Helios/PHT/PLC/DUTs/Info/Alarm.TcDUT

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <DUT Name="Alarm" Id="{59e6bc94-a461-4798-a729-7c6d32e9530d}">
    <Declaration><![CDATA[TYPE Alarm :
STRUCT
	PRESSURE:BOOL;
	MFC1:BOOL;
	WALL_TEMP:BOOL;
	LID_TEMP:BOOL;
	STAGE_TEMP1:BOOL;
	STAGE_TEMP2:BOOL;
	STAGE_TEMP3:BOOL;
	STAGE_TEMP4:BOOL;
	Gas1FlowPressureOutOfRange:BOOL;
	TurboN2PurgePressureOutOfRange:BOOL;
	PrepareTransferTimerout:BOOL;
	TransferWaferTimeout:BOOL;
	OpenGasValveTimeout:BOOL;
	CloseGasValveTimeout:BOOL;
	OpenCloseSlitValveTimeout:BOOL;
	ATMCheckTimeout:BOOL;
	
	PLC:BOOL;	
	DRY_PUMP:BOOL;
	PENDULUM_VALVE:BOOL;
	TURBO_PUMP:BOOL;	
	//PROCESS TOLERANCE
	TOLERANCE_PRESSURE:BOOL;
	TOLERANCE_MFC1:BOOL;
	TOLERANCE_WALL_TEMP:BOOL;
	TOLERANCE_LID_TEMP:BOOL;
	TOLERANCE_STAGE_TEMP1,
	TOLERANCE_STAGE_TEMP2,
	TOLERANCE_STAGE_TEMP3,
	TOLERANCE_STAGE_TEMP4: BOOL;


END_STRUCT
END_TYPE
]]></Declaration>
  </DUT>
</TcPlcObject>