GV.TcGVL 2.6 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  3. <GVL Name="GV" Id="{94909caf-fa4c-4665-a826-1f80aaa9659a}">
  4. <Declaration><![CDATA[{attribute 'qualified_only'}
  5. VAR_GLOBAL
  6. //************************HW-IO******************************************
  7. NDI :STR_NDI;
  8. NDO :STR_NDO;
  9. AI :STR_AI;
  10. AO :STR_AO;
  11. //POWER
  12. TURBO_PUMP_POWER_ON :BOOL;
  13. PENDULUM_VALVE_HEATER_POWER_ON :BOOL;
  14. LID_HEATER_POWER_ON :BOOL;
  15. CHAMBER_HEATER_POWER_ON :BOOL;
  16. IGS_HEATER_POWER_ON :BOOL;
  17. TAPE_HEATER_POWER_ON :BOOL;
  18. FORELINE_HEATER_POWER_ON :BOOL;
  19. GATE_VALVE_HEATER_POWER_ON :BOOL;
  20. //HEATER
  21. LID_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
  22. CHAMBER_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
  23. PEN_VALVE_HEATER_AUTO_TUNE_EN :BOOL;
  24. GATE_VALVE_HEATER_AUTO_TUNE_EN :BOOL;
  25. IGS_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
  26. TAPE_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
  27. FORELINE_HEATER_AUTO_TUNE_EN :ARRAY[1..20] OF BOOL;
  28. STAGE_HEATER_AUTO_TUNE_EN :ARRAY[1..10] OF BOOL;
  29. LID_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
  30. CHAMBER_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
  31. PEN_VALVE_HEATER_AUTO_TUNE_OUTPUT :REAL;
  32. GATE_VALVE_HEATER_AUTO_TUNE_OUTPUT :REAL;
  33. IGS_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
  34. TAPE_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
  35. FORELINE_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..20] OF REAL;
  36. STAGE_HEATER_AUTO_TUNE_OUTPUT :ARRAY[1..10] OF REAL;
  37. LID_HEATER_SSR_ON :ARRAY[1..10] OF BOOL;
  38. CHAMBER_HEATER_SSR_ON :ARRAY[1..10] OF BOOL;
  39. PEN_VALVE_HEATER_SSR_ON :BOOL;
  40. GATE_VALVE_SSR_ON :BOOL;
  41. IGS_HEATER_SSR_ON :ARRAY[1..10] OF BOOL;
  42. TAPE_HEATER_SSR_ON :ARRAY[1..10] OF BOOL;
  43. FORELINE_HEATER_SSR_ON :ARRAY[1..20] OF BOOL;
  44. STAGE_HEATER_SCR_OUTPUT :ARRAY[1..10] OF REAL;
  45. //INTERLOCK
  46. ALARM_OCC :BOOL;
  47. WARNING_OCC :BOOL;
  48. //UI-Config
  49. PMConfig :ConfigPM;
  50. Chiller :ConfigChiller;
  51. InnerChiller :ConfigChiller;
  52. OuterChiller :ConfigChiller;
  53. TopChiller :ConfigChiller;
  54. DryPump :ConfigDryPump;
  55. Mfcgas1 :ConfigMfcGas;
  56. MfcN2 :ConfigMfcGas;
  57. MfcHe :ConfigMfcGas;
  58. Pump :ConfigPump;
  59. Purge :ConfigPurge;
  60. PendulumHeater :ConfigHeater;
  61. LidHeater :ConfigHeater;
  62. ChamberHeater :ConfigHeater;
  63. ForelineHeater :ConfigHeater;
  64. STAGE :ConfigHeater;
  65. PendulumValve :ConfigPendulumValve;
  66. //UI-RECIPE
  67. Process_Start :BOOL;
  68. Process_Stop :BOOL;
  69. Step_Num :INT;
  70. SetpArray :ARRAY[1..100] OF RecipeEachStep;
  71. //INTERLOCK
  72. TurboN2PurgePressure :INT; //PS103
  73. END_VAR]]></Declaration>
  74. </GVL>
  75. </TcPlcObject>