,
- PG_PS2_Value ,
- PG_PS3_Value ,
- PG_PS4_Value ,
- PG_PS5_Value ,
- PG_PS6_Value ,
- //PG_PS7_Value ,
- //PG_PS8_Value ,
- //PG_PS9_Value ,
- PS1_Value ,
- PS2_Value ,
- MS1_Value ,
- GD01_Value ,
- GD02_Value :REAL;
- APC:VAT_IN;
- TMP:TMP_IN;
- Water_Flow:REAL;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
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