Helios/PHT/PLC/GVLs/GV_IL.TcGVL

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <GVL Name="GV_IL" Id="{0c048ad6-ae76-4662-86e8-ecfd032660f5}">
    <Declaration><![CDATA[{attribute 'qualified_only'}
VAR_GLOBAL
//Tolerance
	PRESSURE_WARNING:BOOL;
	PRESSURE_ALARM:BOOL;
	
	MFC1_WARNING:BOOL;
	MFC1_Alarm:BOOL;
	
	MFC2_WARNING:BOOL;
	MFC2_Alarm:BOOL;
	
	MFC3_WARNING:BOOL;
	MFC3_Alarm:BOOL;
	
	MFC4_WARNING:BOOL;
	MFC4_Alarm:BOOL;
	
	MFC5_WARNING:BOOL;
	MFC5_Alarm:BOOL;
	
	MFC6_WARNING:BOOL;
	MFC6_Alarm:BOOL;
	
	MFC7_WARNING:BOOL;
	MFC7_Alarm:BOOL;
	
	MFC8_WARNING:BOOL;
	MFC8_Alarm:BOOL;
	
	MFC9_WARNING:BOOL;
	MFC9_Alarm:BOOL;
	
	WALL_TEMP_WARNING:BOOL;
	WALL_TEMP_Alarm:BOOL;
		
	LID_TEMP_WARNING:BOOL;
	LID_TEMP_Alarm:BOOL;
	
	STAGE_EDGE_TEMP_WARNING:BOOL;
	STAGE_EDGE_TEMP_Alarm:BOOL;
	
	STAGE_CENTER_TEMP_WARNING: BOOL;
	STAGE_CENTER_TEMP_ALARM: BOOL;
	
//INTERLOCK
	STATUS_PrepareTransfer:BOOL;
	STATUS_TransferWafer:BOOL;
	STATUS_OpenGasValve:BOOL;
	STATUS_CloseGasValve:BOOL;
	STATUS_OpenCloseSlitValve:BOOL;
	
	AV1_EN	:BOOL;//	MFC1前气动阀(N2-1)	使能
	AV2_EN	:BOOL;//	MFC1前气动阀(N2-3)	使能
	AV3_EN	:BOOL;//	MFC1后气动阀	使能
	AV4_EN	:BOOL;//	MFC2前气动阀(N2-1)	使能
	AV5_EN	:BOOL;//	MFC2前气动阀(NH3)	使能
	AV6_EN	:BOOL;//	MFC2后气动阀	使能
	AV7_EN	:BOOL;//	MFC3前气动阀(N2-1)	使能
	AV8_EN	:BOOL;//	MFC3前气动阀(NH3)	使能
	AV9_EN	:BOOL;//	MFC3后气动阀	使能
	AV10_EN	:BOOL;//	N2-1 总进气阀	使能
	AV11_EN	:BOOL;//	MFC1,2,3 BYPASS阀(N2-1)	使能
	AV12_EN	:BOOL;//	N2-2 总进气阀	使能
	AV13_EN	:BOOL;//	MFC5,6,7 BYPASS阀(N2-2)	使能
	AV14_EN	:BOOL;//	MFC5前气动阀(N2-2)	使能
	AV15_EN	:BOOL;//	MFC5前气动阀(HF)	使能
	AV16_EN	:BOOL;//	MFC5后气动阀	使能
	AV17_EN	:BOOL;//	OF前气动阀(N2-2)	使能
	AV18_EN	:BOOL;//	OF前气动阀(HF)	使能
	AV19_EN	:BOOL;//	OF后气动阀	使能
	AV20_EN	:BOOL;//	MFC6前气动阀(N2-2)	使能
	AV21_EN	:BOOL;//	MFC6前气动阀(Ar)	使能
	AV22_EN	:BOOL;//	MFC6后气动阀	使能
	AV23_EN	:BOOL;//	MFC7前气动阀(N2-2)	使能
	AV24_EN	:BOOL;//	MFC7前气动阀(Ar)	使能
	AV25_EN	:BOOL;//	MFC7后气动阀	使能
	AV26_EN	:BOOL;//	Chamber总进气阀(NH3,N2)	使能
	AV27_EN	:BOOL;//	Chamber总进气阀(HF,Ar)	使能
	AV101_EN:BOOL;//	Dry Pump至Chamber	使能
	AV102_EN:BOOL;//	Dry Pump至TMP	使能
	AV103_EN:BOOL;//	TMP N2 Purge	使能
	AV104_EN:BOOL;//	VG103压力计前置保护阀	使能
	AV105_EN:BOOL;//	BA01压力计前置保护阀	使能
	AV106_EN:BOOL;//	酸排阀	使能
	APC_EN	:BOOL;//	APC Open	使能

	AV1_EN_Bypass	:BOOL;//	MFC1前气动阀(N2-1)	使能Bypass
	AV2_EN_Bypass	:BOOL;//	MFC1前气动阀(N2-3)	使能Bypass
	AV3_EN_Bypass	:BOOL;//	MFC1后气动阀	使能Bypass
	AV4_EN_Bypass	:BOOL;//	MFC2前气动阀(N2-1)	使能Bypass
	AV5_EN_Bypass	:BOOL;//	MFC2前气动阀(NH3)	使能Bypass
	AV6_EN_Bypass	:BOOL;//	MFC2后气动阀	使能Bypass
	AV7_EN_Bypass	:BOOL;//	MFC3前气动阀(N2-1)	使能Bypass
	AV8_EN_Bypass	:BOOL;//	MFC3前气动阀(NH3)	使能Bypass
	AV9_EN_Bypass	:BOOL;//	MFC3后气动阀	使能Bypass
	AV10_EN_Bypass	:BOOL;//	N2-1 总进气阀	使能Bypass
	AV11_EN_Bypass	:BOOL;//	MFC1,2,3 BYPASS阀(N2-1)	使能Bypass
	AV12_EN_Bypass	:BOOL;//	N2-2 总进气阀	使能Bypass
	AV13_EN_Bypass	:BOOL;//	MFC5,6,7 BYPASS阀(N2-2)	使能Bypass
	AV14_EN_Bypass	:BOOL;//	MFC5前气动阀(N2-2)	使能Bypass
	AV15_EN_Bypass	:BOOL;//	MFC5前气动阀(HF)	使能Bypass
	AV16_EN_Bypass	:BOOL;//	MFC5后气动阀	使能Bypass
	AV17_EN_Bypass	:BOOL;//	OF前气动阀(N2-2)	使能Bypass
	AV18_EN_Bypass	:BOOL;//	OF前气动阀(HF)	使能Bypass
	AV19_EN_Bypass	:BOOL;//	OF后气动阀	使能Bypass
	AV20_EN_Bypass	:BOOL;//	MFC6前气动阀(N2-2)	使能Bypass
	AV21_EN_Bypass	:BOOL;//	MFC6前气动阀(Ar)	使能Bypass
	AV22_EN_Bypass	:BOOL;//	MFC6后气动阀	使能Bypass
	AV23_EN_Bypass	:BOOL;//	MFC7前气动阀(N2-2)	使能Bypass
	AV24_EN_Bypass	:BOOL;//	MFC7前气动阀(Ar)	使能Bypass
	AV25_EN_Bypass	:BOOL;//	MFC7后气动阀	使能Bypass
	AV26_EN_Bypass	:BOOL;//	Chamber总进气阀(NH3,N2)	使能Bypass
	AV27_EN_Bypass	:BOOL;//	Chamber总进气阀(HF,Ar)	使能Bypass
	AV101_EN_Bypass	:BOOL;//	Dry Pump至Chamber	使能Bypass
	AV102_EN_Bypass	:BOOL;//	Dry Pump至TMP	使能Bypass
	AV103_EN_Bypass	:BOOL;//	TMP N2 Purge	使能Bypass
	AV104_EN_Bypass	:BOOL;//	VG103压力计前置保护阀	使能Bypass
	AV105_EN_Bypass	:BOOL;//	BA01压力计前置保护阀	使能Bypass
	AV106_EN_Bypass	:BOOL;//	酸排阀	使能Bypass
	APC_EN_Bypass	:BOOL;//	APC Open	使能Bypass

	HTR_APC_EN,
	HTR_CHAMBER_EN,
	HTR_FORLINE_EN,
	HTR_GAS_BOX_EN,
	HTR_GATE_VALVE_EN,
	HTR_LID_EN:BOOL;
	
	HTR_APC_EN_Bypass,
	HTR_CHAMBER_EN_Bypass,
	HTR_FORLINE_EN_Bypass,
	HTR_GAS_BOX_EN_Bypass,
	HTR_GATE_VALVE_EN_Bypass,
	HTR_LID_EN_Bypass:BOOL;
	
//PROCESS
	Process_RUN: BOOL;
	Process_Stop: BOOL;
	
//SPLC
	Lid_Temp_OT_Bypass,
	Chamber_Temp_OT_Bypass,
	APC_Temp_OT_Bypass,
	Gate_Valve_Temp_OT_Bypass,
	Gas_Line_Temp_OT_Bypass	,
	Stage_Temp_OT_Bypass	,
	TMP_ALARM_Bypass	,
	PS1_ALM_Bypass,
	PS2_ALM_Bypass,
	SPLC_manual_ErrorAck	:BOOL;	
	SPLC_TO_PLC	AT	%I*	:SPLC_TO_PLC;
	PLC_TO_SPLC	AT	%Q*	:PLC_TO_SPLC;
	
(*	
	Lid_Temp_OK,
	Chamber_Temp_OK,
	APC_Temp_OK,
	Gate_Valve_Temp_OK,
	Gas_Line_Temp_OK	,
	TMP_Interlock_OK	,
	PS1_Interlock_OK	,
	PS2_Interlock_OK	AT	%Q*	:BOOL;	
	
	EV1_EN,
	EV2_EN,
	EV3_EN,
	EV4_EN,
	HTR_APC_EN,
	HTR_CHAMBER_EN,
	HTR_FORLINE_EN,
	HTR_GAS_BOX,
	HTR_GATE_VALVE,
	HTR_LID,
	PROCESS_EN,
	TMP_PW_EN,
	TRANSFER_EN,
	VALVE_ACID_EXHAUST_OPEN_EN,
	VALVE_CM_OPEN_EN,
	VALVE_DRY_PUMP_OPEN_EN,
	VALVE_TMP_BACK_OPEN_EN,
	VALVE_APC_OPEN_EN,
	WAFER_MOVING_IN_EN	AT	%I*	:BOOL;
	
	SPLC_ErrorAcknowledgement,
	SPLC_manual_ErrorAck,
	SPLC_Restart,
	SPLC_Run	AT	%Q*	:BOOL;			
	SPLC_Com_err,
	SPLC_FB_Err AT	%I*	:BOOL;
	*)
	
	
END_VAR]]></Declaration>
  </GVL>
</TcPlcObject>