Helios/PHT/PLC/POUs/PRG/MAIN.TcPOU

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <POU Name="MAIN" Id="{cb8452ac-9ed0-449b-9151-d931368f6d28}" SpecialFunc="None">
    <Declaration><![CDATA[PROGRAM MAIN
VAR
	ENABLE:BOOL;

//RECIPE
PROCESS:PROCESS;
PROCESS_EN:BOOL;
PROCESS_RUN:BOOL;
PROCESS_STOP:BOOL;

P_NO:INT;

CYCLE_EN:BOOL;
CYCLE_NUM:INT;
CYCLE_START_STEP_NO:INT;

STEP_NO:INT;
NEXTSTEP_EN:BOOL;

UPS:FB_S_UPS_BAPI;

END_VAR
]]></Declaration>
    <Implementation>
      <ST><![CDATA[//UPS
UPS(
	sNetID:= , 
	iPLCPort:= 851, 
	tTimeout:= , 
	eUpsMode:= eSUPS_WrPersistData_shutdown, 
	ePersistentMode:= , 
	tRecoverTime:= T#10S, 
	bPowerFailDetect=> , 
	eState=> , 
	nCapacity=> , 
	bBusy=> , 
	bError=> , 
	nErrID=> );

//******************************IO*********************************
	IO_EXCHANGE();

//*****************************CONFIGURATION***********************
	IL();

//*****************************INTERLOCK***************************
	Temp();
	
//*****************************PROCESS*****************************
	PROCESS_RUN:=GV.Process_Start AND NOT GV.ALARM_OCC;
	PROCESS_STOP:=GV.Process_Stop OR GV.ALARM_OCC;

	//PROCESS ENABLE
	IF PROCESS_RUN AND NOT PROCESS_EN
		THEN
		CYCLE_NUM := 0;
		STEP_NO:=1;
		P_NO:=1;
		PM.ProcessFeedBack.ProcessFinished:=FALSE;
	END_IF
		IF PROCESS_RUN AND NOT PROCESS_EN
		THEN
		PROCESS_EN:=TRUE;		
	END_IF;
	
	IF PROCESS_STOP
		THEN
		CYCLE_NUM:=0;
		CYCLE_EN:=FALSE;
		PROCESS_EN:=FALSE;
		PROCESS_RUN:=FALSE;
	END_IF;
	IF NOT PM.ProcessFeedBack.ProcessFinished
		THEN 
			PM.ProcessFeedBack.CurrentStepNo:=STEP_NO;
		ELSE
			PM.ProcessFeedBack.CurrentStepNo:=STEP_NO-1;
	END_IF
	
	IF PROCESS_EN
		THEN 
		PM.ProcessFeedBack.ProcessStart:=TRUE;
		PM.ProcessFeedBack.CurrentStepstart:=TRUE;
		ELSE
			PM.ProcessFeedBack.ProcessStart:=FALSE;
			PM.ProcessFeedBack.CurrentStepstart:=FALSE;
		END_IF
	
	IF GV.Step_Num<STEP_NO 
		THEN 	
		PM.ProcessFeedBack.ProcessFinished:=TRUE;
	END_IF
	IF  GV.ALARM_OCC
		THEN
		PROCESS_EN:=FALSE;	
		
	END_IF
	
	IF STEP_NO<1 OR STEP_NO >100
		THEN 
		STEP_NO:=1;
	END_IF
	
	//CYCLE初始化
	IF GV.SetpArray[STEP_NO].CycleStart AND CYCLE_EN=FALSE
		THEN 
		CYCLE_EN				:=	TRUE;
		CYCLE_START_STEP_NO		:=	STEP_NO;
		CYCLE_NUM				:=	GV.SetpArray[STEP_NO].CycleNumber;
	END_IF;	
	
	//STEP
	PROCESS(
	ENABLE			:= 	PROCESS_EN, 
	NEXTSTEP_EN		:=	NEXTSTEP_EN,
	Alarm_RST		:=	UI.Warning_And_Alarm_RST,
	PMStableTime	:=	GV.PMConfig.PMStableTime,
	STEP_DATA		:= 	GV.SetpArray[STEP_NO],  
	);
	
	//PROCESS FLOW	
	CASE P_NO OF
		1:	IF NOT PROCESS_EN 
				THEN 
				P_NO:=100;
				ELSE
				P_NO:=2;	
			END_IF;
			NEXTSTEP_EN:=FALSE;
			
		2:	IF PROCESS.NEXTSTEP 
				THEN 
				PM.ProcessFeedBack.CurrentStepFinished:=TRUE;
				PM.ProcessFeedBack.CurrentStepstart:=FALSE;
				P_NO:=3;
			END_IF;
			
		3:	IF CYCLE_EN
			THEN
				P_NO:=10;
				ELSE
				P_NO:=20;
			END_IF
		
		10:	IF GV.SetpArray[STEP_NO].CycleEnd 
				THEN 
				P_NO:=11; 
				ELSE
				P_NO:=20; 
			END_IF;	
		
		11:	IF CYCLE_NUM=0 
				THEN 
				P_NO:=20; 
				CYCLE_EN:=FALSE;
				ELSE
				CYCLE_NUM:=CYCLE_NUM-1; 
				P_NO:=21; 
			END_IF;	
				
		20:	STEP_NO:=STEP_NO+1;
			NEXTSTEP_EN:=TRUE;
			P_NO:=1; 
			PM.ProcessFeedBack.CurrentStepstart:=TRUE;
			PM.ProcessFeedBack.CurrentStepFinished:=FALSE;
			
		21:	STEP_NO:=CYCLE_START_STEP_NO;
			NEXTSTEP_EN:=TRUE;
			P_NO:=1;
		
		100:;	
	END_CASE;	
		
	
	IF	PROCESS_EN
		THEN
//******************工艺参数赋值***************
		//APC
		GV.	AO.	APC.TARGET_PRESSURE	:=	PROCESS.APC_PRESSURE;
		GV.	AO.	APC.TARGET_POSITION	:=	PROCESS.APC_POSITION;
		IF GV_IL.APC_EN THEN 
		GV.AO.	APC.	Control_Mode	:=	PROCESS.APC_CONTROL_MODE	;
		ELSE 
		GV.AO.	APC.	Control_Mode	:=	3	;
		END_IF
		
		//MFC
		GV.AO.MFC1_Flow_Setpoint	:=	PROCESS.MFC1_SV;
		GV.AO.MFC2_Flow_Setpoint	:=	PROCESS.MFC2_SV;
		GV.AO.MFC3_Flow_Setpoint	:=	PROCESS.MFC3_SV;
		GV.AO.MFC4_Flow_Setpoint	:=	PROCESS.MFC4_SV;
		GV.AO.MFC5_Flow_Setpoint	:=	PROCESS.MFC5_SV;
		GV.AO.MFC6_Flow_Setpoint	:=	PROCESS.MFC6_SV;
		GV.AO.MFC7_Flow_Setpoint	:=	PROCESS.MFC7_SV;
	//	GV.AO.MFC8_Flow_Setpoint	:=	PROCESS.MFC8_SV;
	//	GV.AO.MFC9_Flow_Setpoint	:=	PROCESS.MFC9_SV;
		
//LID HEATER
		GV.AO.LID_Temp_SV			:=	PROCESS.LID_TEMP;		
		
//CHAMBER HEATER
		GV.AO.	Chamber_Temp1_SV	:=	
		GV.AO.	Chamber_Temp2_SV	:=	
		GV.AO.	Chamber_Temp3_SV	:=	PROCESS.WALL_TEMP;
//STAGE
		GV.AO.Stage_Temp1_SV	 	:=	PROCESS.STAGE_TEMP1;
		GV.AO.Stage_Temp1_SV	 	:=	PROCESS.STAGE_TEMP2;	
		GV.AO.Stage_Temp1_SV	 	:=	PROCESS.STAGE_TEMP3;	
		GV.AO.Stage_Temp1_SV	 	:=	PROCESS.STAGE_TEMP4;		
		
//************************TOLERANCE 赋值****************
		

//************************VALVE动作****************
		GV.NDO.AV1	:=	FALSE	;//	(	GV.AO.MFC1_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC1	AND	GV_IL.AV1_EN	;
		GV.NDO.AV2	:=			(	GV.AO.MFC1_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC1	AND	GV_IL.AV2_EN	;
		GV.NDO.AV3	:=	FALSE	;//(	GV.AO.MFC1_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC1	AND	GV_IL.AV3_EN	;
		GV.NDO.AV4	:=	FALSE	;//	(	GV.AO.MFC2_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC2	AND	GV_IL.AV4_EN	;
		GV.NDO.AV5	:=			(	GV.AO.MFC1_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC1	AND	GV_IL.AV5_EN	;
		GV.NDO.AV6	:=	FALSE	;//	(	GV.AO.MFC2_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC2	AND	GV_IL.AV6_EN	;
		GV.NDO.AV7	:=	FALSE	;//	(	GV.AO.MFC3_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC3	AND	GV_IL.AV7_EN	;
		GV.NDO.AV8	:=	FALSE	;//	(	GV.AO.MFC3_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC3	AND	GV_IL.AV8_EN	;
		GV.NDO.AV9	:=	FALSE	;//	(	GV.AO.MFC3_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC3	AND	GV_IL.AV9_EN	;
		GV.NDO.AV10	:=	FALSE	;//	(		)	AND		AND	GV_IL.AV10_EN	;
		GV.NDO.AV11	:=	FALSE	;//	(		)	AND		AND	GV_IL.AV11_EN	;
		GV.NDO.AV12	:=	FALSE	;//	(		)	AND		AND	GV_IL.AV12_EN	;
		GV.NDO.AV13	:=	FALSE	;//	(		)	AND		AND	GV_IL.AV13_EN	;
		GV.NDO.AV14	:=	FALSE	;//	(	GV.AO.MFC5_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC5	AND	GV_IL.AV14_EN	;
		GV.NDO.AV15	:=	FALSE	;//	(	GV.AO.MFC5_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC5	AND	GV_IL.AV15_EN	;
		GV.NDO.AV16	:=	FALSE	;//	(	GV.AO.MFC5_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC5	AND	GV_IL.AV16_EN	;
		GV.NDO.AV17	:=	FALSE	;//	(		)	AND		AND	GV_IL.AV17_EN	;
		GV.NDO.AV18	:=	FALSE	;//	(		)	AND		AND	GV_IL.AV18_EN	;
		GV.NDO.AV19	:=	FALSE	;//	(		)	AND		AND	GV_IL.AV19_EN	;
		GV.NDO.AV20	:=	FALSE	;//	(	GV.AO.MFC6_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC6	AND	GV_IL.AV20_EN	;
		GV.NDO.AV21	:=	FALSE	;//	(	GV.AO.MFC6_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC6	AND	GV_IL.AV21_EN	;
		GV.NDO.AV22	:=	FALSE	;//	(	GV.AO.MFC6_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC6	AND	GV_IL.AV22_EN	;
		GV.NDO.AV23	:=	FALSE	;//	(	GV.AO.MFC7_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC7	AND	GV_IL.AV23_EN	;
		GV.NDO.AV24	:=	FALSE	;//	(	GV.AO.MFC7_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC7	AND	GV_IL.AV24_EN	;
		GV.NDO.AV25	:=	FALSE	;//	(	GV.AO.MFC7_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC7	AND	GV_IL.AV25_EN	;
		GV.NDO.AV26	:=			(	GV.AO.MFC1_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC1	AND	GV_IL.AV26_EN	;
							(*	(
						((	GV.AO.MFC1_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC1) 
					OR ((	GV.AO.MFC2_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC2)
					OR ((	GV.AO.MFC3_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC3)
						)
						AND	GV_IL.AV26_EN	;*)
		GV.NDO.AV27	:=	FALSE	;(*	(	
						((	GV.AO.MFC5_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC5)
					OR 	((	GV.AO.MFC6_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC6)
					OR	((	GV.AO.MFC7_Flow_Setpoint>0	)	AND	PM.INFO.Alarm.TOLERANCE_MFC7)	
						)	
						AND	GV_IL.AV27_EN	;*)

		
	END_IF

//TOL ALRM&WARNING
	PM.INFO.Alarm.TOLERANCE_PRESSURE			:= NOT PROCESS.PRESSURE_ALARM;
	PM.INFO.Alarm.TOLERANCE_MFC1				:= NOT PROCESS.MFC1_Alarm;
	PM.INFO.Alarm.TOLERANCE_MFC2				:= NOT PROCESS.MFC2_Alarm;
	PM.INFO.Alarm.TOLERANCE_MFC3				:= NOT PROCESS.MFC3_Alarm;
	PM.INFO.Alarm.TOLERANCE_MFC4				:= NOT PROCESS.MFC4_Alarm;
	PM.INFO.Alarm.TOLERANCE_MFC5				:= NOT PROCESS.MFC5_Alarm;
	PM.INFO.Alarm.TOLERANCE_MFC6				:= NOT PROCESS.MFC6_Alarm;
	PM.INFO.Alarm.TOLERANCE_MFC7				:= NOT PROCESS.MFC7_Alarm;
	PM.INFO.Alarm.TOLERANCE_MFC8				:= NOT PROCESS.MFC8_Alarm;
	PM.INFO.Alarm.TOLERANCE_MFC9				:= NOT PROCESS.MFC9_Alarm;
	PM.INFO.Alarm.TOLERANCE_WALL_TEMP			:= NOT PROCESS.WALL_TEMP_Alarm;
	PM.INFO.Alarm.TOLERANCE_LID_TEMP			:= NOT PROCESS.LID_TEMP_Alarm;
	PM.INFO.Alarm.TOLERANCE_STAGE_TEMP1			:= NOT PROCESS.STAGE_TEMP1_Alarm;
	PM.INFO.Alarm.TOLERANCE_STAGE_TEMP2			:= NOT PROCESS.STAGE_TEMP2_Alarm;
	PM.INFO.Alarm.TOLERANCE_STAGE_TEMP3			:= NOT PROCESS.STAGE_TEMP3_Alarm;
	PM.INFO.Alarm.TOLERANCE_STAGE_TEMP4			:= NOT PROCESS.STAGE_TEMP4_Alarm;
	
	PM.INFO.Warning.TOLERANCE_PRESSURE			:= NOT PROCESS.PRESSURE_WARNING;	
	PM.INFO.Warning.TOLERANCE_MFC1				:= NOT PROCESS.MFC1_WARNING;
	PM.INFO.Warning.TOLERANCE_MFC2				:= NOT PROCESS.MFC2_WARNING;
	PM.INFO.Warning.TOLERANCE_MFC3				:= NOT PROCESS.MFC3_WARNING;
	PM.INFO.Warning.TOLERANCE_MFC4				:= NOT PROCESS.MFC4_WARNING;
	PM.INFO.Warning.TOLERANCE_MFC5				:= NOT PROCESS.MFC5_WARNING;
	PM.INFO.Warning.TOLERANCE_MFC6				:= NOT PROCESS.MFC6_WARNING;
	PM.INFO.Warning.TOLERANCE_MFC7				:= NOT PROCESS.MFC7_WARNING;
	PM.INFO.Warning.TOLERANCE_MFC8				:= NOT PROCESS.MFC8_WARNING;
	PM.INFO.Warning.TOLERANCE_MFC9				:= NOT PROCESS.MFC9_WARNING;
	PM.INFO.Warning.TOLERANCE_WALL_TEMP			:= NOT PROCESS.WALL_TEMP_WARNING;	
	PM.INFO.Warning.TOLERANCE_LID_TEMP			:= NOT PROCESS.LID_TEMP_WARNING;	
	PM.INFO.Warning.TOLERANCE_STAGE_TEMP1		:= NOT PROCESS.STAGE_TEMP1_WARNING;		
	PM.INFO.Warning.TOLERANCE_STAGE_TEMP2		:= NOT PROCESS.STAGE_TEMP2_WARNING;	
	PM.INFO.Warning.TOLERANCE_STAGE_TEMP3		:= NOT PROCESS.STAGE_TEMP3_WARNING;		
	PM.INFO.Warning.TOLERANCE_STAGE_TEMP4		:= NOT PROCESS.STAGE_TEMP4_WARNING;	
]]></ST>
    </Implementation>
    <LineIds Name="MAIN">
      <LineId Id="4397" Count="155" />
      <LineId Id="4705" Count="3" />
      <LineId Id="4704" Count="0" />
      <LineId Id="4554" Count="20" />
      <LineId Id="4653" Count="2" />
      <LineId Id="4576" Count="30" />
      <LineId Id="4681" Count="0" />
      <LineId Id="4607" Count="29" />
      <LineId Id="4656" Count="1" />
      <LineId Id="4637" Count="14" />
      <LineId Id="4658" Count="0" />
      <LineId Id="4652" Count="0" />
      <LineId Id="686" Count="0" />
    </LineIds>
  </POU>
</TcPlcObject>