1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071727374757677 |
- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <GVL Name="GV" Id="{94909caf-fa4c-4665-a826-1f80aaa9659a}">
- <Declaration><![CDATA[{attribute 'qualified_only'}
- VAR_GLOBAL
- //************************HW-IO******************************************
- NDI :STR_NDI;
- NDO :STR_NDO;
- AI :STR_AI;
- AO :STR_AO;
- //POWER
- TURBO_PUMP_POWER_ON :BOOL;
- PENDULUM_VALVE_HEATER_POWER_ON :BOOL;
- LID_HEATER_POWER_ON :BOOL;
- CHAMBER_HEATER_POWER_ON :BOOL;
- IGS_HEATER_POWER_ON :BOOL;
- TAPE_HEATER_POWER_ON :BOOL;
- FORELINE_HEATER_POWER_ON :BOOL;
- GATE_VALVE_HEATER_POWER_ON :BOOL;
- //HEATER
- LID_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
- CHAMBER_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
- PEN_VALVE_HEATER_AUTO_TUNE_EN :BOOL;
- GATE_VALVE_HEATER_AUTO_TUNE_EN :BOOL;
- IGS_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
- TAPE_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
- FORELINE_HEATER_AUTO_TUNE_EN :ARRAY[1..20] OF BOOL;
- STAGE_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
-
- LID_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
- CHAMBER_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
- PEN_VALVE_HEATER_AUTO_TUNE_OUTPUT :REAL;
- GATE_VALVE_HEATER_AUTO_TUNE_OUTPUT :REAL;
- IGS_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
- TAPE_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
- FORELINE_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..20] OF REAL;
- STAGE_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
-
- LID_HEATER_SSR_ON :ARRAY[1..10] OF BOOL;
- CHAMBER_HEATER_SSR_ON :ARRAY[1..10] OF BOOL;
- PEN_VALVE_HEATER_SSR_ON :BOOL;
- GATE_VALVE_SSR_ON :BOOL;
- IGS_HEATER_SSR_ON :ARRAY[1..10] OF BOOL;
- TAPE_HEATER_SSR_ON :ARRAY[1..10] OF BOOL;
- FORELINE_HEATER_SSR_ON :ARRAY[1..20] OF BOOL;
- STAGE_HEATER_SCR_OUTPUT :ARRAY[1..10] OF REAL;
- //INTERLOCK
- ALARM_OCC :BOOL;
- WARNING_OCC :BOOL;
- //UI-Config
- PMConfig :ConfigPM;
- Chiller :ConfigChiller;
- InnerChiller :ConfigChiller;
- OuterChiller :ConfigChiller;
- TopChiller :ConfigChiller;
- DryPump :ConfigDryPump;
- Mfcgas1 :ConfigMfcGas;
- MfcN2 :ConfigMfcGas;
- MfcHe :ConfigMfcGas;
- Pump :ConfigPump;
- Purge :ConfigPurge;
- PendulumHeater :ConfigHeater;
- LidHeater :ConfigHeater;
- ChamberHeater :ConfigHeater;
- ForelineHeater :ConfigHeater;
- STAGE :ConfigHeater;
- PendulumValve :ConfigPendulumValve;
- //UI-RECIPE
- Process_Start :BOOL;
- Process_Stop :BOOL;
- Step_Num :INT;
- SetpArray :ARRAY[1..100] OF RecipeEachStep;
- //INTERLOCK
- TurboN2PurgePressure :INT; //PS103
- END_VAR]]></Declaration>
- </GVL>
- </TcPlcObject>
|