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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="STR_NDI" Id="{af8dc287-46cc-4d11-8149-db1762b7bc01}">
- <Declaration><![CDATA[TYPE STR_NDI :
- STRUCT
- AV101_OPEN ,
- AV101_CLOSE ,
- AV102_OPEN ,
- AV102_CLOSE ,
- AV103_OPEN ,
- AV103_CLOSE ,
- AV104_OPEN ,
- AV104_CLOSE ,
- AV105_OPEN ,
- AV105_CLOSE ,
- AV106_OPEN ,
- AV106_CLOSE ,
- CY1_OPEN ,
- CY1_CLOSE ,
- CY2_OPEN ,
- CY2_CLOSE ,
- GV1_OPEN ,
- GV1_CLOSE ,
- Lid_Closed ,
- Water_Leak_Sensor01 ,
- Water_Leak_Sensor02 ,
- Water_Leak_Sensor03 ,
- Water_Leak_Sensor04 ,
- // LID_heater_OT ,
- // Chamber_heater_OT ,
- Chiller_Controller_ALM ,
- PG_PS1_Pressure_Switch_Up_Limit ,
- PG_PS1_Pressure_Switch_Down_Limit ,
- MS1_ALM ,
- PS1_Pressure_Switch ,
- (* Forline_Heater1_OT ,
- Forline_Heater2_OT ,
- Forline_Heater3_OT ,
- Forline_Heater4_OT ,
- Forline_Heater5_OT ,
- Forline_Heater6_OT ,
- Forline_Heater7_OT ,
- Forline_Heater8_OT ,
- Turbo_Pump_Heater_OT ,
- Pendulum_Valve_Heater_OT ,
- IGS_Heater_OT ,
- Tape_Heater_OT ,
- Gate_Valve_OT ,
- Stage_Heater_OT ,
- *) CDA_OK ,
- Lift_Pin_Middle1 ,
- Lift_Pin_Middle2 ,
- FL02B2 ,
- FL03B2 ,
- FL04B2 ,
- AV1 ,
- AV2 ,
- AV3 ,
- AV4 ,
- AV26 ,
- AV5 :BOOL;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
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