Helios/PHT/PLC/POUs/PRG/Temp.TcPOU

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <POU Name="Temp" Id="{8e4146c5-83e0-483d-9024-7c58de37e9e4}" SpecialFunc="None">
    <Declaration><![CDATA[PROGRAM Temp
VAR	
	H_LID				:ARRAY[1..10] OF Temp_controller;
	H_CHAMBER			:ARRAY[1..10] OF Temp_controller;
	H_PEN_VALVE			:Temp_controller;
	H_GATE_VALVE		:Temp_controller;
	H_IGS				:ARRAY[1..10] OF Temp_controller;
	H_TAPE				:ARRAY[1..10] OF Temp_controller;
	H_FORELINE			:ARRAY[1..20] OF Temp_controller;
	H_STAGE				:ARRAY[1..10] OF Temp_controller;	
END_VAR
]]></Declaration>
    <Implementation>
      <ST><![CDATA[//E01 PEN_VALVE PID		
	IF 	GV.AI.APC_Temp-GV.AO.APC_Temp_SV<3	
	THEN 
		H_PEN_VALVE.PID_Feedforward:=GV_H.PEN_VALVE_HEATER_PID.Feedforward;
	ELSE
		H_PEN_VALVE.PID_Feedforward:=0;
	END_IF	
	H_PEN_VALVE(
		ENABLE:= GV.AI.APC_Temp<110, 
		AUTO_TUNE:= GV.PEN_VALVE_HEATER_AUTO_TUNE_EN, 
		AUTO_TUNE_OUTPUT:=GV.PEN_VALVE_HEATER_AUTO_TUNE_OUTPUT,
		TEMP_SV:= GV.AO.APC_Temp_SV, 
		TEMP_ACTUAL:= GV.AI.APC_Temp, 
		TEMP_RATE:=5,
		PID_P:= GV_H.PEN_VALVE_HEATER_PID.P, 
		PID_I:= GV_H.PEN_VALVE_HEATER_PID.I, 
		PID_D:= GV_H.PEN_VALVE_HEATER_PID.D, 
		PID_Dp:= GV_H.PEN_VALVE_HEATER_PID.DP,
		PID_Output_Limit:= GV_H.PEN_VALVE_HEATER_PID.Output_Limit,
		SSR_ON=> GV.PEN_VALVE_HEATER_SSR_ON
	);		
	IF H_PEN_VALVE.PID_AUTO_TUNE_DONE
		THEN
		GV_H.PEN_VALVE_HEATER_PID.P:=H_PEN_VALVE.PID_AUTO_TUNE_P;
		GV_H.PEN_VALVE_HEATER_PID.I:=H_PEN_VALVE.PID_AUTO_TUNE_I;
		GV_H.PEN_VALVE_HEATER_PID.D:=H_PEN_VALVE.PID_AUTO_TUNE_D;
		GV.PEN_VALVE_HEATER_AUTO_TUNE_EN:=FALSE;
	END_IF
	
//E02 LID1 PID
	H_LID[1](
	ENABLE:= GV.AI.Lid_Temp<100, 
	AUTO_TUNE:= GV.LID_HEATER_AUTO_TUNE_EN[1], 
	AUTO_TUNE_OUTPUT:=GV.LID_HEATER_AUTO_TUNE_OUTPUT[1],
	TEMP_SV:= GV.AO.LID_Temp_SV, 
	TEMP_ACTUAL:= GV.AI.Lid_Temp, 
	TEMP_RATE:=5,
	PID_P:= GV_H.LID_HEATER_PID[1].P, 
	PID_I:= GV_H.LID_HEATER_PID[1].I, 
	PID_D:= GV_H.LID_HEATER_PID[1].D, 
	PID_Dp:= GV_H.LID_HEATER_PID[1].DP, 
	PID_Feedforward:= GV_H.LID_HEATER_PID[1].Feedforward,
	PID_Output_Limit:= GV_H.LID_HEATER_PID[1].Output_Limit,
	SSR_ON=> GV.LID_HEATER_SSR_ON[1],
	SSR_ON=> GV.LID_HEATER_SSR_ON[2],
	SSR_ON=> GV.LID_HEATER_SSR_ON[3],
	SSR_ON=> GV.LID_HEATER_SSR_ON[4]
	);	
	IF H_LID[1].PID_AUTO_TUNE_DONE
		THEN
		GV_H.LID_HEATER_PID[1].P:=H_LID[1].PID_AUTO_TUNE_P;
		GV_H.LID_HEATER_PID[1].I:=H_LID[1].PID_AUTO_TUNE_I;
		GV_H.LID_HEATER_PID[1].D:=H_LID[1].PID_AUTO_TUNE_D;
		GV.LID_HEATER_AUTO_TUNE_EN[1]:=FALSE;
	END_IF
//E06 CHAMBER1 PID
	H_CHAMBER[1](
	ENABLE:= GV.AI.CHAMBER_Temp1<100, 
	AUTO_TUNE:= GV.CHAMBER_HEATER_AUTO_TUNE_EN[1], 
	AUTO_TUNE_OUTPUT:=GV.CHAMBER_HEATER_AUTO_TUNE_OUTPUT[1],
	TEMP_SV:= GV.AO.Chamber_Temp1_SV, 
	TEMP_ACTUAL:= GV.AI.CHAMBER_Temp1, 
	TEMP_RATE:=5,
	PID_P:= GV_H.CHAMBER_HEATER_PID[1].P, 
	PID_I:= GV_H.CHAMBER_HEATER_PID[1].I, 
	PID_D:= GV_H.CHAMBER_HEATER_PID[1].D, 
	PID_Dp:= GV_H.CHAMBER_HEATER_PID[1].DP, 
	PID_Feedforward:= GV_H.CHAMBER_HEATER_PID[1].Feedforward,
	PID_Output_Limit:= GV_H.CHAMBER_HEATER_PID[1].Output_Limit,
	SSR_ON=> GV.CHAMBER_HEATER_SSR_ON[1]
	);	
	IF H_CHAMBER[1].PID_AUTO_TUNE_DONE
		THEN
		GV_H.CHAMBER_HEATER_PID[1].P:=H_CHAMBER[1].PID_AUTO_TUNE_P;
		GV_H.CHAMBER_HEATER_PID[1].I:=H_CHAMBER[1].PID_AUTO_TUNE_I;
		GV_H.CHAMBER_HEATER_PID[1].D:=H_CHAMBER[1].PID_AUTO_TUNE_D;
		GV.CHAMBER_HEATER_AUTO_TUNE_EN[1]:=FALSE;
	END_IF
//E07 CHAMBER2 PID	
	H_CHAMBER[2](
	ENABLE:= GV.AI.CHAMBER_Temp2<100, 
	AUTO_TUNE:= GV.CHAMBER_HEATER_AUTO_TUNE_EN[2], 
	AUTO_TUNE_OUTPUT:=GV.CHAMBER_HEATER_AUTO_TUNE_OUTPUT[2],
	TEMP_SV:= GV.AO.Chamber_Temp2_SV, 
	TEMP_ACTUAL:= GV.AI.CHAMBER_Temp2, 
	TEMP_RATE:=5,
	PID_P:= GV_H.CHAMBER_HEATER_PID[2].P, 
	PID_I:= GV_H.CHAMBER_HEATER_PID[2].I, 
	PID_D:= GV_H.CHAMBER_HEATER_PID[2].D, 
	PID_Dp:= GV_H.CHAMBER_HEATER_PID[2].DP, 
	PID_Feedforward:= GV_H.CHAMBER_HEATER_PID[2].Feedforward,
	PID_Output_Limit:= GV_H.CHAMBER_HEATER_PID[2].Output_Limit,
	SSR_ON=> GV.CHAMBER_HEATER_SSR_ON[2]
	);	
	IF H_CHAMBER[2].PID_AUTO_TUNE_DONE
		THEN
		GV_H.CHAMBER_HEATER_PID[2].P:=H_CHAMBER[2].PID_AUTO_TUNE_P;
		GV_H.CHAMBER_HEATER_PID[2].I:=H_CHAMBER[2].PID_AUTO_TUNE_I;
		GV_H.CHAMBER_HEATER_PID[2].D:=H_CHAMBER[2].PID_AUTO_TUNE_D;
		GV.CHAMBER_HEATER_AUTO_TUNE_EN[2]:=FALSE;
	END_IF
(*
	//E08 CHAMBER3 PID		
	H_CHAMBER[3](
	ENABLE:= GV.AI.CHAMBER_Temp3<100, 
	AUTO_TUNE:= GV.CHAMBER_HEATER_AUTO_TUNE_EN[3], 
	AUTO_TUNE_OUTPUT:=GV.CHAMBER_HEATER_AUTO_TUNE_OUTPUT[3],
	TEMP_SV:= GV.AO.Chamber_Temp3_SV, 
	TEMP_ACTUAL:= GV.AI.Chamber_Temp3, 
	PID_P:= GV_H.CHAMBER_HEATER_PID[3].P, 
	PID_I:= GV_H.CHAMBER_HEATER_PID[3].I, 
	PID_D:= GV_H.CHAMBER_HEATER_PID[3].D, 
	PID_Dp:= GV_H.CHAMBER_HEATER_PID[3].DP,
	PID_Feedforward:= GV_H.CHAMBER_HEATER_PID[3].Feedforward,
	PID_Output_Limit:= GV_H.CHAMBER_HEATER_PID[3].Output_Limit,
	SSR_ON=> GV.CHAMBER_HEATER_SSR_ON[4]
	);	
	IF H_CHAMBER[3].PID_AUTO_TUNE_DONE
		THEN
		GV_H.CHAMBER_HEATER_PID[3].P:=H_CHAMBER[3].PID_AUTO_TUNE_P;
		GV_H.CHAMBER_HEATER_PID[3].I:=H_CHAMBER[3].PID_AUTO_TUNE_I;
		GV_H.CHAMBER_HEATER_PID[3].D:=H_CHAMBER[3].PID_AUTO_TUNE_D;
		GV.CHAMBER_HEATER_AUTO_TUNE_EN[3]:=FALSE;
	END_IF

	//E18 GATE VALVE PID
		IF 	ABS(GV.AI.GATE_VALVE_Temp-GV.AO.Gate_Valve_Temp_SV)<5	
		THEN 
			H_GATE_VALVE.PID_Feedforward:=GV_H.GATE_VALVE_HEATER_PID.Feedforward;
		ELSE
			H_GATE_VALVE.PID_Feedforward:=0;
		END_IF
		H_GATE_VALVE(
		ENABLE:= GV.AI.GATE_VALVE_Temp<100, 
		AUTO_TUNE:= GV.GATE_VALVE_HEATER_AUTO_TUNE_EN, 
		AUTO_TUNE_OUTPUT:=GV.GATE_VALVE_HEATER_AUTO_TUNE_OUTPUT,
		TEMP_SV:= GV.AO.Gate_Valve_Temp_SV, 
		TEMP_ACTUAL:= GV.AI.GATE_VALVE_Temp, 
		PID_P:= GV_H.GATE_VALVE_HEATER_PID.P, 
		PID_I:= GV_H.GATE_VALVE_HEATER_PID.I, 
		PID_D:= GV_H.GATE_VALVE_HEATER_PID.D, 
		PID_Dp:= GV_H.GATE_VALVE_HEATER_PID.DP, 
		PID_Output_Limit:= GV_H.GATE_VALVE_HEATER_PID.Output_Limit,
		SSR_ON=> GV.GATE_VALVE_SSR_ON
		);		
		IF H_GATE_VALVE.PID_AUTO_TUNE_DONE
			THEN
			GV_H.GATE_VALVE_HEATER_PID.P:=H_GATE_VALVE.PID_AUTO_TUNE_P;
			GV_H.GATE_VALVE_HEATER_PID.I:=H_GATE_VALVE.PID_AUTO_TUNE_I;
			GV_H.GATE_VALVE_HEATER_PID.D:=H_GATE_VALVE.PID_AUTO_TUNE_D;
			GV.GATE_VALVE_HEATER_AUTO_TUNE_EN:=FALSE;
		END_IF	
		
	//E31	TAPE1 PID		
		H_TAPE[1](
		ENABLE:= GV.AI.TAPE_Temp1<120, 
		AUTO_TUNE:= GV.TAPE_HEATER_AUTO_TUNE_EN[1],
		AUTO_TUNE_OUTPUT:=GV.TAPE_HEATER_AUTO_TUNE_OUTPUT[1], 
		TEMP_SV:= GV.AO.Tape_Temp1_SV, 
		TEMP_ACTUAL:= GV.AI.TAPE_Temp1, 
		PID_P:= GV_H.TAPE_HEATER_PID[1].P, 
		PID_I:= GV_H.TAPE_HEATER_PID[1].I, 
		PID_D:= GV_H.TAPE_HEATER_PID[1].D, 
		PID_Dp:= GV_H.TAPE_HEATER_PID[1].DP, 
		PID_Feedforward:= ,
		PID_Output_Limit:= GV_H.TAPE_HEATER_PID[1].Output_Limit,
		SSR_ON=> GV.TAPE_HEATER_SSR_ON[1]
		);	
		IF H_TAPE[1].PID_AUTO_TUNE_DONE
			THEN
			GV_H.TAPE_HEATER_PID[1].P:=H_TAPE[1].PID_AUTO_TUNE_P;
			GV_H.TAPE_HEATER_PID[1].I:=H_TAPE[1].PID_AUTO_TUNE_I;
			GV_H.TAPE_HEATER_PID[1].D:=H_TAPE[1].PID_AUTO_TUNE_D;
			GV.TAPE_HEATER_AUTO_TUNE_EN[1]:=FALSE;
		END_IF
	//E32	TAPE2 PID		
		H_TAPE[2](
		ENABLE:= GV.AI.TAPE_Temp2<120, 
		AUTO_TUNE:= GV.TAPE_HEATER_AUTO_TUNE_EN[2], 
		AUTO_TUNE_OUTPUT:=GV.TAPE_HEATER_AUTO_TUNE_OUTPUT[2], 
		TEMP_SV:= GV.AO.Tape_Temp2_SV, 
		TEMP_ACTUAL:= GV.AI.TAPE_Temp2, 
		PID_P:= GV_H.TAPE_HEATER_PID[2].P, 
		PID_I:= GV_H.TAPE_HEATER_PID[2].I, 
		PID_D:= GV_H.TAPE_HEATER_PID[2].D, 
		PID_Dp:= GV_H.TAPE_HEATER_PID[2].DP, 
		PID_Feedforward:= ,
		PID_Output_Limit:= GV_H.TAPE_HEATER_PID[2].Output_Limit,
		SSR_ON=> GV.TAPE_HEATER_SSR_ON[2]
		);	
		IF H_TAPE[2].PID_AUTO_TUNE_DONE
			THEN
			GV_H.TAPE_HEATER_PID[2].P:=H_TAPE[2].PID_AUTO_TUNE_P;
			GV_H.TAPE_HEATER_PID[2].I:=H_TAPE[2].PID_AUTO_TUNE_I;
			GV_H.TAPE_HEATER_PID[2].D:=H_TAPE[2].PID_AUTO_TUNE_D;
			GV.TAPE_HEATER_AUTO_TUNE_EN[2]:=FALSE;
		END_IF
	//E35	IGS1 PID		
		H_IGS[1](
		ENABLE:= GV.AI.IGS_Temp1<50, 
		AUTO_TUNE:= GV.IGS_HEATER_AUTO_TUNE_EN[1], 
		AUTO_TUNE_OUTPUT:=GV.IGS_HEATER_AUTO_TUNE_OUTPUT[1], 
		TEMP_SV:= GV.AO.IGS_Temp1_SV, 
		TEMP_ACTUAL:= GV.AI.IGS_Temp1, 
		PID_P:= GV_H.IGS_HEATER_PID[1].P, 
		PID_I:= GV_H.IGS_HEATER_PID[1].I, 
		PID_D:= GV_H.IGS_HEATER_PID[1].D, 
		PID_Dp:= GV_H.IGS_HEATER_PID[1].DP, 
		PID_Feedforward:= GV_H.IGS_HEATER_PID[1].Feedforward,
		PID_Output_Limit:= GV_H.IGS_HEATER_PID[1].Output_Limit,
		SSR_ON=> GV.IGS_HEATER_SSR_ON[1]
		);	
		IF H_IGS[1].PID_AUTO_TUNE_DONE
			THEN
			GV_H.IGS_HEATER_PID[1].P:=H_IGS[1].PID_AUTO_TUNE_P;
			GV_H.IGS_HEATER_PID[1].I:=H_IGS[1].PID_AUTO_TUNE_I;
			GV_H.IGS_HEATER_PID[1].D:=H_IGS[1].PID_AUTO_TUNE_D;
			GV.IGS_HEATER_AUTO_TUNE_EN[1]:=FALSE;
		END_IF
	//E36	IGS2 PID	
		IF 	GV.AI.IGS_Temp2>GV.AO.IGS_Temp2_SV+3 THEN 
			H_IGS[2].PID_Feedforward:=0;
			ELSE
				H_IGS[2].PID_Feedforward:=GV_H.IGS_HEATER_PID[2].Feedforward;
		
		END_IF
		H_IGS[2](
		ENABLE:= GV.AI.IGS_Temp2<50, 
		AUTO_TUNE:= GV.IGS_HEATER_AUTO_TUNE_EN[2], 
		AUTO_TUNE_OUTPUT:=GV.IGS_HEATER_AUTO_TUNE_OUTPUT[2],
		TEMP_SV:= GV.AO.IGS_Temp2_SV, 
		TEMP_ACTUAL:= GV.AI.IGS_Temp2, 
		TEMP_RATE:=10,
		PID_P:= GV_H.IGS_HEATER_PID[2].P, 
		PID_I:= GV_H.IGS_HEATER_PID[2].I, 
		PID_D:= GV_H.IGS_HEATER_PID[2].D, 
		PID_Dp:= GV_H.IGS_HEATER_PID[2].DP, 
		PID_Feedforward:= ,
		PID_Output_Limit:= GV_H.IGS_HEATER_PID[2].Output_Limit,
		SSR_ON=> GV.IGS_HEATER_SSR_ON[2]
		);	
		IF H_IGS[2].PID_AUTO_TUNE_DONE
			THEN
			GV_H.IGS_HEATER_PID[2].P:=H_IGS[2].PID_AUTO_TUNE_P;
			GV_H.IGS_HEATER_PID[2].I:=H_IGS[2].PID_AUTO_TUNE_I;
			GV_H.IGS_HEATER_PID[2].D:=H_IGS[2].PID_AUTO_TUNE_D;
			GV.IGS_HEATER_AUTO_TUNE_EN[2]:=FALSE;
		END_IF
*)	
//FORELINE1 PID	SSR7	AV105	
	H_FORELINE[1](
	ENABLE:= GV.AI.AV105_Temp<120, 
	AUTO_TUNE:= GV.FORELINE_HEATER_AUTO_TUNE_EN[1], 
	AUTO_TUNE_OUTPUT:=GV.FORELINE_HEATER_AUTO_TUNE_OUTPUT[1],
	TEMP_SV:= GV.AO.AV105_Temp_SV, 
	TEMP_ACTUAL:= GV.AI.AV105_Temp, 
	TEMP_RATE:=10,
	PID_P:= GV_H.FORELINE_HEATER_PID[1].P, 
	PID_I:= GV_H.FORELINE_HEATER_PID[1].I, 
	PID_D:= GV_H.FORELINE_HEATER_PID[1].D, 
	PID_Dp:= GV_H.FORELINE_HEATER_PID[1].DP, 
	PID_Feedforward:= GV_H.FORELINE_HEATER_PID[1].Feedforward,
	PID_Output_Limit:= GV_H.FORELINE_HEATER_PID[1].Output_Limit,
	SSR_ON=> GV.FORELINE_HEATER_SSR_ON[1]);
	
	IF H_FORELINE[1].PID_AUTO_TUNE_DONE
		THEN
		GV_H.FORELINE_HEATER_PID[1].P:=H_FORELINE[1].PID_AUTO_TUNE_P;
		GV_H.FORELINE_HEATER_PID[1].I:=H_FORELINE[1].PID_AUTO_TUNE_I;
		GV_H.FORELINE_HEATER_PID[1].D:=H_FORELINE[1].PID_AUTO_TUNE_D;
		GV.FORELINE_HEATER_AUTO_TUNE_EN[1]:=FALSE;
	END_IF
//FORELINE2 PID		SSR8	AV104
	H_FORELINE[2](
	ENABLE:= GV.AI.AV104_Temp<120, 
	AUTO_TUNE:= GV.FORELINE_HEATER_AUTO_TUNE_EN[2], 
	AUTO_TUNE_OUTPUT:=GV.FORELINE_HEATER_AUTO_TUNE_OUTPUT[2],
	TEMP_SV:= GV.AO.AV104_Temp_SV, 
	TEMP_ACTUAL:= GV.AI.AV104_Temp,
	TEMP_RATE:=10, 
	PID_P:= GV_H.FORELINE_HEATER_PID[2].P, 
	PID_I:= GV_H.FORELINE_HEATER_PID[2].I, 
	PID_D:= GV_H.FORELINE_HEATER_PID[2].D, 
	PID_Dp:= GV_H.FORELINE_HEATER_PID[2].DP, 
	PID_Feedforward:= GV_H.FORELINE_HEATER_PID[2].Feedforward,
	PID_Output_Limit:= GV_H.FORELINE_HEATER_PID[2].Output_Limit,
	SSR_ON=> GV.FORELINE_HEATER_SSR_ON[2]);
	
	IF H_FORELINE[2].PID_AUTO_TUNE_DONE
		THEN
		GV_H.FORELINE_HEATER_PID[2].P:=H_FORELINE[2].PID_AUTO_TUNE_P;
		GV_H.FORELINE_HEATER_PID[2].I:=H_FORELINE[2].PID_AUTO_TUNE_I;
		GV_H.FORELINE_HEATER_PID[2].D:=H_FORELINE[2].PID_AUTO_TUNE_D;
		GV.FORELINE_HEATER_AUTO_TUNE_EN[2]:=FALSE;
	END_IF
//FORELINE3 PID		SSR9	AV102
IF GV.AI.AV102_Temp<GV.AO.AV102_Temp_SV+1
	THEN 
	GV_H.FORELINE_HEATER_PID[3].Feedforward:=0;
	ELSE
	GV_H.FORELINE_HEATER_PID[3].Feedforward:=0;
END_IF
	H_FORELINE[3](
	ENABLE:= GV.AI.AV102_Temp<120, 
	AUTO_TUNE:= GV.FORELINE_HEATER_AUTO_TUNE_EN[3], 
	AUTO_TUNE_OUTPUT:=GV.FORELINE_HEATER_AUTO_TUNE_OUTPUT[3],
	TEMP_SV:= GV.AO.AV102_Temp_SV, 
	TEMP_ACTUAL:= GV.AI.AV102_Temp,
	TEMP_RATE:=10, 
	PID_P:= GV_H.FORELINE_HEATER_PID[3].P, 
	PID_I:= GV_H.FORELINE_HEATER_PID[3].I, 
	PID_D:= GV_H.FORELINE_HEATER_PID[3].D, 
	PID_Dp:= GV_H.FORELINE_HEATER_PID[3].DP, 
	PID_Feedforward:= GV_H.FORELINE_HEATER_PID[3].Feedforward,
	PID_Output_Limit:= GV_H.FORELINE_HEATER_PID[3].Output_Limit,
	SSR_ON=> GV.FORELINE_HEATER_SSR_ON[3]);
	
	IF H_FORELINE[3].PID_AUTO_TUNE_DONE
		THEN
		GV_H.FORELINE_HEATER_PID[3].P:=H_FORELINE[3].PID_AUTO_TUNE_P;
		GV_H.FORELINE_HEATER_PID[3].I:=H_FORELINE[3].PID_AUTO_TUNE_I;
		GV_H.FORELINE_HEATER_PID[3].D:=H_FORELINE[3].PID_AUTO_TUNE_D;
		GV.FORELINE_HEATER_AUTO_TUNE_EN[3]:=FALSE;
	END_IF	
//FORELINE4 PID		SSR10	AV101
	H_FORELINE[4](
	ENABLE:= GV.AI.AV101_Temp<120, 
	AUTO_TUNE:= GV.FORELINE_HEATER_AUTO_TUNE_EN[4],
	AUTO_TUNE_OUTPUT:=GV.FORELINE_HEATER_AUTO_TUNE_OUTPUT[4], 
	TEMP_SV:= GV.AO.AV101_Temp_SV, 
	TEMP_ACTUAL:= GV.AI.AV101_Temp, 
	TEMP_RATE:=10,
	PID_P:= GV_H.FORELINE_HEATER_PID[4].P, 
	PID_I:= GV_H.FORELINE_HEATER_PID[4].I, 
	PID_D:= GV_H.FORELINE_HEATER_PID[4].D, 
	PID_Dp:= GV_H.FORELINE_HEATER_PID[4].DP, 
	PID_Feedforward:= GV_H.FORELINE_HEATER_PID[4].Feedforward,
	PID_Output_Limit:= GV_H.FORELINE_HEATER_PID[4].Output_Limit,
	SSR_ON=> GV.FORELINE_HEATER_SSR_ON[4]);
	
	IF H_FORELINE[4].PID_AUTO_TUNE_DONE
		THEN
		GV_H.FORELINE_HEATER_PID[4].P:=H_FORELINE[4].PID_AUTO_TUNE_P;
		GV_H.FORELINE_HEATER_PID[4].I:=H_FORELINE[4].PID_AUTO_TUNE_I;
		GV_H.FORELINE_HEATER_PID[4].D:=H_FORELINE[4].PID_AUTO_TUNE_D;
		GV.FORELINE_HEATER_AUTO_TUNE_EN[4]:=FALSE;
	END_IF
//FORELINE5 PID		SS11	Exh1-3
	H_FORELINE[5](
	ENABLE:= GV.AI.Exhaust1_3_Temp<120, 
	AUTO_TUNE:= GV.FORELINE_HEATER_AUTO_TUNE_EN[5], 
	AUTO_TUNE_OUTPUT:=GV.FORELINE_HEATER_AUTO_TUNE_OUTPUT[5],
	TEMP_SV:= GV.AO.Exhaust1_3_Temp_SV ,
	TEMP_ACTUAL:= GV.AI.Exhaust1_3_Temp,
	TEMP_RATE:=10, 
	PID_P:= GV_H.FORELINE_HEATER_PID[5].P, 
	PID_I:= GV_H.FORELINE_HEATER_PID[5].I, 
	PID_D:= GV_H.FORELINE_HEATER_PID[5].D, 
	PID_Dp:= GV_H.FORELINE_HEATER_PID[5].DP, 
	PID_Feedforward:= GV_H.FORELINE_HEATER_PID[5].Feedforward,
	PID_Output_Limit:= GV_H.FORELINE_HEATER_PID[5].Output_Limit,
	SSR_ON=> GV.FORELINE_HEATER_SSR_ON[5]);
	
	IF H_FORELINE[5].PID_AUTO_TUNE_DONE
		THEN
		GV_H.FORELINE_HEATER_PID[5].P:=H_FORELINE[5].PID_AUTO_TUNE_P;
		GV_H.FORELINE_HEATER_PID[5].I:=H_FORELINE[5].PID_AUTO_TUNE_I;
		GV_H.FORELINE_HEATER_PID[5].D:=H_FORELINE[5].PID_AUTO_TUNE_D;
		GV.FORELINE_HEATER_AUTO_TUNE_EN[5]:=FALSE;
	END_IF
//FORELINE6 PID		SS12	Exh4-7
	H_FORELINE[6](
	ENABLE:= GV.AI.Exhaust4_7_Temp<120, 
	AUTO_TUNE:= GV.FORELINE_HEATER_AUTO_TUNE_EN[6], 
	TEMP_SV:= GV.AO.Exhaust4_7_Temp_SV, 
	TEMP_ACTUAL:= GV.AI.Exhaust4_7_Temp,
	TEMP_RATE:=10, 
	PID_P:= GV_H.FORELINE_HEATER_PID[6].P, 
	PID_I:= GV_H.FORELINE_HEATER_PID[6].I, 
	PID_D:= GV_H.FORELINE_HEATER_PID[6].D, 
	PID_Dp:= GV_H.FORELINE_HEATER_PID[6].DP, 
	PID_Feedforward:= GV_H.FORELINE_HEATER_PID[6].Feedforward,
	PID_Output_Limit:= GV_H.FORELINE_HEATER_PID[6].Output_Limit,
	SSR_ON=> GV.FORELINE_HEATER_SSR_ON[6]);
	
	IF H_FORELINE[6].PID_AUTO_TUNE_DONE
		THEN
		GV_H.FORELINE_HEATER_PID[6].P:=H_FORELINE[6].PID_AUTO_TUNE_P;
		GV_H.FORELINE_HEATER_PID[6].I:=H_FORELINE[6].PID_AUTO_TUNE_I;
		GV_H.FORELINE_HEATER_PID[6].D:=H_FORELINE[6].PID_AUTO_TUNE_D;
		GV.FORELINE_HEATER_AUTO_TUNE_EN[6]:=FALSE;
	END_IF	
//H-STAGE1
	H_STAGE[1](
	ENABLE:= GV.AI.Stage_Temp1<250 AND PM.NDI.Lid_Closed, 
	AUTO_TUNE:= GV.STAGE_HEATER_AUTO_TUNE_EN[1], 
	TEMP_SV:= GV.AO.Stage_Temp1_SV, 
	TEMP_ACTUAL:= GV.AI.Stage_Temp1,
	TEMP_RATE:=10, 
	PID_P:= GV_H.STAGE_HEATER_PID[1].P, 
	PID_I:= GV_H.STAGE_HEATER_PID[1].I, 
	PID_D:= GV_H.STAGE_HEATER_PID[1].D, 
	PID_Dp:= GV_H.STAGE_HEATER_PID[1].DP, 
	PID_Feedforward:= GV_H.STAGE_HEATER_PID[1].Feedforward,
	PID_Output_Limit:= GV_H.STAGE_HEATER_PID[1].Output_Limit,
	SCR_OUT=> GV.STAGE_HEATER_SCR_OUTPUT[1]);
	
	IF H_STAGE[1].PID_AUTO_TUNE_DONE
		THEN
		GV_H.STAGE_HEATER_PID[1].P:=H_STAGE[1].PID_AUTO_TUNE_P;
		GV_H.STAGE_HEATER_PID[1].I:=H_STAGE[1].PID_AUTO_TUNE_I;
		GV_H.STAGE_HEATER_PID[1].D:=H_STAGE[1].PID_AUTO_TUNE_D;
		GV.STAGE_HEATER_AUTO_TUNE_EN[1]:=FALSE;
	END_IF
	
//H-STAGE2
	H_STAGE[2](
	ENABLE:= GV.AI.Stage_Temp2<250 AND PM.NDI.Lid_Closed, 
	AUTO_TUNE:= GV.STAGE_HEATER_AUTO_TUNE_EN[2], 
	TEMP_SV:= GV.AO.Stage_Temp2_SV, 
	TEMP_ACTUAL:= GV.AI.Stage_Temp2, 
	TEMP_RATE:=10,
	PID_P:= GV_H.STAGE_HEATER_PID[2].P, 
	PID_I:= GV_H.STAGE_HEATER_PID[2].I, 
	PID_D:= GV_H.STAGE_HEATER_PID[2].D, 
	PID_Dp:= GV_H.STAGE_HEATER_PID[2].DP, 
	PID_Feedforward:= GV_H.STAGE_HEATER_PID[2].Feedforward,
	PID_Output_Limit:= GV_H.STAGE_HEATER_PID[2].Output_Limit,
	SCR_OUT=> GV.STAGE_HEATER_SCR_OUTPUT[2]);

	
	IF H_STAGE[2].PID_AUTO_TUNE_DONE
		THEN
		GV_H.STAGE_HEATER_PID[2].P:=H_STAGE[2].PID_AUTO_TUNE_P;
		GV_H.STAGE_HEATER_PID[2].I:=H_STAGE[2].PID_AUTO_TUNE_I;
		GV_H.STAGE_HEATER_PID[2].D:=H_STAGE[2].PID_AUTO_TUNE_D;
		GV.STAGE_HEATER_AUTO_TUNE_EN[2]:=FALSE;
	END_IF
	
//H-STAGE3
	H_STAGE[3](
	ENABLE:= GV.AI.Stage_Temp3<250 AND PM.NDI.Lid_Closed, 
	AUTO_TUNE:= GV.STAGE_HEATER_AUTO_TUNE_EN[3], 
	TEMP_SV:= GV.AO.Stage_Temp3_SV, 
	TEMP_ACTUAL:= GV.AI.Stage_Temp3, 
	TEMP_RATE:=10,
	PID_P:= GV_H.STAGE_HEATER_PID[3].P, 
	PID_I:= GV_H.STAGE_HEATER_PID[3].I, 
	PID_D:= GV_H.STAGE_HEATER_PID[3].D, 
	PID_Dp:= GV_H.STAGE_HEATER_PID[3].DP, 
	PID_Feedforward:= GV_H.STAGE_HEATER_PID[3].Feedforward,
	PID_Output_Limit:= GV_H.STAGE_HEATER_PID[3].Output_Limit,
	SCR_OUT=> GV.STAGE_HEATER_SCR_OUTPUT[3]);

	
	IF H_STAGE[3].PID_AUTO_TUNE_DONE
		THEN
		GV_H.STAGE_HEATER_PID[3].P:=H_STAGE[3].PID_AUTO_TUNE_P;
		GV_H.STAGE_HEATER_PID[3].I:=H_STAGE[3].PID_AUTO_TUNE_I;
		GV_H.STAGE_HEATER_PID[3].D:=H_STAGE[3].PID_AUTO_TUNE_D;
		GV.STAGE_HEATER_AUTO_TUNE_EN[3]:=FALSE;
	END_IF
	
//H-STAGE4
	H_STAGE[4](
	ENABLE:= GV.AI.Stage_Temp4<250 AND PM.NDI.Lid_Closed, 
	AUTO_TUNE:= GV.STAGE_HEATER_AUTO_TUNE_EN[4], 
	TEMP_SV:= GV.AO.Stage_Temp4_SV, 
	TEMP_ACTUAL:= GV.AI.Stage_Temp4, 
	TEMP_RATE:=10,
	PID_P:= GV_H.STAGE_HEATER_PID[4].P, 
	PID_I:= GV_H.STAGE_HEATER_PID[4].I, 
	PID_D:= GV_H.STAGE_HEATER_PID[4].D, 
	PID_Dp:= GV_H.STAGE_HEATER_PID[4].DP, 
	PID_Feedforward:= GV_H.STAGE_HEATER_PID[4].Feedforward,
	PID_Output_Limit:= GV_H.STAGE_HEATER_PID[4].Output_Limit,
	SCR_OUT=> GV.STAGE_HEATER_SCR_OUTPUT[4]);

	
	IF H_STAGE[4].PID_AUTO_TUNE_DONE
		THEN
		GV_H.STAGE_HEATER_PID[4].P:=H_STAGE[4].PID_AUTO_TUNE_P;
		GV_H.STAGE_HEATER_PID[4].I:=H_STAGE[4].PID_AUTO_TUNE_I;
		GV_H.STAGE_HEATER_PID[4].D:=H_STAGE[4].PID_AUTO_TUNE_D;
		GV.STAGE_HEATER_AUTO_TUNE_EN[4]:=FALSE;
	END_IF]]></ST>
    </Implementation>
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