STR_AI.TcDUT 1.3 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  3. <DUT Name="STR_AI" Id="{6575a4b9-3bc4-4bec-9dbe-d8e6adab06fb}">
  4. <Declaration><![CDATA[TYPE STR_AI :
  5. STRUCT
  6. VG101_Pressure ,
  7. VG102_Pressure ,
  8. //VG103_Pressure ,
  9. VG104_Pressure ,
  10. BA1_Pressure ,
  11. MFC1_Flow ,
  12. APC_Temp , //TC01
  13. Gate_Valve_Temp , //TC13
  14. Gate_Valve_Temp_Monitor, //TC14
  15. //IGS_Temp1 , //TC35
  16. //IGS_Temp2 , //TC36
  17. //IGS_Temp3 , //TC35
  18. //IGS_Temp4 , //TC36
  19. Lid_Temp , //TC02
  20. //Lid_Temp_Monitor1 , //TC03
  21. //Lid_Temp_Monitor2 , //TC04
  22. //Tape_Temp1 , //TC31
  23. //Tape_Temp2 , //TC32
  24. AV102_Temp ,
  25. AV101_Temp ,
  26. AV104_Temp ,
  27. AV105_Temp ,
  28. //BA01_Temp ,
  29. //VG103_Pipe_Temp ,
  30. Exhaust1_3_Temp ,
  31. Exhaust4_7_Temp ,
  32. VG101_Pipe_Temp ,
  33. Chamber_Temp1 , //TC05
  34. Chamber_Temp2 , //TC06
  35. Chamber_Temp3 , //TC07
  36. //Chamber_Temp_Monitor, //TC12
  37. Stage_Temp1 , //TC08
  38. Stage_Temp1_Monitor ,
  39. Stage_Temp2 , //TC09
  40. Stage_Temp2_Monitor ,
  41. Stage_Temp3 , //TC10
  42. Stage_Temp3_Monitor ,
  43. Stage_Temp4 ,
  44. Stage_Temp4_Monitor :REAL; //TC11
  45. PG_PS1_Value ,
  46. //PG_PS2_Value ,
  47. //PG_PS3_Value ,
  48. //PG_PS4_Value ,
  49. //PG_PS5_Value ,
  50. //PG_PS6_Value ,
  51. //PG_PS7_Value ,
  52. //PG_PS8_Value ,
  53. //PG_PS9_Value ,
  54. PS1_Value ,
  55. //PS2_Value ,
  56. MS1_Value :REAL;
  57. //GD01_Value ,
  58. //GD02_Value :REAL;
  59. APC:VAT_IN;
  60. TMP:TMP_IN;
  61. Water_Flow:REAL;
  62. END_STRUCT
  63. END_TYPE
  64. ]]></Declaration>
  65. </DUT>
  66. </TcPlcObject>