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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="STR_AO" Id="{b73cbc10-e11d-41a0-8294-d507835504d6}">
- <Declaration><![CDATA[TYPE STR_AO :
- STRUCT
- MFC1_Flow_Setpoint ,
- MFC1_Rate_Setpoint ,
- LID_Temp_SV , //E02
- Chamber_Temp1_SV ,//E06
- Chamber_Temp2_SV ,//E07
- Chamber_Temp3_SV ,//E08
- AV102_Temp_SV ,//E14
- AV101_Temp_SV ,//E15
- AV104_Temp_SV ,//E16
- AV105_Temp_SV ,
- Exhaust1_3_Temp_SV ,//E14
- Exhaust4_7_Temp_SV ,//E15
- VG101_Pipe_Temp_SV ,//E16
- Gate_Valve_Temp_SV ,//E18
- APC_Temp_SV ,//E01
- Stage_Temp1_SV ,
- Stage_Temp2_SV ,
- Stage_Temp3_SV ,
- Stage_Temp4_SV :REAL;
- APC:VAT_OUT;
- TMP:TMP_OUT;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
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