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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <GVL Name="ECC" Id="{c23ecc3b-2b86-4d74-9935-af4c8da3ae35}">
- <Declaration><![CDATA[{attribute 'qualified_only'}
- VAR_GLOBAL
- //HW_IO
- CHAMBER_IN AT %I* :CHAMBER_IN;
- CHAMBER_OUT AT %Q* :CHAMBER_OUT;
-
- IGS_IN AT %I* :IGS_IN;
- IGS_OUT AT %Q* :IGS_OUT;
- //MFC
- MFC_PV AT %I* :ARRAY [1..10] OF STR_FCSP700_INPUT;
- MFC_SV AT %Q* :ARRAY [1..10] OF STR_FCSP700_OUTPUT;
- //EV
- EV1 AT %Q* :STR_EX260_SEC;
- EV2 AT %Q* :STR_EX260_SEC;
- EV3 AT %Q* :STR_EX260_SEC;
- EV4 AT %Q* :STR_EX260_SEC;
-
- //APC VALVE
- APC_PV AT %I* :VAT_IN;
- APC_SV AT %Q* :VAT_OUT;
- //TMP
- TURBO_SV AT %Q* :TMP_OUT;
- TURBO_PV AT %I* :TMP_IN;
-
- //CDG PG/VG
- VG103_PV AT %I* :STR_CDG200D;
- VG101_PV AT %I* :STR_CDG200D;
- VG102_PV AT %I* :STR_CDG200D;
- BA1_PV AT %I* :STR_BPG400;
- VG104_PV AT %I* :STR_CDG200D;
- //STAGE
- STAGE_SV AT %Q* :ARRAY [1..4] OF REAL;
- END_VAR]]></Declaration>
- </GVL>
- </TcPlcObject>
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