Helios/PHT/PLC/POUs/FB/PROCESS.TcPOU

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <POU Name="PROCESS" Id="{8f0fc598-40b3-45a0-b6d6-82fe73246645}" SpecialFunc="None">
    <Declaration><![CDATA[FUNCTION_BLOCK PROCESS
VAR_INPUT
	ENABLE:BOOL;
	NEXTSTEP_EN:BOOL;
	Alarm_RST:BOOL;
	PMStableTime:INT;
	STEP_DATA:RecipeEachStep;
END_VAR
VAR_OUTPUT
	
	//APC
	APC_PRESSURE:REAL;
	APC_POSITION:REAL;
	APC_CONTROL_MODE:SINT;
	
	//MFC
	MFC1_SV:REAL;
	MFC2_SV:REAL;
	MFC3_SV:REAL;
	MFC4_SV:REAL;
	MFC5_SV:REAL;
	MFC6_SV:REAL;
	MFC7_SV:REAL;
	MFC8_SV:REAL;	
	MFC9_SV:REAL;	
	
	//HEATER
	WALL_TEMP:REAL;
	LID_TEMP:REAL;
	STAGE_TEMP1,
	STAGE_TEMP2,
	STAGE_TEMP3,
	STAGE_TEMP4:REAL;
	
	//STEP
	STEP_TIME_OUT:BOOL;
	STEP_ERR:BOOL;
	NEXTSTEP:BOOL;
	
	//Tolerance
	PRESSURE_WARNING:BOOL;
	PRESSURE_ALARM:BOOL;
	
	MFC1_WARNING:BOOL;
	MFC1_Alarm:BOOL;
	
	MFC2_WARNING:BOOL;
	MFC2_Alarm:BOOL;
	
	MFC3_WARNING:BOOL;
	MFC3_Alarm:BOOL;
	
	MFC4_WARNING:BOOL;
	MFC4_Alarm:BOOL;
	
	MFC5_WARNING:BOOL;
	MFC5_Alarm:BOOL;
	
	MFC6_WARNING:BOOL;
	MFC6_Alarm:BOOL;
	
	MFC7_WARNING:BOOL;
	MFC7_Alarm:BOOL;
	
	MFC8_WARNING:BOOL;
	MFC8_Alarm:BOOL;
	
	MFC9_WARNING:BOOL;
	MFC9_Alarm:BOOL;
	
	WALL_TEMP_WARNING:BOOL;
	WALL_TEMP_Alarm:BOOL;
		
	LID_TEMP_WARNING:BOOL;
	LID_TEMP_Alarm:BOOL;
	
	STAGE_TEMP1_WARNING:BOOL;
	STAGE_TEMP1_Alarm:BOOL;
	
	STAGE_TEMP2_WARNING:BOOL;
	STAGE_TEMP2_Alarm:BOOL;
	
	STAGE_TEMP3_WARNING:BOOL;
	STAGE_TEMP3_Alarm:BOOL;
	
	STAGE_TEMP4_WARNING:BOOL;
	STAGE_TEMP4_Alarm:BOOL;
	
END_VAR
VAR
	STEP_TIME:TON;
	STEP_TIME_DONE:BOOL;
	
	COMPLETION:INT;
	
	//Tolerance
	TOL_PRESSURE_PERCENT:Tolerance;
	TOL_PRESSURE_VALUE_EN:BOOL;
	TOL_PRESSURE_PERCENT_EN:BOOL;
	
	TOL_MFC1:Tolerance;
	TOL_MFC2:Tolerance;
	TOL_MFC3:Tolerance;
	//TOL_MFC4:Tolerance;
	TOL_MFC5:Tolerance;
	TOL_MFC6:Tolerance;
	TOL_MFC7:Tolerance;
	//TOL_MFC8:Tolerance;
	//TOL_MFC9:Tolerance;
	TOL_MFC_VALUE_EN:BOOL;
	TOL_MFC_PERCENT_EN:BOOL;

	TOL_WALL_TEMP:Tolerance;

	TOL_LID_TEMP:Tolerance;

	TOL_STAGE_TEMP1:Tolerance;	
	TOL_STAGE_TEMP2:Tolerance;
	TOL_STAGE_TEMP3:Tolerance;	
	TOL_STAGE_TEMP4:Tolerance;
	
	TOL_HEATER_VALUE_EN:BOOL;
	TOL_HEATER_PERCENT_EN:BOOL;
	
	TON_STEP_TIME:TON;
	TON_STEP_TIME_EN:BOOL;
	
	WARNING_OCC:BOOL;
	ALARM_OCC:BOOL;
	
	i:INT;
	
	STABLE_DONE:BOOL;
	EN_TRIG:R_TRIG;
	TON_STABLE_PROCESS:TON;
	
	CHAMBER_TEMP_MIN_VALUE:REAL;
	STAGE_EDGE_TEMP_MIN_VALUE:REAL;
	STAGE_CENTER_TEMP_MIN_VALUE:REAL;
		
END_VAR
]]></Declaration>
    <Implementation>
      <ST><![CDATA[//NOT ENABLE
	IF NOT ENABLE 
		THEN
		i:=0;
		STEP_ERR:=FALSE;
		STEP_TIME_OUT:=FALSE;
		NEXTSTEP:=FALSE;
		TON_STEP_TIME_EN:=FALSE;
	END_IF;
	
//初始化
	EN_TRIG(CLK:= ENABLE, Q=> );
	IF EN_TRIG.Q OR NEXTSTEP_EN
		THEN
		i:=1;
		STEP_ERR:=FALSE;
		STEP_TIME_OUT:=FALSE;
		NEXTSTEP:=FALSE;
		TON_STEP_TIME_EN:=TRUE;
	END_IF;

	
//STEP开始时赋值
	IF  ENABLE AND NOT STEP_TIME_DONE
	THEN
	//APC
	IF 		STEP_DATA.LstUnit.Pressure.PressureUnitMode = 'Pressure' 
			THEN
			APC_PRESSURE:=STEP_DATA.LstUnit.Pressure.StartValue;
			APC_CONTROL_MODE:=5;
			ELSIF 	
			STEP_DATA.LstUnit.Pressure.PressureUnitMode = 'Position'	
			THEN
			APC_POSITION:=STEP_DATA.LstUnit.Pressure.StartValue;
			APC_CONTROL_MODE:=2;
	END_IF
	
	IF 		STEP_DATA.LstUnit.Pressure.ToleranceMode = 'Value' 
			THEN
			TOL_PRESSURE_VALUE_EN:=TRUE;
			TOL_PRESSURE_PERCENT_EN:=FALSE;
			ELSIF 	
			STEP_DATA.LstUnit.Pressure.ToleranceMode = 'Percent'	
			THEN
			TOL_PRESSURE_VALUE_EN:=FALSE;
			TOL_PRESSURE_PERCENT_EN:=TRUE;
	END_IF
	
	//MFC
	IF 		STEP_DATA.LstUnit.GAS.ToleranceMode = 'Value' 
			THEN
			TOL_MFC_VALUE_EN:=TRUE;
			TOL_MFC_PERCENT_EN:=FALSE;
			ELSIF 	
			STEP_DATA.LstUnit.GAS.ToleranceMode = 'Percent'	
			THEN
			TOL_MFC_VALUE_EN:=FALSE;
			TOL_MFC_PERCENT_EN:=TRUE;
	END_IF
	
	MFC1_SV:=INT_TO_REAL(STEP_DATA.LstUnit.GAS.Gas1);
	MFC2_SV:=INT_TO_REAL(STEP_DATA.LstUnit.GAS.Gas2);
	MFC3_SV:=INT_TO_REAL(STEP_DATA.LstUnit.GAS.Gas3);
	MFC4_SV:=INT_TO_REAL(STEP_DATA.LstUnit.GAS.Gas4);	
	MFC5_SV:=INT_TO_REAL(STEP_DATA.LstUnit.GAS.Gas5);
	MFC6_SV:=INT_TO_REAL(STEP_DATA.LstUnit.GAS.Gas6);
	MFC7_SV:=INT_TO_REAL(STEP_DATA.LstUnit.GAS.Gas7);
	MFC8_SV:=INT_TO_REAL(STEP_DATA.LstUnit.GAS.Gas8);	
	MFC9_SV:=INT_TO_REAL(STEP_DATA.LstUnit.GAS.Gas9);
	
	//HEATER
	IF 		STEP_DATA.LstUnit.Heater.ToleranceMode = 'Value' 
			THEN
			TOL_HEATER_VALUE_EN:=TRUE;
			TOL_HEATER_PERCENT_EN:=FALSE;
			ELSIF 	
			STEP_DATA.LstUnit.Heater.ToleranceMode = 'Percent'	
			THEN
			TOL_HEATER_VALUE_EN:=FALSE;
			TOL_HEATER_PERCENT_EN:=TRUE;
	END_IF
	
	WALL_TEMP:=INT_TO_REAL(STEP_DATA.LstUnit.Heater.WallTemp);
	LID_TEMP:=INT_TO_REAL(STEP_DATA.LstUnit.Heater.LidTemp);
	STAGE_TEMP1:=INT_TO_REAL(STEP_DATA.LstUnit.Heater.StageTemp1);
	STAGE_TEMP2:=INT_TO_REAL(STEP_DATA.LstUnit.Heater.StageTemp2);
	STAGE_TEMP3:=INT_TO_REAL(STEP_DATA.LstUnit.Heater.StageTemp3);
	STAGE_TEMP4:=INT_TO_REAL(STEP_DATA.LstUnit.Heater.StageTemp4);
	END_IF;
	
// Lifter
	GV.NDO.AV110 :=	STEP_DATA.Lifter_Up AND NOT STEP_DATA.Lifter_Down;
	GV.NDO.AV109 :=	FALSE;
	
//取最小值
		IF 
		GV.AI.Chamber_Temp1<=GV.AI.Chamber_Temp2 AND GV.AI.Chamber_Temp1<=GV.AI.Chamber_Temp3
		THEN 
		CHAMBER_TEMP_MIN_VALUE:=GV.AI.Chamber_Temp1;
		ELSIF 
		GV.AI.Chamber_Temp2<=GV.AI.Chamber_Temp1 AND GV.AI.Chamber_Temp2<=GV.AI.Chamber_Temp3
		THEN
		CHAMBER_TEMP_MIN_VALUE:=GV.AI.Chamber_Temp2;
		ELSIF
		GV.AI.Chamber_Temp3<=GV.AI.Chamber_Temp2 AND GV.AI.Chamber_Temp3<=GV.AI.Chamber_Temp1
		THEN
		CHAMBER_TEMP_MIN_VALUE:=GV.AI.Chamber_Temp3;
	END_IF
	
//Tolerance
	TOL_PRESSURE_PERCENT(
		ENABLE:= TOL_PRESSURE_PERCENT.SV>0	AND ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_PRESSURE_VALUE_EN, 
		TOL_P:= TOL_PRESSURE_PERCENT_EN, 
		SV:= STEP_DATA.LstUnit.Pressure.StartValue, 
		PV:= GV.AI.	APC.ACTUAL_PRESSURE, 
		WARNING_RANGE:= STEP_DATA.LstUnit.Pressure.StartValueWarningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.Pressure.StartValueAlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.Pressure.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> PRESSURE_WARNING, 
		STU_ALARM=> PRESSURE_ALARM, );

	TOL_MFC1(
		ENABLE:= TOL_MFC1.SV>0	AND ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_MFC_VALUE_EN, 
		TOL_P:= TOL_MFC_PERCENT_EN, 
		SV:= STEP_DATA.LstUnit.GAS.Gas1, 
		PV:= GV.AI.MFC1_Flow, 
		WARNING_RANGE:= STEP_DATA.LstUnit.GAS.Gas1WarningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.GAS.Gas1AlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.GAS.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> MFC1_WARNING, 
		STU_ALARM=> MFC1_Alarm, );
(*	
	TOL_MFC2(
		ENABLE:= TOL_MFC2.SV>0	AND ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_MFC_VALUE_EN, 
		TOL_P:= TOL_MFC_PERCENT_EN, 
		SV:= STEP_DATA.LstUnit.GAS.Gas2, 
		PV:= GV.AI.MFC2_Flow,
		WARNING_RANGE:= STEP_DATA.LstUnit.GAS.Gas2WarningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.GAS.Gas2AlarmRange,  
		DELAY_TIME:=STEP_DATA.LstUnit.GAS.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> MFC2_WARNING, 
		STU_ALARM=> MFC2_Alarm, );
	
	TOL_MFC3(
		ENABLE:= TOL_MFC3.SV>0	AND ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_MFC_VALUE_EN, 
		TOL_P:= TOL_MFC_PERCENT_EN, 
		SV:= STEP_DATA.LstUnit.GAS.Gas3, 
		PV:= GV.AI.MFC3_Flow,
		WARNING_RANGE:= STEP_DATA.LstUnit.GAS.Gas3WarningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.GAS.Gas3AlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.GAS.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> MFC3_WARNING, 
		STU_ALARM=> MFC3_Alarm, );
	
	
	TOL_MFC5(
		ENABLE:= TOL_MFC5.SV>0	AND ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_MFC_VALUE_EN, 
		TOL_P:= TOL_MFC_PERCENT_EN, 
		SV:= STEP_DATA.LstUnit.GAS.Gas5, 
		PV:= GV.AI.MFC5_Flow,
		WARNING_RANGE:= STEP_DATA.LstUnit.GAS.Gas5WarningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.GAS.Gas5AlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.GAS.ToleranceDelayTime,
		RST	:=	Alarm_RST, 
		STABLE_TIME := PMStableTime,
		STU_WARNING=> MFC5_WARNING, 
		STU_ALARM=> MFC5_Alarm, );
	
	TOL_MFC6(
		ENABLE:= TOL_MFC6.SV>0	AND ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_MFC_VALUE_EN, 
		TOL_P:= TOL_MFC_PERCENT_EN, 
		SV:= STEP_DATA.LstUnit.GAS.Gas6, 
		PV:= GV.AI.MFC6_Flow,
		WARNING_RANGE:= STEP_DATA.LstUnit.GAS.Gas6WarningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.GAS.Gas6AlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.GAS.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> MFC6_WARNING, 
		STU_ALARM=> MFC6_Alarm, );
	
	TOL_MFC7(
		ENABLE:= TOL_MFC7.SV>0	AND ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_MFC_VALUE_EN, 
		TOL_P:= TOL_MFC_PERCENT_EN, 
		SV:= STEP_DATA.LstUnit.GAS.Gas7, 
		PV:= GV.AI.MFC7_Flow,
		WARNING_RANGE:= STEP_DATA.LstUnit.GAS.Gas7WarningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.GAS.Gas7AlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.GAS.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> MFC7_WARNING, 
		STU_ALARM=> MFC7_Alarm, );
*)
	TOL_WALL_TEMP(
		ENABLE:= ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_HEATER_VALUE_EN, 
		TOL_P:= TOL_HEATER_PERCENT_EN, 
		SV:= STEP_DATA.LstUnit.Heater.WallTemp, 
		PV:= CHAMBER_TEMP_MIN_VALUE, 
		WARNING_RANGE:= STEP_DATA.LstUnit.Heater.WallTempWaningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.Heater.WallTempAlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.Heater.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> WALL_TEMP_WARNING, 
		STU_ALARM=> WALL_TEMP_Alarm, );
	
	TOL_LID_TEMP(
		ENABLE:= ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_HEATER_VALUE_EN, 
		TOL_P:= TOL_HEATER_PERCENT_EN,
		SV:= STEP_DATA.LstUnit.Heater.LidTemp, 
		PV:= GV.AI.	Lid_Temp, 
		WARNING_RANGE:= STEP_DATA.LstUnit.Heater.LidTempWaningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.Heater.LidTempAlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.Heater.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> LID_TEMP_WARNING, 
		STU_ALARM=> LID_TEMP_Alarm, );
		
	
	TOL_STAGE_TEMP1(
		ENABLE:= ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_HEATER_VALUE_EN, 
		TOL_P:= TOL_HEATER_PERCENT_EN,
		SV:= STEP_DATA.LstUnit.Heater.StageTemp1, 
		PV:= GV.AI.Stage_Temp1, 
		WARNING_RANGE:= STEP_DATA.LstUnit.Heater.StageTemp1WaningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.Heater.StageTemp1AlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.Heater.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> STAGE_TEMP1_WARNING, 
		STU_ALARM=> STAGE_TEMP1_Alarm, );
	
	TOL_STAGE_TEMP2(
		ENABLE:= ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_HEATER_VALUE_EN, 
		TOL_P:= TOL_HEATER_PERCENT_EN,
		SV:= STEP_DATA.LstUnit.Heater.StageTemp2, 
		PV:= GV.AI.Stage_Temp2, 
		WARNING_RANGE:= STEP_DATA.LstUnit.Heater.StageTemp2WaningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.Heater.StageTemp2AlarmRange,
		DELAY_TIME:=STEP_DATA.LstUnit.Heater.ToleranceDelayTime,
		RST	:=	Alarm_RST, 
		STABLE_TIME := PMStableTime,
		STU_WARNING=> STAGE_TEMP2_WARNING, 
		STU_ALARM=> STAGE_TEMP2_Alarm, );
		
	TOL_STAGE_TEMP3(
		ENABLE:= ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_HEATER_VALUE_EN, 
		TOL_P:= TOL_HEATER_PERCENT_EN,
		SV:= STEP_DATA.LstUnit.Heater.StageTEMP3, 
		PV:= GV.AI.Stage_TEMP3, 
		WARNING_RANGE:= STEP_DATA.LstUnit.Heater.StageTEMP3WaningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.Heater.StageTEMP3AlarmRange, 
		DELAY_TIME:=STEP_DATA.LstUnit.Heater.ToleranceDelayTime,
		RST	:=	Alarm_RST,
		STABLE_TIME := PMStableTime,
		STU_WARNING=> STAGE_TEMP3_WARNING, 
		STU_ALARM=> STAGE_TEMP3_Alarm, );
	
	TOL_STAGE_TEMP4(
		ENABLE:= ENABLE,
		STEP_TYPE:=	STEP_DATA.Completion,
		STEP_TIME:=	STEP_DATA.StepTime+STEP_DATA.AddTime,
		TOL_V:= TOL_HEATER_VALUE_EN, 
		TOL_P:= TOL_HEATER_PERCENT_EN,
		SV:= STEP_DATA.LstUnit.Heater.StageTEMP4, 
		PV:= GV.AI.Stage_TEMP4, 
		WARNING_RANGE:= STEP_DATA.LstUnit.Heater.StageTEMP4WaningRange, 
		ALARM_RANGE:= STEP_DATA.LstUnit.Heater.StageTEMP4AlarmRange,
		DELAY_TIME:=STEP_DATA.LstUnit.Heater.ToleranceDelayTime,
		RST	:=	Alarm_RST, 
		STABLE_TIME := PMStableTime,
		STU_WARNING=> STAGE_TEMP4_WARNING, 
		STU_ALARM=> STAGE_TEMP4_Alarm, );


		
		
		
//ALRAM & WARNING	
	WARNING_OCC:=  PRESSURE_WARNING 
				OR MFC1_WARNING OR MFC2_WARNING OR MFC3_WARNING OR MFC4_WARNING OR MFC5_WARNING
				OR MFC6_WARNING OR MFC7_WARNING OR MFC8_WARNING OR MFC9_WARNING 
				OR WALL_TEMP_WARNING OR LID_TEMP_WARNING OR STAGE_TEMP1_WARNING 
				OR STAGE_TEMP1_WARNING OR STAGE_TEMP2_WARNING OR STAGE_TEMP3_WARNING OR STAGE_TEMP4_WARNING;
	
	ALARM_OCC:=    PRESSURE_ALARM 				
				OR MFC1_ALARM OR MFC2_ALARM OR MFC3_ALARM OR MFC4_ALARM OR MFC5_ALARM
				OR MFC6_ALARM OR MFC7_ALARM OR MFC8_ALARM OR MFC9_ALARM 
				OR WALL_TEMP_ALARM OR LID_TEMP_ALARM OR STAGE_TEMP1_Alarm 
				OR STAGE_TEMP1_ALARM OR STAGE_TEMP2_ALARM OR STAGE_TEMP3_ALARM OR STAGE_TEMP4_ALARM;

//STABLE DONE
TON_STABLE_PROCESS(IN:= ENABLE, PT:= INT_TO_TIME(PMStableTime)*1000, Q=> , ET=> );

	STABLE_DONE:=	TOL_PRESSURE_PERCENT.STABLE_DONE 
				AND TOL_MFC1.STABLE_DONE 
				AND TOL_MFC2.STABLE_DONE 
				AND TOL_MFC3.STABLE_DONE 
				AND TOL_MFC5.STABLE_DONE 			 
				AND TOL_MFC6.STABLE_DONE 
				AND TOL_MFC7.STABLE_DONE
				AND TOL_WALL_TEMP.STABLE_DONE
				AND TOL_LID_TEMP.STABLE_DONE
				AND TOL_STAGE_TEMP1.STABLE_DONE
				AND TOL_STAGE_TEMP2.STABLE_DONE
				AND TOL_STAGE_TEMP3.STABLE_DONE
				AND TOL_STAGE_TEMP4.STABLE_DONE
				AND TON_STABLE_PROCESS.Q;

//STEP流程	
	CASE i OF
	1:	IF STEP_DATA.Completion='Stable'
			THEN
			i:= 10;
			ELSIF STEP_DATA.Completion='Time'
			THEN
			i:= 20;
		END_IF
	
		//STABLE
	10:	IF 	STABLE_DONE 
			THEN i:=100; 
		END_IF;
			
		//TIME
	20:	IF 	ALARM_OCC 
			THEN i:=50; 
			ELSE i:=21;
		END_IF;	
		
	21:	IF 	STEP_TIME_DONE 
			THEN i:= 100;		
			ELSE i:= 20;	
		END_IF;
		
		//ALARM CONDITION
	50:	STEP_ERR:=TRUE;
		TON_STEP_TIME_EN:=FALSE;
	
		//TIME OUT
	51: STEP_TIME_OUT:=TRUE;
		TON_STEP_TIME_EN:=FALSE;
		
		//FINISHED
	100:	NEXTSTEP:=TRUE;
		TON_STEP_TIME_EN:=FALSE;	
	END_CASE;	
	
//PROCESS TIME
	STEP_TIME(IN:= TON_STEP_TIME_EN, PT:= INT_TO_TIME(STEP_DATA.StepTime+STEP_DATA.AddTime)*1000, Q=> STEP_TIME_DONE, ET=> );
	
	
	
]]></ST>
    </Implementation>
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      <LineId Id="11845" Count="14" />
      <LineId Id="11948" Count="1" />
      <LineId Id="11860" Count="45" />
      <LineId Id="28" Count="0" />
    </LineIds>
  </POU>
</TcPlcObject>