Helios/PHT/PLC/POUs/PRG/IL.TcPOU

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <POU Name="IL" Id="{961a54ba-f7f0-49a7-854f-d28514225011}" SpecialFunc="None">
    <Declaration><![CDATA[PROGRAM IL
VAR
	RANGE_PG_PS1:RANGEJD;
	RANGE_PG_PS2:RANGEJD;
	RANGE_PG_PS3:RANGEJD;
	RANGE_PG_PS4:RANGEJD;
	RANGE_PG_PS5:RANGEJD;
	RANGE_PG_PS6:RANGEJD;
	RANGE_PG_PS7:RANGEJD;
	RANGE_PG_PS8:RANGEJD;
	RANGE_PG_PS9:RANGEJD;
	
	RANGE_MFC1:RANGEJD;
	RANGE_MFC2:RANGEJD;
	RANGE_MFC3:RANGEJD;
	RANGE_MFC4:RANGEJD;
	RANGE_MFC5:RANGEJD;
	RANGE_MFC6:RANGEJD;
	RANGE_MFC7:RANGEJD;
	RANGE_MFC8:RANGEJD;
	RANGE_MFC9:RANGEJD;
	
	RANGE_CHAMBER_HEATER1:RANGEJD;
	RANGE_CHAMBER_HEATER2:RANGEJD;
	RANGE_CHAMBER_HEATER3:RANGEJD;
	
	RANGE_LID_HEATER:RANGEJD;
	
	RANGE_STAGE1:RANGEJD;
	RANGE_STAGE2:RANGEJD;
	RANGE_STAGE3:RANGEJD;
	RANGE_STAGE4:RANGEJD;
	
	//INTERLOCK	
	TON_PrepareTransfer:TON;	
	TON_TransferWafer:TON;	
	TON_OpenGasValve:TON;	
	TON_CloseGasValve:TON;	
	TON_OpenCloseSlitValve:TON;
	
	ALWAYS_TRUE:BOOL:=TRUE;
END_VAR
]]></Declaration>
    <Implementation>
      <ST><![CDATA[VALVE();
Temp();
SYS();
SPLC();
ACT_HEATER();
ACT_MFC();
ACT_PG_PS();

//TMP Pressure OUT OF RANGE
	IF GV.PMConfig.TurboN2Pressure	<=	GV.TurboN2PurgePressure
		THEN
		PM.INFO.Alarm.TurboN2PurgePressureOutOfRange:=TRUE;
		ELSE
		PM.INFO.Alarm.TurboN2PurgePressureOutOfRange:=FALSE;	
	END_IF
	
//PrepareTransfer TIMEOUT
	TON_PrepareTransfer(IN:= GV_IL.STATUS_PrepareTransfer, PT:=INT_TO_TIME(GV.PMConfig.PrepareTransferTimeout)*1000 , Q=> , ET=> );	
	IF TON_PrepareTransfer.Q
		THEN
		PM.INFO.Alarm.PrepareTransferTimerout:=TRUE;
		ELSE
		PM.INFO.Alarm.PrepareTransferTimerout:=FALSE;
	END_IF
	
//TransferWafer TIMEOUT
	TON_TransferWafer(IN:=GV_IL.STATUS_TransferWafer , PT:= INT_TO_TIME(GV.PMConfig.TransferWaferTimeout)*1000, Q=> , ET=> );
	IF TON_TransferWafer.Q
		THEN
		PM.INFO.Alarm.TransferWaferTimeout:=TRUE;
		ELSE
		PM.INFO.Alarm.TransferWaferTimeout:=FALSE;	
	END_IF
	
//OpenGasValve TIMEOUT
	TON_OpenGasValve(IN:=GV_IL.STATUS_OpenGasValve , PT:= INT_TO_TIME(GV.PMConfig.OpenGasValveTimeout)*1000, Q=> , ET=> );
	IF TON_OpenGasValve.Q
		THEN
		PM.INFO.Alarm.OpenGasValveTimeout:=TRUE;
		ELSE 
		PM.INFO.Alarm.OpenGasValveTimeout:=FALSE;
	END_IF
	
//CloseGasValve TIMEOUT
	TON_CloseGasValve(IN:=GV_IL.STATUS_CloseGasValve , PT:= INT_TO_TIME(GV.PMConfig.CloseGasValveTimeout)*1000, Q=> , ET=> );
	IF TON_CloseGasValve.Q
		THEN
		PM.INFO.Alarm.CloseGasValveTimeout:=TRUE;
		ELSE
		PM.INFO.Alarm.CloseGasValveTimeout:=FALSE;
	END_IF
	
//OpenCloseSlitValve TIMEOUT
	TON_OpenCloseSlitValve(IN:=GV_IL.STATUS_OpenCloseSlitValve , PT:= INT_TO_TIME(GV.PMConfig.OpenCloseSlitValveTimeout)*1000, Q=> , ET=> );
	IF TON_OpenCloseSlitValve.Q
		THEN
		PM.INFO.Alarm.OpenCloseSlitValveTimeout:=TRUE;
		ELSE
		PM.INFO.Alarm.OpenCloseSlitValveTimeout:=FALSE;	
	END_IF
	
	
//PRESSURE ALARM
	//PM.INFO.Alarm.PRESSURE:=
	
//ALARM OR WARNING OCCUR
	GV.ALARM_OCC:=
				 	//PM.INFO.Alarm.PRESSURE
					PM.INFO.Alarm.MFC1	
				OR PM.INFO.Alarm.WALL_TEMP	
				OR PM.INFO.Alarm.LID_TEMP	
				OR PM.INFO.Alarm.STAGE_TEMP1
				OR PM.INFO.Alarm.STAGE_TEMP2
				OR PM.INFO.Alarm.STAGE_TEMP3
				OR PM.INFO.Alarm.STAGE_TEMP4
				//OR PM.INFO.Alarm.Gas1FlowPressureOutOfRange
				//OR PM.INFO.Alarm.Gas2FlowPressureOutOfRange
				//OR PM.INFO.Alarm.Gas3FlowPressureOutOfRange
				//OR PM.INFO.Alarm.Gas4FlowPressureOutOfRange
				//OR PM.INFO.Alarm.Gas5FlowPressureOutOfRange
				//OR PM.INFO.Alarm.Gas6FlowPressureOutOfRange
				//OR PM.INFO.Alarm.TurboN2PurgePressureOutOfRange
				//OR PM.INFO.Alarm.PrepareTransferTimerout
				//OR PM.INFO.Alarm.TransferWaferTimeout
				//OR PM.INFO.Alarm.OpenGasValveTimeout
				//OR PM.INFO.Alarm.CloseGasValveTimeout
				//OR PM.INFO.Alarm.OpenCloseSlitValveTimeout
				//OR PM.INFO.Alarm.ATMCheckTimeout
				//OR PM.INFO.Alarm.DRY_PUMP
				//OR PM.INFO.Alarm.PENDULUM_VALVE
				//OR PM.INFO.Alarm.TURBO_PUMP
				OR PM.INFO.Alarm.TOLERANCE_PRESSURE				
				OR PM.INFO.Alarm.TOLERANCE_MFC1
				OR PM.INFO.Alarm.TOLERANCE_WALL_TEMP
				OR PM.INFO.Alarm.TOLERANCE_LID_TEMP
				OR PM.INFO.Alarm.TOLERANCE_STAGE_TEMP1
				OR PM.INFO.Alarm.TOLERANCE_STAGE_TEMP2
				OR PM.INFO.Alarm.TOLERANCE_STAGE_TEMP3
				OR PM.INFO.Alarm.TOLERANCE_STAGE_TEMP4
				;

	GV.WARNING_OCC:=
					//PM.INFO.Warning.PRESSURE					
					PM.INFO.Warning.MFC1
				OR PM.INFO.Warning.WALL_TEMP
				OR PM.INFO.Warning.LID_TEMP
				OR PM.INFO.Warning.STAGE_TEMP1
				OR PM.INFO.Warning.STAGE_TEMP2
				OR PM.INFO.Warning.STAGE_TEMP3
				OR PM.INFO.Warning.STAGE_TEMP4
				//OR PM.INFO.Warning.Gas1FlowPressureOutOfRange
				//OR PM.INFO.Warning.Gas2FlowPressureOutOfRange
				//OR PM.INFO.Warning.Gas3FlowPressureOutOfRange
				//OR PM.INFO.Warning.Gas4FlowPressureOutOfRange
				//OR PM.INFO.Warning.Gas5FlowPressureOutOfRange
				//OR PM.INFO.Warning.Gas6FlowPressureOutOfRange
				//OR PM.INFO.Warning.OpenCloseSlitValveTimeout
				OR PM.INFO.Warning.TOLERANCE_PRESSURE
				OR PM.INFO.Warning.TOLERANCE_MFC1
				OR PM.INFO.Warning.TOLERANCE_WALL_TEMP
				OR PM.INFO.Warning.TOLERANCE_LID_TEMP
				OR PM.INFO.Warning.TOLERANCE_STAGE_TEMP1
				OR PM.INFO.Warning.TOLERANCE_STAGE_TEMP2
				OR PM.INFO.Warning.TOLERANCE_STAGE_TEMP3
				OR PM.INFO.Warning.TOLERANCE_STAGE_TEMP4
				;

				
]]></ST>
    </Implementation>
    <Action Name="ACT_HEATER" Id="{6564add3-f54d-4f80-a53a-e99a59ae8459}">
      <Implementation>
        <ST><![CDATA[//CHAMBER HEATER
	RANGE_CHAMBER_HEATER1(
	ENABLE:= GV.ChamberHeater.HeaterTolerance_Enable,
	SV:= REAL_TO_LREAL(GV.AO.Chamber_Temp1_SV),
	PV:= REAL_TO_LREAL( GV.AI.Chamber_Temp1), 
	RANGE_ALARM_H:= ANY_TO_REAL(GV.ChamberHeater.HeaterAlarmRange.SV), 
	RANGE_ALARM_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), 
	RANGE_WARNING_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), 
	RANGE_WARNING_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), 
	TIME_ALARM:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmTime.SV), 
	TIME_WARNING:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningTime.SV), 
	ALARM=> , 
	WARNING=> );
	
	RANGE_CHAMBER_HEATER2(
	ENABLE:= GV.ChamberHeater.HeaterTolerance_Enable,
	SV:= REAL_TO_LREAL(GV.AO.Chamber_Temp2_SV),
	PV:= REAL_TO_LREAL( GV.AI.Chamber_Temp2), 
	RANGE_ALARM_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), 
	RANGE_ALARM_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), 
	RANGE_WARNING_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), 
	RANGE_WARNING_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), 
	TIME_ALARM:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmTime.SV), 
	TIME_WARNING:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningTime.SV), 
	ALARM=> , 
	WARNING=> );
	
	RANGE_CHAMBER_HEATER3(
	ENABLE:= GV.ChamberHeater.HeaterTolerance_Enable,
	SV:= REAL_TO_LREAL(GV.AO.Chamber_Temp3_SV),
	PV:= REAL_TO_LREAL( GV.AI.Chamber_Temp3), 
	RANGE_ALARM_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), 
	RANGE_ALARM_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), 
	RANGE_WARNING_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), 
	RANGE_WARNING_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), 
	TIME_ALARM:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmTime.SV), 
	TIME_WARNING:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningTime.SV), 
	ALARM=> , 
	WARNING=> );
	
	PM.INFO.Alarm.WALL_TEMP:=	RANGE_CHAMBER_HEATER1.ALARM 
							AND RANGE_CHAMBER_HEATER2.ALARM 
							AND RANGE_CHAMBER_HEATER3.ALARM
								;
	PM.INFO.Warning.WALL_TEMP:=	RANGE_CHAMBER_HEATER1.WARNING 
							AND RANGE_CHAMBER_HEATER2.WARNING 
							AND RANGE_CHAMBER_HEATER3.WARNING
								;
//LID HEATER
	RANGE_LID_HEATER(
	ENABLE:= GV.LidHeater.HeaterTolerance_Enable,
	SV:= REAL_TO_LREAL(GV.AO.LID_Temp_SV),
	PV:= REAL_TO_LREAL( GV.AI.Lid_Temp), 
	RANGE_ALARM_H:= ANY_TO_LREAL(GV.LidHeater.HeaterAlarmRange.SV), 
	RANGE_ALARM_L:= ANY_TO_LREAL(GV.LidHeater.HeaterAlarmRange.SV), 
	RANGE_WARNING_H:= ANY_TO_LREAL(GV.LidHeater.HeaterWarningRange.SV), 
	RANGE_WARNING_L:= ANY_TO_LREAL(GV.LidHeater.HeaterWarningRange.SV), 
	TIME_ALARM:= ANY_TO_LREAL(GV.LidHeater.HeaterAlarmTime.SV), 
	TIME_WARNING:= ANY_TO_LREAL(GV.LidHeater.HeaterWarningTime.SV), 
	ALARM=> , 
	WARNING=> );
	
	PM.INFO.Alarm.LID_TEMP	:=	RANGE_LID_HEATER.ALARM ;
	PM.INFO.Warning.LID_TEMP:=	RANGE_LID_HEATER.WARNING;
	
//STAGE HEATER
	RANGE_STAGE1(
	ENABLE:= GV.STAGE.HeaterTolerance_Enable,
	SV:= REAL_TO_LREAL(GV.AO.Stage_Temp1_SV),
	PV:= REAL_TO_LREAL( GV.AI.Stage_Temp1), 
	RANGE_ALARM_H:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), 
	RANGE_ALARM_L:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), 
	RANGE_WARNING_H:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), 
	RANGE_WARNING_L:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), 
	TIME_ALARM:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmTime.SV), 
	TIME_WARNING:= ANY_TO_LREAL(GV.STAGE.HeaterWarningTime.SV), 
	ALARM=> , 
	WARNING=> );
	
	PM.INFO.Alarm.STAGE_TEMP1:=RANGE_STAGE1.ALARM;
	PM.INFO.Warning.STAGE_TEMP1:=RANGE_STAGE1.WARNING;

	RANGE_STAGE2(
	ENABLE:= GV.STAGE.HeaterTolerance_Enable,
	SV:= REAL_TO_LREAL(GV.AO.Stage_Temp2_SV),
	PV:= REAL_TO_LREAL( GV.AI.Stage_Temp2), 
	RANGE_ALARM_H:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), 
	RANGE_ALARM_L:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), 
	RANGE_WARNING_H:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), 
	RANGE_WARNING_L:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), 
	TIME_ALARM:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmTime.SV), 
	TIME_WARNING:= ANY_TO_LREAL(GV.STAGE.HeaterWarningTime.SV), 
	ALARM=> , 
	WARNING=> );
	
	PM.INFO.Alarm.STAGE_TEMP2:=RANGE_STAGE2.ALARM;
	PM.INFO.Warning.STAGE_TEMP2:=RANGE_STAGE2.WARNING;
	
	RANGE_STAGE3(
	ENABLE:= GV.STAGE.HeaterTolerance_Enable,
	SV:= REAL_TO_LREAL(GV.AO.Stage_Temp3_SV),
	PV:= REAL_TO_LREAL( GV.AI.Stage_Temp3), 
	RANGE_ALARM_H:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), 
	RANGE_ALARM_L:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), 
	RANGE_WARNING_H:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), 
	RANGE_WARNING_L:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), 
	TIME_ALARM:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmTime.SV), 
	TIME_WARNING:= ANY_TO_LREAL(GV.STAGE.HeaterWarningTime.SV), 
	ALARM=> , 
	WARNING=> );
	
	PM.INFO.Alarm.STAGE_TEMP3:=RANGE_STAGE3.ALARM;
	PM.INFO.Warning.STAGE_TEMP3:=RANGE_STAGE3.WARNING;
	
	RANGE_STAGE4(
	ENABLE:= GV.STAGE.HeaterTolerance_Enable,
	SV:= REAL_TO_LREAL(GV.AO.Stage_Temp4_SV),
	PV:= REAL_TO_LREAL( GV.AI.Stage_Temp4), 
	RANGE_ALARM_H:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), 
	RANGE_ALARM_L:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), 
	RANGE_WARNING_H:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), 
	RANGE_WARNING_L:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), 
	TIME_ALARM:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmTime.SV), 
	TIME_WARNING:= ANY_TO_LREAL(GV.STAGE.HeaterWarningTime.SV), 
	ALARM=> , 
	WARNING=> );
	
	PM.INFO.Alarm.STAGE_TEMP4:=RANGE_STAGE4.ALARM;
	PM.INFO.Warning.STAGE_TEMP4:=RANGE_STAGE4.WARNING;
	
	
]]></ST>
      </Implementation>
    </Action>
    <Action Name="ACT_MFC" Id="{588f6d43-b3ba-4cf5-8c99-fd72a3f7fdf0}">
      <Implementation>
        <ST><![CDATA[RANGE_MFC1(
	ENABLE:= GV.Mfcgas1.EnableAlarm AND GV.Mfcgas1.Enable,
	SV:= REAL_TO_LREAL(GV.AO.MFC1_Flow_Setpoint),
	PV:= REAL_TO_LREAL( GV.AI.MFC1_Flow), 
	RANGE_ALARM_H:= GV.Mfcgas1.AlarmRange.SV, 
	RANGE_ALARM_L:= GV.Mfcgas1.AlarmRange.SV, 
	RANGE_WARNING_H:= GV.Mfcgas1.WarningRange.SV, 
	RANGE_WARNING_L:= GV.Mfcgas1.WarningRange.SV, 
	TIME_ALARM:= GV.Mfcgas1.AlarmTime.SV, 
	TIME_WARNING:= GV.Mfcgas1.WarningTime.SV, 
	ALARM=> , 
	WARNING=> );
(*	
	RANGE_MFC2(
	ENABLE:= GV.Mfcgas2.EnableAlarm AND GV.Mfcgas2.Enable, 
	SV:= REAL_TO_LREAL(GV.AO.MFC2_Flow_Setpoint),
	PV:= REAL_TO_LREAL( GV.AI.MFC2_Flow), 
	RANGE_ALARM_H:= GV.Mfcgas2.AlarmRange.SV, 
	RANGE_ALARM_L:= GV.Mfcgas2.AlarmRange.SV, 
	RANGE_WARNING_H:= GV.Mfcgas2.WarningRange.SV, 
	RANGE_WARNING_L:= GV.Mfcgas2.WarningRange.SV, 
	TIME_ALARM:= GV.Mfcgas2.AlarmTime.SV, 
	TIME_WARNING:= GV.Mfcgas2.WarningTime.SV, 
	ALARM=> , 
	WARNING=> );

	RANGE_MFC3(	
	ENABLE:= GV.Mfcgas3.EnableAlarm AND GV.Mfcgas3.Enable, 
	SV:= REAL_TO_LREAL(GV.AO.MFC3_Flow_Setpoint),
	PV:= REAL_TO_LREAL( GV.AI.MFC3_Flow), 
	RANGE_ALARM_H:= GV.Mfcgas3.AlarmRange.SV, 
	RANGE_ALARM_L:= GV.Mfcgas3.AlarmRange.SV, 
	RANGE_WARNING_H:= GV.Mfcgas3.WarningRange.SV, 
	RANGE_WARNING_L:= GV.Mfcgas3.WarningRange.SV, 
	TIME_ALARM:= GV.Mfcgas3.AlarmTime.SV, 
	TIME_WARNING:= GV.Mfcgas3.WarningTime.SV,  
	ALARM=> , 
	WARNING=> );
(*
	RANGE_MFC4(	
	ENABLE:= GV.Mfcgas4.EnableAlarm AND GV.Mfcgas4.Enable, 
	SV:= REAL_TO_LREAL(GV.AO.MFC4_Flow_Setpoint),
	PV:= REAL_TO_LREAL( GV.AI.MFC4_Flow), 
	RANGE_ALARM_H:= GV.Mfcgas4.AlarmRange.SV, 
	RANGE_ALARM_L:= GV.Mfcgas4.AlarmRange.SV, 
	RANGE_WARNING_H:= GV.Mfcgas4.WarningRange.SV, 
	RANGE_WARNING_L:= GV.Mfcgas4.WarningRange.SV, 
	TIME_ALARM:= GV.Mfcgas4.AlarmTime.SV, 
	TIME_WARNING:= GV.Mfcgas4.WarningTime.SV, 
	ALARM=> , 
	WARNING=> );
*)	
	RANGE_MFC5(	
	ENABLE:= GV.Mfcgas5.EnableAlarm AND GV.Mfcgas5.Enable, 
	SV:= REAL_TO_LREAL(GV.AO.MFC5_Flow_Setpoint),
	PV:= REAL_TO_LREAL( GV.AI.MFC5_Flow), 
	RANGE_ALARM_H:= GV.Mfcgas5.AlarmRange.SV, 
	RANGE_ALARM_L:= GV.Mfcgas5.AlarmRange.SV, 
	RANGE_WARNING_H:= GV.Mfcgas5.WarningRange.SV, 
	RANGE_WARNING_L:= GV.Mfcgas5.WarningRange.SV, 
	TIME_ALARM:= GV.Mfcgas5.AlarmTime.SV, 
	TIME_WARNING:= GV.Mfcgas5.WarningTime.SV, 
	ALARM=> , 
	WARNING=> );

	RANGE_MFC6(	
	ENABLE:= GV.Mfcgas6.EnableAlarm AND GV.Mfcgas6.Enable, 
	SV:= REAL_TO_LREAL(GV.AO.MFC6_Flow_Setpoint),
	PV:= REAL_TO_LREAL( GV.AI.MFC6_Flow), 
	RANGE_ALARM_H:= GV.Mfcgas6.AlarmRange.SV, 
	RANGE_ALARM_L:= GV.Mfcgas6.AlarmRange.SV, 
	RANGE_WARNING_H:= GV.Mfcgas6.WarningRange.SV, 
	RANGE_WARNING_L:= GV.Mfcgas6.WarningRange.SV, 
	TIME_ALARM:= GV.Mfcgas6.AlarmTime.SV, 
	TIME_WARNING:= GV.Mfcgas6.WarningTime.SV,  
	ALARM=> , 
	WARNING=> );

	RANGE_MFC7(	
	ENABLE:= GV.Mfcgas7.EnableAlarm AND GV.Mfcgas7.Enable, 
	SV:= REAL_TO_LREAL(GV.AO.MFC7_Flow_Setpoint),
	PV:= REAL_TO_LREAL( GV.AI.MFC7_Flow), 
	RANGE_ALARM_H:= GV.Mfcgas7.AlarmRange.SV, 
	RANGE_ALARM_L:= GV.Mfcgas7.AlarmRange.SV, 
	RANGE_WARNING_H:= GV.Mfcgas7.WarningRange.SV, 
	RANGE_WARNING_L:= GV.Mfcgas7.WarningRange.SV, 
	TIME_ALARM:= GV.Mfcgas7.AlarmTime.SV, 
	TIME_WARNING:= GV.Mfcgas7.WarningTime.SV, 
	ALARM=> , 
	WARNING=> );
*)
(*
	RANGE_MFC8(	
	ENABLE:= GV.Mfcgas8.EnableAlarm AND GV.Mfcgas8.Enable, 
	PV:= REAL_TO_LREAL( GV.AI.MFC8_Flow), 
	RANGE_ALARM_H:= GV.Mfcgas8.AlarmRange.MaxSV, 
	RANGE_ALARM_L:= 0, 
	RANGE_WARNING_H:= GV.Mfcgas8.WarningRange.MaxSV, 
	RANGE_WARNING_L:= 0, 
	TIME_ALARM:= GV.Mfcgas8.AlarmTime.SV, 
	TIME_WARNING:= GV.Mfcgas8.WarningTime.SV, 
	ALARM=> , 
	WARNING=> );

	RANGE_MFC9(	
	ENABLE:= GV.Mfcgas9.EnableAlarm AND GV.Mfcgas9.Enable, 
	PV:= REAL_TO_LREAL( GV.AI.MFC9_Flow), 
	RANGE_ALARM_H:= GV.Mfcgas9.AlarmRange.MaxSV, 
	RANGE_ALARM_L:= 0, 
	RANGE_WARNING_H:= GV.Mfcgas9.WarningRange.MaxSV, 
	RANGE_WARNING_L:= 0, 
	TIME_ALARM:= GV.Mfcgas9.AlarmTime.SV, 
	TIME_WARNING:= GV.Mfcgas9.WarningTime.SV, 
	ALARM=> , 
	WARNING=> );
*)	
	
	PM.Info.Alarm.MFC1:=  RANGE_MFC1.ALARM;
	
	PM.INFO.warning.MFC1:=  RANGE_MFC1.warning;]]></ST>
      </Implementation>
    </Action>
    <Action Name="ACT_PG_PS" Id="{7ffa7f57-0fe8-4370-8286-3e1a888cc2a0}">
      <Implementation>
        <ST><![CDATA[RANGE_PG_PS1(
	ENABLE:=TRUE,
	SV:= 270,
	PV:= GV.AI.PG_PS1_VALUE, 
	RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, 
	RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, 
	TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, 
	TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, 
	ALARM=> , 
	WARNING=> );
(*	
	RANGE_PG_PS2(
	ENABLE:=TRUE,
	SV:= 270 ,
	PV:= GV.AI.PG_PS2_VALUE, 
	RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, 
	RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, 
	TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, 
	TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, 
	ALARM=> , 
	WARNING=> );
	
	RANGE_PG_PS3(
	ENABLE:=TRUE,
	SV:= 270 ,
	PV:= GV.AI.PG_PS3_VALUE, 
	RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, 
	RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, 
	TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, 
	TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, 
	ALARM=> , 
	WARNING=> );
	
	RANGE_PG_PS4(
	ENABLE:=TRUE,
	SV:=25,
	PV:= GV.AI.PG_PS4_VALUE, 
	RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, 
	RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, 
	TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, 
	TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, 
	ALARM=> , 
	WARNING=> );
	
	RANGE_PG_PS5(
	ENABLE:=TRUE,
	SV:= 270,
	PV:= GV.AI.PG_PS5_VALUE, 
	RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, 
	RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, 
	TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, 
	TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, 
	ALARM=> , 
	WARNING=> );
	
	RANGE_PG_PS6(
	ENABLE:=TRUE,
	SV:=270,
	PV:= GV.AI.PG_PS6_VALUE, 
	RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, 
	RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, 
	TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, 
	TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, 
	ALARM=> , 
	WARNING=> );
	
	RANGE_PG_PS7(
	ENABLE:=TRUE,
	PV:= GV.AI.PG_PS7_VALUE, 
	RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, 
	RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, 
	TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, 
	TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, 
	ALARM=> , 
	WARNING=> );
	
	RANGE_PG_PS8(
	ENABLE:=TRUE,
	PV:= GV.AI.PG_PS8_VALUE, 
	RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, 
	RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, 
	TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, 
	TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, 
	ALARM=> , 
	WARNING=> );
	
	RANGE_PG_PS9(
	ENABLE:=TRUE,
	PV:= GV.AI.PG_PS9_VALUE, 
	RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, 
	RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, 
	RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, 
	TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, 
	TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, 
	ALARM=> , 
	WARNING=> );
*)	
	PM.INFO.Alarm.Gas1FlowPressureOutOfRange:=  RANGE_PG_PS1.ALARM;
(*	PM.INFO.Alarm.Gas2FlowPressureOutOfRange:=  RANGE_PG_PS2.ALARM OR TRUE;
	PM.INFO.Alarm.Gas3FlowPressureOutOfRange:=  RANGE_PG_PS3.ALARM OR TRUE;	
	PM.INFO.Alarm.Gas4FlowPressureOutOfRange:=  RANGE_PG_PS4.ALARM OR TRUE;
	PM.INFO.Alarm.Gas5FlowPressureOutOfRange:=  RANGE_PG_PS5.ALARM OR TRUE;
	PM.INFO.Alarm.Gas6FlowPressureOutOfRange:=  RANGE_PG_PS6.ALARM OR TRUE;
	//PM.INFO.Alarm.Gas7FlowPressureOutOfRange:=  RANGE_PG_PS7.ALARM;
	//PM.INFO.Alarm.Gas8FlowPressureOutOfRange:=  RANGE_PG_PS8.ALARM;
	//PM.INFO.Alarm.Gas9FlowPressureOutOfRange:=  RANGE_PG_PS9.ALARM;
*)
	PM.INFO.warning.Gas1FlowPressureOutOfRange:=  RANGE_PG_PS1.warning;
(*	PM.INFO.warning.Gas2FlowPressureOutOfRange:=  RANGE_PG_PS2.warning OR TRUE;
	PM.INFO.warning.Gas3FlowPressureOutOfRange:=  RANGE_PG_PS3.warning OR TRUE;
	PM.INFO.warning.Gas4FlowPressureOutOfRange:=  RANGE_PG_PS4.warning OR TRUE;
	PM.INFO.warning.Gas5FlowPressureOutOfRange:=  RANGE_PG_PS5.warning OR TRUE;
	PM.INFO.warning.Gas6FlowPressureOutOfRange:=  RANGE_PG_PS6.warning OR TRUE;
	//PM.INFO.warning.Gas7FlowPressureOutOfRange:=  RANGE_PG_PS7.warning;
	//PM.INFO.warning.Gas8FlowPressureOutOfRange:=  RANGE_PG_PS8.warning;
	//PM.INFO.warning.Gas9FlowPressureOutOfRange:=  RANGE_PG_PS9.warning;
*)]]></ST>
      </Implementation>
    </Action>
    <Action Name="SPLC" Id="{7c5927e5-5585-4359-b0bf-01c50daa49b8}">
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