Helios/COR.tsproj.bak

<?xml version="1.0"?>
<TcSmProject xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="http://www.beckhoff.com/schemas/2012/07/TcSmProject" TcSmVersion="1.0" TcVersion="3.1.4024.56">
	<DataTypes>
		<DataType>
			<Name GUID="{169E946E-3750-3DBC-621A-F28304512880}" AutoDeleteType="true">CHAMBER_IN</Name>
			<BitSize>832</BitSize>
			<SubItem>
				<Name>C02</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C02 	EL1889 16DI]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C03</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C03	EL1889 16DI]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C04</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>8</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C04	EL3318	8TC]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>256</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C05</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>8</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C05	EL3318	8TC]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>384</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C06</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C06	EL3164	4AI	0-10V]]></Comment>
				<BitSize>64</BitSize>
				<BitOffs>512</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C11</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>8</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C10 	EL9410	POWER MODULE
C11	EL1918	SPLC+8SDI]]></Comment>
				<BitSize>64</BitSize>
				<BitOffs>576</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C12</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C12	EL1904	4SDI]]></Comment>
				<BitSize>32</BitSize>
				<BitOffs>640</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C13</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C13	EL1904	4SDI]]></Comment>
				<BitSize>32</BitSize>
				<BitOffs>672</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C15</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>8</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C15	EL3318	8TC]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>704</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{EDE28A60-CBD4-9C10-F9BF-BA7E6FABA4FD}" AutoDeleteType="true">IGS_IN</Name>
			<BitSize>704</BitSize>
			<SubItem>
				<Name>C32</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C32	EL3164	4AI	0-10V]]></Comment>
				<BitSize>64</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C33</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C33	EL3164	4AI	0-10V]]></Comment>
				<BitSize>64</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C34</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C34	EL3164	4AI	0-10V]]></Comment>
				<BitSize>64</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C35</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C35	EL3154	4AI	4-20mA]]></Comment>
				<BitSize>64</BitSize>
				<BitOffs>192</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C36</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C36	EL1889 16DI]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>256</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C37</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C37	EL1889 16DI]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>384</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C38</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C38	EL1904	4SDI]]></Comment>
				<BitSize>32</BitSize>
				<BitOffs>512</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C39</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C39	EL1904	4SDI]]></Comment>
				<BitSize>32</BitSize>
				<BitOffs>544</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C40</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>8</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C40	EL3318	8TC]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>576</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{C1C9107F-4CDE-3AAB-2493-545CB90F83DF}" AutoDeleteType="true">STR_FCSP700_INPUT</Name>
			<BitSize>224</BitSize>
			<SubItem>
				<Name>Active_Exception_Status</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000002}">USINT</Type>
				<BitSize>8</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Flow_Reading</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Pressure_Reading</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Temperature_Reading</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>96</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Position_Readback</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Position_Setpoint</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>160</BitOffs>
			</SubItem>
			<SubItem>
				<Name>WcState</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>192</BitOffs>
			</SubItem>
			<SubItem>
				<Name>InputToggle</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>193</BitOffs>
			</SubItem>
			<SubItem>
				<Name>State</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<BitSize>16</BitSize>
				<BitOffs>208</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{23275CD4-2CAD-3AEB-1D74-738CE12168AA}" IecBaseType="true" AutoDeleteType="true">ARRAY [1..10] OF STR_FCSP700_INPUT</Name>
			<Comment><![CDATA[MFC]]></Comment>
			<BitSize>2240</BitSize>
			<BaseType GUID="{C1C9107F-4CDE-3AAB-2493-545CB90F83DF}">STR_FCSP700_INPUT</BaseType>
			<ArrayInfo>
				<LBound>1</LBound>
				<Elements>10</Elements>
			</ArrayInfo>
		</DataType>
		<DataType>
			<Name GUID="{A58AEC95-DF23-F151-16C5-0D501B1DFCE9}" AutoDeleteType="true">VAT_IN</Name>
			<BitSize>224</BitSize>
			<SubItem>
				<Name>Actual_Pressure</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Pressure_Sensor_1</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Pressure_Sensor_2</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Actual_Position</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>96</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Control_Mode</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000003}">SINT</Type>
				<Comment><![CDATA[
											CONTROL MODE:	
											1=HOMING
											2=POSITION
											3=CLOSE
											4=OPEN
											5=PRESSURE
											6=HOLD:KEEP IN CURRENT POSITION
											7=LEARN:INTERNAL LEARN PROCEDURE
											]]></Comment>
				<BitSize>8</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Error_Number</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<BitSize>16</BitSize>
				<BitOffs>144</BitOffs>
			</SubItem>
			<SubItem>
				<Name>General_Status</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<Comment><![CDATA[
											BIT 0	FIELDBUS DATA VALID 
													0 = Valve is not in the EtherCAT state OPERATIONAL or the process data output 
													watchdog 
													(SyncManager2) is disabled 
													1 = Valve is in the EtherCAT state OPERATIONAL and the process data output 
													watchdog 
													(SyncManager2) is enabled 
											BIT 1 ZERO ADJUST EXECUTED 
													ZERO ADJUST successful executed, active for 2 seconds 
											BIT 2 PING PONG RX-BIT 
													PING PONG RX BIT, is inverted and transmitted back to the fieldbus master (PLC) 
											BIT 3 PRESSURE SIMULATION 
													0 = off 
													1 = on 
											BIT 4 TARGET PRESSURE REACHED 
													0 = The actual pressure is not within 2% of the pressure setpoint 
													1 = The actual pressure is within 2% of the pressure setpoint 
											BIT 5-6 NOT USED (reserved) - 
											BIT 7-8 ACCESS MODE 
											bit 8	bit 7
												0 		0 	= LOCAL 
												0 		1 	= REMOTE 
												1 		0 	= LOCKED 
											BIT 9 WARNINGS ACTIVE 
													0 = No WARNINGS 
													1 = At least one WARNING of the warning bitmaps is active (GENERAL 
														WARNING bitmap and EXTENDED WARNING bitmap) 
											BIT 10 SEALING STATE 
													Only valid if a sealing functionality is available.
													0 = valve is not sealed 
													1 = valve is sealed 
											BIT 11 INTERLOCK ACTIVE 
													Is set if an interlock input is active 
											BIT 12-15 NOT USED (reserved) -
											]]></Comment>
				<BitSize>16</BitSize>
				<BitOffs>160</BitOffs>
			</SubItem>
			<SubItem>
				<Name>General_Warnings</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<Comment><![CDATA[
											BIT 0 NOT USED (reserved) - 
											BIT 1 LEARN DATA SET 
													Learn data not present. Learn required for adaptive pressure control. 
													Just active if adaptive pressure control algorithm is choosen. 
											BIT 2 NOT USED (reserved) - 
											BIT 3 POWER FAILURE BATTERY 
													Not ready, voltage too low. 
													Just active if power failure is available. 
											4-15 NOT USED (reserved) -
											]]></Comment>
				<BitSize>16</BitSize>
				<BitOffs>176</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Extended_Warnings</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<Comment><![CDATA[
											BIT 0 REMOTE CONTROL NOT POSSIBLE 
													Remote control not possible, access mode local is active, change to acces mode 
													remote or access mode locked 
											BIT 1 ACTUAL CONTROL MODE SETPOINT NOT ALLOWED 
													Not possible to switch the actual control mode to CONTROL MODE SETPOINT 
													• Control mode is interlock or fatal error 
													• CONTROL MODE SETPOINT is 5 (pressure) or 7 (learn) and no sensor 
													  is selected (sensor mode configuration) 
											BIT 2 ZERO DISABLED 
													Using zero function not possible 
											BIT 3 PFO DEACTIVATED 
													Power Failure Option is deactivated 
											BIT 4 NOT USED (reserved) - 
											BIT 5 OUT OF RANGE: PRESSURE SETPOINT 
													Value of PRESSURE SETPOINT is out of range 
											BIT 6 OUT OF RANGE: POSITION SETPOINT 
													Value of POSITION SETPOINT is out of range 
											BIT 7-9 NOT USED (reserved) - 
											BIT 10 OUT OF RANGE: CONTROL MODE SETPOINT 
													Value of CONTROL MODE SETPOINT is out of range 
											BIT 11 OUT OF RANGE: GENERAL CONTROL SETPOINT 
													Value of GENERAL CONTROL SETPOINT is out of range 
											BIT 12-15 NOT USED (reserved) -
											]]></Comment>
				<BitSize>16</BitSize>
				<BitOffs>192</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{E5C20BEC-ED66-6119-4621-55709C9256F1}" AutoDeleteType="true">TMP_IN</Name>
			<BitSize>112</BitSize>
			<SubItem>
				<Name>Rotation</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<Comment><![CDATA[1:ROTATING,0:NOT ROTATING]]></Comment>
				<BitSize>1</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Normal</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<Comment><![CDATA[1:NORMAL,0:UNNORMAL]]></Comment>
				<BitSize>1</BitSize>
				<BitOffs>1</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Acceleration</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>2</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Deceleration_Includes_Braking</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>3</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Remote_Local</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<Comment><![CDATA[1:LOCAL.E-CAT CONTROL DISABLED,0:REMOTE.E-CAT CONTROL ENABLED]]></Comment>
				<BitSize>1</BitSize>
				<BitOffs>4</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Turbo_Low_Speed</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>5</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Alarm</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>6</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Warning</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>7</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Turbo_Speed</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<Comment><![CDATA[0.1[%],1000(100.0%):RATED SPEED,0(0.0%):NO RATATION]]></Comment>
				<BitSize>16</BitSize>
				<BitOffs>16</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Turbo_Current</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<Comment><![CDATA[0.1A]]></Comment>
				<BitSize>16</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Turbo_pump_temperature</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<Comment><![CDATA[1[℃]]]></Comment>
				<BitSize>16</BitSize>
				<BitOffs>48</BitOffs>
			</SubItem>
			<SubItem>
				<Name>VibrationH</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<BitSize>16</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>VibrationB</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<BitSize>16</BitSize>
				<BitOffs>80</BitOffs>
			</SubItem>
			<SubItem>
				<Name>VibrationZ</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000006}">INT</Type>
				<BitSize>16</BitSize>
				<BitOffs>96</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{A0D599C1-68F7-9056-2857-1063C3F65307}" AutoDeleteType="true">STR_CDG200D</Name>
			<BitSize>192</BitSize>
			<SubItem>
				<Name>Reading_Valid1</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Overrange_Exceeded1</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>8</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Underrange_Exceeded1</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>16</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Sensor_Value1</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Reading_Valid2</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Overrange_Exceeded2</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>72</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Underrange_Exceeded2</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>80</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Sensor_Value2</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>96</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Active_Exception_Status</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000002}">USINT</Type>
				<BitSize>8</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Trip_Point_Output_All_Insta</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type>
				<BitSize>32</BitSize>
				<BitOffs>160</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{1F26C7D6-3F6B-7D42-FC93-15720AE13FD2}" AutoDeleteType="true">STR_BPG400</Name>
			<BitSize>224</BitSize>
			<SubItem>
				<Name>Combination_Gauge_Reading_Valid_Module_1</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Combination_Gauge_Overrange_Exceeded_Module_1</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>1</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Combination_Gauge_Underrange_Exceeded_Module_1</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>2</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Combination_Gauge_Active_Value_Module_1</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Combination_Gauge_Active_Sensor_Number_Module_1</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<BitSize>16</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Combination_Gauge_Reading_Valid_Module_2</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>80</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Combination_Gauge_Overrange_Exceeded_Module_2</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>81</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Combination_Gauge_Underrange_Exceeded_Module_2</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>82</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Combination_Gauge_Active_Value_Module_2</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>96</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Combination_Gauge_Active_Sensor_Number_Module_2</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<BitSize>16</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Active_Exception_Status</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000002}">USINT</Type>
				<BitSize>8</BitSize>
				<BitOffs>144</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Trip_Point_Output_All_Instance</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type>
				<BitSize>32</BitSize>
				<BitOffs>160</BitOffs>
			</SubItem>
			<SubItem>
				<Name>WcState</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>192</BitOffs>
			</SubItem>
			<SubItem>
				<Name>InputToggle</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>193</BitOffs>
			</SubItem>
			<SubItem>
				<Name>State</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<BitSize>16</BitSize>
				<BitOffs>208</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{B63B4428-D21A-594A-D385-DAF494B3FE81}" AutoDeleteType="true">CHILLER_IN</Name>
			<BitSize>288</BitSize>
			<SubItem>
				<Name>Module1_Word</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>2</Elements>
				</ArrayInfo>
				<BitSize>32</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Module2_Word</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<BitSize>256</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{4CCE469D-0046-EC10-95A2-548A767E11E6}" AutoDeleteType="true">SPLC_TO_PLC</Name>
			<BitSize>184</BitSize>
			<SubItem>
				<Name>EV1_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>EV2_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>8</BitOffs>
			</SubItem>
			<SubItem>
				<Name>EV3_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>16</BitOffs>
			</SubItem>
			<SubItem>
				<Name>EV4_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>24</BitOffs>
			</SubItem>
			<SubItem>
				<Name>HTR_APC_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
			<SubItem>
				<Name>HTR_CHAMBER_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>40</BitOffs>
			</SubItem>
			<SubItem>
				<Name>HTR_FORLINE_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>48</BitOffs>
			</SubItem>
			<SubItem>
				<Name>HTR_GAS_BOX</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>56</BitOffs>
			</SubItem>
			<SubItem>
				<Name>HTR_GATE_VALVE</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>HTR_LID</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>72</BitOffs>
			</SubItem>
			<SubItem>
				<Name>PROCESS_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>80</BitOffs>
			</SubItem>
			<SubItem>
				<Name>DRY_PUMP_PW_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>88</BitOffs>
			</SubItem>
			<SubItem>
				<Name>TMP_PW_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>96</BitOffs>
			</SubItem>
			<SubItem>
				<Name>TRANSFER_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>104</BitOffs>
			</SubItem>
			<SubItem>
				<Name>VALVE_ACID_EXHAUST_OPEN_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>112</BitOffs>
			</SubItem>
			<SubItem>
				<Name>VALVE_CM_OPEN_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>120</BitOffs>
			</SubItem>
			<SubItem>
				<Name>VALVE_DRY_PUMP_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
			<SubItem>
				<Name>VALVE_TMP_BACK_OPEN_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>136</BitOffs>
			</SubItem>
			<SubItem>
				<Name>VALVE_APC_OPEN_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>144</BitOffs>
			</SubItem>
			<SubItem>
				<Name>WAFER_MOVING_IN_EN</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>152</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Status_Lid</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>160</BitOffs>
			</SubItem>
			<SubItem>
				<Name>SPLC_Com_err</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>168</BitOffs>
			</SubItem>
			<SubItem>
				<Name>SPLC_FB_Err</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>176</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{1C882642-1250-89C8-FA11-88DCF611E494}" AutoDeleteType="true">TMP_OUT</Name>
			<BitSize>8</BitSize>
			<SubItem>
				<Name>Turbo_Start_Stop</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<Comment><![CDATA[	1:START,0:STOP]]></Comment>
				<BitSize>1</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Turbo_Reset_Alarm</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<Comment><![CDATA[	1:RESET ALARM,0:NO ACTION]]></Comment>
				<BitSize>1</BitSize>
				<BitOffs>1</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Turbo_Low_Speed</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<Comment><![CDATA[	1:LOW SPEED MODE ON,0:OFF]]></Comment>
				<BitSize>1</BitSize>
				<BitOffs>2</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{5B571013-9455-2B99-1D51-44100AC13B76}" AutoDeleteType="true">CHAMBER_OUT</Name>
			<BitSize>416</BitSize>
			<SubItem>
				<Name>C07</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C07	EL2889 16DO]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C08</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C08	EL2889	16DO]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C09</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C09	EL2889	16DO]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>256</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C14</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C14	EL2904	4SDO]]></Comment>
				<BitSize>32</BitSize>
				<BitOffs>384</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{91F2E722-7B8A-6F83-84B9-B186D03E5908}" AutoDeleteType="true">IGS_OUT</Name>
			<BitSize>160</BitSize>
			<SubItem>
				<Name>C42</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C42	EL2889	16DO]]></Comment>
				<BitSize>128</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C43</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>4</Elements>
				</ArrayInfo>
				<Comment><![CDATA[C43	EL2904	4SDO]]></Comment>
				<BitSize>32</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{DAE4DD38-906D-204B-3E71-8EF0BAA432D4}" AutoDeleteType="true">STR_FCSP700_OUTPUT</Name>
			<BitSize>128</BitSize>
			<SubItem>
				<Name>Flow_SP</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Actuator_Control</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000002}">USINT</Type>
				<BitSize>8</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Actuator_Position_SP</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Ramp_Time</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type>
				<BitSize>32</BitSize>
				<BitOffs>96</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{C9C4839B-BDD4-C118-421B-F975F021D0CE}" IecBaseType="true" AutoDeleteType="true">ARRAY [1..10] OF STR_FCSP700_OUTPUT</Name>
			<BitSize>1280</BitSize>
			<BaseType GUID="{DAE4DD38-906D-204B-3E71-8EF0BAA432D4}">STR_FCSP700_OUTPUT</BaseType>
			<ArrayInfo>
				<LBound>1</LBound>
				<Elements>10</Elements>
			</ArrayInfo>
		</DataType>
		<DataType>
			<Name GUID="{738CEC62-1D6C-5E55-F900-AF5FE8B56B0C}" AutoDeleteType="true">STR_EX260_SEC</Name>
			<BitSize>32</BitSize>
			<SubItem>
				<Name>A</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000002}">USINT</Type>
				<BitSize>8</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>B</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000002}">USINT</Type>
				<BitSize>8</BitSize>
				<BitOffs>8</BitOffs>
			</SubItem>
			<SubItem>
				<Name>C</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000002}">USINT</Type>
				<BitSize>8</BitSize>
				<BitOffs>16</BitOffs>
			</SubItem>
			<SubItem>
				<Name>D</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000002}">USINT</Type>
				<BitSize>8</BitSize>
				<BitOffs>24</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{ED43F5E7-32BE-ECEC-9F38-45C089871ECE}" AutoDeleteType="true">CHILLER_OUT</Name>
			<BitSize>288</BitSize>
			<SubItem>
				<Name>Module1_Word</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>2</Elements>
				</ArrayInfo>
				<BitSize>32</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Module2_Word</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<ArrayInfo>
					<LBound>1</LBound>
					<Elements>16</Elements>
				</ArrayInfo>
				<BitSize>256</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{4A2E2CF0-C838-ADEE-3E0D-537AAFA6BC66}" AutoDeleteType="true">PLC_TO_SPLC</Name>
			<BitSize>96</BitSize>
			<SubItem>
				<Name>Lid_Temp_OK</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Chamber_Temp_OK</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>8</BitOffs>
			</SubItem>
			<SubItem>
				<Name>APC_Temp_OK</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>16</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Gate_Valve_Temp_OK</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>24</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Gas_Line_Temp_OK</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
			<SubItem>
				<Name>TMP_Interlock_OK</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>40</BitOffs>
			</SubItem>
			<SubItem>
				<Name>PS1_Interlock_OK</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>48</BitOffs>
			</SubItem>
			<SubItem>
				<Name>PS2_Interlock_OK</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>56</BitOffs>
			</SubItem>
			<SubItem>
				<Name>VG101_LOWER_10Torr</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>SPLC_ErrorAcknowledgement</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>72</BitOffs>
			</SubItem>
			<SubItem>
				<Name>SPLC_Restart</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>80</BitOffs>
			</SubItem>
			<SubItem>
				<Name>SPLC_Run</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type>
				<BitSize>8</BitSize>
				<BitOffs>88</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{1EE4D006-FDA1-E4B8-54B6-25D5D2B4F071}" AutoDeleteType="true">VAT_OUT</Name>
			<BitSize>224</BitSize>
			<SubItem>
				<Name>Target_Pressure</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Target_Position</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Pressure_Input_Digital_Sensor_1</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>64</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Pressure_Input_Digital_Sensor_2</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>96</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Control_Mode</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000003}">SINT</Type>
				<Comment><![CDATA[	0 = init 
															1 = homing 
															2 = position 
															3 = close 
															4 = open 
															5 = pressure 
															6 = hold 
															7 = learn 
															8 = interlock open 
															9 = interlock close 
															12 = power failure 
															13 = safety 
															14 = fatal error
														]]></Comment>
				<BitSize>8</BitSize>
				<BitOffs>128</BitOffs>
			</SubItem>
			<SubItem>
				<Name>General_Control_Setpoint</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<BitSize>16</BitSize>
				<BitOffs>144</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Pressure_Ramp_Time</Name>
				<Type GUID="{18071995-0000-0000-0000-00000000000D}">REAL</Type>
				<BitSize>32</BitSize>
				<BitOffs>160</BitOffs>
			</SubItem>
			<SubItem>
				<Name>PID_No</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000001}">BYTE</Type>
				<BitSize>8</BitSize>
				<BitOffs>192</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{18071995-0000-0000-0000-002000000004}" IecBaseType="true" BitType="true" AutoDeleteType="true" HideSubItems="true">ARRAY [0..3] OF BIT</Name>
			<BitSize>4</BitSize>
			<BaseType GUID="{18071995-0000-0000-0000-000000000010}">BIT</BaseType>
			<ArrayInfo>
				<LBound>0</LBound>
				<Elements>4</Elements>
			</ArrayInfo>
		</DataType>
		<DataType>
			<Name GUID="{18071995-0000-0000-0000-002000000007}" IecBaseType="true" BitType="true" AutoDeleteType="true" HideSubItems="true">ARRAY [0..6] OF BIT</Name>
			<BitSize>7</BitSize>
			<BaseType GUID="{18071995-0000-0000-0000-000000000010}">BIT</BaseType>
			<ArrayInfo>
				<LBound>0</LBound>
				<Elements>7</Elements>
			</ArrayInfo>
		</DataType>
		<DataType>
			<Name GUID="{18071995-0000-0000-0000-002000000001}" IecBaseType="true" BitType="true" AutoDeleteType="true" HideSubItems="true">ARRAY [0..0] OF BIT</Name>
			<BitSize>1</BitSize>
			<BaseType GUID="{18071995-0000-0000-0000-000000000010}">BIT</BaseType>
			<ArrayInfo>
				<LBound>0</LBound>
				<Elements>1</Elements>
			</ArrayInfo>
		</DataType>
		<DataType>
			<Name GUID="{18071995-0000-0000-0000-002000000005}" IecBaseType="true" BitType="true" AutoDeleteType="true" HideSubItems="true">ARRAY [0..4] OF BIT</Name>
			<BitSize>5</BitSize>
			<BaseType GUID="{18071995-0000-0000-0000-000000000010}">BIT</BaseType>
			<ArrayInfo>
				<LBound>0</LBound>
				<Elements>5</Elements>
			</ArrayInfo>
		</DataType>
		<DataType>
			<Name GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety" TcBaseType="true">FSOE_6</Name>
			<BitSize>48</BitSize>
			<SubItem>
				<Name>FSoE CMD</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000002}">USINT</Type>
				<BitSize>8</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>FSoE Data</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000032}">BITARR8</Type>
				<BitSize>8</BitSize>
				<BitOffs>8</BitOffs>
			</SubItem>
			<SubItem>
				<Name>FSoE CRC_0</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<BitSize>16</BitSize>
				<BitOffs>16</BitOffs>
			</SubItem>
			<SubItem>
				<Name>FSoE ConnID</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type>
				<BitSize>16</BitSize>
				<BitOffs>32</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{18071995-0000-0000-0000-002000000002}" IecBaseType="true" AutoDeleteType="true" HideSubItems="true">ARRAY [0..1] OF BIT</Name>
			<BitSize>2</BitSize>
			<BaseType GUID="{18071995-0000-0000-0000-000000000010}">BIT</BaseType>
			<ArrayInfo>
				<LBound>0</LBound>
				<Elements>2</Elements>
			</ArrayInfo>
		</DataType>
		<DataType>
			<Name GUID="{A3E15F99-32F4-8BDA-0778-18F7AA54AC31}" AutoDeleteType="true">INFODATA_1790266199</Name>
			<BitSize>8</BitSize>
			<SubItem>
				<Name>Input Safe Data InputChannel1</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data InputChannel2</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>1</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data InputChannel3</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>2</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data InputChannel4</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>3</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{00690516-A06B-2FAC-765F-330C43E46EC8}" AutoDeleteType="true">INFODATA_3187781607</Name>
			<BitSize>24</BitSize>
			<SubItem>
				<Name>Input Safe Data FSIN Module 1.Input</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>0</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 1.Module Fault</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>1</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 2.Input</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>2</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 2.Module Fault</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>3</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 3.Input</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>4</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 3.Module Fault</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>5</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 4.Input</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>6</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 4.Module Fault</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>7</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 5.Input</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>8</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 5.Module Fault</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>9</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 6.Input</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>10</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 6.Module Fault</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>11</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 7.Input</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>12</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 7.Module Fault</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>13</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 8.Input</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>14</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Input Safe Data FSIN Module 8.Module Fault</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>15</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Output Safe Data FSIN Module 1.ErrAck</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>16</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Output Safe Data FSIN Module 2.ErrAck</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>17</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Output Safe Data FSIN Module 3.ErrAck</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>18</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Output Safe Data FSIN Module 4.ErrAck</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>19</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Output Safe Data FSIN Module 5.ErrAck</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>20</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Output Safe Data FSIN Module 6.ErrAck</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>21</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Output Safe Data FSIN Module 7.ErrAck</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>22</BitOffs>
			</SubItem>
			<SubItem>
				<Name>Output Safe Data FSIN Module 8.ErrAck</Name>
				<Type GUID="{18071995-0000-0000-0000-000000000010}">BIT</Type>
				<BitSize>1</BitSize>
				<BitOffs>23</BitOffs>
			</SubItem>
		</DataType>
		<DataType>
			<Name GUID="{18071995-0000-0000-0000-002000000010}" IecBaseType="true" AutoDeleteType="true" HideSubItems="true">ARRAY [0..1] OF BYTE</Name>
			<BitSize>16</BitSize>
			<BaseType GUID="{18071995-0000-0000-0000-000000000001}">BYTE</BaseType>
			<ArrayInfo>
				<LBound>0</LBound>
				<Elements>2</Elements>
			</ArrayInfo>
		</DataType>
		<DataType>
			<Name GUID="{18071995-0000-0000-0000-002000000008}" IecBaseType="true" AutoDeleteType="true" HideSubItems="true">ARRAY [0..0] OF BYTE</Name>
			<BitSize>8</BitSize>
			<BaseType GUID="{18071995-0000-0000-0000-000000000001}">BYTE</BaseType>
			<ArrayInfo>
				<LBound>0</LBound>
				<Elements>1</Elements>
			</ArrayInfo>
		</DataType>
		<DataType>
			<Name GUID="{18071995-0000-0000-0000-00200000000C}" IecBaseType="true" AutoDeleteType="true" HideSubItems="true">ARRAY [0..11] OF BIT</Name>
			<BitSize>12</BitSize>
			<BaseType GUID="{18071995-0000-0000-0000-000000000010}">BIT</BaseType>
			<ArrayInfo>
				<LBound>0</LBound>
				<Elements>12</Elements>
			</ArrayInfo>
		</DataType>
	</DataTypes>
	<ImageDatas>
		<ImageData Id="1000">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</ImageData>
		<ImageData Id="1001">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</ImageData>
		<ImageData Id="1002">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</ImageData>
		<ImageData Id="1003">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</ImageData>
		<ImageData Id="1004">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</ImageData>
		<ImageData Id="1005">424dd6020000000000003600000028000000100000000e0000000100180000000000a0020000c40e0000c40e00000000000000000000ff00ffff00ffff00ffff00ffff00ffff00ff808080808080808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffff00ffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ff007fff007fff007fff007fff007fff007fffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ff007fff007fff007fff007fff007fff007fffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ff007fff007fff007fff007fff007fff007fffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ff007fff007fff007fff007fff007fff007fffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ff007fff007fff007fff007fff007fff007fffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ff007fff007fff007fff007fff007fff007fffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ff007fff007fff007fff007fff007fff007fffc0c0c0c0c0c0808080ff00ffff00ffff00ffff00ffff00ffff00ffff00ff</ImageData>
		<ImageData Id="1006">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</ImageData>
		<ImageData Id="1007">424dd6020000000000003600000028000000100000000e0000000100180000000000a0020000232e0000232e00000000000000000001000000000000000000000000000000000000000000000000ffffffffffffffffffffffffffffffffffffffffffffffff00000000ff0000ff0000ff0000ff0000ff0000ff00000000ffffffffffffffffffffffffffffffffffffffffffffffffffffff00000000ff0000ff0000ff0000ff00000000ffffffffffffffffffffffffffffffffffffffffffffffffffffffffffff00000000ff0000ff0000ff0000ff00000000ffffff000000ffffffffffffffffffffffffffffffffffffffffffffffffffffff00000000ff0000ff00000000ffffffffffff000000ffffffffffffffffffffffffffffffffffffffffffffffffffffffffffff000000000000ffffffffffffffffff000000000000000000000000000000000000000000ffffffffffffffffffffffff0000000000000000ff0000ff0000ff000000000000000000000000000000000000000000ffffffffffffffffffffffff0000000000000000ff0000ff0000ff000000000000000000000000000000000000000000ffffffffffffffffffffffff000000000000ffffffffffffffffff000000000000000000000000000000000000000000ffffffffffffffffff00000000ff0000ff00000000ffffffffffff000000ffffffffffff000000ffffffffffffffffffffffffffffff00000000ff0000ff0000ff0000ff00000000ffffff000000ffffffffffff000000000000000000000000ffffffffffff00000000ff0000ff0000ff0000ff00000000ffffffffffffffffffffffffffffffffffffffffffffffffffffff00000000ff0000ff0000ff0000ff0000ff0000ff00000000ffffffffffffffffffffffffffffffffffffffffffffffff000000000000000000000000000000000000000000000000ffffffffffffffffffffffffffffffffffffffffffffffff</ImageData>
		<ImageData Id="1008">424de6000000000000007600000028000000100000000e000000010004000000000070000000ea0e0000ea0e000000000000000000000000000000008000008000000080800080000000800080008080000080808000c0c0c0000000ff0000ff000000ffff00ff000000ff00ff00ffff0000ffffff00777f7f7f77f77f777fff7f7f7ff77f77777f878f77f77f777fff7f7ff7f7ff77777f7f7f77f77f77fffffffffffffffff8888888888888888877777777777777777887888888888777788786ccccc66778788786ccccc6677f78878666666687887ff7fffffffff7ff77777777777777</ImageData>
		<ImageData Id="1009">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</ImageData>
		<ImageData Id="1010">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</ImageData>
		<ImageData Id="1011">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</ImageData>
		<ImageData Id="1012">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</ImageData>
	</ImageDatas>
	<Project ProjectGUID="{26C3B673-D5F7-49B2-9750-A4FE6FF4F84B}" TargetNetId="192.168.250.30.1.1" Target64Bit="true" ShowHideConfigurations="#x6">
		<System>
			<Tasks>
				<Task Id="3" Priority="20" CycleTime="100000" AmsPort="350" AdtTasks="true">
					<Name>PlcTask</Name>
				</Task>
			</Tasks>
		</System>
		<Plc>
			<Project GUID="{145271F0-5335-4C5D-8B53-34FD6DA6AC1B}" Name="PLC" PrjFilePath="PLC\PLC.plcproj" TmcFilePath="PLC\PLC.tmc" ReloadTmc="true" AmsPort="851" FileArchiveSettings="#x000e" SymbolicMapping="true">
				<Instance Id="#x08502000" TcSmClass="TComPlcObjDef" KeepUnrestoredLinks="1" TmcPath="PLC\PLC.tmc" TmcHash="{B396BF8C-3616-01DA-FA27-30320C91E68C}">
					<Name>PLC Instance</Name>
					<CLSID ClassFactory="TcPlc30">{08500001-0000-0000-F000-000000000064}</CLSID>
					<Vars VarGrpType="1">
						<Name>PlcTask Inputs</Name>
						<Var>
							<Name>ECC.CHAMBER_IN</Name>
							<Comment><![CDATA[HW_IO]]></Comment>
							<Type GUID="{169E946E-3750-3DBC-621A-F28304512880}">CHAMBER_IN</Type>
						</Var>
						<Var>
							<Name>ECC.IGS_IN</Name>
							<Type GUID="{EDE28A60-CBD4-9C10-F9BF-BA7E6FABA4FD}">IGS_IN</Type>
						</Var>
						<Var>
							<Name>ECC.MFC_PV</Name>
							<Comment><![CDATA[MFC]]></Comment>
							<Type GUID="{23275CD4-2CAD-3AEB-1D74-738CE12168AA}">ARRAY [1..10] OF STR_FCSP700_INPUT</Type>
						</Var>
						<Var>
							<Name>ECC.APC_PV</Name>
							<Comment><![CDATA[APC VALVE]]></Comment>
							<Type GUID="{A58AEC95-DF23-F151-16C5-0D501B1DFCE9}">VAT_IN</Type>
						</Var>
						<Var>
							<Name>ECC.TURBO_PV</Name>
							<Type GUID="{E5C20BEC-ED66-6119-4621-55709C9256F1}">TMP_IN</Type>
						</Var>
						<Var>
							<Name>ECC.VG103_PV</Name>
							<Comment><![CDATA[CDG PG/VG]]></Comment>
							<Type GUID="{A0D599C1-68F7-9056-2857-1063C3F65307}">STR_CDG200D</Type>
						</Var>
						<Var>
							<Name>ECC.VG101_PV</Name>
							<Type GUID="{A0D599C1-68F7-9056-2857-1063C3F65307}">STR_CDG200D</Type>
						</Var>
						<Var>
							<Name>ECC.VG102_PV</Name>
							<Type GUID="{A0D599C1-68F7-9056-2857-1063C3F65307}">STR_CDG200D</Type>
						</Var>
						<Var>
							<Name>ECC.BA1_PV</Name>
							<Type GUID="{1F26C7D6-3F6B-7D42-FC93-15720AE13FD2}">STR_BPG400</Type>
						</Var>
						<Var>
							<Name>ECC.VG104_PV</Name>
							<Type GUID="{A0D599C1-68F7-9056-2857-1063C3F65307}">STR_CDG200D</Type>
						</Var>
						<Var>
							<Name>ECC.CHILLER1_PV</Name>
							<Comment><![CDATA[CHILLER]]></Comment>
							<Type GUID="{B63B4428-D21A-594A-D385-DAF494B3FE81}">CHILLER_IN</Type>
						</Var>
						<Var>
							<Name>ECC.CHILLER2_PV</Name>
							<Type GUID="{B63B4428-D21A-594A-D385-DAF494B3FE81}">CHILLER_IN</Type>
						</Var>
						<Var>
							<Name>GV_IL.SPLC_TO_PLC</Name>
							<Type GUID="{4CCE469D-0046-EC10-95A2-548A767E11E6}">SPLC_TO_PLC</Type>
						</Var>
					</Vars>
					<Vars VarGrpType="2" AreaNo="1">
						<Name>PlcTask Outputs</Name>
						<Var>
							<Name>ECC.TURBO_SV</Name>
							<Comment><![CDATA[TMP]]></Comment>
							<Type GUID="{1C882642-1250-89C8-FA11-88DCF611E494}">TMP_OUT</Type>
						</Var>
						<Var>
							<Name>ECC.CHAMBER_OUT</Name>
							<Type GUID="{5B571013-9455-2B99-1D51-44100AC13B76}">CHAMBER_OUT</Type>
						</Var>
						<Var>
							<Name>ECC.IGS_OUT</Name>
							<Type GUID="{91F2E722-7B8A-6F83-84B9-B186D03E5908}">IGS_OUT</Type>
						</Var>
						<Var>
							<Name>ECC.MFC_SV</Name>
							<Type GUID="{C9C4839B-BDD4-C118-421B-F975F021D0CE}">ARRAY [1..10] OF STR_FCSP700_OUTPUT</Type>
						</Var>
						<Var>
							<Name>ECC.EV1</Name>
							<Comment><![CDATA[EV]]></Comment>
							<Type GUID="{738CEC62-1D6C-5E55-F900-AF5FE8B56B0C}">STR_EX260_SEC</Type>
						</Var>
						<Var>
							<Name>ECC.EV2</Name>
							<Type GUID="{738CEC62-1D6C-5E55-F900-AF5FE8B56B0C}">STR_EX260_SEC</Type>
						</Var>
						<Var>
							<Name>ECC.EV3</Name>
							<Type GUID="{738CEC62-1D6C-5E55-F900-AF5FE8B56B0C}">STR_EX260_SEC</Type>
						</Var>
						<Var>
							<Name>ECC.EV4</Name>
							<Type GUID="{738CEC62-1D6C-5E55-F900-AF5FE8B56B0C}">STR_EX260_SEC</Type>
						</Var>
						<Var>
							<Name>ECC.CHILLER1_SV</Name>
							<Type GUID="{ED43F5E7-32BE-ECEC-9F38-45C089871ECE}">CHILLER_OUT</Type>
						</Var>
						<Var>
							<Name>ECC.CHILLER2_SV</Name>
							<Type GUID="{ED43F5E7-32BE-ECEC-9F38-45C089871ECE}">CHILLER_OUT</Type>
						</Var>
						<Var>
							<Name>GV_IL.PLC_TO_SPLC</Name>
							<Type GUID="{4A2E2CF0-C838-ADEE-3E0D-537AAFA6BC66}">PLC_TO_SPLC</Type>
						</Var>
						<Var>
							<Name>ECC.APC_SV</Name>
							<Type GUID="{1EE4D006-FDA1-E4B8-54B6-25D5D2B4F071}">VAT_OUT</Type>
						</Var>
					</Vars>
					<UnrestoredVarLinks ImportTime="2025-03-11T11:49:05">
						<OwnerA Name="InputDst" Prefix="TIPC^PLC^PLC Instance" Type="1">
							<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C11 (EL1918)">
								<Link VarA="GV_IL.EV1_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 10" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.EV2_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 19" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.EV3_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 20" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.EV4_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 18" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.HTR_APC_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 17" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.HTR_CHAMBER_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 15" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.HTR_FORLINE_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 14" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.HTR_GAS_BOX" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 13" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.HTR_GATE_VALVE" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 12" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.HTR_LID" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 11" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.PROCESS_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 28" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.SPLC_Com_err" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 42" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.SPLC_FB_Err" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 43" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.TMP_PW_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 27" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.TRANSFER_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 26" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.VALVE_ACID_EXHAUST_OPEN_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 25" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.VALVE_APC_OPEN_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 21" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.VALVE_CM_OPEN_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 24" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.VALVE_DRY_PUMP_OPEN_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 23" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.VALVE_TMP_BACK_OPEN_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 22" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.WAFER_MOVING_IN_EN" TypeA="BOOL" InOutA="0" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 16" Size="1" RestoreInfo="ANotFound"/>
							</OwnerB>
						</OwnerA>
						<OwnerA Name="OutputSrc" Prefix="TIPC^PLC^PLC Instance" Type="2">
							<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C11 (EL1918)">
								<Link VarA="GV_IL.APC_Temp_OK" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 31" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.Chamber_Temp_OK" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 30" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.Gas_Line_Temp_OK" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 33" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.Gate_Valve_Temp_OK" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 32" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.Lid_Temp_OK" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 29" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.PS1_Interlock_OK" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 35" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.PS2_Interlock_OK" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 36" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.SPLC_ErrorAcknowledgement" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 1" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.SPLC_Restart" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 41" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.SPLC_Run" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 2" Size="1" RestoreInfo="ANotFound"/>
								<Link VarA="GV_IL.TMP_Interlock_OK" TypeA="BOOL" InOutA="1" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardOutputs^Standard In Var 34" Size="1" RestoreInfo="ANotFound"/>
							</OwnerB>
						</OwnerA>
					</UnrestoredVarLinks>
					<UnrestoredVarLinks ImportTime="2025-03-11T13:35:11">
						<OwnerA Name="InputDst" Prefix="TIPC^PLC^PLC Instance" Type="1">
							<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C11 (EL1918)">
								<Link VarA="GV_IL.SPLC_TO_PLC^VALVE_DRY_PUMP_OPEN_EN" TypeA="BOOL" InOutA="0" ParentTypeA="SPLC_TO_PLC" GuidA="{18071995-0000-0000-0000-000000000030}" VarB="StandardInputs^Standard Out Var 27" Size="1" RestoreInfo="ANotFound"/>
							</OwnerB>
						</OwnerA>
					</UnrestoredVarLinks>
					<Contexts>
						<Context>
							<Id>0</Id>
							<Name>PlcTask</Name>
							<ManualConfig>
								<OTCID>#x02010030</OTCID>
							</ManualConfig>
							<Priority>20</Priority>
							<CycleTime>10000000</CycleTime>
						</Context>
					</Contexts>
					<TaskPouOids>
						<TaskPouOid Prio="20" OTCID="#x08502001"/>
					</TaskPouOids>
				</Instance>
			</Project>
		</Plc>
		<Safety>
			<Project GUID="{E1220E95-CF25-4D4B-96F6-42CFFB6144D8}" Name="COR_SPLC" PrjFilePath="COR_SPLC\COR_SPLC.splcproj" TmcFilePath="COR_SPLC\COR_SPLC.tmc" GeneralArchiveSettings="#x000f" TargetArchiveSettings="#x0007" FileArchiveSettings="#x000e">
				<Instance Id="#x01010010" KeepUnrestoredLinks="2">
					<Name>COR_SPLC Instance</Name>
					<TmcDesc GUID="{72A6D5B8-E98C-4604-8B90-09D1F8AB38A9}">
						<Name>Safety</Name>
						<InitSequence>PO</InitSequence>
						<Contexts>
							<Context>
								<Id>1</Id>
								<Name>Default</Name>
							</Context>
						</Contexts>
					</TmcDesc>
				</Instance>
			</Project>
		</Safety>
		<Io>
			<Device Id="1" DevType="111" DevFlags="#x0003" AmsPort="28673" AmsNetId="10.4.6.84.2.1" RemoteName="Device 1 (EtherCAT)" InfoImageId="2">
				<Name>Device 1 (EtherCAT)</Name>
				<AddressInfo>
					<Ccat>
						<Address>-1855979520</Address>
						<Offset>131072</Offset>
						<Size>8192</Size>
						<BaseAddr>0</BaseAddr>
						<BusNo>3</BusNo>
						<SlotNo>0</SlotNo>
						<VendorId>5612</VendorId>
						<DeviceId>20480</DeviceId>
						<Dma>
							<Address>0</Address>
							<Offset>4096</Offset>
							<Size>256</Size>
							<BaseAddr>2</BaseAddr>
							<RxChn>0</RxChn>
							<TxChn>1</TxChn>
						</Dma>
						<Identification>
							<Value>498694182</Value>
							<Version>1</Version>
							<Size>256</Size>
						</Identification>
					</Ccat>
				</AddressInfo>
				<Image Id="1" AddrType="9" ImageType="3">
					<Name>Image</Name>
				</Image>
				<Box Id="1" BoxType="9099">
					<Name>CPU (EK1200)</Name>
					<ImageId>1000</ImageId>
					<EtherCAT PdiType="#x0100" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x04b02c52" RevisionNo="#x00001388" InfoDataState="false" PortPhys="49" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EK1200-5000 EtherCAT Power supply (2A E-Bus)" Desc="EK1200" PortABoxInfo="#x00ffffff"/>
					<Box Id="2" BoxType="9099">
						<Name>C02 (EL1889)</Name>
						<ImageId>7</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x07613052" RevisionNo="#x00130000" RepeatSupport="true" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL1889 16Ch. Dig. Input 24V, 3ms, negative" Desc="EL1889" PortABoxInfo="#x01000001">
							<SyncMan>001002000000010004000000000000000200001000010000</SyncMan>
							<Fmmu>0000000000000000001000010100000002000000000000000000000000000000</Fmmu>
							<Pdo Name="Channel 1" Index="#x1a00" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 2" Index="#x1a01" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 3" Index="#x1a02" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 4" Index="#x1a03" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 5" Index="#x1a04" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 6" Index="#x1a05" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 7" Index="#x1a06" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 8" Index="#x1a07" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 9" Index="#x1a08" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6080" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 10" Index="#x1a09" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6090" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 11" Index="#x1a0a" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60a0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 12" Index="#x1a0b" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60b0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 13" Index="#x1a0c" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60c0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 14" Index="#x1a0d" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60d0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 15" Index="#x1a0e" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60e0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 16" Index="#x1a0f" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60f0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="3" BoxType="9099">
						<Name>C03 (EL1889)</Name>
						<ImageId>7</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x07613052" RevisionNo="#x00130000" RepeatSupport="true" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL1889 16Ch. Dig. Input 24V, 3ms, negative" Desc="EL1889" PortABoxInfo="#x01000002">
							<SyncMan>001002000000010004000000000000000200001000010000</SyncMan>
							<Fmmu>0000000000000000001000010100000002000000000000000000000000000000</Fmmu>
							<Pdo Name="Channel 1" Index="#x1a00" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 2" Index="#x1a01" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 3" Index="#x1a02" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 4" Index="#x1a03" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 5" Index="#x1a04" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 6" Index="#x1a05" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 7" Index="#x1a06" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 8" Index="#x1a07" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 9" Index="#x1a08" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6080" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 10" Index="#x1a09" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6090" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 11" Index="#x1a0a" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60a0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 12" Index="#x1a0b" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60b0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 13" Index="#x1a0c" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60c0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 14" Index="#x1a0d" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60d0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 15" Index="#x1a0e" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60e0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 16" Index="#x1a0f" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60f0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="4" BoxType="9099" BoxFlags="#x00000020">
						<Name>C04 (EL3318)</Name>
						<ImageId>1001</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x0cf63052" RevisionNo="#x00160000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL3318 8Ch. Ana Input Thermocouple (TC)" Desc="EL3318" PortABoxInfo="#x01000003">
							<SyncMan>001080002600010001000000800080008000001026010000</SyncMan>
							<SyncMan>801080002200010002000000800080008000801022010000</SyncMan>
							<SyncMan>001100002400000003000000000000000000001124010000</SyncMan>
							<SyncMan>801120002000010004000000000000002000801120010000</SyncMan>
							<Fmmu>0000000000000000000000020000000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000801100010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<Pdo Name="TC Channel 1" Index="#x1a00" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1800" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 2" Index="#x1a01" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6010" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6010" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6010" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1801" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 3" Index="#x1a02" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6020" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6020" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6020" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1802" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 4" Index="#x1a03" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6030" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6030" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6030" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1803" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 5" Index="#x1a04" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6040" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6040" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6040" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1804" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6040" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 6" Index="#x1a05" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6050" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6050" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6050" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1805" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6050" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 7" Index="#x1a06" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6060" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6060" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6060" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1806" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6060" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 8" Index="#x1a07" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6070" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6070" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6070" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1807" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6070" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 1" Index="#x1600" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7000" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 2" Index="#x1601" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7010" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 3" Index="#x1602" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7020" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 4" Index="#x1603" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7030" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 5" Index="#x1604" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7040" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 6" Index="#x1605" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7050" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 7" Index="#x1606" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7060" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 8" Index="#x1607" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7070" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
						</EtherCAT>
					</Box>
					<Box Id="5" BoxType="9099" BoxFlags="#x00000020">
						<Name>C05 (EL3318)</Name>
						<ImageId>1001</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x0cf63052" RevisionNo="#x00160000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL3318 8Ch. Ana Input Thermocouple (TC)" Desc="EL3318" PortABoxInfo="#x01000004">
							<SyncMan>001080002600010001000000800080008000001026010000</SyncMan>
							<SyncMan>801080002200010002000000800080008000801022010000</SyncMan>
							<SyncMan>001100002400000003000000000000000000001124010000</SyncMan>
							<SyncMan>801120002000010004000000000000002000801120010000</SyncMan>
							<Fmmu>0000000000000000000000020000000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000801100010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<Pdo Name="TC Channel 1" Index="#x1a00" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1800" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 2" Index="#x1a01" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6010" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6010" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6010" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1801" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 3" Index="#x1a02" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6020" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6020" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6020" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1802" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 4" Index="#x1a03" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6030" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6030" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6030" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1803" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 5" Index="#x1a04" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6040" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6040" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6040" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1804" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6040" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 6" Index="#x1a05" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6050" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6050" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6050" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1805" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6050" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 7" Index="#x1a06" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6060" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6060" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6060" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1806" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6060" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 8" Index="#x1a07" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6070" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6070" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6070" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1807" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6070" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 1" Index="#x1600" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7000" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 2" Index="#x1601" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7010" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 3" Index="#x1602" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7020" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 4" Index="#x1603" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7030" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 5" Index="#x1604" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7040" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 6" Index="#x1605" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7050" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 7" Index="#x1606" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7060" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 8" Index="#x1607" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7070" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
						</EtherCAT>
					</Box>
					<Box Id="6" BoxType="9099" BoxFlags="#x00000020">
						<Name>C06 (EL3164)</Name>
						<ImageId>1001</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0405" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x0c5c3052" RevisionNo="#x00140000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL3164 4Ch. Ana. Input 0-10V" Desc="EL3164" PortABoxInfo="#x01000005">
							<SyncMan>001080002600010001000000800080008000001026010000</SyncMan>
							<SyncMan>801080002200010002000000800080008000801022010000</SyncMan>
							<SyncMan>001100000400000003000000000000000000001104000000</SyncMan>
							<SyncMan>801110002000010004000000000000001000801120010000</SyncMan>
							<Fmmu>0000000000000000801100010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<DcMode>53796e6368726f6e00000000000000004672656552756e2f534d2d53796e6368726f6e00000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443000000000000000000000000000044432d53796e6368726f6e0000000000000000000000000000000000000000000000000000000000a8610000000000070100000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443494e00000000000000000000000044432d53796e6368726f6e2028696e7075742062617365642900000000000000000000006079feffa8610000000000070100000000000000000001000000000000000000000000000000000000000000</DcMode>
							<Pdo Name="AI Standard Channel 1" Index="#x1a00" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a01</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6000" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6000" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6000" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6000" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 1" Index="#x1a01" Flags="#x0010">
								<ExcludePdo>#x1a00</ExcludePdo>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 2" Index="#x1a02" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a03</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6010" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6010" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6010" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6010" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6010" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6010" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6010" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 2" Index="#x1a03" Flags="#x0010">
								<ExcludePdo>#x1a02</ExcludePdo>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 3" Index="#x1a04" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a05</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6020" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6020" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6020" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6020" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6020" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6020" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6020" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 3" Index="#x1a05" Flags="#x0010">
								<ExcludePdo>#x1a04</ExcludePdo>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 4" Index="#x1a06" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a07</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6030" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6030" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6030" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6030" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6030" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6030" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6030" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 4" Index="#x1a07" Flags="#x0010">
								<ExcludePdo>#x1a06</ExcludePdo>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
						</EtherCAT>
					</Box>
					<Box Id="7" BoxType="9099">
						<Name>C07 (EL2889)</Name>
						<ImageId>1002</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x0b493052" RevisionNo="#x00120000" RepeatSupport="true" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL2889 16Ch. Dig. Output 24V, 0.5A, negative" Desc="EL2889" PortABoxInfo="#x01000006">
							<SyncMan>000f01004400010003000000000000000100000f44090000</SyncMan>
							<SyncMan>010f01004400010003000000000000000100010f44090000</SyncMan>
							<Fmmu>0000000000000000000f00020100000001000000000000000000000000000000</Fmmu>
							<Pdo Name="Channel 1" Index="#x1600" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 2" Index="#x1601" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 3" Index="#x1602" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 4" Index="#x1603" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 5" Index="#x1604" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 6" Index="#x1605" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 7" Index="#x1606" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 8" Index="#x1607" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 9" Index="#x1608" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x7080" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 10" Index="#x1609" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x7090" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 11" Index="#x160a" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70a0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 12" Index="#x160b" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70b0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 13" Index="#x160c" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70c0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 14" Index="#x160d" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70d0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 15" Index="#x160e" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70e0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 16" Index="#x160f" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70f0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="8" BoxType="9099">
						<Name>C08 (EL2889)</Name>
						<ImageId>1002</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x0b493052" RevisionNo="#x00120000" RepeatSupport="true" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL2889 16Ch. Dig. Output 24V, 0.5A, negative" Desc="EL2889" PortABoxInfo="#x01000007">
							<SyncMan>000f01004400010003000000000000000100000f44090000</SyncMan>
							<SyncMan>010f01004400010003000000000000000100010f44090000</SyncMan>
							<Fmmu>0000000000000000000f00020100000001000000000000000000000000000000</Fmmu>
							<Pdo Name="Channel 1" Index="#x1600" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 2" Index="#x1601" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 3" Index="#x1602" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 4" Index="#x1603" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 5" Index="#x1604" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 6" Index="#x1605" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 7" Index="#x1606" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 8" Index="#x1607" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 9" Index="#x1608" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x7080" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 10" Index="#x1609" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x7090" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 11" Index="#x160a" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70a0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 12" Index="#x160b" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70b0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 13" Index="#x160c" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70c0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 14" Index="#x160d" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70d0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 15" Index="#x160e" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70e0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 16" Index="#x160f" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70f0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="9" BoxType="9099">
						<Name>C09 (EL2889)</Name>
						<ImageId>1002</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x0b493052" RevisionNo="#x00120000" RepeatSupport="true" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL2889 16Ch. Dig. Output 24V, 0.5A, negative" Desc="EL2889" PortABoxInfo="#x01000008">
							<SyncMan>000f01004400010003000000000000000100000f44090000</SyncMan>
							<SyncMan>010f01004400010003000000000000000100010f44090000</SyncMan>
							<Fmmu>0000000000000000000f00020100000001000000000000000000000000000000</Fmmu>
							<Pdo Name="Channel 1" Index="#x1600" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 2" Index="#x1601" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 3" Index="#x1602" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 4" Index="#x1603" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 5" Index="#x1604" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 6" Index="#x1605" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 7" Index="#x1606" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 8" Index="#x1607" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 9" Index="#x1608" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x7080" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 10" Index="#x1609" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x7090" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 11" Index="#x160a" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70a0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 12" Index="#x160b" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70b0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 13" Index="#x160c" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70c0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 14" Index="#x160d" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70d0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 15" Index="#x160e" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70e0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 16" Index="#x160f" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70f0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="10" BoxType="9099">
						<Name>C10 (EL9410)</Name>
						<ImageId>1003</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x24c23052" RevisionNo="#x00110000" RepeatSupport="true" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL9410 E-Bus Power Supplier  (Diagnostics)" Desc="EL9410" PortABoxInfo="#x01000009">
							<SyncMan>001001000000010004000000000000000000001000000000</SyncMan>
							<Fmmu>0000000000000000001000010100000002000000000000000000000000000000</Fmmu>
							<Pdo Name="Status Us" Index="#x1a00" Flags="#x0011" SyncMan="0">
								<Entry Name="Undervoltage" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Status Up" Index="#x1a01" Flags="#x0011" SyncMan="0">
								<Entry Name="Undervoltage" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="11" BoxType="9099" BoxFlags="#x00000020">
						<Name>C11 (EL1918)</Name>
						<ImageId>1004</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="3" FoeType="1" VendorId="#x00000002" ProductCode="#x077e3052" RevisionNo="#x00110000" InfoDataAddr="true" RepeatSupport="true" TimeoutStateChange1="5000" TimeoutMailbox2="10000" TComSupport="true" PortPhys="51" DebugMemory="8" SafetyLogicSupported="true" MaxSlotCount="2" Type="EL1918, 8Ch. Safety Input 24V, TwinSAFE" Desc="EL1918" PortABoxInfo="#x0100000a">
							<SyncMan>001000012600010001000000000100010001001026010000</SyncMan>
							<SyncMan>001100012200010002000000000100010001001122010000</SyncMan>
							<SyncMan>001228002400010003000000000000000800001224010000</SyncMan>
							<SyncMan>001d2d002000010004000000000000000900001d20010000</SyncMan>
							<SyncMan>002e00002400000003000000000000000000002e24000000</SyncMan>
							<SyncMan>002f00002000000004000000000000000000002f20000000</SyncMan>
							<Fmmu>0000000000000000001200020100000001000000060000000200000000000000</Fmmu>
							<Fmmu>0000000000000000001d00010100000002000000060000000300000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000000000020000000001000000060000000400010000000000</Fmmu>
							<Fmmu>0000000000000000000000010000000002000000060000000500010000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<SuName>SPLC</SuName>
							<SuName></SuName>
							<SuTask>#x00000000</SuTask>
							<SuTask>#x00000000</SuTask>
							<MBoxUserCmdData>004003000a0000001f000000000000000000000000000000000000000000000020f31005020000000100456e61626c6520446961674d65737361676520617320656d657267656e637900</MBoxUserCmdData>
							<Pdo Name="ConnectionInputs" Index="#x1a00" Flags="#x2011" SyncMan="3">
								<Entry Name="Message_4 TxPDO" Index="#x7000" Sub="#x01">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_5 TxPDO" Index="#x7000" Sub="#x02">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_6 TxPDO" Index="#x7000" Sub="#x03">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_7 TxPDO" Index="#x7000" Sub="#x04">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_8 TxPDO" Index="#x7000" Sub="#x05">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_9 TxPDO" Index="#x7000" Sub="#x06">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
							</Pdo>
							<Pdo Name="ConnectionOutputs" Index="#x1600" InOut="1" Flags="#x2011" SyncMan="2">
								<Entry Name="Message_4 RxPDO" Index="#x6000" Sub="#x01">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_5 RxPDO" Index="#x6000" Sub="#x02">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_6 RxPDO" Index="#x6000" Sub="#x03">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_7 RxPDO" Index="#x6000" Sub="#x04">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_8 RxPDO" Index="#x6000" Sub="#x05">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
								<Entry Name="Message_9 RxPDO" Index="#x6000" Sub="#x06">
									<Type GUID="{2438F91B-E188-4ED7-8594-54354F9ED6A4}" Namespace="Safety">FSOE_6</Type>
								</Entry>
							</Pdo>
							<Pdo Name="StandardInputs" Index="#x1bf0" Flags="#x2011" SyncMan="3">
								<Entry Name="Standard Out Var 10" Index="#x7000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 11" Index="#x7000" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 12" Index="#x7000" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 13" Index="#x7000" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 14" Index="#x7000" Sub="#x05">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 15" Index="#x7000" Sub="#x06">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 16" Index="#x7000" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 17" Index="#x7000" Sub="#x08">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 18" Index="#x7000" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 19" Index="#x7000" Sub="#x0a">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 20" Index="#x7000" Sub="#x0b">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 21" Index="#x7000" Sub="#x0c">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 22" Index="#x7000" Sub="#x0d">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 24" Index="#x7000" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 25" Index="#x7000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 26" Index="#x7000" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 27" Index="#x7000" Sub="#x11">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 28" Index="#x7000" Sub="#x12">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 42" Index="#x7000" Sub="#x13">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 43" Index="#x7000" Sub="#x14">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 44" Index="#x7000" Sub="#x15">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard Out Var 46" Index="#x7000" Sub="#x16">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000002}">ARRAY [0..1] OF BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="StandardOutputs" Index="#x17f0" InOut="1" Flags="#x2011" SyncMan="2">
								<Entry Name="Standard In Var 1" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 2" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 29" Index="#x6000" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 30" Index="#x6000" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 31" Index="#x6000" Sub="#x05">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 32" Index="#x6000" Sub="#x06">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 33" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 34" Index="#x6000" Sub="#x08">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 35" Index="#x6000" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 36" Index="#x6000" Sub="#x0a">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 41" Index="#x6000" Sub="#x0b">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Standard In Var 45" Index="#x6000" Sub="#x0c">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Connection Info Data" Index="#x1bf9" Flags="#x2011" SyncMan="3">
								<Entry Name="Message_8 Info Data" Index="#x7000" Sub="#x01">
									<Type GUID="{A3E15F99-32F4-8BDA-0778-18F7AA54AC31}">INFODATA_1790266199</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Device Info Data" Index="#x1bfe" Flags="#x2011" SyncMan="3">
								<Entry Name="Internal I/O" Index="#x7000" Sub="#x01">
									<Type GUID="{00690516-A06B-2FAC-765F-330C43E46EC8}">INFODATA_3187781607</Type>
								</Entry>
							</Pdo>
							<Pdo Name="FSLOGIC Inputs" Index="#x1bff" Flags="#x0091" SyncMan="3">
								<Entry Name="Safe Logic State" BitLen="8" Index="#xf100" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="Cycle Counter" BitLen="8" Index="#xf100" Sub="#x02">
									<Type>USINT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="FSLOGIC Outputs" Index="#x17ff" InOut="1" Flags="#x0091" SyncMan="2">
								<Entry BitLen="16">
									<Type GUID="{18071995-0000-0000-0000-002000000010}">ARRAY [0..1] OF BYTE</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="12522377"/>
							<CoeProfile ProfileNo="12522377"/>
							<CoeProfile ProfileNo="12522377"/>
							<CoeProfile ProfileNo="12522377"/>
							<CoeProfile ProfileNo="12522377"/>
							<CoeProfile ProfileNo="12522377"/>
							<CoeProfile ProfileNo="12522377"/>
							<CoeProfile ProfileNo="12522377"/>
							<CoeProfile ProfileNo="45290377"/>
							<Slot Name="FSOE-Slot">
								<SlotData>0000000001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>17827710</ModuleIdent>
							</Slot>
							<Slot Name="FSLOGIC">
								<SlotData>0000010001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>691</ModuleIdent>
								<Module Id="#x03090003" Type="FSLOGIC" Class="FSLOGIC">
									<Name>Module 2 (FSLOGIC)</Name>
									<ImageId>409</ImageId>
									<ModuleData>02000000b3020000000004000000000000000000000000000000000000000000</ModuleData>
									<PdoIndex>7167</PdoIndex>
									<PdoIndex>6143</PdoIndex>
								</Module>
							</Slot>
						</EtherCAT>
					</Box>
					<Box Id="12" BoxType="9099" BoxFlags="#x00000020">
						<Name>C12 (EL1904)</Name>
						<ImageId>118</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x07703052" RevisionNo="#x00130000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="1" Type="EL1904, 4 Ch. Safety Input 24V, TwinSAFE" Desc="EL1904" PortABoxInfo="#x0100000b">
							<SyncMan>001000012600010001000000400000010001001026010000</SyncMan>
							<SyncMan>001100012200010002000000400000010001001122010000</SyncMan>
							<SyncMan>001206002400010003000000000000000600001224010000</SyncMan>
							<SyncMan>001906002000010004000000000000000600001920010000</SyncMan>
							<Fmmu>0000000000000000001200020100000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000001900010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<SuName>SPLC</SuName>
							<Pdo Name="TxPDO" Index="#x1a00" Flags="#x0090" SyncMan="3">
								<Entry Name="FSOE__FSoE Slave CMD" Index="#x6000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel1" Index="#x6001" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel2" Index="#x6001" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel3" Index="#x6001" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel4" Index="#x6001" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave CRC_0" Index="#x6000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave ConnID" Index="#x6000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="RxPDO" Index="#x1600" InOut="1" Flags="#x0090" SyncMan="2">
								<Entry Name="FSOE__FSoE Master CMD" Index="#x7000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000008}">ARRAY [0..0] OF BYTE</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master CRC_0" Index="#x7000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master ConnID" Index="#x7000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="5001"/>
							<Slot Name="">
								<SlotData>0000010001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>190</ModuleIdent>
								<Module Id="#x03090004" Type="FSOES" Class="190">
									<Name>Module 1 (FSOES)</Name>
									<ImageId>118</ImageId>
									<ModuleData>02000000be00000000000c000000000000000000000000000000000000000000</ModuleData>
									<PdoIndex>6656</PdoIndex>
									<PdoIndex>5632</PdoIndex>
									<CoeProfile ProfileNo="#x00001389"/>
								</Module>
							</Slot>
						</EtherCAT>
					</Box>
					<Box Id="13" BoxType="9099" BoxFlags="#x00000020">
						<Name>C13 (EL1904)</Name>
						<ImageId>118</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x07703052" RevisionNo="#x00130000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="1" Type="EL1904, 4 Ch. Safety Input 24V, TwinSAFE" Desc="EL1904" PortABoxInfo="#x0100000c">
							<SyncMan>001000012600010001000000400000010001001026010000</SyncMan>
							<SyncMan>001100012200010002000000400000010001001122010000</SyncMan>
							<SyncMan>001206002400010003000000000000000600001224010000</SyncMan>
							<SyncMan>001906002000010004000000000000000600001920010000</SyncMan>
							<Fmmu>0000000000000000001200020100000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000001900010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<SuName>SPLC</SuName>
							<Pdo Name="TxPDO" Index="#x1a00" Flags="#x0090" SyncMan="3">
								<Entry Name="FSOE__FSoE Slave CMD" Index="#x6000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel1" Index="#x6001" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel2" Index="#x6001" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel3" Index="#x6001" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel4" Index="#x6001" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave CRC_0" Index="#x6000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave ConnID" Index="#x6000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="RxPDO" Index="#x1600" InOut="1" Flags="#x0090" SyncMan="2">
								<Entry Name="FSOE__FSoE Master CMD" Index="#x7000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000008}">ARRAY [0..0] OF BYTE</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master CRC_0" Index="#x7000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master ConnID" Index="#x7000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="5001"/>
							<Slot Name="">
								<SlotData>0000010001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>190</ModuleIdent>
								<Module Id="#x03090005" Type="FSOES" Class="190">
									<Name>Module 1 (FSOES)</Name>
									<ImageId>118</ImageId>
									<ModuleData>02000000be00000000000c000000000000000000000000000000000000000000</ModuleData>
									<PdoIndex>6656</PdoIndex>
									<PdoIndex>5632</PdoIndex>
									<CoeProfile ProfileNo="#x00001389"/>
								</Module>
							</Slot>
						</EtherCAT>
					</Box>
					<Box Id="14" BoxType="9099" BoxFlags="#x00000020">
						<Name>C14 (EL2904)</Name>
						<ImageId>118</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="3" FoeType="1" VendorId="#x00000002" ProductCode="#x0b583052" RevisionNo="#x00130000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="2" Type="EL2904, 4 Ch. Safety Output 24V, 0.5A, TwinSAFE" Desc="EL2904" PortABoxInfo="#x0100000d">
							<SyncMan>001000012600010001000000400000010001001026010000</SyncMan>
							<SyncMan>001100012200010002000000400000010001001122010000</SyncMan>
							<SyncMan>001208002400010003000000000000000800001224010000</SyncMan>
							<SyncMan>001906002000010004000000000000000600001920010000</SyncMan>
							<Fmmu>0000000000000000001200020100000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000001900010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0018f400f418f400</BootStrapData>
							<SuName>SPLC</SuName>
							<Pdo Name="TxPDO" Index="#x1a00" Flags="#x0090" SyncMan="3">
								<Entry Name="FSOE__FSoE Slave CMD" Index="#x6000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000008}">ARRAY [0..0] OF BYTE</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave CRC_0" Index="#x6000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave ConnID" Index="#x6000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="RxPDO" Index="#x1600" InOut="1" Flags="#x0090" SyncMan="2">
								<Entry Name="FSOE__FSoE Master CMD" Index="#x7000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__OutputChannel1" Index="#x7001" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__OutputChannel2" Index="#x7001" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__OutputChannel3" Index="#x7001" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__OutputChannel4" Index="#x7001" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master CRC_0" Index="#x7000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master ConnID" Index="#x7000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="RxPDO" Index="#x1601" InOut="1" Flags="#x0090" SyncMan="2">
								<Entry Name="Output Channel 1" Index="#x7010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Output Channel 2" Index="#x7010" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Output Channel 3" Index="#x7010" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Output Channel 4" Index="#x7010" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-00200000000C}">ARRAY [0..11] OF BIT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="5001"/>
							<CoeProfile ProfileNo="13112201"/>
							<Slot Name="">
								<SlotData>0000010001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>290</ModuleIdent>
								<Module Id="#x03090006" Type="FSOES" Class="290">
									<Name>Module 1 (FSOES)</Name>
									<ImageId>118</ImageId>
									<ModuleData>020000002201000000000c000000000000000000000000000000000000000000</ModuleData>
									<PdoIndex>6656</PdoIndex>
									<PdoIndex>5632</PdoIndex>
									<CoeProfile ProfileNo="#x00001389"/>
								</Module>
							</Slot>
							<Slot Name="">
								<SlotData>0000010001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>200</ModuleIdent>
								<Module Id="#x03090009" Type="DO" Class="200">
									<Name>Module 2 (DO)</Name>
									<ImageId>118</ImageId>
									<ModuleData>02000000c8000000000004000000000000000000000000000000000000000000</ModuleData>
									<PdoIndex>5633</PdoIndex>
								</Module>
							</Slot>
						</EtherCAT>
					</Box>
					<Box Id="16" BoxType="9099" BoxFlags="#x00000020">
						<Name>C15 (EL3318)</Name>
						<ImageId>1001</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x0cf63052" RevisionNo="#x00160000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL3318 8Ch. Ana Input Thermocouple (TC)" Desc="EL3318" PortABoxInfo="#x0100000e">
							<SyncMan>001080002600010001000000800080008000001026010000</SyncMan>
							<SyncMan>801080002200010002000000800080008000801022010000</SyncMan>
							<SyncMan>001100002400000003000000000000000000001124010000</SyncMan>
							<SyncMan>801120002000010004000000000000002000801120010000</SyncMan>
							<Fmmu>0000000000000000000000020000000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000801100010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<Pdo Name="TC Channel 1" Index="#x1a00" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1800" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 2" Index="#x1a01" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6010" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6010" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6010" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1801" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 3" Index="#x1a02" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6020" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6020" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6020" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1802" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 4" Index="#x1a03" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6030" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6030" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6030" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1803" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 5" Index="#x1a04" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6040" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6040" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6040" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1804" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6040" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 6" Index="#x1a05" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6050" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6050" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6050" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1805" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6050" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 7" Index="#x1a06" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6060" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6060" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6060" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1806" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6060" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 8" Index="#x1a07" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6070" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6070" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6070" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1807" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6070" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 1" Index="#x1600" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7000" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 2" Index="#x1601" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7010" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 3" Index="#x1602" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7020" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 4" Index="#x1603" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7030" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 5" Index="#x1604" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7040" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 6" Index="#x1605" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7050" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 7" Index="#x1606" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7060" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 8" Index="#x1607" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7070" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
						</EtherCAT>
					</Box>
					<Box Id="15" BoxType="9099">
						<Name>Term 16 (EL9011)</Name>
						<ImageId>1005</ImageId>
						<EtherCAT CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x23333050" InfoDataState="false" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL9011 End Terminal" Desc="EL9011" PortABoxInfo="#x01000010"/>
					</Box>
				</Box>
				<EtherCAT/>
			</Device>
			<Device Id="6" DevType="111" DevFlags="#x0003" AmsPort="28678" AmsNetId="10.4.6.84.7.1" RemoteName="Device 6 (EtherCAT)" InfoImageId="7">
				<Name>Device 6 (EtherCAT)</Name>
				<AddressInfo>
					<Pnp>
						<DeviceDesc>X001 (TwinCAT-Intel PCI Ethernet Adapter (Gigabit))</DeviceDesc>
						<DeviceName>\DEVICE\{C7B4C672-6873-4B5A-AED5-E66D76B8418E}</DeviceName>
						<DeviceData>0001058f9550</DeviceData>
					</Pnp>
				</AddressInfo>
				<Image Id="6" AddrType="9" ImageType="3">
					<Name>Image</Name>
				</Image>
				<Box Id="35" BoxType="9099" BoxFlags="#x00000020">
					<Name>PG10_VG103 (CDG)</Name>
					<ImageId>1006</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x3205" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x00000644" ProductCode="#x0000000e" RevisionNo="#x00000200" InfoDataAddr="true" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="CDG V2.0.0.0" Desc="CDG" PortABoxInfo="#x00ffffff">
						<SyncMan>001000042600010001000000800000040004001026010000</SyncMan>
						<SyncMan>001400042200010002000000800000040004001422010000</SyncMan>
						<SyncMan>001800006400000003000000000000000000001864030000</SyncMan>
						<SyncMan>001c0f002000010004000000000000000000001c20030000</SyncMan>
						<Fmmu>0000000000000000000000020000000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001c00010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0014140200101402</BootStrapData>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a00" Flags="#x0011" SyncMan="3">
							<Entry Name="Reading Valid" Index="#x6001" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Overrange Exceeded" Index="#x6001" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Underrange Exceeded" Index="#x6001" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry>
								<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
							</Entry>
							<Entry Name="Sensor Value" Index="#x6000" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a01" Flags="#x0011"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a02" Flags="#x0011" SyncMan="3">
							<Entry Name="Reading Valid" Index="#x6012" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Overrange Exceeded" Index="#x6012" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Underrange Exceeded" Index="#x6012" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry>
								<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
							</Entry>
							<Entry Name="Sensor Value" Index="#x6010" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a03" Flags="#x0011"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1bfe" Flags="#x0011" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Trip Point Output All Instance" Index="#xf641" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<CoeProfile ProfileNo="136319883"/>
					</EtherCAT>
				</Box>
				<Box Id="36" BoxType="9099" BoxFlags="#x00000020">
					<Name>BA1 (BPG402)</Name>
					<ImageId>1006</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x3205" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x00000644" ProductCode="#x0000000c" RevisionNo="#x00000200" InfoDataAddr="true" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="BPG402 V2.0.0.0" Desc="BPG402" PortABoxInfo="#x01000023">
						<SyncMan>001000042600010001000000800000040004001026010000</SyncMan>
						<SyncMan>001400042200010002000000800000040004001422010000</SyncMan>
						<SyncMan>001800006400000003000000000000000000001864010000</SyncMan>
						<SyncMan>001c13002000010004000000000000000000001c20010000</SyncMan>
						<Fmmu>0000000000000000000000020000000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001c00010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0014140200101402</BootStrapData>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a00" Flags="#x0000" SyncMan="3">
							<Entry Name="Combination Gauge Reading Valid Module 1" Index="#xf640" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Combination Gauge Overrange Exceeded Module 1" Index="#xf640" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Combination Gauge Underrange Exceeded Module 1" Index="#xf640" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Padding Bits Module 1">
								<Type>BIT5</Type>
							</Entry>
							<Entry Name="Combination Gauge Active Value Module 1" Index="#xf640" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Combination Gauge Active Sensor Number Module 1" Index="#xf640" Sub="#x12">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1a01" Flags="#x0000"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a02" Flags="#x0000" SyncMan="3">
							<Entry Name="Combination Gauge Reading Valid Module 2" Index="#xf640" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Combination Gauge Overrange Exceeded Module 2" Index="#xf640" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Combination Gauge Underrange Exceeded Module 2" Index="#xf640" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Padding Bits Module 2">
								<Type>BIT5</Type>
							</Entry>
							<Entry Name="Combination Gauge Active Value Module 2" Index="#xf640" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Combination Gauge Active Sensor Number Module 2" Index="#xf640" Sub="#x12">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1a03" Flags="#x0000"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1bfe" Flags="#x0000" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Trip Point Output All Instance" Index="#xf641" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1bff" Flags="#x0000"/>
						<Pdo Name="Receive PDO Mapping" Index="#x1600" InOut="1" Flags="#x0000"/>
						<Pdo Name="Receive PDO Mapping User" Index="#x1601" InOut="1" Flags="#x0000"/>
						<CoeProfile ProfileNo="136319883"/>
					</EtherCAT>
				</Box>
				<Box Id="37" BoxType="9099" BoxFlags="#x00000020">
					<Name>PEND-V (VAT valve S653)</Name>
					<ImageId>1007</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x0006" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x00000549" ProductCode="#x02010653" RevisionNo="#x00020002" InfoDataAddr="true" TimeoutMailbox2="2500" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="VAT valve S653" Desc="VAT valve S653" PortABoxInfo="#x01000024">
						<SyncMan>001080003600010001000000800080008000001036010000</SyncMan>
						<SyncMan>801080003200010002000000800080008000801032010000</SyncMan>
						<SyncMan>001118007400010003000000000000041700001174010000</SyncMan>
						<SyncMan>001d19003000010004000000000000041900001d30010000</SyncMan>
						<Fmmu>0000000000000000001100020100000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001d00010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0010cc05cc15cc05</BootStrapData>
						<Pdo Name="TxPDO Mapping Inputs Integer 1" Index="#x1a00" Flags="#x0000">
							<Entry Name="Actual Pressure" Index="#x2f00" Sub="#x08">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Pressure Sensor 1" Index="#x2f00" Sub="#x09">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Pressure Sensor 2" Index="#x2f00" Sub="#x0a">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Actual Position" Index="#x2f00" Sub="#x0b">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="Error Number" Index="#x2030" Sub="#x03">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="General Status" Index="#x2f00" Sub="#x0d">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="General Warnings" Index="#x2f00" Sub="#x0e">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="Extended Warnings" Index="#x2f00" Sub="#x0f">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="TxPDO Mapping Inputs Float 1" Index="#x1a01" Flags="#x0000" SyncMan="3">
							<Entry Name="Actual Pressure" Index="#x2300" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Sensor 1" Index="#x2401" Sub="#x18">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Sensor 2" Index="#x2402" Sub="#x18">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Actual Position" Index="#x2200" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="Error Number" Index="#x2030" Sub="#x03">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="General Status" Index="#x2f00" Sub="#x0d">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="General Warnings" Index="#x2f00" Sub="#x0e">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="Extended Warnings" Index="#x2f00" Sub="#x0f">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="TxPDO Mapping Inputs Integer 2" Index="#x1a02" Flags="#x0000">
							<Entry Name="Actual Position" Index="#x2f00" Sub="#x0b">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="Error Number" Index="#x2030" Sub="#x03">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="General Status" Index="#x2f00" Sub="#x0d">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="General Warnings" Index="#x2f00" Sub="#x0e">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="Extended Warnings" Index="#x2f00" Sub="#x0f">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="TxPDO Mapping Inputs Float 2" Index="#x1a03" Flags="#x0000">
							<Entry Name="Actual Position" Index="#x2200" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="Error Number" Index="#x2030" Sub="#x03">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="General Status" Index="#x2f00" Sub="#x0d">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="General Warnings" Index="#x2f00" Sub="#x0e">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="Extended Warnings" Index="#x2f00" Sub="#x0f">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="TxPDO Mapping Inputs User 1" Index="#x1aff" Flags="#x0000"/>
						<Pdo Name="RxPDO Mapping Outputs Integer 1" Index="#x1600" InOut="1" Flags="#x0000">
							<Entry Name="Target Pressure" Index="#x2f00" Sub="#x01">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Target Position" Index="#x2f00" Sub="#x02">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Pressure Input Digital Sensor 1" Index="#x2f00" Sub="#x03">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Pressure Input Digital Sensor 2" Index="#x2f00" Sub="#x04">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="General Control Setpoint" Index="#x2f00" Sub="#x06">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="Pressure Ramp Time" Index="#x2f00" Sub="#x07">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="RxPDO Mapping Outputs Float 1" Index="#x1601" InOut="1" Flags="#x0000" SyncMan="2">
							<Entry Name="Target Pressure" Index="#x2300" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Target Position" Index="#x2200" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Input Digital Sensor 1" Index="#x2401" Sub="#x14">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Input Digital Sensor 2" Index="#x2402" Sub="#x14">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="General Control Setpoint" Index="#x2f00" Sub="#x06">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="Pressure Ramp Time" Index="#x2f00" Sub="#x07">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="RxPDO Mapping Outputs Integer 2" Index="#x1602" InOut="1" Flags="#x0000">
							<Entry Name="Target Pressure" Index="#x2f00" Sub="#x01">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Target Position" Index="#x2f00" Sub="#x02">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Pressure Input Digital Sensor 1" Index="#x2f00" Sub="#x03">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Pressure Input Digital Sensor 2" Index="#x2f00" Sub="#x04">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="General Control Setpoint" Index="#x2f00" Sub="#x06">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="RxPDO Mapping Outputs Float 2" Index="#x1603" InOut="1" Flags="#x0000">
							<Entry Name="Target Pressure" Index="#x2300" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Target Position" Index="#x2200" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Input Digital Sensor 1" Index="#x2401" Sub="#x14">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Input Digital Sensor 2" Index="#x2402" Sub="#x14">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="General Control Setpoint" Index="#x2f00" Sub="#x06">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="RxPDO Mapping Outputs Integer 3" Index="#x1604" InOut="1" Flags="#x0000">
							<Entry Name="Target Position" Index="#x2f00" Sub="#x02">
								<Type>DINT</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="General Control Setpoint" Index="#x2f00" Sub="#x06">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="RxPDO Mapping Outputs Float 3" Index="#x1605" InOut="1" Flags="#x0000">
							<Entry Name="Target Position" Index="#x2200" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Control Mode" Index="#x2002">
								<Type>SINT</Type>
							</Entry>
							<Entry Name="General Control Setpoint" Index="#x2f00" Sub="#x06">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="RxPDO Mapping Outputs User 1" Index="#x16ff" InOut="1" Flags="#x0000" SyncMan="2">
							<Entry Name="Pressure Controller Selector" Index="#x2310">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
					</EtherCAT>
				</Box>
				<Box Id="38" BoxType="9099">
					<Name>VT02 (EX260-SEC4)</Name>
					<ImageId>1008</ImageId>
					<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000114" ProductCode="#x01000004" RevisionNo="#x00010002" PortPhys="17" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EX260-SEC4 EtherCAT SI Unit (16DO_NPN) Rev1.2" Desc="EX260-SEC4" PortABoxInfo="#x01000025">
						<SyncMan>000f01004400010003000000000000000000000f44090000</SyncMan>
						<SyncMan>010f01004400010003000000000000000000010f44090000</SyncMan>
						<Fmmu>0000000000000000000f00020100000001000000000000000000000000000000</Fmmu>
						<Pdo Name="Byte 0" Index="#x1600" InOut="1" Flags="#x0011" SyncMan="0">
							<Entry Name="Output" Index="#x3101" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Byte 1" Index="#x1601" InOut="1" Flags="#x0011" SyncMan="1">
							<Entry Name="Output" Index="#x3101" Sub="#x02">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
					</EtherCAT>
				</Box>
				<Box Id="39" BoxType="9099">
					<Name>VT01 (EX260-SEC4)</Name>
					<ImageId>1008</ImageId>
					<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000114" ProductCode="#x01000004" RevisionNo="#x00010002" PortPhys="17" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EX260-SEC4 EtherCAT SI Unit (16DO_NPN) Rev1.2" Desc="EX260-SEC4" PortABoxInfo="#x01000026">
						<SyncMan>000f01004400010003000000000000000000000f44090000</SyncMan>
						<SyncMan>010f01004400010003000000000000000000010f44090000</SyncMan>
						<Fmmu>0000000000000000000f00020100000001000000000000000000000000000000</Fmmu>
						<Pdo Name="Byte 0" Index="#x1600" InOut="1" Flags="#x0011" SyncMan="0">
							<Entry Name="Output" Index="#x3101" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Byte 1" Index="#x1601" InOut="1" Flags="#x0011" SyncMan="1">
							<Entry Name="Output" Index="#x3101" Sub="#x02">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
					</EtherCAT>
				</Box>
				<Box Id="40" BoxType="9099" BoxFlags="#x00000020">
					<Name>PS12_VG104 (CDG)</Name>
					<ImageId>1006</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x3205" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x00000644" ProductCode="#x0000000e" RevisionNo="#x00000200" InfoDataAddr="true" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="CDG V2.0.0.0" Desc="CDG" PortABoxInfo="#x01000027">
						<SyncMan>001000042600010001000000800000040004001026010000</SyncMan>
						<SyncMan>001400042200010002000000800000040004001422010000</SyncMan>
						<SyncMan>001800006400000003000000000000000000001864010000</SyncMan>
						<SyncMan>001c0f002000010004000000000000000000001c20010000</SyncMan>
						<Fmmu>0000000000000000000000020000000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001c00010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0014140200101402</BootStrapData>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a00" Flags="#x0000" SyncMan="3">
							<Entry Name="Reading Valid" Index="#x6001" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Overrange Exceeded" Index="#x6001" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Underrange Exceeded" Index="#x6001" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Padding Bits 1">
								<Type>BIT5</Type>
							</Entry>
							<Entry Name="Sensor Value" Index="#x6000" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1a01" Flags="#x0000"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a02" Flags="#x0000" SyncMan="3">
							<Entry Name="Reading Valid" Index="#x6012" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Overrange Exceeded" Index="#x6012" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Underrange Exceeded" Index="#x6012" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Padding Bits 2">
								<Type>BIT5</Type>
							</Entry>
							<Entry Name="Sensor Value" Index="#x6010" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1a03" Flags="#x0000"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1bfe" Flags="#x0000" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Trip Point Output All Instances" Index="#xf641" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1bff" Flags="#x0000"/>
						<Pdo Name="Receive PDO Mapping" Index="#x1600" InOut="1" Flags="#x0000"/>
						<Pdo Name="Receive PDO Mapping User" Index="#x1601" InOut="1" Flags="#x0000"/>
						<CoeProfile ProfileNo="136319883"/>
					</EtherCAT>
				</Box>
				<Box Id="41" BoxType="9099" BoxFlags="#x00000020">
					<Name>PS11_VG102 (CDG)</Name>
					<ImageId>1006</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x3205" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x00000644" ProductCode="#x0000000e" RevisionNo="#x00000200" InfoDataAddr="true" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="CDG V2.0.0.0" Desc="CDG" PortABoxInfo="#x01000028">
						<SyncMan>001000042600010001000000800000040004001026010000</SyncMan>
						<SyncMan>001400042200010002000000800000040004001422010000</SyncMan>
						<SyncMan>001800006400000003000000000000000000001864010000</SyncMan>
						<SyncMan>001c0f002000010004000000000000000000001c20010000</SyncMan>
						<Fmmu>0000000000000000000000020000000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001c00010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0014140200101402</BootStrapData>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a00" Flags="#x0000" SyncMan="3">
							<Entry Name="Reading Valid" Index="#x6001" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Overrange Exceeded" Index="#x6001" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Underrange Exceeded" Index="#x6001" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Padding Bits 1">
								<Type>BIT5</Type>
							</Entry>
							<Entry Name="Sensor Value" Index="#x6000" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1a01" Flags="#x0000"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a02" Flags="#x0000" SyncMan="3">
							<Entry Name="Reading Valid" Index="#x6012" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Overrange Exceeded" Index="#x6012" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Underrange Exceeded" Index="#x6012" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Padding Bits 2">
								<Type>BIT5</Type>
							</Entry>
							<Entry Name="Sensor Value" Index="#x6010" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1a03" Flags="#x0000"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1bfe" Flags="#x0000" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Trip Point Output All Instances" Index="#xf641" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1bff" Flags="#x0000"/>
						<Pdo Name="Receive PDO Mapping" Index="#x1600" InOut="1" Flags="#x0000"/>
						<Pdo Name="Receive PDO Mapping User" Index="#x1601" InOut="1" Flags="#x0000"/>
						<CoeProfile ProfileNo="136319883"/>
					</EtherCAT>
				</Box>
				<Box Id="42" BoxType="9099" BoxFlags="#x00000020">
					<Name>PS10_VG101 (CDG)</Name>
					<ImageId>1006</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x3205" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x00000644" ProductCode="#x0000000e" RevisionNo="#x00000200" InfoDataAddr="true" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="CDG V2.0.0.0" Desc="CDG" PortABoxInfo="#x01000029">
						<SyncMan>001000042600010001000000800000040004001026010000</SyncMan>
						<SyncMan>001400042200010002000000800000040004001422010000</SyncMan>
						<SyncMan>001800006400000003000000000000000000001864010000</SyncMan>
						<SyncMan>001c0f002000010004000000000000000000001c20010000</SyncMan>
						<Fmmu>0000000000000000000000020000000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001c00010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0014140200101402</BootStrapData>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a00" Flags="#x0000" SyncMan="3">
							<Entry Name="Reading Valid" Index="#x6001" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Overrange Exceeded" Index="#x6001" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Underrange Exceeded" Index="#x6001" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Padding Bits 1">
								<Type>BIT5</Type>
							</Entry>
							<Entry Name="Sensor Value" Index="#x6000" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1a01" Flags="#x0000"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1a02" Flags="#x0000" SyncMan="3">
							<Entry Name="Reading Valid" Index="#x6012" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Overrange Exceeded" Index="#x6012" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Underrange Exceeded" Index="#x6012" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Padding Bits 2">
								<Type>BIT5</Type>
							</Entry>
							<Entry Name="Sensor Value" Index="#x6010" Sub="#x11">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1a03" Flags="#x0000"/>
						<Pdo Name="Transmit PDO Mapping" Index="#x1bfe" Flags="#x0000" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Trip Point Output All Instances" Index="#xf641" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Transmit PDO Mapping User" Index="#x1bff" Flags="#x0000"/>
						<Pdo Name="Receive PDO Mapping" Index="#x1600" InOut="1" Flags="#x0000"/>
						<Pdo Name="Receive PDO Mapping User" Index="#x1601" InOut="1" Flags="#x0000"/>
						<CoeProfile ProfileNo="136319883"/>
					</EtherCAT>
				</Box>
				<Box Id="43" BoxType="9099">
					<Name>IGS (EK1100)</Name>
					<ImageId>1009</ImageId>
					<EtherCAT SlaveType="1" PdiType="#x0d00" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x044c2c52" RevisionNo="#x00120000" PortPhys="305" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EK1100 EtherCAT Coupler (2A E-Bus)" Desc="EK1100" PortABoxInfo="#x0100002a"/>
					<Box Id="44" BoxType="9099" BoxFlags="#x00000020">
						<Name>C32 (EL3164)</Name>
						<ImageId>1001</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0405" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x0c5c3052" RevisionNo="#x00140000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL3164 4Ch. Ana. Input 0-10V" Desc="EL3164" PortABoxInfo="#x0100002b">
							<SyncMan>001080002600010001000000800080008000001026010000</SyncMan>
							<SyncMan>801080002200010002000000800080008000801022010000</SyncMan>
							<SyncMan>001100000400000003000000000000000000001104000000</SyncMan>
							<SyncMan>801110002000010004000000000000001000801120010000</SyncMan>
							<Fmmu>0000000000000000801100010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<DcMode>53796e6368726f6e00000000000000004672656552756e2f534d2d53796e6368726f6e00000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443000000000000000000000000000044432d53796e6368726f6e0000000000000000000000000000000000000000000000000000000000a8610000000000070100000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443494e00000000000000000000000044432d53796e6368726f6e2028696e7075742062617365642900000000000000000000006079feffa8610000000000070100000000000000000001000000000000000000000000000000000000000000</DcMode>
							<Pdo Name="AI Standard Channel 1" Index="#x1a00" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a01</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6000" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6000" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6000" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6000" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 1" Index="#x1a01" Flags="#x0010">
								<ExcludePdo>#x1a00</ExcludePdo>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 2" Index="#x1a02" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a03</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6010" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6010" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6010" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6010" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6010" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6010" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6010" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 2" Index="#x1a03" Flags="#x0010">
								<ExcludePdo>#x1a02</ExcludePdo>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 3" Index="#x1a04" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a05</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6020" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6020" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6020" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6020" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6020" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6020" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6020" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 3" Index="#x1a05" Flags="#x0010">
								<ExcludePdo>#x1a04</ExcludePdo>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 4" Index="#x1a06" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a07</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6030" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6030" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6030" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6030" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6030" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6030" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6030" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 4" Index="#x1a07" Flags="#x0010">
								<ExcludePdo>#x1a06</ExcludePdo>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
						</EtherCAT>
					</Box>
					<Box Id="45" BoxType="9099" BoxFlags="#x00000020">
						<Name>C33 (EL3164)</Name>
						<ImageId>1001</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0405" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x0c5c3052" RevisionNo="#x00140000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL3164 4Ch. Ana. Input 0-10V" Desc="EL3164" PortABoxInfo="#x0100002c">
							<SyncMan>001080002600010001000000800080008000001026010000</SyncMan>
							<SyncMan>801080002200010002000000800080008000801022010000</SyncMan>
							<SyncMan>001100000400000003000000000000000000001104000000</SyncMan>
							<SyncMan>801110002000010004000000000000001000801120010000</SyncMan>
							<Fmmu>0000000000000000801100010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<DcMode>53796e6368726f6e00000000000000004672656552756e2f534d2d53796e6368726f6e00000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443000000000000000000000000000044432d53796e6368726f6e0000000000000000000000000000000000000000000000000000000000a8610000000000070100000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443494e00000000000000000000000044432d53796e6368726f6e2028696e7075742062617365642900000000000000000000006079feffa8610000000000070100000000000000000001000000000000000000000000000000000000000000</DcMode>
							<Pdo Name="AI Standard Channel 1" Index="#x1a00" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a01</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6000" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6000" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6000" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6000" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 1" Index="#x1a01" Flags="#x0010">
								<ExcludePdo>#x1a00</ExcludePdo>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 2" Index="#x1a02" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a03</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6010" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6010" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6010" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6010" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6010" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6010" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6010" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 2" Index="#x1a03" Flags="#x0010">
								<ExcludePdo>#x1a02</ExcludePdo>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 3" Index="#x1a04" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a05</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6020" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6020" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6020" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6020" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6020" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6020" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6020" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 3" Index="#x1a05" Flags="#x0010">
								<ExcludePdo>#x1a04</ExcludePdo>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 4" Index="#x1a06" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a07</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6030" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6030" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6030" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6030" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6030" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6030" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6030" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 4" Index="#x1a07" Flags="#x0010">
								<ExcludePdo>#x1a06</ExcludePdo>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
						</EtherCAT>
					</Box>
					<Box Id="46" BoxType="9099" BoxFlags="#x00000020">
						<Name>C34 (EL3164)</Name>
						<ImageId>1001</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0405" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x0c5c3052" RevisionNo="#x00140000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL3164 4Ch. Ana. Input 0-10V" Desc="EL3164" PortABoxInfo="#x0100002d">
							<SyncMan>001080002600010001000000800080008000001026010000</SyncMan>
							<SyncMan>801080002200010002000000800080008000801022010000</SyncMan>
							<SyncMan>001100000400000003000000000000000000001104000000</SyncMan>
							<SyncMan>801110002000010004000000000000001000801120010000</SyncMan>
							<Fmmu>0000000000000000801100010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<DcMode>53796e6368726f6e00000000000000004672656552756e2f534d2d53796e6368726f6e00000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443000000000000000000000000000044432d53796e6368726f6e0000000000000000000000000000000000000000000000000000000000a8610000000000070100000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443494e00000000000000000000000044432d53796e6368726f6e2028696e7075742062617365642900000000000000000000006079feffa8610000000000070100000000000000000001000000000000000000000000000000000000000000</DcMode>
							<Pdo Name="AI Standard Channel 1" Index="#x1a00" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a01</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6000" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6000" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6000" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6000" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 1" Index="#x1a01" Flags="#x0010">
								<ExcludePdo>#x1a00</ExcludePdo>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 2" Index="#x1a02" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a03</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6010" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6010" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6010" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6010" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6010" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6010" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6010" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 2" Index="#x1a03" Flags="#x0010">
								<ExcludePdo>#x1a02</ExcludePdo>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 3" Index="#x1a04" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a05</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6020" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6020" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6020" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6020" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6020" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6020" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6020" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 3" Index="#x1a05" Flags="#x0010">
								<ExcludePdo>#x1a04</ExcludePdo>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 4" Index="#x1a06" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a07</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6030" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6030" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6030" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6030" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6030" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6030" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6030" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 4" Index="#x1a07" Flags="#x0010">
								<ExcludePdo>#x1a06</ExcludePdo>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00020000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
						</EtherCAT>
					</Box>
					<Box Id="47" BoxType="9099" BoxFlags="#x00000020">
						<Name>C35 (EL3154)</Name>
						<ImageId>1001</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0405" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x0c523052" RevisionNo="#x00140000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL3154 4Ch. Ana. Input 4-20mA" Desc="EL3154" PortABoxInfo="#x0100002e">
							<SyncMan>001080002600010001000000800080008000001026010000</SyncMan>
							<SyncMan>801080002200010002000000800080008000801022010000</SyncMan>
							<SyncMan>001100000400000003000000000000000000001104000000</SyncMan>
							<SyncMan>801110002000010004000000000000001000801120010000</SyncMan>
							<Fmmu>0000000000000000801100010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<DcMode>53796e6368726f6e00000000000000004672656552756e2f534d2d53796e6368726f6e00000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443000000000000000000000000000044432d53796e6368726f6e0000000000000000000000000000000000000000000000000000000000a8610000000000070100000000000000000000000000000000000000000000000000000000000000</DcMode>
							<DcMode>4443494e00000000000000000000000044432d53796e6368726f6e2028696e7075742062617365642900000000000000000000006079feffa8610000000000070100000000000000000001000000000000000000000000000000000000000000</DcMode>
							<Pdo Name="AI Standard Channel 1" Index="#x1a00" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a01</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6000" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6000" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6000" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6000" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00040000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 1" Index="#x1a01" Flags="#x0010">
								<ExcludePdo>#x1a00</ExcludePdo>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00040000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 2" Index="#x1a02" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a03</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6010" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6010" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6010" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6010" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6010" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6010" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6010" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00040000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 2" Index="#x1a03" Flags="#x0010">
								<ExcludePdo>#x1a02</ExcludePdo>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00040000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 3" Index="#x1a04" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a05</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6020" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6020" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6020" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6020" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6020" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6020" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6020" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00040000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 3" Index="#x1a05" Flags="#x0010">
								<ExcludePdo>#x1a04</ExcludePdo>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00040000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Standard Channel 4" Index="#x1a06" Flags="#x0010" SyncMan="3">
								<ExcludePdo>#x1a07</ExcludePdo>
								<Entry Name="Status__Underrange" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when upper value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6030" Sub="#x02">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when lower value limit exceeded]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 1" Index="#x6030" Sub="#x03">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit1
Bit1: Value smaller than Limit1]]></Comment>
								</Entry>
								<Entry Name="Status__Limit 2" Index="#x6030" Sub="#x05">
									<Type>BIT2</Type>
									<Comment><![CDATA[Bit0: Value greater than Limit2
Bit1: Value smaller than Limit2]]></Comment>
								</Entry>
								<Entry Name="Status__Error" Index="#x6030" Sub="#x07">
									<Type>BIT</Type>
									<Comment><![CDATA[Bit set when Over- or Underrange]]></Comment>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000001}">ARRAY [0..0] OF BIT</Type>
								</Entry>
								<Entry Name="Status__">
									<Type GUID="{18071995-0000-0000-0000-002000000005}">ARRAY [0..4] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Sync error" Index="#x6030" Sub="#x0e">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6030" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x6030" Sub="#x10">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00040000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="AI Compact Channel 4" Index="#x1a07" Flags="#x0010">
								<ExcludePdo>#x1a06</ExcludePdo>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00040000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
							<CoeProfile ProfileNo="19665801"/>
						</EtherCAT>
					</Box>
					<Box Id="48" BoxType="9099">
						<Name>C36 (EL1889)</Name>
						<ImageId>7</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x07613052" RevisionNo="#x00130000" RepeatSupport="true" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL1889 16Ch. Dig. Input 24V, 3ms, negative" Desc="EL1889" PortABoxInfo="#x0100002f">
							<SyncMan>001002000000010004000000000000000200001000010000</SyncMan>
							<Fmmu>0000000000000000001000010100000002000000000000000000000000000000</Fmmu>
							<Pdo Name="Channel 1" Index="#x1a00" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 2" Index="#x1a01" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 3" Index="#x1a02" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 4" Index="#x1a03" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 5" Index="#x1a04" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 6" Index="#x1a05" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 7" Index="#x1a06" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 8" Index="#x1a07" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 9" Index="#x1a08" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6080" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 10" Index="#x1a09" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6090" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 11" Index="#x1a0a" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60a0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 12" Index="#x1a0b" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60b0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 13" Index="#x1a0c" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60c0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 14" Index="#x1a0d" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60d0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 15" Index="#x1a0e" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60e0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 16" Index="#x1a0f" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60f0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="49" BoxType="9099">
						<Name>C37 (EL1889)</Name>
						<ImageId>7</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x07613052" RevisionNo="#x00130000" RepeatSupport="true" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL1889 16Ch. Dig. Input 24V, 3ms, negative" Desc="EL1889" PortABoxInfo="#x01000030">
							<SyncMan>001002000000010004000000000000000200001000010000</SyncMan>
							<Fmmu>0000000000000000001000010100000002000000000000000000000000000000</Fmmu>
							<Pdo Name="Channel 1" Index="#x1a00" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 2" Index="#x1a01" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 3" Index="#x1a02" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 4" Index="#x1a03" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 5" Index="#x1a04" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 6" Index="#x1a05" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 7" Index="#x1a06" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 8" Index="#x1a07" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 9" Index="#x1a08" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6080" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 10" Index="#x1a09" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x6090" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 11" Index="#x1a0a" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60a0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 12" Index="#x1a0b" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60b0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 13" Index="#x1a0c" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60c0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 14" Index="#x1a0d" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60d0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 15" Index="#x1a0e" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60e0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 16" Index="#x1a0f" Flags="#x0011" SyncMan="0">
								<Entry Name="Input" Index="#x60f0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="19" BoxType="9099" BoxFlags="#x00000020">
						<Name>C38 (EL1904)</Name>
						<ImageId>118</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x07703052" RevisionNo="#x00130000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="1" Type="EL1904, 4 Ch. Safety Input 24V, TwinSAFE" Desc="EL1904" PortABoxInfo="#x01000031">
							<SyncMan>001000012600010001000000400000010001001026010000</SyncMan>
							<SyncMan>001100012200010002000000400000010001001122010000</SyncMan>
							<SyncMan>001206002400010003000000000000000600001224010000</SyncMan>
							<SyncMan>001906002000010004000000000000000600001920010000</SyncMan>
							<Fmmu>0000000000000000001200020100000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000001900010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<SuName>SPLC</SuName>
							<Pdo Name="TxPDO" Index="#x1a00" Flags="#x0090" SyncMan="3">
								<Entry Name="FSOE__FSoE Slave CMD" Index="#x6000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel1" Index="#x6001" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel2" Index="#x6001" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel3" Index="#x6001" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel4" Index="#x6001" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave CRC_0" Index="#x6000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave ConnID" Index="#x6000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="RxPDO" Index="#x1600" InOut="1" Flags="#x0090" SyncMan="2">
								<Entry Name="FSOE__FSoE Master CMD" Index="#x7000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000008}">ARRAY [0..0] OF BYTE</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master CRC_0" Index="#x7000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master ConnID" Index="#x7000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="5001"/>
							<Slot Name="">
								<SlotData>0000010001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>190</ModuleIdent>
								<Module Id="#x0309000c" Type="FSOES" Class="190">
									<Name>Module 1 (FSOES)</Name>
									<ImageId>118</ImageId>
									<ModuleData>02000000be00000000000c000000000000000000000000000000000000000000</ModuleData>
									<PdoIndex>6656</PdoIndex>
									<PdoIndex>5632</PdoIndex>
									<CoeProfile ProfileNo="#x00001389"/>
								</Module>
							</Slot>
						</EtherCAT>
					</Box>
					<Box Id="20" BoxType="9099" BoxFlags="#x00000020">
						<Name>C39 (EL1904)</Name>
						<ImageId>118</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x07703052" RevisionNo="#x00130000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="1" Type="EL1904, 4 Ch. Safety Input 24V, TwinSAFE" Desc="EL1904" PortABoxInfo="#x01000013">
							<SyncMan>001000012600010001000000400000010001001026010000</SyncMan>
							<SyncMan>001100012200010002000000400000010001001122010000</SyncMan>
							<SyncMan>001206002400010003000000000000000600001224010000</SyncMan>
							<SyncMan>001906002000010004000000000000000600001920010000</SyncMan>
							<Fmmu>0000000000000000001200020100000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000001900010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<SuName>SPLC</SuName>
							<Pdo Name="TxPDO" Index="#x1a00" Flags="#x0090" SyncMan="3">
								<Entry Name="FSOE__FSoE Slave CMD" Index="#x6000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel1" Index="#x6001" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel2" Index="#x6001" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel3" Index="#x6001" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__InputChannel4" Index="#x6001" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave CRC_0" Index="#x6000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave ConnID" Index="#x6000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="RxPDO" Index="#x1600" InOut="1" Flags="#x0090" SyncMan="2">
								<Entry Name="FSOE__FSoE Master CMD" Index="#x7000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000008}">ARRAY [0..0] OF BYTE</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master CRC_0" Index="#x7000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master ConnID" Index="#x7000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="5001"/>
							<Slot Name="">
								<SlotData>0000010001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>190</ModuleIdent>
								<Module Id="#x0309000d" Type="FSOES" Class="190">
									<Name>Module 1 (FSOES)</Name>
									<ImageId>118</ImageId>
									<ModuleData>02000000be00000000000c000000000000000000000000000000000000000000</ModuleData>
									<PdoIndex>6656</PdoIndex>
									<PdoIndex>5632</PdoIndex>
									<CoeProfile ProfileNo="#x00001389"/>
								</Module>
							</Slot>
						</EtherCAT>
					</Box>
					<Box Id="52" BoxType="9099" BoxFlags="#x00000020">
						<Name>C40 (EL3318)</Name>
						<ImageId>1001</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="7" FoeType="1" VendorId="#x00000002" ProductCode="#x0cf63052" RevisionNo="#x00160000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL3318 8Ch. Ana Input Thermocouple (TC)" Desc="EL3318" PortABoxInfo="#x01000014">
							<SyncMan>001080002600010001000000800080008000001026010000</SyncMan>
							<SyncMan>801080002200010002000000800080008000801022010000</SyncMan>
							<SyncMan>001100002400000003000000000000000000001124010000</SyncMan>
							<SyncMan>801120002000010004000000000000002000801120010000</SyncMan>
							<Fmmu>0000000000000000000000020000000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000801100010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0010f400f410f400</BootStrapData>
							<Pdo Name="TC Channel 1" Index="#x1a00" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6000" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6000" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6000" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1800" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6000" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 2" Index="#x1a01" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6010" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6010" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6010" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1801" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6010" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 3" Index="#x1a02" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6020" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6020" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6020" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1802" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6020" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 4" Index="#x1a03" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6030" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6030" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6030" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1803" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6030" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 5" Index="#x1a04" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6040" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6040" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6040" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1804" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6040" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 6" Index="#x1a05" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6050" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6050" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6050" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1805" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6050" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 7" Index="#x1a06" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6060" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6060" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6060" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1806" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6060" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Channel 8" Index="#x1a07" Flags="#x0011" SyncMan="3">
								<Entry Name="Status__Underrange" Index="#x6070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__Overrange" Index="#x6070" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="Status__Error" Index="#x6070" Sub="#x07">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-002000000007}">ARRAY [0..6] OF BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO State" Index="#x6070" Sub="#x0f">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Status__TxPDO Toggle" Index="#x1807" Sub="#x09">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Value" Index="#x6070" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 1" Index="#x1600" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7000" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 2" Index="#x1601" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7010" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 3" Index="#x1602" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7020" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 4" Index="#x1603" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7030" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 5" Index="#x1604" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7040" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 6" Index="#x1605" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7050" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 7" Index="#x1606" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7060" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="TC Outputs Channel 8" Index="#x1607" InOut="1" Flags="#x0010">
								<Entry Name="CJCompensation" Index="#x7070" Sub="#x11" Flags="#x00050000">
									<Type>INT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
							<CoeProfile ProfileNo="21631881"/>
						</EtherCAT>
					</Box>
					<Box Id="53" BoxType="9099">
						<Name>C41 (EL9410)</Name>
						<ImageId>1003</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x24c23052" RevisionNo="#x00110000" RepeatSupport="true" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL9410 E-Bus Power Supplier  (Diagnostics)" Desc="EL9410" PortABoxInfo="#x01000034">
							<SyncMan>001001000000010004000000000000000000001000000000</SyncMan>
							<Fmmu>0000000000000000001000010100000002000000000000000000000000000000</Fmmu>
							<Pdo Name="Status Us" Index="#x1a00" Flags="#x0011" SyncMan="0">
								<Entry Name="Undervoltage" Index="#x6000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Status Up" Index="#x1a01" Flags="#x0011" SyncMan="0">
								<Entry Name="Undervoltage" Index="#x6010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="54" BoxType="9099">
						<Name>C42 (EL2889)</Name>
						<ImageId>1002</ImageId>
						<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x0b493052" RevisionNo="#x00120000" RepeatSupport="true" PortPhys="51" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL2889 16Ch. Dig. Output 24V, 0.5A, negative" Desc="EL2889" PortABoxInfo="#x01000035">
							<SyncMan>000f01004400010003000000000000000100000f44090000</SyncMan>
							<SyncMan>010f01004400010003000000000000000100010f44090000</SyncMan>
							<Fmmu>0000000000000000000f00020100000001000000000000000000000000000000</Fmmu>
							<Pdo Name="Channel 1" Index="#x1600" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7000" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 2" Index="#x1601" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 3" Index="#x1602" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7020" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 4" Index="#x1603" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7030" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 5" Index="#x1604" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7040" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 6" Index="#x1605" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7050" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 7" Index="#x1606" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7060" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 8" Index="#x1607" InOut="1" Flags="#x0011" SyncMan="0">
								<Entry Name="Output" Index="#x7070" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 9" Index="#x1608" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x7080" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 10" Index="#x1609" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x7090" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 11" Index="#x160a" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70a0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 12" Index="#x160b" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70b0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 13" Index="#x160c" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70c0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 14" Index="#x160d" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70d0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 15" Index="#x160e" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70e0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="Channel 16" Index="#x160f" InOut="1" Flags="#x0011" SyncMan="1">
								<Entry Name="Output" Index="#x70f0" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
							</Pdo>
						</EtherCAT>
					</Box>
					<Box Id="21" BoxType="9099" BoxFlags="#x00000020">
						<Name>C43 (EL2904)</Name>
						<ImageId>118</ImageId>
						<EtherCAT SlaveType="2" PdiType="#x0005" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="3" FoeType="1" VendorId="#x00000002" ProductCode="#x0b583052" RevisionNo="#x00130000" InfoDataAddr="true" TimeoutMailbox2="2000" CheckRevisionNoType="3" PortPhys="51" MaxSlotCount="2" Type="EL2904, 4 Ch. Safety Output 24V, 0.5A, TwinSAFE" Desc="EL2904" PortABoxInfo="#x01000036">
							<SyncMan>001000012600010001000000400000010001001026010000</SyncMan>
							<SyncMan>001100012200010002000000400000010001001122010000</SyncMan>
							<SyncMan>001208002400010003000000000000000800001224010000</SyncMan>
							<SyncMan>001906002000010004000000000000000600001920010000</SyncMan>
							<Fmmu>0000000000000000001200020100000001000000000000000000000000000000</Fmmu>
							<Fmmu>0000000000000000001900010100000002000000000000000000000000000000</Fmmu>
							<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
							<BootStrapData>0018f400f418f400</BootStrapData>
							<SuName>SPLC</SuName>
							<Pdo Name="TxPDO" Index="#x1a00" Flags="#x0090" SyncMan="3">
								<Entry Name="FSOE__FSoE Slave CMD" Index="#x6000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000008}">ARRAY [0..0] OF BYTE</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave CRC_0" Index="#x6000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Slave ConnID" Index="#x6000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="RxPDO" Index="#x1600" InOut="1" Flags="#x0090" SyncMan="2">
								<Entry Name="FSOE__FSoE Master CMD" Index="#x7000" Sub="#x01">
									<Type>USINT</Type>
								</Entry>
								<Entry Name="FSOE__OutputChannel1" Index="#x7001" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__OutputChannel2" Index="#x7001" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__OutputChannel3" Index="#x7001" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__OutputChannel4" Index="#x7001" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="FSOE__">
									<Type GUID="{18071995-0000-0000-0000-002000000004}">ARRAY [0..3] OF BIT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master CRC_0" Index="#x7000" Sub="#x03">
									<Type>UINT</Type>
								</Entry>
								<Entry Name="FSOE__FSoE Master ConnID" Index="#x7000" Sub="#x02">
									<Type>UINT</Type>
								</Entry>
							</Pdo>
							<Pdo Name="RxPDO" Index="#x1601" InOut="1" Flags="#x0090" SyncMan="2">
								<Entry Name="Output Channel 1" Index="#x7010" Sub="#x01">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Output Channel 2" Index="#x7010" Sub="#x02">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Output Channel 3" Index="#x7010" Sub="#x03">
									<Type>BIT</Type>
								</Entry>
								<Entry Name="Output Channel 4" Index="#x7010" Sub="#x04">
									<Type>BIT</Type>
								</Entry>
								<Entry>
									<Type GUID="{18071995-0000-0000-0000-00200000000C}">ARRAY [0..11] OF BIT</Type>
								</Entry>
							</Pdo>
							<CoeProfile ProfileNo="5001"/>
							<CoeProfile ProfileNo="13112201"/>
							<Slot Name="">
								<SlotData>0000010001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>290</ModuleIdent>
								<Module Id="#x0309000e" Type="FSOES" Class="290">
									<Name>Module 1 (FSOES)</Name>
									<ImageId>118</ImageId>
									<ModuleData>020000002201000000000c000000000000000000000000000000000000000000</ModuleData>
									<PdoIndex>6656</PdoIndex>
									<PdoIndex>5632</PdoIndex>
									<CoeProfile ProfileNo="#x00001389"/>
								</Module>
							</Slot>
							<Slot Name="">
								<SlotData>0000010001000400000000000000000000000000000000000000000000000000</SlotData>
								<ModuleIdent>200</ModuleIdent>
								<Module Id="#x0309000f" Type="DO" Class="200">
									<Name>Module 2 (DO)</Name>
									<ImageId>118</ImageId>
									<ModuleData>02000000c8000000000004000000000000000000000000000000000000000000</ModuleData>
									<PdoIndex>5633</PdoIndex>
								</Module>
							</Slot>
						</EtherCAT>
					</Box>
					<Box Id="68" BoxType="9099">
						<Name>Term 53 (EL9011)</Name>
						<ImageId>1005</ImageId>
						<EtherCAT CycleMBoxPollingTime="0" VendorId="#x00000002" ProductCode="#x23333050" InfoDataState="false" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EL9011 End Terminal" Desc="EL9011" PortABoxInfo="#x01000015"/>
					</Box>
				</Box>
				<Box Id="56" BoxType="9099">
					<Name>TMP(STP)</Name>
					<ImageId>1010</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x0405" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x0000066a" ProductCode="#x0b100000" RevisionNo="#x00000001" InfoDataAddr="true" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="Turbo Pump" Desc="STP" PortABoxInfo="#x0200002b">
						<SyncMan>001080002600010001000000000000008000001026010000</SyncMan>
						<SyncMan>001480002200010002000000000000008000001422010000</SyncMan>
						<SyncMan>001801006400010003000000000000000100001864010000</SyncMan>
						<SyncMan>001c07002000010004000000000000000700001c20010000</SyncMan>
						<Fmmu>0000000000000000001800020100000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001c00010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0010800000148000</BootStrapData>
						<Pdo Name="TXPDO" Index="#x1a00" Flags="#x0010" SyncMan="3">
							<Entry Name="Rotation" Index="#x6000" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Normal" Index="#x6000" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Acceleration" Index="#x6000" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Deceleration (Includes Braking)" Index="#x6000" Sub="#x04">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Remote/Local" Index="#x6000" Sub="#x05">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Turbo Low Speed" Index="#x6000" Sub="#x07">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Alarm" Index="#x6000" Sub="#x09">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Warning" Index="#x6000" Sub="#x0a">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Turbo Speed" Index="#x6000" Sub="#x11">
								<Type>INT</Type>
							</Entry>
							<Entry Name="Turbo Current" Index="#x6000" Sub="#x12">
								<Type>INT</Type>
							</Entry>
							<Entry Name="Turbo pump temperature" Index="#x6000" Sub="#x13">
								<Type>INT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="TXPDO" Index="#x1a01" Flags="#x0000"/>
						<Pdo Name="RxPDO" Index="#x1600" InOut="1" Flags="#x0010" SyncMan="2">
							<Entry Name="Turbo Start Stop" Index="#x7000" Sub="#x01">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Turbo Reset Alarm" Index="#x7000" Sub="#x02">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Turbo Low Speed" Index="#x7000" Sub="#x03">
								<Type>BIT</Type>
							</Entry>
							<Entry Name="Pad 5">
								<Type>BIT5</Type>
							</Entry>
						</Pdo>
						<Pdo Name="RxPDO" Index="#x1601" InOut="1" Flags="#x0000"/>
					</EtherCAT>
				</Box>
				<Box Id="57" BoxType="9099" BoxFlags="#x00000020">
					<Name>MFC1 (FCS-WR)</Name>
					<ImageId>1011</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x0c05" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x0000066c" ProductCode="#x00001bbc" RevisionNo="#x00000004" InfoDataAddr="true" TimeoutMailbox2="10000" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="FCS-WR" Desc="FCS-WR" PortABoxInfo="#x01000038">
						<SyncMan>0010f40126000100010000008000f401f401001026010000</SyncMan>
						<SyncMan>0012f40122000100020000008000f401f401001222010000</SyncMan>
						<SyncMan>00140d006400010003000000000000000d00001464010000</SyncMan>
						<SyncMan>001615002000010004000000000000001500001620010000</SyncMan>
						<Fmmu>0000000000000000001400020100000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001600010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0010c8000012c800</BootStrapData>
						<DcMode>4672656552756e0000000000000000004672656552756e00000000000000000000000000000000000000000000000000000000000000000000000000000000000100000000000000000000000000000000000000000000000000000000000000</DcMode>
						<Pdo Name="Default TxPDO Mapping Object" Index="#x1a00" Flags="#x0010" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Flow Reading [REAL]" Index="#x6000" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Reading [REAL]" Index="#x6001" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Temperature Reading [REAL]" Index="#x6002" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Readback [REAL]" Index="#x6009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Setpoint [REAL]" Index="#x6009" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Default RxPDO Mapping Object" Index="#x1600" InOut="1" Flags="#x0010" SyncMan="2">
							<Entry Name="Flow SP [REAL]" Index="#x7003" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Actuator Control" Index="#x7009" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Actuator Position SP [REAL]" Index="#x7009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Ramp Time" Index="#x7008" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<CoeProfile ProfileNo="132387723"/>
					</EtherCAT>
				</Box>
				<Box Id="58" BoxType="9099" BoxFlags="#x00000020">
					<Name>MFC2 (FCS-WR)</Name>
					<ImageId>1011</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x0c05" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x0000066c" ProductCode="#x00001bbc" RevisionNo="#x00000004" InfoDataAddr="true" TimeoutMailbox2="10000" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="FCS-WR" Desc="FCS-WR" PortABoxInfo="#x01000039">
						<SyncMan>0010f40126000100010000008000f401f401001026010000</SyncMan>
						<SyncMan>0012f40122000100020000008000f401f401001222010000</SyncMan>
						<SyncMan>00140d006400010003000000000000000d00001464010000</SyncMan>
						<SyncMan>001615002000010004000000000000001500001620010000</SyncMan>
						<Fmmu>0000000000000000001400020100000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001600010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0010c8000012c800</BootStrapData>
						<DcMode>4672656552756e0000000000000000004672656552756e00000000000000000000000000000000000000000000000000000000000000000000000000000000000100000000000000000000000000000000000000000000000000000000000000</DcMode>
						<Pdo Name="Default TxPDO Mapping Object" Index="#x1a00" Flags="#x0010" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Flow Reading [REAL]" Index="#x6000" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Reading [REAL]" Index="#x6001" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Temperature Reading [REAL]" Index="#x6002" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Readback [REAL]" Index="#x6009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Setpoint [REAL]" Index="#x6009" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Default RxPDO Mapping Object" Index="#x1600" InOut="1" Flags="#x0010" SyncMan="2">
							<Entry Name="Flow SP [REAL]" Index="#x7003" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Actuator Control" Index="#x7009" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Actuator Position SP [REAL]" Index="#x7009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Ramp Time" Index="#x7008" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<CoeProfile ProfileNo="132387723"/>
					</EtherCAT>
				</Box>
				<Box Id="59" BoxType="9099" BoxFlags="#x00000020">
					<Name>MFC3 (FCS-WR)</Name>
					<ImageId>1011</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x0c05" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x0000066c" ProductCode="#x00001bbc" RevisionNo="#x00000004" InfoDataAddr="true" TimeoutMailbox2="10000" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="FCS-WR" Desc="FCS-WR" PortABoxInfo="#x0100003a">
						<SyncMan>0010f40126000100010000008000f401f401001026010000</SyncMan>
						<SyncMan>0012f40122000100020000008000f401f401001222010000</SyncMan>
						<SyncMan>00140d006400010003000000000000000d00001464010000</SyncMan>
						<SyncMan>001615002000010004000000000000001500001620010000</SyncMan>
						<Fmmu>0000000000000000001400020100000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001600010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0010c8000012c800</BootStrapData>
						<DcMode>4672656552756e0000000000000000004672656552756e00000000000000000000000000000000000000000000000000000000000000000000000000000000000100000000000000000000000000000000000000000000000000000000000000</DcMode>
						<Pdo Name="Default TxPDO Mapping Object" Index="#x1a00" Flags="#x0010" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Flow Reading [REAL]" Index="#x6000" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Reading [REAL]" Index="#x6001" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Temperature Reading [REAL]" Index="#x6002" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Readback [REAL]" Index="#x6009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Setpoint [REAL]" Index="#x6009" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Default RxPDO Mapping Object" Index="#x1600" InOut="1" Flags="#x0010" SyncMan="2">
							<Entry Name="Flow SP [REAL]" Index="#x7003" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Actuator Control" Index="#x7009" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Actuator Position SP [REAL]" Index="#x7009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Ramp Time" Index="#x7008" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<CoeProfile ProfileNo="132387723"/>
					</EtherCAT>
				</Box>
				<Box Id="60" BoxType="9099" BoxFlags="#x00000020">
					<Name>MFC5 (FCS-WR)</Name>
					<ImageId>1011</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x0c05" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x0000066c" ProductCode="#x00001bbc" RevisionNo="#x00000004" InfoDataAddr="true" TimeoutMailbox2="10000" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="FCS-WR" Desc="FCS-WR" PortABoxInfo="#x0100003b">
						<SyncMan>0010f40126000100010000008000f401f401001026010000</SyncMan>
						<SyncMan>0012f40122000100020000008000f401f401001222010000</SyncMan>
						<SyncMan>00140d006400010003000000000000000d00001464010000</SyncMan>
						<SyncMan>001615002000010004000000000000001500001620010000</SyncMan>
						<Fmmu>0000000000000000001400020100000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001600010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0010c8000012c800</BootStrapData>
						<DcMode>4672656552756e0000000000000000004672656552756e00000000000000000000000000000000000000000000000000000000000000000000000000000000000100000000000000000000000000000000000000000000000000000000000000</DcMode>
						<Pdo Name="Default TxPDO Mapping Object" Index="#x1a00" Flags="#x0010" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Flow Reading [REAL]" Index="#x6000" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Reading [REAL]" Index="#x6001" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Temperature Reading [REAL]" Index="#x6002" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Readback [REAL]" Index="#x6009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Setpoint [REAL]" Index="#x6009" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Default RxPDO Mapping Object" Index="#x1600" InOut="1" Flags="#x0010" SyncMan="2">
							<Entry Name="Flow SP [REAL]" Index="#x7003" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Actuator Control" Index="#x7009" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Actuator Position SP [REAL]" Index="#x7009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Ramp Time" Index="#x7008" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<CoeProfile ProfileNo="132387723"/>
					</EtherCAT>
				</Box>
				<Box Id="61" BoxType="9099" BoxFlags="#x00000020">
					<Name>MFC6 (FCS-WR)</Name>
					<ImageId>1011</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x0c05" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x0000066c" ProductCode="#x00001bbc" RevisionNo="#x00000004" InfoDataAddr="true" TimeoutMailbox2="10000" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="FCS-WR" Desc="FCS-WR" PortABoxInfo="#x0100003c">
						<SyncMan>0010f40126000100010000008000f401f401001026010000</SyncMan>
						<SyncMan>0012f40122000100020000008000f401f401001222010000</SyncMan>
						<SyncMan>00140d006400010003000000000000000d00001464010000</SyncMan>
						<SyncMan>001615002000010004000000000000001500001620010000</SyncMan>
						<Fmmu>0000000000000000001400020100000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001600010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0010c8000012c800</BootStrapData>
						<DcMode>4672656552756e0000000000000000004672656552756e00000000000000000000000000000000000000000000000000000000000000000000000000000000000100000000000000000000000000000000000000000000000000000000000000</DcMode>
						<Pdo Name="Default TxPDO Mapping Object" Index="#x1a00" Flags="#x0010" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Flow Reading [REAL]" Index="#x6000" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Reading [REAL]" Index="#x6001" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Temperature Reading [REAL]" Index="#x6002" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Readback [REAL]" Index="#x6009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Setpoint [REAL]" Index="#x6009" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Default RxPDO Mapping Object" Index="#x1600" InOut="1" Flags="#x0010" SyncMan="2">
							<Entry Name="Flow SP [REAL]" Index="#x7003" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Actuator Control" Index="#x7009" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Actuator Position SP [REAL]" Index="#x7009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Ramp Time" Index="#x7008" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<CoeProfile ProfileNo="132387723"/>
					</EtherCAT>
				</Box>
				<Box Id="62" BoxType="9099" BoxFlags="#x00000020">
					<Name>MFC7 (FCS-WR)</Name>
					<ImageId>1011</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x0c05" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="47" FoeType="1" VendorId="#x0000066c" ProductCode="#x00001bbc" RevisionNo="#x00000004" InfoDataAddr="true" TimeoutMailbox2="10000" PortPhys="17" IdentificationAdo="308" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="FCS-WR" Desc="FCS-WR" PortABoxInfo="#x0100003d">
						<SyncMan>0010f40126000100010000008000f401f401001026010000</SyncMan>
						<SyncMan>0012f40122000100020000008000f401f401001222010000</SyncMan>
						<SyncMan>00140d006400010003000000000000000d00001464010000</SyncMan>
						<SyncMan>001615002000010004000000000000001500001620010000</SyncMan>
						<Fmmu>0000000000000000001400020100000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001600010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<BootStrapData>0010c8000012c800</BootStrapData>
						<DcMode>4672656552756e0000000000000000004672656552756e00000000000000000000000000000000000000000000000000000000000000000000000000000000000100000000000000000000000000000000000000000000000000000000000000</DcMode>
						<Pdo Name="Default TxPDO Mapping Object" Index="#x1a00" Flags="#x0010" SyncMan="3">
							<Entry Name="Active Exception Status" Index="#xf380">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Flow Reading [REAL]" Index="#x6000" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Pressure Reading [REAL]" Index="#x6001" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Temperature Reading [REAL]" Index="#x6002" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Readback [REAL]" Index="#x6009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Position Setpoint [REAL]" Index="#x6009" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Default RxPDO Mapping Object" Index="#x1600" InOut="1" Flags="#x0010" SyncMan="2">
							<Entry Name="Flow SP [REAL]" Index="#x7003" Sub="#x01">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Actuator Control" Index="#x7009" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
							<Entry Name="Actuator Position SP [REAL]" Index="#x7009" Sub="#x02">
								<Type>REAL</Type>
							</Entry>
							<Entry Name="Ramp Time" Index="#x7008" Sub="#x01">
								<Type>UDINT</Type>
							</Entry>
						</Pdo>
						<CoeProfile ProfileNo="132387723"/>
					</EtherCAT>
				</Box>
				<Box Id="66" BoxType="9099">
					<Name>VT03 (EX260-SEC2)</Name>
					<ImageId>1008</ImageId>
					<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000114" ProductCode="#x01000002" RevisionNo="#x00010002" PortPhys="17" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EX260-SEC2 EtherCAT SI Unit (32DO_NPN) Rev1.2" Desc="EX260-SEC2" PortABoxInfo="#x0100003e">
						<SyncMan>000f01004400010003000000000000000000000f44090000</SyncMan>
						<SyncMan>010f01004400010003000000000000000000010f44090000</SyncMan>
						<SyncMan>020f01004400010003000000000000000000020f44090000</SyncMan>
						<SyncMan>030f01004400010003000000000000000000030f44090000</SyncMan>
						<Fmmu>0000000000000000000f00020100000001000000000000000000000000000000</Fmmu>
						<Pdo Name="Byte 0" Index="#x1600" InOut="1" Flags="#x0011" SyncMan="0">
							<Entry Name="Output" Index="#x3101" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Byte 1" Index="#x1601" InOut="1" Flags="#x0011" SyncMan="1">
							<Entry Name="Output" Index="#x3101" Sub="#x02">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Byte 2" Index="#x1602" InOut="1" Flags="#x0011" SyncMan="2">
							<Entry Name="Output" Index="#x3101" Sub="#x03">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Byte 3" Index="#x1603" InOut="1" Flags="#x0011" SyncMan="3">
							<Entry Name="Output" Index="#x3101" Sub="#x04">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
					</EtherCAT>
				</Box>
				<Box Id="67" BoxType="9099">
					<Name>VT04 (EX260-SEC4)</Name>
					<ImageId>1008</ImageId>
					<EtherCAT SlaveType="1" PdiType="#x0104" CycleMBoxPollingTime="0" VendorId="#x00000114" ProductCode="#x01000004" RevisionNo="#x00010002" PortPhys="17" MaxSlotCount="256" MaxSlotGroupCount="1" SlotPdoIncrement="1" SlotIndexIncrement="16" Type="EX260-SEC4 EtherCAT SI Unit (16DO_NPN) Rev1.2" Desc="EX260-SEC4" PortABoxInfo="#x01000042">
						<SyncMan>000f01004400010003000000000000000000000f44090000</SyncMan>
						<SyncMan>010f01004400010003000000000000000000010f44090000</SyncMan>
						<Fmmu>0000000000000000000f00020100000001000000000000000000000000000000</Fmmu>
						<Pdo Name="Byte 0" Index="#x1600" InOut="1" Flags="#x0011" SyncMan="0">
							<Entry Name="Output" Index="#x3101" Sub="#x01">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Byte 1" Index="#x1601" InOut="1" Flags="#x0011" SyncMan="1">
							<Entry Name="Output" Index="#x3101" Sub="#x02">
								<Type>USINT</Type>
							</Entry>
						</Pdo>
					</EtherCAT>
				</Box>
				<EtherCAT/>
			</Device>
			<Device Id="7" DevType="111" DevFlags="#x0003" AmsPort="28679" AmsNetId="10.4.6.84.8.1" RemoteName="Device 7 (EtherCAT)" InfoImageId="8">
				<Name>Device 7 (EtherCAT)</Name>
				<AddressInfo>
					<Pnp>
						<DeviceDesc>Ethernet (TwinCAT-Intel PCI Ethernet Adapter (Gigab</DeviceDesc>
						<DeviceName>\DEVICE\{7DA04BCC-95A3-4C82-A8C6-ED8BAA068599}</DeviceName>
						<DeviceData>000105921d45</DeviceData>
					</Pnp>
				</AddressInfo>
				<Image Id="5" AddrType="9" ImageType="3">
					<Name>Image</Name>
				</Image>
				<Box Id="17" BoxType="9099" BoxFlags="#x00000020">
					<Name>Box 17 (Adapter)</Name>
					<ImageId>1012</ImageId>
					<EtherCAT SlaveType="2" PdiType="#x3c00" MboxDataLinkLayer="true" StateMBoxPolling="true" CycleMBoxPollingTime="0" CoeType="35" FoeType="1" VendorId="#x00881028" ProductCode="#x00010001" RevisionNo="#x00070001" InfoDataAddr="true" TimeoutStateChange1="2000" TimeoutStateChange2="9000" TimeoutMailbox2="2000" DownloadSlotCfg="true" PortPhys="17" SlotPdoIncrement="16" SlotIndexIncrement="256" Type="Adapter" Desc="Adapter" PortABoxInfo="#x00ffffff">
						<SyncMan>001080002600010001000000000080008000001026010000</SyncMan>
						<SyncMan>801080002200010002000000000080008000801022010000</SyncMan>
						<SyncMan>001142006400010003000000000000000200001164010000</SyncMan>
						<SyncMan>001442002000010004000000000000000200001420010000</SyncMan>
						<Fmmu>0000000000000000001100020100000001000000000000000000000000000000</Fmmu>
						<Fmmu>0000000000000000001400010100000002000000000000000000000000000000</Fmmu>
						<Fmmu>00000000000000000d0800010100000003000000000000000000000000000000</Fmmu>
						<Pdo Name="Inputs" Index="#x1a00" Flags="#x0290" SyncMan="3">
							<Entry Name="word_1" Index="#x6000" Sub="#x01" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Outputs" Index="#x1600" InOut="1" Flags="#x0290" SyncMan="2">
							<Entry Name="word_1" Index="#x7000" Sub="#x01" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Inputs" Index="#x1a10" Flags="#x0290" SyncMan="3">
							<Entry Name="word_1" Index="#x6100" Sub="#x01" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_2" Index="#x6100" Sub="#x02" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_3" Index="#x6100" Sub="#x03" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_4" Index="#x6100" Sub="#x04" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_5" Index="#x6100" Sub="#x05" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_6" Index="#x6100" Sub="#x06" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_7" Index="#x6100" Sub="#x07" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_8" Index="#x6100" Sub="#x08" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_9" Index="#x6100" Sub="#x09" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_10" Index="#x6100" Sub="#x0a" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_11" Index="#x6100" Sub="#x0b" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_12" Index="#x6100" Sub="#x0c" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_13" Index="#x6100" Sub="#x0d" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_14" Index="#x6100" Sub="#x0e" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_15" Index="#x6100" Sub="#x0f" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_16" Index="#x6100" Sub="#x10" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Outputs" Index="#x1610" InOut="1" Flags="#x0290" SyncMan="2">
							<Entry Name="word_1" Index="#x7100" Sub="#x01" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_2" Index="#x7100" Sub="#x02" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_3" Index="#x7100" Sub="#x03" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_4" Index="#x7100" Sub="#x04" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_5" Index="#x7100" Sub="#x05" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_6" Index="#x7100" Sub="#x06" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_7" Index="#x7100" Sub="#x07" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_8" Index="#x7100" Sub="#x08" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_9" Index="#x7100" Sub="#x09" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_10" Index="#x7100" Sub="#x0a" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_11" Index="#x7100" Sub="#x0b" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_12" Index="#x7100" Sub="#x0c" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_13" Index="#x7100" Sub="#x0d" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_14" Index="#x7100" Sub="#x0e" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_15" Index="#x7100" Sub="#x0f" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_16" Index="#x7100" Sub="#x10" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Inputs" Index="#x1a20" Flags="#x0290" SyncMan="3">
							<Entry Name="word_1" Index="#x6200" Sub="#x01" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_2" Index="#x6200" Sub="#x02" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_3" Index="#x6200" Sub="#x03" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_4" Index="#x6200" Sub="#x04" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_5" Index="#x6200" Sub="#x05" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_6" Index="#x6200" Sub="#x06" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_7" Index="#x6200" Sub="#x07" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_8" Index="#x6200" Sub="#x08" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_9" Index="#x6200" Sub="#x09" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_10" Index="#x6200" Sub="#x0a" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_11" Index="#x6200" Sub="#x0b" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_12" Index="#x6200" Sub="#x0c" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_13" Index="#x6200" Sub="#x0d" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_14" Index="#x6200" Sub="#x0e" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_15" Index="#x6200" Sub="#x0f" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_16" Index="#x6200" Sub="#x10" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<Pdo Name="Outputs" Index="#x1620" InOut="1" Flags="#x0290" SyncMan="2">
							<Entry Name="word_1" Index="#x7200" Sub="#x01" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_2" Index="#x7200" Sub="#x02" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_3" Index="#x7200" Sub="#x03" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_4" Index="#x7200" Sub="#x04" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_5" Index="#x7200" Sub="#x05" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_6" Index="#x7200" Sub="#x06" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_7" Index="#x7200" Sub="#x07" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_8" Index="#x7200" Sub="#x08" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_9" Index="#x7200" Sub="#x09" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_10" Index="#x7200" Sub="#x0a" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_11" Index="#x7200" Sub="#x0b" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_12" Index="#x7200" Sub="#x0c" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_13" Index="#x7200" Sub="#x0d" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_14" Index="#x7200" Sub="#x0e" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_15" Index="#x7200" Sub="#x0f" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
							<Entry Name="word_16" Index="#x7200" Sub="#x10" Flags="#x00001000">
								<Type>UINT</Type>
							</Entry>
						</Pdo>
						<CoeProfile ProfileNo="5001"/>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
							<Module Id="#x03090001" Type="Input/Outnput 1 words" Class="xb_dig_inout">
								<Name>Module 1 (Input/Outnput 1 words)</Name>
								<ImageId>65</ImageId>
								<ModuleData>2810880001020000000004000000000000000000000000000000000000000000</ModuleData>
								<PdoIndex>6656</PdoIndex>
								<PdoIndex>5632</PdoIndex>
							</Module>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
							<Module Id="#x03090007" Type="Input/Outnput 16 words" Class="xb_dig_inout">
								<Name>Module 2 (Input/Outnput 16 words)</Name>
								<ImageId>65</ImageId>
								<ModuleData>2810880010020000000004000000000000000000000000000000000000000000</ModuleData>
								<PdoIndex>6672</PdoIndex>
								<PdoIndex>5648</PdoIndex>
							</Module>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
							<Module Id="#x03090008" Type="Input/Outnput 16 words" Class="xb_dig_inout">
								<Name>Module 3 (Input/Outnput 16 words)</Name>
								<ImageId>65</ImageId>
								<ModuleData>2810880010020000000004000000000000000000000000000000000000000000</ModuleData>
								<PdoIndex>6688</PdoIndex>
								<PdoIndex>5664</PdoIndex>
							</Module>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
						<Slot Name="Terminals">
							<SlotData>0000000001000000100000000001000000000000000000000000000000000000</SlotData>
							<ModuleClass Class="xb_dig_in" Name="Digital Input Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_out" Name="Digital Output Terminals" VendorId="8917032"/>
							<ModuleClass Class="xb_dig_inout" Name="Digital IO Terminals" VendorId="8917032"/>
						</Slot>
					</EtherCAT>
				</Box>
				<EtherCAT/>
			</Device>
		</Io>
	</Project>
	<Mappings>
		<MappingInfo Identifier="{00000000-2001-0850-0020-500810000403}" Id="#x02030060"/>
		<MappingInfo Identifier="{00000000-2001-0850-0020-500850000403}" Id="#x02030010"/>
		<MappingInfo Identifier="{00000000-2001-0850-0020-500860000403}" Id="#x02030030"/>
		<MappingInfo Identifier="{00000000-2001-0850-0020-500871000403}" Id="#x02030040"/>
		<MappingInfo Identifier="{03040010-0010-0304-1000-040310000403}" Id="#x02030050" Watchdog="04000000040000000400000004000000"/>
		<MappingInfo Identifier="{03040060-0010-0304-6000-040310000403}" Id="#x02030020" Watchdog="04000000040000000400000004000000"/>
		<OwnerA Name="TIID^Device 1 (EtherCAT)">
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C11 (EL1918)">
				<Link VarA="CPU (EK1200)^C12 (EL1904)^Module 1 (FSOES)^RxPDO^FSOE" VarB="ConnectionInputs^Message_4 TxPDO"/>
				<Link VarA="CPU (EK1200)^C13 (EL1904)^Module 1 (FSOES)^TxPDO^FSOE" VarB="ConnectionOutputs^Message_5 RxPDO"/>
				<Link VarA="CPU (EK1200)^C14 (EL2904)^Module 1 (FSOES)^RxPDO^FSOE" VarB="ConnectionInputs^Message_6 TxPDO"/>
				<Link VarA="CPU (EK1200)^C14 (EL2904)^Module 1 (FSOES)^TxPDO^FSOE" VarB="ConnectionOutputs^Message_6 RxPDO"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C12 (EL1904)">
				<Link VarA="CPU (EK1200)^C11 (EL1918)^ConnectionOutputs^Message_4 RxPDO" VarB="Module 1 (FSOES)^TxPDO^FSOE"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C13 (EL1904)">
				<Link VarA="CPU (EK1200)^C11 (EL1918)^ConnectionInputs^Message_5 TxPDO" VarB="Module 1 (FSOES)^RxPDO^FSOE"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C38 (EL1904)">
				<Link VarA="CPU (EK1200)^C11 (EL1918)^ConnectionOutputs^Message_7 RxPDO" VarB="Module 1 (FSOES)^TxPDO^FSOE"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C39 (EL1904)">
				<Link VarA="CPU (EK1200)^C11 (EL1918)^ConnectionInputs^Message_8 TxPDO" VarB="Module 1 (FSOES)^RxPDO^FSOE"/>
				<Link VarA="CPU (EK1200)^C11 (EL1918)^ConnectionOutputs^Message_8 RxPDO" VarB="Module 1 (FSOES)^TxPDO^FSOE"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C43 (EL2904)">
				<Link VarA="CPU (EK1200)^C11 (EL1918)^ConnectionInputs^Message_9 TxPDO" VarB="Module 1 (FSOES)^RxPDO^FSOE"/>
			</OwnerB>
		</OwnerA>
		<OwnerA Name="TIID^Device 6 (EtherCAT)">
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C11 (EL1918)">
				<Link VarA="IGS (EK1100)^C38 (EL1904)^Module 1 (FSOES)^RxPDO^FSOE" VarB="ConnectionInputs^Message_7 TxPDO"/>
				<Link VarA="IGS (EK1100)^C43 (EL2904)^Module 1 (FSOES)^TxPDO^FSOE" VarB="ConnectionOutputs^Message_9 RxPDO"/>
			</OwnerB>
		</OwnerA>
		<OwnerA Name="TIPC^PLC^PLC Instance">
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C02 (EL1889)">
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[10]" VarB="Channel 10^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[11]" VarB="Channel 11^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[12]" VarB="Channel 12^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[13]" VarB="Channel 13^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[14]" VarB="Channel 14^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[15]" VarB="Channel 15^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[16]" VarB="Channel 16^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[1]" VarB="Channel 1^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[2]" VarB="Channel 2^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[3]" VarB="Channel 3^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[4]" VarB="Channel 4^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[5]" VarB="Channel 5^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[6]" VarB="Channel 6^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[7]" VarB="Channel 7^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[8]" VarB="Channel 8^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C02[9]" VarB="Channel 9^Input"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C03 (EL1889)">
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[10]" VarB="Channel 10^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[11]" VarB="Channel 11^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[12]" VarB="Channel 12^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[13]" VarB="Channel 13^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[14]" VarB="Channel 14^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[15]" VarB="Channel 15^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[16]" VarB="Channel 16^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[1]" VarB="Channel 1^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[2]" VarB="Channel 2^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[3]" VarB="Channel 3^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[4]" VarB="Channel 4^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[5]" VarB="Channel 5^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[6]" VarB="Channel 6^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[7]" VarB="Channel 7^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[8]" VarB="Channel 8^Input"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C03[9]" VarB="Channel 9^Input"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C04 (EL3318)">
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C04[1]" VarB="TC Channel 1^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C04[2]" VarB="TC Channel 2^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C04[3]" VarB="TC Channel 3^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C04[4]" VarB="TC Channel 4^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C04[5]" VarB="TC Channel 5^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C04[6]" VarB="TC Channel 6^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C04[7]" VarB="TC Channel 7^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C04[8]" VarB="TC Channel 8^Value"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C05 (EL3318)">
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C05[1]" VarB="TC Channel 1^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C05[2]" VarB="TC Channel 2^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C05[3]" VarB="TC Channel 3^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C05[4]" VarB="TC Channel 4^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C05[5]" VarB="TC Channel 5^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C05[6]" VarB="TC Channel 6^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C05[7]" VarB="TC Channel 7^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C05[8]" VarB="TC Channel 8^Value"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C06 (EL3164)">
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C06[1]" VarB="AI Standard Channel 1^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C06[2]" VarB="AI Standard Channel 2^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C06[3]" VarB="AI Standard Channel 3^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C06[4]" VarB="AI Standard Channel 4^Value"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C07 (EL2889)">
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[10]" VarB="Channel 10^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[11]" VarB="Channel 11^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[12]" VarB="Channel 12^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[13]" VarB="Channel 13^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[14]" VarB="Channel 14^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[15]" VarB="Channel 15^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[16]" VarB="Channel 16^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[1]" VarB="Channel 1^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[2]" VarB="Channel 2^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[3]" VarB="Channel 3^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[4]" VarB="Channel 4^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[5]" VarB="Channel 5^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[6]" VarB="Channel 6^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[7]" VarB="Channel 7^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[8]" VarB="Channel 8^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C07[9]" VarB="Channel 9^Output"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C08 (EL2889)">
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[10]" VarB="Channel 10^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[11]" VarB="Channel 11^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[12]" VarB="Channel 12^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[13]" VarB="Channel 13^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[14]" VarB="Channel 14^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[15]" VarB="Channel 15^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[16]" VarB="Channel 16^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[1]" VarB="Channel 1^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[2]" VarB="Channel 2^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[3]" VarB="Channel 3^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[4]" VarB="Channel 4^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[5]" VarB="Channel 5^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[6]" VarB="Channel 6^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[7]" VarB="Channel 7^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[8]" VarB="Channel 8^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C08[9]" VarB="Channel 9^Output"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C09 (EL2889)">
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[10]" VarB="Channel 10^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[11]" VarB="Channel 11^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[12]" VarB="Channel 12^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[13]" VarB="Channel 13^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[14]" VarB="Channel 14^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[15]" VarB="Channel 15^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[16]" VarB="Channel 16^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[1]" VarB="Channel 1^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[2]" VarB="Channel 2^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[3]" VarB="Channel 3^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[4]" VarB="Channel 4^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[5]" VarB="Channel 5^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[6]" VarB="Channel 6^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[7]" VarB="Channel 7^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[8]" VarB="Channel 8^Output"/>
				<Link VarA="PlcTask Outputs^ECC.CHAMBER_OUT^C09[9]" VarB="Channel 9^Output"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C11 (EL1918)">
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^DRY_PUMP_PW_EN" VarB="StandardInputs^Standard Out Var 27"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^EV1_EN" VarB="StandardInputs^Standard Out Var 10"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^EV2_EN" VarB="StandardInputs^Standard Out Var 19"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^EV3_EN" VarB="StandardInputs^Standard Out Var 20"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^EV4_EN" VarB="StandardInputs^Standard Out Var 18"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^HTR_APC_EN" VarB="StandardInputs^Standard Out Var 17"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^HTR_CHAMBER_EN" VarB="StandardInputs^Standard Out Var 15"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^HTR_FORLINE_EN" VarB="StandardInputs^Standard Out Var 14"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^HTR_GAS_BOX" VarB="StandardInputs^Standard Out Var 13"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^HTR_GATE_VALVE" VarB="StandardInputs^Standard Out Var 12"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^HTR_LID" VarB="StandardInputs^Standard Out Var 11"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^PROCESS_EN" VarB="StandardInputs^Standard Out Var 28"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^SPLC_Com_err" VarB="StandardInputs^Standard Out Var 42"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^SPLC_FB_Err" VarB="StandardInputs^Standard Out Var 43"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^Status_Lid" VarB="StandardInputs^Standard Out Var 46"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^TRANSFER_EN" VarB="StandardInputs^Standard Out Var 26"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^VALVE_ACID_EXHAUST_OPEN_EN" VarB="StandardInputs^Standard Out Var 25"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^VALVE_APC_OPEN_EN" VarB="StandardInputs^Standard Out Var 21"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^VALVE_CM_OPEN_EN" VarB="StandardInputs^Standard Out Var 24"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^VALVE_DRY_PUMP_EN" VarB="StandardInputs^Standard Out Var 44"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^VALVE_TMP_BACK_OPEN_EN" VarB="StandardInputs^Standard Out Var 22"/>
				<Link VarA="PlcTask Inputs^GV_IL.SPLC_TO_PLC^WAFER_MOVING_IN_EN" VarB="StandardInputs^Standard Out Var 16"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^APC_Temp_OK" VarB="StandardOutputs^Standard In Var 31"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^Chamber_Temp_OK" VarB="StandardOutputs^Standard In Var 30"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^Gas_Line_Temp_OK" VarB="StandardOutputs^Standard In Var 33"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^Gate_Valve_Temp_OK" VarB="StandardOutputs^Standard In Var 32"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^Lid_Temp_OK" VarB="StandardOutputs^Standard In Var 29"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^PS1_Interlock_OK" VarB="StandardOutputs^Standard In Var 35"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^PS2_Interlock_OK" VarB="StandardOutputs^Standard In Var 36"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^SPLC_ErrorAcknowledgement" VarB="StandardOutputs^Standard In Var 1"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^SPLC_Restart" VarB="StandardOutputs^Standard In Var 41"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^SPLC_Run" VarB="StandardOutputs^Standard In Var 2"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^TMP_Interlock_OK" VarB="StandardOutputs^Standard In Var 34"/>
				<Link VarA="PlcTask Outputs^GV_IL.PLC_TO_SPLC^VG101_LOWER_10Torr" VarB="StandardOutputs^Standard In Var 45"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 1 (EtherCAT)^CPU (EK1200)^C15 (EL3318)">
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C15[1]" VarB="TC Channel 1^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C15[2]" VarB="TC Channel 2^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C15[3]" VarB="TC Channel 3^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C15[4]" VarB="TC Channel 4^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C15[5]" VarB="TC Channel 5^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C15[6]" VarB="TC Channel 6^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C15[7]" VarB="TC Channel 7^Value"/>
				<Link VarA="PlcTask Inputs^ECC.CHAMBER_IN^C15[8]" VarB="TC Channel 8^Value"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^BA1 (BPG402)">
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Active_Exception_Status" VarB="Transmit PDO Mapping_2^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Active_Sensor_Number_Module_1" VarB="Transmit PDO Mapping^Combination Gauge Active Sensor Number Module 1"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Active_Sensor_Number_Module_2" VarB="Transmit PDO Mapping_1^Combination Gauge Active Sensor Number Module 2"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Active_Value_Module_1" VarB="Transmit PDO Mapping^Combination Gauge Active Value Module 1"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Active_Value_Module_2" VarB="Transmit PDO Mapping_1^Combination Gauge Active Value Module 2"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Overrange_Exceeded_Module_1" VarB="Transmit PDO Mapping^Combination Gauge Overrange Exceeded Module 1"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Overrange_Exceeded_Module_2" VarB="Transmit PDO Mapping_1^Combination Gauge Overrange Exceeded Module 2"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Reading_Valid_Module_1" VarB="Transmit PDO Mapping^Combination Gauge Reading Valid Module 1"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Reading_Valid_Module_2" VarB="Transmit PDO Mapping_1^Combination Gauge Reading Valid Module 2"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Underrange_Exceeded_Module_1" VarB="Transmit PDO Mapping^Combination Gauge Underrange Exceeded Module 1"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Combination_Gauge_Underrange_Exceeded_Module_2" VarB="Transmit PDO Mapping_1^Combination Gauge Underrange Exceeded Module 2"/>
				<Link VarA="PlcTask Inputs^ECC.BA1_PV^Trip_Point_Output_All_Instance" VarB="Transmit PDO Mapping_2^Trip Point Output All Instance"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C32 (EL3164)">
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C32[1]" VarB="AI Standard Channel 1^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C32[2]" VarB="AI Standard Channel 2^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C32[3]" VarB="AI Standard Channel 3^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C32[4]" VarB="AI Standard Channel 4^Value"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C33 (EL3164)">
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C33[1]" VarB="AI Standard Channel 1^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C33[2]" VarB="AI Standard Channel 2^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C33[3]" VarB="AI Standard Channel 3^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C33[4]" VarB="AI Standard Channel 4^Value"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C34 (EL3164)">
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C34[1]" VarB="AI Standard Channel 1^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C34[2]" VarB="AI Standard Channel 2^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C34[3]" VarB="AI Standard Channel 3^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C34[4]" VarB="AI Standard Channel 4^Value"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C35 (EL3154)">
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C35[1]" VarB="AI Standard Channel 1^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C35[2]" VarB="AI Standard Channel 2^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C35[3]" VarB="AI Standard Channel 3^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C35[4]" VarB="AI Standard Channel 4^Value"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C36 (EL1889)">
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[10]" VarB="Channel 10^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[11]" VarB="Channel 11^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[12]" VarB="Channel 12^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[13]" VarB="Channel 13^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[14]" VarB="Channel 14^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[15]" VarB="Channel 15^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[16]" VarB="Channel 16^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[1]" VarB="Channel 1^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[2]" VarB="Channel 2^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[3]" VarB="Channel 3^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[4]" VarB="Channel 4^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[5]" VarB="Channel 5^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[6]" VarB="Channel 6^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[7]" VarB="Channel 7^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[8]" VarB="Channel 8^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C36[9]" VarB="Channel 9^Input"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C37 (EL1889)">
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[10]" VarB="Channel 10^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[11]" VarB="Channel 11^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[12]" VarB="Channel 12^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[13]" VarB="Channel 13^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[14]" VarB="Channel 14^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[15]" VarB="Channel 15^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[16]" VarB="Channel 16^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[1]" VarB="Channel 1^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[2]" VarB="Channel 2^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[3]" VarB="Channel 3^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[4]" VarB="Channel 4^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[5]" VarB="Channel 5^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[6]" VarB="Channel 6^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[7]" VarB="Channel 7^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[8]" VarB="Channel 8^Input"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C37[9]" VarB="Channel 9^Input"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C40 (EL3318)">
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C40[1]" VarB="TC Channel 1^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C40[2]" VarB="TC Channel 2^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C40[3]" VarB="TC Channel 3^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C40[4]" VarB="TC Channel 4^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C40[5]" VarB="TC Channel 5^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C40[6]" VarB="TC Channel 6^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C40[7]" VarB="TC Channel 7^Value"/>
				<Link VarA="PlcTask Inputs^ECC.IGS_IN^C40[8]" VarB="TC Channel 8^Value"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^IGS (EK1100)^C42 (EL2889)">
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[10]" VarB="Channel 10^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[11]" VarB="Channel 11^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[12]" VarB="Channel 12^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[13]" VarB="Channel 13^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[14]" VarB="Channel 14^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[15]" VarB="Channel 15^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[16]" VarB="Channel 16^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[1]" VarB="Channel 1^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[2]" VarB="Channel 2^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[3]" VarB="Channel 3^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[4]" VarB="Channel 4^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[5]" VarB="Channel 5^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[6]" VarB="Channel 6^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[7]" VarB="Channel 7^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[8]" VarB="Channel 8^Output"/>
				<Link VarA="PlcTask Outputs^ECC.IGS_OUT^C42[9]" VarB="Channel 9^Output"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^MFC1 (FCS-WR)">
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[1]^Active_Exception_Status" VarB="Default TxPDO Mapping Object^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[1]^Flow_Reading" VarB="Default TxPDO Mapping Object^Flow Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[1]^Position_Readback" VarB="Default TxPDO Mapping Object^Position Readback [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[1]^Position_Setpoint" VarB="Default TxPDO Mapping Object^Position Setpoint [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[1]^Pressure_Reading" VarB="Default TxPDO Mapping Object^Pressure Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[1]^Temperature_Reading" VarB="Default TxPDO Mapping Object^Temperature Reading [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[1]^Actuator_Control" VarB="Default RxPDO Mapping Object^Actuator Control"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[1]^Actuator_Position_SP" VarB="Default RxPDO Mapping Object^Actuator Position SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[1]^Flow_SP" VarB="Default RxPDO Mapping Object^Flow SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[1]^Ramp_Time" VarB="Default RxPDO Mapping Object^Ramp Time"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^MFC2 (FCS-WR)">
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[2]^Active_Exception_Status" VarB="Default TxPDO Mapping Object^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[2]^Flow_Reading" VarB="Default TxPDO Mapping Object^Flow Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[2]^InputToggle" VarB="WcState^InputToggle"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[2]^Position_Readback" VarB="Default TxPDO Mapping Object^Position Readback [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[2]^Position_Setpoint" VarB="Default TxPDO Mapping Object^Position Setpoint [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[2]^Pressure_Reading" VarB="Default TxPDO Mapping Object^Pressure Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[2]^State" VarB="InfoData^State"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[2]^Temperature_Reading" VarB="Default TxPDO Mapping Object^Temperature Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[2]^WcState" VarB="WcState^WcState"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[2]^Actuator_Control" VarB="Default RxPDO Mapping Object^Actuator Control"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[2]^Actuator_Position_SP" VarB="Default RxPDO Mapping Object^Actuator Position SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[2]^Flow_SP" VarB="Default RxPDO Mapping Object^Flow SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[2]^Ramp_Time" VarB="Default RxPDO Mapping Object^Ramp Time"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^MFC3 (FCS-WR)">
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[3]^Active_Exception_Status" VarB="Default TxPDO Mapping Object^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[3]^Flow_Reading" VarB="Default TxPDO Mapping Object^Flow Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[3]^InputToggle" VarB="WcState^InputToggle"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[3]^Position_Readback" VarB="Default TxPDO Mapping Object^Position Readback [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[3]^Position_Setpoint" VarB="Default TxPDO Mapping Object^Position Setpoint [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[3]^Pressure_Reading" VarB="Default TxPDO Mapping Object^Pressure Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[3]^State" VarB="InfoData^State"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[3]^Temperature_Reading" VarB="Default TxPDO Mapping Object^Temperature Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[3]^WcState" VarB="WcState^WcState"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[3]^Actuator_Control" VarB="Default RxPDO Mapping Object^Actuator Control"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[3]^Actuator_Position_SP" VarB="Default RxPDO Mapping Object^Actuator Position SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[3]^Flow_SP" VarB="Default RxPDO Mapping Object^Flow SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[3]^Ramp_Time" VarB="Default RxPDO Mapping Object^Ramp Time"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^MFC5 (FCS-WR)">
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[5]^Active_Exception_Status" VarB="Default TxPDO Mapping Object^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[5]^Flow_Reading" VarB="Default TxPDO Mapping Object^Flow Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[5]^InputToggle" VarB="WcState^InputToggle"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[5]^Position_Readback" VarB="Default TxPDO Mapping Object^Position Readback [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[5]^Position_Setpoint" VarB="Default TxPDO Mapping Object^Position Setpoint [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[5]^Pressure_Reading" VarB="Default TxPDO Mapping Object^Pressure Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[5]^State" VarB="InfoData^State"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[5]^Temperature_Reading" VarB="Default TxPDO Mapping Object^Temperature Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[5]^WcState" VarB="WcState^WcState"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[5]^Actuator_Control" VarB="Default RxPDO Mapping Object^Actuator Control"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[5]^Actuator_Position_SP" VarB="Default RxPDO Mapping Object^Actuator Position SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[5]^Flow_SP" VarB="Default RxPDO Mapping Object^Flow SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[5]^Ramp_Time" VarB="Default RxPDO Mapping Object^Ramp Time"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^MFC6 (FCS-WR)">
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[6]^Active_Exception_Status" VarB="Default TxPDO Mapping Object^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[6]^Flow_Reading" VarB="Default TxPDO Mapping Object^Flow Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[6]^InputToggle" VarB="WcState^InputToggle"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[6]^Position_Readback" VarB="Default TxPDO Mapping Object^Position Readback [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[6]^Position_Setpoint" VarB="Default TxPDO Mapping Object^Position Setpoint [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[6]^Pressure_Reading" VarB="Default TxPDO Mapping Object^Pressure Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[6]^State" VarB="InfoData^State"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[6]^Temperature_Reading" VarB="Default TxPDO Mapping Object^Temperature Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[6]^WcState" VarB="WcState^WcState"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[6]^Actuator_Control" VarB="Default RxPDO Mapping Object^Actuator Control"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[6]^Actuator_Position_SP" VarB="Default RxPDO Mapping Object^Actuator Position SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[6]^Flow_SP" VarB="Default RxPDO Mapping Object^Flow SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[6]^Ramp_Time" VarB="Default RxPDO Mapping Object^Ramp Time"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^MFC7 (FCS-WR)">
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[7]^Active_Exception_Status" VarB="Default TxPDO Mapping Object^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[7]^Flow_Reading" VarB="Default TxPDO Mapping Object^Flow Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[7]^InputToggle" VarB="WcState^InputToggle"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[7]^Position_Readback" VarB="Default TxPDO Mapping Object^Position Readback [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[7]^Position_Setpoint" VarB="Default TxPDO Mapping Object^Position Setpoint [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[7]^Pressure_Reading" VarB="Default TxPDO Mapping Object^Pressure Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[7]^State" VarB="InfoData^State"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[7]^Temperature_Reading" VarB="Default TxPDO Mapping Object^Temperature Reading [REAL]"/>
				<Link VarA="PlcTask Inputs^ECC.MFC_PV[7]^WcState" VarB="WcState^WcState"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[7]^Actuator_Control" VarB="Default RxPDO Mapping Object^Actuator Control"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[7]^Actuator_Position_SP" VarB="Default RxPDO Mapping Object^Actuator Position SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[7]^Flow_SP" VarB="Default RxPDO Mapping Object^Flow SP [REAL]"/>
				<Link VarA="PlcTask Outputs^ECC.MFC_SV[7]^Ramp_Time" VarB="Default RxPDO Mapping Object^Ramp Time"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^PEND-V (VAT valve S653)">
				<Link VarA="PlcTask Inputs^ECC.APC_PV^Actual_Position" VarB="TxPDO Mapping Inputs Float 1^Actual Position"/>
				<Link VarA="PlcTask Inputs^ECC.APC_PV^Actual_Pressure" VarB="TxPDO Mapping Inputs Float 1^Actual Pressure"/>
				<Link VarA="PlcTask Inputs^ECC.APC_PV^Control_Mode" VarB="TxPDO Mapping Inputs Float 1^Control Mode"/>
				<Link VarA="PlcTask Inputs^ECC.APC_PV^Error_Number" VarB="TxPDO Mapping Inputs Float 1^Error Number"/>
				<Link VarA="PlcTask Inputs^ECC.APC_PV^Extended_Warnings" VarB="TxPDO Mapping Inputs Float 1^Extended Warnings"/>
				<Link VarA="PlcTask Inputs^ECC.APC_PV^General_Status" VarB="TxPDO Mapping Inputs Float 1^General Status"/>
				<Link VarA="PlcTask Inputs^ECC.APC_PV^General_Warnings" VarB="TxPDO Mapping Inputs Float 1^General Warnings"/>
				<Link VarA="PlcTask Inputs^ECC.APC_PV^Pressure_Sensor_1" VarB="TxPDO Mapping Inputs Float 1^Pressure Sensor 1"/>
				<Link VarA="PlcTask Inputs^ECC.APC_PV^Pressure_Sensor_2" VarB="TxPDO Mapping Inputs Float 1^Pressure Sensor 2"/>
				<Link VarA="PlcTask Outputs^ECC.APC_SV^Control_Mode" VarB="RxPDO Mapping Outputs Float 1^Control Mode"/>
				<Link VarA="PlcTask Outputs^ECC.APC_SV^General_Control_Setpoint" VarB="RxPDO Mapping Outputs Float 1^General Control Setpoint"/>
				<Link VarA="PlcTask Outputs^ECC.APC_SV^PID_No" VarB="RxPDO Mapping Outputs User 1^Pressure Controller Selector"/>
				<Link VarA="PlcTask Outputs^ECC.APC_SV^Pressure_Input_Digital_Sensor_1" VarB="RxPDO Mapping Outputs Float 1^Pressure Input Digital Sensor 1"/>
				<Link VarA="PlcTask Outputs^ECC.APC_SV^Pressure_Input_Digital_Sensor_2" VarB="RxPDO Mapping Outputs Float 1^Pressure Input Digital Sensor 2"/>
				<Link VarA="PlcTask Outputs^ECC.APC_SV^Pressure_Ramp_Time" VarB="RxPDO Mapping Outputs Float 1^Pressure Ramp Time"/>
				<Link VarA="PlcTask Outputs^ECC.APC_SV^Target_Position" VarB="RxPDO Mapping Outputs Float 1^Target Position"/>
				<Link VarA="PlcTask Outputs^ECC.APC_SV^Target_Pressure" VarB="RxPDO Mapping Outputs Float 1^Target Pressure"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^PG10_VG103 (CDG)">
				<Link VarA="PlcTask Inputs^ECC.VG103_PV^Active_Exception_Status" VarB="Transmit PDO Mapping_2^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.VG103_PV^Overrange_Exceeded1" VarB="Transmit PDO Mapping^Overrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG103_PV^Overrange_Exceeded2" VarB="Transmit PDO Mapping_1^Overrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG103_PV^Reading_Valid1" VarB="Transmit PDO Mapping^Reading Valid"/>
				<Link VarA="PlcTask Inputs^ECC.VG103_PV^Reading_Valid2" VarB="Transmit PDO Mapping_1^Reading Valid"/>
				<Link VarA="PlcTask Inputs^ECC.VG103_PV^Sensor_Value1" VarB="Transmit PDO Mapping^Sensor Value"/>
				<Link VarA="PlcTask Inputs^ECC.VG103_PV^Sensor_Value2" VarB="Transmit PDO Mapping_1^Sensor Value"/>
				<Link VarA="PlcTask Inputs^ECC.VG103_PV^Underrange_Exceeded1" VarB="Transmit PDO Mapping^Underrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG103_PV^Underrange_Exceeded2" VarB="Transmit PDO Mapping_1^Underrange Exceeded"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^PS10_VG101 (CDG)">
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Active_Exception_Status" VarB="Transmit PDO Mapping_2^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Overrange_Exceeded1" VarB="Transmit PDO Mapping^Overrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Overrange_Exceeded2" VarB="Transmit PDO Mapping_1^Overrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Reading_Valid1" VarB="Transmit PDO Mapping^Reading Valid"/>
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Reading_Valid2" VarB="Transmit PDO Mapping_1^Reading Valid"/>
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Sensor_Value1" VarB="Transmit PDO Mapping^Sensor Value"/>
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Sensor_Value2" VarB="Transmit PDO Mapping_1^Sensor Value"/>
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Trip_Point_Output_All_Insta" VarB="Transmit PDO Mapping_2^Trip Point Output All Instances"/>
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Underrange_Exceeded1" VarB="Transmit PDO Mapping^Underrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG101_PV^Underrange_Exceeded2" VarB="Transmit PDO Mapping_1^Underrange Exceeded"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^PS11_VG102 (CDG)">
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Active_Exception_Status" VarB="Transmit PDO Mapping_2^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Overrange_Exceeded1" VarB="Transmit PDO Mapping^Overrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Overrange_Exceeded2" VarB="Transmit PDO Mapping_1^Overrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Reading_Valid1" VarB="Transmit PDO Mapping^Reading Valid"/>
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Reading_Valid2" VarB="Transmit PDO Mapping_1^Reading Valid"/>
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Sensor_Value1" VarB="Transmit PDO Mapping^Sensor Value"/>
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Sensor_Value2" VarB="Transmit PDO Mapping_1^Sensor Value"/>
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Trip_Point_Output_All_Insta" VarB="Transmit PDO Mapping_2^Trip Point Output All Instances"/>
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Underrange_Exceeded1" VarB="Transmit PDO Mapping^Underrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG102_PV^Underrange_Exceeded2" VarB="Transmit PDO Mapping_1^Underrange Exceeded"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^PS12_VG104 (CDG)">
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Active_Exception_Status" VarB="Transmit PDO Mapping_2^Active Exception Status"/>
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Overrange_Exceeded1" VarB="Transmit PDO Mapping^Overrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Overrange_Exceeded2" VarB="Transmit PDO Mapping_1^Overrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Reading_Valid1" VarB="Transmit PDO Mapping^Reading Valid"/>
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Reading_Valid2" VarB="Transmit PDO Mapping_1^Reading Valid"/>
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Sensor_Value1" VarB="Transmit PDO Mapping^Sensor Value"/>
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Sensor_Value2" VarB="Transmit PDO Mapping_1^Sensor Value"/>
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Trip_Point_Output_All_Insta" VarB="Transmit PDO Mapping_2^Trip Point Output All Instances"/>
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Underrange_Exceeded1" VarB="Transmit PDO Mapping^Underrange Exceeded"/>
				<Link VarA="PlcTask Inputs^ECC.VG104_PV^Underrange_Exceeded2" VarB="Transmit PDO Mapping_1^Underrange Exceeded"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^TMP(STP)">
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Acceleration" VarB="TXPDO^Acceleration"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Alarm" VarB="TXPDO^Alarm"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Deceleration_Includes_Braking" VarB="TXPDO^Deceleration (Includes Braking)"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Normal" VarB="TXPDO^Normal"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Remote_Local" VarB="TXPDO^Remote/Local"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Rotation" VarB="TXPDO^Rotation"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Turbo_Current" VarB="TXPDO^Turbo Current"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Turbo_Low_Speed" VarB="TXPDO^Turbo Low Speed"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Turbo_Speed" VarB="TXPDO^Turbo Speed"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Turbo_pump_temperature" VarB="TXPDO^Turbo pump temperature"/>
				<Link VarA="PlcTask Inputs^ECC.TURBO_PV^Warning" VarB="TXPDO^Warning"/>
				<Link VarA="PlcTask Outputs^ECC.TURBO_SV^Turbo_Low_Speed" VarB="RxPDO^Turbo Low Speed"/>
				<Link VarA="PlcTask Outputs^ECC.TURBO_SV^Turbo_Reset_Alarm" VarB="RxPDO^Turbo Reset Alarm"/>
				<Link VarA="PlcTask Outputs^ECC.TURBO_SV^Turbo_Start_Stop" VarB="RxPDO^Turbo Start Stop"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^VT01 (EX260-SEC4)">
				<Link VarA="PlcTask Outputs^ECC.EV1^A" VarB="Byte 0^Output"/>
				<Link VarA="PlcTask Outputs^ECC.EV1^B" VarB="Byte 1^Output"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^VT02 (EX260-SEC4)">
				<Link VarA="PlcTask Outputs^ECC.EV2^A" VarB="Byte 0^Output"/>
				<Link VarA="PlcTask Outputs^ECC.EV2^B" VarB="Byte 1^Output"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^VT03 (EX260-SEC2)">
				<Link VarA="PlcTask Outputs^ECC.EV3^A" VarB="Byte 0^Output"/>
				<Link VarA="PlcTask Outputs^ECC.EV3^B" VarB="Byte 1^Output"/>
				<Link VarA="PlcTask Outputs^ECC.EV3^C" VarB="Byte 2^Output"/>
				<Link VarA="PlcTask Outputs^ECC.EV3^D" VarB="Byte 3^Output"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 6 (EtherCAT)^VT04 (EX260-SEC4)">
				<Link VarA="PlcTask Outputs^ECC.EV4^A" VarB="Byte 0^Output"/>
				<Link VarA="PlcTask Outputs^ECC.EV4^B" VarB="Byte 1^Output"/>
			</OwnerB>
			<OwnerB Name="TIID^Device 7 (EtherCAT)^Box 17 (Adapter)">
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[10]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_10"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[11]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_11"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[12]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_12"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[13]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_13"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[14]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_14"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[15]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_15"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[16]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_16"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[1]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_1"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[2]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_2"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[3]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_3"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[4]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_4"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[5]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_5"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[6]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_6"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[7]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_7"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[8]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_8"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER1_PV^Module2_Word[9]" VarB="Module 2 (Input/Outnput 16 words)^Inputs^word_9"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[10]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_10"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[11]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_11"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[12]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_12"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[13]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_13"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[14]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_14"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[15]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_15"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[16]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_16"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[1]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_1"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[2]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_2"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[3]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_3"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[4]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_4"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[5]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_5"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[6]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_6"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[7]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_7"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[8]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_8"/>
				<Link VarA="PlcTask Inputs^ECC.CHILLER2_PV^Module2_Word[9]" VarB="Module 3 (Input/Outnput 16 words)^Inputs^word_9"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[10]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_10"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[11]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_11"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[12]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_12"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[13]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_13"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[14]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_14"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[15]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_15"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[16]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_16"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[1]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_1"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[2]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_2"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[3]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_3"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[4]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_4"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[5]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_5"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[6]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_6"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[7]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_7"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[8]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_8"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER1_SV^Module2_Word[9]" VarB="Module 2 (Input/Outnput 16 words)^Outputs^word_9"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[10]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_10"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[11]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_11"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[12]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_12"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[13]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_13"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[14]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_14"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[15]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_15"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[16]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_16"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[1]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_1"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[2]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_2"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[3]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_3"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[4]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_4"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[5]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_5"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[6]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_6"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[7]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_7"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[8]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_8"/>
				<Link VarA="PlcTask Outputs^ECC.CHILLER2_SV^Module2_Word[9]" VarB="Module 3 (Input/Outnput 16 words)^Outputs^word_9"/>
			</OwnerB>
		</OwnerA>
	</Mappings>
</TcSmProject>