Helios/PHT/PLC/GVLs/GV.TcGVL

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <GVL Name="GV" Id="{94909caf-fa4c-4665-a826-1f80aaa9659a}">
    <Declaration><![CDATA[{attribute 'qualified_only'}
VAR_GLOBAL
//************************HW-IO******************************************
	NDI									:STR_NDI;	
	NDO									:STR_NDO;
	AI									:STR_AI;
	AO									:STR_AO;	
	//POWER
	TURBO_PUMP_POWER_ON 				:BOOL;
	PENDULUM_VALVE_HEATER_POWER_ON		:BOOL;
	LID_HEATER_POWER_ON					:BOOL;
	CHAMBER_HEATER_POWER_ON				:BOOL;
	IGS_HEATER_POWER_ON					:BOOL;
	TAPE_HEATER_POWER_ON				:BOOL;
	FORELINE_HEATER_POWER_ON			:BOOL;
	GATE_VALVE_HEATER_POWER_ON			:BOOL;	
	//HEATER	
	LID_HEATER_AUTO_TUNE_EN				:ARRAY[1..10] OF BOOL;
	CHAMBER_HEATER_AUTO_TUNE_EN			:ARRAY[1..10] OF BOOL;
	PEN_VALVE_HEATER_AUTO_TUNE_EN		:BOOL;
	GATE_VALVE_HEATER_AUTO_TUNE_EN		:BOOL;
	IGS_HEATER_AUTO_TUNE_EN				:ARRAY[1..10] OF BOOL;
	TAPE_HEATER_AUTO_TUNE_EN			:ARRAY[1..10] OF BOOL;
	FORELINE_HEATER_AUTO_TUNE_EN		:ARRAY[1..20] OF BOOL;
	STAGE_HEATER_AUTO_TUNE_EN			:ARRAY[1..10] OF BOOL;
	
	LID_HEATER_AUTO_TUNE_OUTPUT			:ARRAY[1..10] OF REAL;
	CHAMBER_HEATER_AUTO_TUNE_OUTPUT		:ARRAY[1..10] OF REAL;
	PEN_VALVE_HEATER_AUTO_TUNE_OUTPUT	:REAL;
	GATE_VALVE_HEATER_AUTO_TUNE_OUTPUT	:REAL;
	IGS_HEATER_AUTO_TUNE_OUTPUT			:ARRAY[1..10] OF REAL;
	TAPE_HEATER_AUTO_TUNE_OUTPUT		:ARRAY[1..10] OF REAL;
	FORELINE_HEATER_AUTO_TUNE_OUTPUT	:ARRAY[1..20] OF REAL;
	STAGE_HEATER_AUTO_TUNE_OUTPUT		:ARRAY[1..10] OF REAL;
	
	LID_HEATER_SSR_ON					:ARRAY[1..10] OF BOOL;
	CHAMBER_HEATER_SSR_ON				:ARRAY[1..10] OF BOOL;
	PEN_VALVE_HEATER_SSR_ON				:BOOL;
	GATE_VALVE_SSR_ON					:BOOL;
	IGS_HEATER_SSR_ON					:ARRAY[1..10] OF BOOL;
	TAPE_HEATER_SSR_ON					:ARRAY[1..10] OF BOOL;
	FORELINE_HEATER_SSR_ON				:ARRAY[1..20] OF BOOL;
	STAGE_HEATER_SCR_OUTPUT				:ARRAY[1..10] OF REAL;	
//INTERLOCK
	ALARM_OCC				:BOOL;
	WARNING_OCC				:BOOL;	
//UI-Config
	PMConfig				:ConfigPM;	
	Chiller					:ConfigChiller;	
	InnerChiller			:ConfigChiller;
	OuterChiller			:ConfigChiller;
	TopChiller				:ConfigChiller;
	DryPump					:ConfigDryPump;	
	Mfcgas1					:ConfigMfcGas;
	MfcN2					:ConfigMfcGas;
	MfcHe					:ConfigMfcGas; 	
	Pump					:ConfigPump;	
	Purge					:ConfigPurge;	
	PendulumHeater			:ConfigHeater;
	LidHeater				:ConfigHeater;
	ChamberHeater			:ConfigHeater;
	ForelineHeater			:ConfigHeater;
	STAGE					:ConfigHeater;
	PendulumValve			:ConfigPendulumValve;	
//UI-RECIPE
	Process_Start			:BOOL;
	Process_Stop			:BOOL;
	Step_Num				:INT;
	SetpArray				:ARRAY[1..100] OF RecipeEachStep;	
//INTERLOCK
	TurboN2PurgePressure	:INT;	//PS103	
END_VAR]]></Declaration>
  </GVL>
</TcPlcObject>