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UI.TcGVL

UI.TcGVL 975 B
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
    3. 

  3.   <GVL Name="UI" Id="{98e032ad-def7-4770-b9b1-2da9fed16a14}">
    4. 

  4.     <Declaration><![CDATA[{attribute 'qualified_only'}
    5. 

  5. VAR_GLOBAL
    6. 

  6. 	HeartBeat:REAL;
    7. 

  7. //HW
    8. 

  8. 	NDO:STR_NDO;
    9. 

  9. 	AO:STR_AO;	
    10. 

  10. //Config
    11. 

  11. 	PMConfig:ConfigPM;	
    12. 

  12. 	Chiller:ConfigChiller;	
    13. 

  13. 	InnerChiller:ConfigChiller;
    14. 

  14. 	OuterChiller:ConfigChiller;
    15. 

  15. 	TopChiller:ConfigChiller;	
    16. 

  16. 	DryPump:ConfigDryPump;	
    17. 

  17. 	Mfcgas1:ConfigMfcGas;
    18. 

  18. 	MfcN2:ConfigMfcGas;
    19. 

  19. 	MfcHe:ConfigMfcGas;	
    20. 

  20. 	Pump:ConfigPump;	
    21. 

  21. 	Purge:ConfigPurge;	
    22. 

  22. 	PendulumHeater:ConfigHeater;
    23. 

  23. 	LidHeater:ConfigHeater;
    24. 

  24. 	ChamberHeater:ConfigHeater;
    25. 

  25. 	ForelineHeater:ConfigHeater;
    26. 

  26. 	STAGE:ConfigHeater;	
    27. 

  27. 	PendulumValve:ConfigPendulumValve;		
    28. 

  28. //RECIPE
    29. 

  29. 	Step_Num:INT;
    30. 

  30. 	SetpArray:ARRAY[1..100] OF RecipeEachStep;	
    31. 

  31. //INTERLOCK
    32. 

  32. 	TurboN2PurgePressure:INT;	//PS103		
    33. 

  33. //PROCESS
    34. 

  34. 	Process_Start:BOOL;
    35. 

  35. 	Process_Stop:BOOL;
    36. 

  36. 	Warning_And_Alarm_RST:BOOL;	
    37. 

  37. END_VAR
    38. 

  38. 

  39. ]]></Declaration>
    40. 

  40.   </GVL>
    41. 

  41. </TcPlcObject>
    42.