1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071 |
- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="STR_AI" Id="{6575a4b9-3bc4-4bec-9dbe-d8e6adab06fb}">
- <Declaration><![CDATA[TYPE STR_AI :
- STRUCT
- VG101_Pressure ,
- VG102_Pressure ,
- //VG103_Pressure ,
- VG104_Pressure ,
- BA1_Pressure ,
- MFC1_Flow ,
- APC_Temp , //TC01
- Gate_Valve_Temp , //TC13
- Gate_Valve_Temp_Monitor, //TC14
- //IGS_Temp1 , //TC35
- //IGS_Temp2 , //TC36
- //IGS_Temp3 , //TC35
- //IGS_Temp4 , //TC36
- Lid_Temp , //TC02
- //Lid_Temp_Monitor1 , //TC03
- //Lid_Temp_Monitor2 , //TC04
- //Tape_Temp1 , //TC31
- //Tape_Temp2 , //TC32
- AV102_Temp ,
- AV101_Temp ,
- AV104_Temp ,
- AV105_Temp ,
- //BA01_Temp ,
- //VG103_Pipe_Temp ,
- Exhaust1_3_Temp ,
- Exhaust4_7_Temp ,
- VG101_Pipe_Temp ,
- Chamber_Temp1 , //TC05
- Chamber_Temp2 , //TC06
- Chamber_Temp3 , //TC07
- //Chamber_Temp_Monitor, //TC12
- Stage_Temp1 , //TC08
- Stage_Temp1_Monitor ,
- Stage_Temp2 , //TC09
- Stage_Temp2_Monitor ,
- Stage_Temp3 , //TC10
- Stage_Temp3_Monitor ,
- Stage_Temp4 ,
- Stage_Temp4_Monitor :REAL; //TC11
- PG_PS1_Value ,
- //PG_PS2_Value ,
- //PG_PS3_Value ,
- //PG_PS4_Value ,
- //PG_PS5_Value ,
- //PG_PS6_Value ,
- //PG_PS7_Value ,
- //PG_PS8_Value ,
- //PG_PS9_Value ,
- PS1_Value ,
- //PS2_Value ,
- MS1_Value :REAL;
- //GD01_Value ,
- //GD02_Value :REAL;
- APC:VAT_IN;
- TMP:TMP_IN;
- Water_Flow:REAL;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
|